CONTENTS. Introduction. NSOM Optical Fiber Probes

Transcription

1

2 CONTENTS Introduction NSOM Optical Fiber Probes AFM Probes AFM Probes Hard to achieve Force Constants and Resonance Frequencies Deep Trench AFM Probes Electrical and STM Probes Hollow AFM Nanopipette Probes Nanopipettes for Chemical Delivery Polished Nanopipettes for NSOM Imaging Cantilevered Nanopipettes with Attached Au/Ag Nanoparticles Insulated Nanowires Single Wire Nanopipette Probes Electrochemical & SECM Probes Coaxial Probes Thermocouple Probes Multi-Channel Optical and Wire Probes Double-Wired Nanopipette Probes General PipetteCharacteristics Double-Wire Electrodes Nanotweezers Dual Wire Thermo-Resistance Nano-Heater and Nano-IR Source Order Form

3 Introduction: Nanonics designs and manufactures unique NSOM and SPM probes based on glass pulling technology.such probes include: - Cantilevered optical fiber probes - Cantilevered nanopipettes for chemical delivery - Wired nanopipette probes - Deep trench AFM probes - AFM probes with ultra-low force constants, medium to high force constants with high resonance frequencies and high aspect ratio probes With an in-house clean room and probe-making facility, in addition to its standard list of probes, Nanonics is dedicated to the production of custom-made SPM probes tailored to our customer s individual needs. The close association between Nanonics probe-designing division and its NSOM/SPM imaging research team, allows Nanonics to constantly improve its probes and find novel applications for them. Attractively priced probe contracts for medium to larger quantity probe requirements are also available. Cantilever Height Cantilever Length Tip Length General diagram of Nanonics cantilevered glass SPM probe. Black box on right is the tip holder. The angle, tip length and cantilever length can be varied depending on the type of probe and the research application of the user. Such probes have unique features as described in detail below. One such feature that is general to all these probes is that the cantilever does not obscure the tip from the optical axis of an optical microscope in SPM systems designed to work with upright optical microscopes. NSOM Optical Fiber Probes Nanonics possesses the exclusive license to manufacture cantilevered, optical fiber NSOM probes. Such pioneering probe technology allows near-field optics to benefit from the user-friendly normal-force feedback technique employed with such success in standard AFM systems. In the unique design of our cantilevered NSOM probes, the fiber tip is bent and coated with metal so that light can be transmitted to the aperture with the same efficiencies and polarization properties as those of conventional, straight nearfield optical elements. With sub-wavelength diameter apertures, these revolutionary cantilevered probes can obtain optical images with resolutions down to 50 nanometers. 1 x 1 µm NSOM (left) and AFM (right) image of 30 nm gold balls taken in reflection mode Reflection mode image of a SRAM after CMP. Image size: 12 x 12 µm 4

