High Barrier Multi-Layer Parylene Coating

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1 High Barrier Multi-Layer Parylene Coating Technology overview Surface Technolgy 2018

2 Company Profile Swiss company founded in 1979 Experts in Parylene coating technology Parylene Equipment Export rate 60% Part of the Incabloc group

3 Our services Pre-treatment and activation of the substrate Masking and unmasking Parylene Coating Parylene etching and Plasma technologies Post-treatment for modification of the Parylene surface (hydrophil, hydrophob) High Barrier Multi-Layer Parylene Coating Parylene equipment Sale of raw material

4 Parylene Key Properties Transparent coating 0,05 to 100 µm Technical polymer free of additives physically and chemically inert Biocompatible USP Class VI, biostable, FDA and Food compliant Diffusion barrier against chemicals, solvents and moisture Compatible with most sterilization techniques: Steam, EtO, H2O2, irradiation Solid lubricant with excellent dry film lubricity - friction coefficients Dielectric barrier (~ 200 V / µm) High thermal stability up to 350 C High power of penetration Completely uniform without pinholes

5 Parylene Technology

6 Parylene Static Process

7 Parylene Tumble Process

8 Parylene Equipment C20-S: Laboratory equipment C30-S: semi-industrial scale equipment C50-S: Industrial scale equipment C22-T: Tumble process

9 Our Certifications

10 Parylene Applications MEDICAL: Protection layer (eg: Biocompatible) for medical devices systems SPACE: Dielectric for sensor and electronics modules used in space mission CHEMICAL INDUSTRY: protection layer against chemical attack of sensors FOOD PROCESSING: Protection layer according to FDA and ISO 10/2011 MICROTECHNICS: Lubricant, electrical insulation and corrosion resistant layer MILITARY: Dielectric layer for electronic module or sensors according to IPC-CC-830

11 High Barrier Multi-Layer Parylene Coating Why combining Parylene with oxide material? The synergetic effect Parylene C 25µm : WVTR => ~ 4 g/m 2 /day O2TR=> ~ 120 cm 3 /m 2 /day Targeted performance for long term AIMD

12 High Barrier Multi-Layer Parylene Coating Polymer (Parylene-C) layers can be grown pin-hole free and conformal. However they are not tight at molecular level. Oxide materials layers are tight at molecular level, however they grow under high stress creating pinholes and cracks. Improved thickness/permeability ratio up to factor 100

13 High Barrier Multi-Layer Parylene Coating Why there is no universal multilayer solution? For the oxide material deposition, PECVD or ALD has been privileged due to the quality of the obtained layer. Both have benefit or drawbacks and depend on the business case Barrier properties Access to 3D shape? Production scale Room temperature deposition Parylene Good Excellente Very good Room + + ALD multilayer Excellente Excellente Good 80 C mini ++++ Cost PECVD multilayer Very good Bad Very good Room +++

14 High Barrier Multi-Layer Parylene Coating Quantitative result : OTR, WTR 1000 Permeability to O2 and Water vapor ,1 0,01 0,001 Parylene 10 µm Parylene multilayer ALD 1 repeted unit Parylene multilayer PECVD 3 reapeted unit OTR in cc.mm/m2/day/bar WTR g/m2/day

15 High Barrier Multi-Layer Parylene Coating Qualitative result on standard PBS solution : Testing protocol Encapsulation coating SiO2 400nm WN 100nm SiO2 400nm WN 100nm WN 100nm SiO2 400nm WN 100nm Si Si Si Production of structured silicon wafer with a passivation layer of SiO2 and pads made of tungsten nitride WN This structure is representative of an typical miniaturized implant 500µm The WN is used for the testing needs due its extreme sensitivity to water The structure is encapsulated with wether Parylene C, Parylene AF4 or Multilayer PECVD Parylene/SiOx PBS solution, 67 C The structure is then soaked in PBS solution at 67 C for 4 months The interface are then observed by Scanning electron microscopy

16 High Barrier Multi-Layer Parylene Coating Qualitative result on standard PBS solution : After 4 months soaking WN not dissolved Adhesion to substrate NOK : initial failure mode due to water ingress WN not dissolved Adhesion between layers and with substrate OK : midterm reliability confirmed Par. C 15 µm SiOx/ParC Multilayer 15 µm Par. AF4 15 µm

17 High Barrier Multi-Layer Parylene Coating On going actions Multi-Layer Biocompatibility evaluation (made of biocompatible materials) Integrated equipment for Parylene / inorganic layers Simulation studies: mechanical stresses, effects of statistics of defects Integration in any kind of product: your application is welcome! A European project focused on thin layers based packaging of a new active implantable device. Starts in 2018.

18 Contact Information Patrick Schneider Dipl. Wirtsch.- Ing. Business Development Manager DE, AUT, GS-CH, Büro Deutschland Tel Helena Schneider B.A. Communication Studies Business Development Assistant Büro Deutschland Tel Tina Heim B.Eng. Business Development Assistant Büro Deutschland Tel