4 Nanonics straight NSOM tips, which also obtain optical images with resolutions down to 50 nanometers, are ideal for performing simultaneous NSOM and shear-force AFM. Cladding Core Al-coating Cantilevered NSOM Probe: opening the way to reflection NSOM imaging SEM of NSOM Probe tip with a 100 nm aperture SEM profile of NSOM Probe: bar is 1 µm Sketch of NSOM Probe General Characteristics Coatings Input Power Total Fiber Length Connectors Aperture Diameter / Transmission Cr (~0.02µm / Al ~0.2µm) 5 mw typical 1 meter standard bare or FC 50 nm ~10-5 (20 mw maximum) (Up to 5 meters upon request) 100 nm ~ nm ~ nm ~10-1 Cantilevered, Contact NSOM Probes* Mode Wavelength Core Cladding Cantilever Cantilever Force Resonant Diameter Diameter Length (LC) Height (HC) Constant Frequency Single nm 3.4 µm 125 µm µm µm 5-20 N/m N.A. Single 630 nm 4.3 µm 125 µm µm µm 5-20 N/m N.A. Single 780 nm 5.4 µm 125 µm µm µm 5-20 N/m N.A. Single 820 nm 5.7 µm 125 µm µm µm 5-20 N/m N.A. Single** nm 9 µm 125 µm µm µm 5-20 N/m N.A. Multi nm µm 125,220 µm µm µm 5-20 N/m N.A. Multi 350 nm 200 µm 220 µm µm µm 5-20 N/m N.A. Multi 350 nm 105 µm 125 µm µm µm 5-20 N/m N.A. Multi nm 50 µm 125 µm µm µm 5-20 N/m N.A. Cantilevered, Non-Contact NSOM Probes* Single nm 3.4 µm 125 µm µm µm 3 N/m khz Single 630 nm 4.3 µm 125 µm µm µm 3 N/m khz Single 780 nm 5.4 µm 125 µm µm µm 3 N/m khz Single 820 nm 5.7 µm 125 µm µm µm 3 N/m khz Single** nm 9 µm 125 µm µm µm 3 N/m khz Multi nm µm 125,220 µm µm µm 3 N/m khz Multi 350 nm 200 µm 220 µm µm µm 3 N/m khz Multi 350 nm 105 µm 125 µm µm µm 3 N/m khz Multi nm 50 µm 125 µm µm µm 3 N/m khz Straight NSOM Probes* Single nm 3.4 µm 125 µm N.A. N.A. N.A. N.A. Single 630 nm 4.3 µm 125 µm N.A. N.A. N.A. N.A. Single 780 nm 5.4 µm 125 µm N.A. N.A. N.A. N.A. Single 820 nm 5.7 µm 125 µm N.A. N.A. N.A. N.A. Single** nm 9 µm 125 µm N.A. N.A. N.A. N.A. Multi nm µm 125,220 µm N.A. N.A. N.A. N.A. Multi 350 nm 200 µm 220 µm N.A. N.A. N.A. N.A. Multi 350 nm 105 µm 125 µm N.A. N.A. N.A. N.A. Multi nm 50 µm 125 µm N.A. N.A. N.A. N.A. Cantilevered, Deep Trench NSOM Probes* Mode Wavelength Core Cladding Cantilever Cantilever Force Tip Length Diameter Diameter Length (LC) Height (HC) Constant same as same as same as same as > 1 mm > 0.5 mm 5 N/m 0.5 mm above above above above * Aperture diameters available in 50 nm increments from nm. ** Standard fiber 5

5 AFM Probes AFM Probes: Nanonics AFM glass probes are used for imaging surface topography with sub-nanometer resolution and have better characteristics as compared to silicon atomic force sensors. Contact, non-contact, and intermittent contact probes are available for surfaces of different material and structure. Nanonics cantilevered probes use normal-force feedback, while our straight probes perform shear-force AFM. AFM Topography of DNA 1.6x1.6 µm, z-range 5 µm AFM Topography of DNA 900x900 nm, z-range 2.5 µm Cantilevered AFM Probe: note that the angle of the cantilever enables viewing the sample underneath the AFM tip. SEM of AFM Probe: line is 250 nm, and tip is 40 nm after removal of gold Sketch of AFM Probe Type Tip Tip Cantilever Cantilever Force Resonant Diameter Length Length (LC) Height (HC) Constant Frequency Cantilevered Contact AFM Probes 10 nm µm µm µm 5-20 N/m N.A. Cantilevered Non-contact AFM Probes 10 nm µm µm µm 5 N/m khz Straight AFM Probes 10 nm µm N.A. N.A. N.A N.A. Hard to achieve Force Constants and Resonance Frequencies: The imaging of soft materials (polymers or biological samples) is often not possible with standard cantilevers. Our production technology enables us to create glass cantilevers with very low force constants and/or with low resonant frequencies. These cantilevers can, as an example, be used for protein pulling experiments. Another advantage of glass cantilevers is their fast dynamic response time of some micro seconds (about 3 orders of magnitude better than Si cantilevers). Type Tip Tip Cantilever Cantilever Force Resonant Diameter Length Length (LC) Height (HC) Constant Frequency Cantilevered AFM Probes 10 nm µm µm µm eg. 1 N/m * eg. 50 khz * * Contact us for further information on these values. 6

6 Deep Trench AFM Probes: The unique technology Nanonics uses to create cantilevered fiber probes enables us to manufacture Deep Trench AFM Probes. For example, a cantilevered AFM tip can be specially designed to probe inside a trench that is 1.5 mm deep and only 100 µm wide. In addition, Nanonics probes for other types of imaging, such as NSOM and electrical/thermal, can be designed as deep trench probes, giving these imaging modalities access to a wide range of surface topographies. AFM image (10x10 µm, z-range 10 µm) of a 2 µm wide deep trench. AFM image (1x1 µm, z-range 60 µm) taken at the bottom of a 10 µm deep trench. 200 µm deep trench Deep Trench AFM Probe lying across 150 µm lines to show its length. Sketch of Deep Trench Probe Type Tip Tip Cantilever Cantilever Force Resonant Diameter Length Length (LC) Height (HC) Constant Frequency Deep Trench Contact AFM Probes 10 nm µm µm µm 5-20 N/m N.A. Deep Trench Non-contact AFM Probes 10 nm µm µm µm 5 N/m 390kHz Tips with high aspect ratios can easily be manufactured using glass pulling techniques. AFM tips (including deep trench probes) with aspect ratios up to 10/1 are available. 7

7 Electrical Probes: Nanonics apertureless, AFM fiber tips can be coated with gold on all sides of the tip and used as an Electrical probe. The Electrical probes can measure both the capacitance and the spreading resistance of localized regions in a sample while providing a simultaneous AFM image. In this way, electrical characteristics of a sample can be correlated with surface topography. AFM electrical sensors have important characteristics that derive from the height of the cantilever from the surface. This reduces noise in the measurement that can occur from the proximity of the cantilever to the surface being measured with the regular AFM electrical probes. Au-coating Electrical and STM Probe with a conductive gold coating SEM of Electrical and STM Probe: line is 250 nm and gold-coated tip is 80 nm Sketch of Electrical and STM Probe Type Tip Tip Cantilever Cantilever Force Resonant Conductive Diameter Length Length (LC) Height (HC) Constant Frequency Coating Cantilevered Contact 10 nm µm µm µm 5-20 N/m N.A. Au (~20 nm) Conductive Probes Cantilevered Non-contact 10 nm µm µm µm >5 N/m khz Au (~20 nm) Conductive Probes Straight Conductive Probes 10 nm µm N.A. N.A. N.A. N.A. Au (~20 nm) Deep Trench Contact 10 nm > 500 µm > 1 mm µm 5-20 N/m N.A. Au (~20 nm) Conductive Probes Deep Trench Non-contact 10 nm > 500 µm > 1 mm µm > 5 N/m 390kHz Au (~20 nm) Conductive Probes Hollow AFM Nanopipette Probes General Characteristics* Pipette Material Shank Diameter Taper Length Total Length Coating Borosilicate glass 1.0 mm 3-5 mm 5 mm - 5 cm Cr (thickness ~0.02µm) Al (thickness ~0.2µm) *Single or multi-channel pipette probes available Central opening SEM of Nanopipette Probe with an aperture of less than 100 nm Sketch of Nanopipette Probe 8

8 Nanopipettes for Chemical Delivery: Cantilevered and Straight Nanopipettes can be used as nano-pens for controlled chemical delivery to or removal from regions as small as 100 nanometers, thus opening up the world of SPM to chemistry. They can also be used as vessels for containing either molecules whose optical properties change in response to their chemical environment or gold and silver nanoparticles that enhance non-linear optical effects. Nanopipette for chemical delivery: almost 90º angle of cantilever permits more precise delivery of chemicals Video still of nanopipette used to etch a chrome film. Two etch lines are visible on the right side of the image and a third line is made. 4x4 µm image (z-range: 10 nm) of protein dots printed using a Nanopipette. Nanopipettes for Chemical Delivery Type Tip Cantilever Cantilever Force Resonant Aperture Length Length (LC) Height (HC) Constant Frequency Size Cantilevered Contact Nanopipettes N.A µm µm 5-20 N/m N.A. 20 nm Cantilevered Non-contact Nanopipettes N.A µm µm 5 N/m khz 20 nm Straight Nanopipettes N.A. N.A. N.A. N.A. N.A. 20 nm Deep Trench Contact Nanopipettes > 500 µm > 1 mm > 500 µm 40 N/m N.A. 20 nm Deep Trench Non-contact Nanopipettes > 500 µm > 1 mm > 500 µm 40 N/m 390 khz 20 nm Polished Nanopipettes for NSOM Imaging: When coated with metal to reduce light loss, Nanonics Nanopipettes extend the use of NSOM into the domain of UV light. They are especially useful for transmitting high-powered laser pulses for use in micro-lithography and highly localized optical photomask repair. Polished Nanopipette probe for NSOM imaging in the UV and ablation with UV laser pulses NanoPens for NSOM Imaging Type Cantilever Cantilever Force Resonant Aperture Transmission Length (LC) Height (HC) Constant Frequency Size* Wavelength Cantilevered Contact Nanopipettes µm µm 5-20 N/m N.A. 50 nm µm Cantilevered Non-contact Nanopipettes µm µm 3 N/m khz 50 nm µm Straight Nanopipettes N.A. N.A. N.A. N.A. 50 nm µm Deep Trench Contact Nanopipettes > 1 mm > 500 µm 40 N/m N.A. 50 nm µm Deep Trench Non-contact Nanopipettes > 1 mm > 500 µm 40 N/m 390 khz 50 nm µm * apertures available in 50 nm increments from nm 9

9 Cantilevered Nanopipettes with Attached Au/Ag Nanoparticles: A Au or Ag nanoparticle can be attached to the end of our nanopipette probes. These probes can be used for enhanced Raman imaging with high resolution. Nanopipette with silver nanoparticles held in tip Material composition at the tip of a micropipette with attached Ag nanoparticles measured by EDX. Image of a Gold-tipped probe in close proximity to a styryl dye. The enhancement of the recorded signal can be clearly seen in the image. Nanopipettes with Au/Ag Nanoparticles Type Cantilever Cantilever Tip Force Resonant Aperture Length (LC) Height (HC) Length Constant Frequency Size Cantilevered Contact Nanopipettes µm µm N.A N/m N.A. N.A Cantilevered Non-contact Nanopipettes µm µm N.A. 3 N/m khz N.A Insulated Nanowires Single Wire Nanopipette Probes: General Pipette Characteristics Pipette Material Shank Diameter Taper Length Total Length Tip Profile Borosilicate mm 3-5 mm 5 mm 5 cm Flat end or 1 µm protrusion (custom designs available) Type Tip Cantilever Cantilever Force Resonant Length Length (LC) Height (HC) Constant Frequency Cantilevered Contact Probes µm µm µm 5-20 N/m N.A. Cantilevered Non-contact Probes µm µm µm >5 N/m khz Straight Probes µm N.A. N.A. N.A. N.A. Deep Trench Contact Probes µm µm µm 5-20 N/m N.A. Deep Trench Non-contact Probes µm µm µm 5 N/m 390kHz The glass insulated Nanowire probes can be fabricated with a glass layer on top of the wire-tip. These probes can be used for capacitance measurements 10

10 Electrochemical & SECM Probes: Electrochemical & SECM Probes consist of a tapered metal wire that runs inside a glass nanopipette and protrudes slightly from its aperture. They aid in the performance of localized electrochemistry experiments and can also be used as electron sources. Me-wire Electrochemical and SECM Probe: wire runs down cantilevered nanopipette SEM of Electrochemical and SECM Probe with 1µm wire tip Sketch of Electrochemical and SECM Probe with wire protruding from glass nanopipette. Electrochemical & SECM Probes* Wire Material Wire Diameter Electrode Diameter Insulator Thickness Pt 25 µm or 50 µm > 50 nm 200 nm Ag 25 µm or 50 µm > 50 nm 200 nm Au 25 µm or 50 µm > 50 nm 200 nm Custom Metal 25 µm or 50 µm > 50 nm 200 nm *These probes can be designed as either straight, cantilevered or deep trench probes with the characteristics mentioned above. Coaxial Probes / Shielded STM Probes: Coaxial probes consists of a tapered metal wire running inside a metal-coated, glass nanopipette. The wire may protrude slightly from the coated nanopipette edge, but it remains exposed at the tip. The metal coating provides the wire with the necessary electrical shielding required for sensitive electrochemical measurements. In addition, these coaxial probes can be used as shielded STM probes. Pt-core Au-coating Cantilevered Coaxial Probe for sensitive electrochemical measurements SEM of Cantilevered Coaxial Probe with flat edge, 1µm tip Sketch of Coaxial Probe with gold coating for electrical shielding Coaxial Probes* Wire Material Wire Diameter Electrode Diameter Insulator Thickness External Coating Pt 25 µm or 50 µm > 50 nm 200 nm Ag, Au, Al, Cr or Ni Ag 25 µm or 50 µm > 50 nm 200 nm Ag, Au, Al, Cr or Ni Au 25 µm or 50 µm > 50 nm 200 nm Ag, Au, Al, Cr or Ni Custom Metal 25 µm or 50 µm > 50 nm 200 nm Ag, Au, Al, Cr or Ni * These probes can be designed as either straight, cantilevered or deep trench probes with the characteristics mentioned above. 11

11 Thermocouple Probes: Thermocouple probes also consist of a tapered wire running inside a metal-coated, glass nanopipette. In this case, however, extending the external metal coating over the protruding wire creates a junction across which the voltage drop is temperaturedependent. The temporal response of this thermocouple is orders of magnitude higher than any other thermocouple in existence. Thus, one gains the ability to perform both static and dynamic thermal measurements in very localized regions and with high precision. Pt-core Au-coating Thermocouple Probe with large cantilever angle SEM of Thermocouple Probe: tip is approximately 200 nm and entire SEM is approximately 100x100µm Sketch of Thermocouple Probe with Pt/Au junction at tip 25x25 mm thermal scan, showing the output profile of an IR single mode fiber. Thermocouple Probes* Wire Wire Coating Junction Thermal Minimum Temperature Operating Material Diameter Material Material Response Time Sensing Area Sensitivity Range Pt 25 µm Au Pt/Au ~1 µs > 100 nm < 10 milli-degrees < 150 C Pt 50 µm Au Pt/Au ~1 µs > 100 nm < 10 milli-degrees < 150 C * These probes can be designed as either straight, cantilevered or deep trench probes with the characteristics mentioned above. Multi-Channel Optical and Wire Probes: These probes are nanopipettes that are tapered together with an optical fiber and a metal wire. This unique, two-channel design allows one to obtain NSOM images at the same time as performing electrochemistry, thermal sensing, or electrical resistivity measurements. The exact design is flexible and can be made according to the customer s request. Double-Wired Nanopipette Probes General Pipette Characteristics Pipette Material Shank Diameter Taper Length Total Length Borosilicate mm 3-5 mm 5 mm 5 cm Type Tip Cantilever Cantilever Force Resonant Length Length (LC) Height (HC) Constant Frequency Cantilevered Contact Probes µm µm µm 5-20 N/m N.A. Cantilevered Non-contact Probes µm µm µm >5 N/m khz Straight probes µm N.A. N.A. N.A N.A. Deep Trench Contact Probes µm µm µm 5-20 N/m N.A. Deep Trench Non-contact Probes µm µm µm 5 N/m 390kHz 12

12 Double-Wire Electrode: In the Double-Wire Electrode probe, two platinum wires are tapered inside a dual-channel nanopipette and kept electrically uncoupled. They can be used to perform electrical measurements, such as resistance and capacitance measurements, on Submicron-scale devices. Because the probes use normal-force feedback to stay in contact with the surface, these electrical measurements can be correlated with the surface topography obtained through the simultaneously obtained AFM image. Pt-wire Double-Wire Electrode Probe with two tapered wires running inside a nanopipette. SEM of Double-Wire Electrode Probe: line is 1µm long Sketch of Double-Wire Electrode Probe Double-Wired Electrode* Wire Wire Length of Wires Distance Diameter Material Diameter Outside Between Wires of Wires Pt-Pt 25 µm 2 30 µm µm 50 nm 5 µm Pt-Pt 50 µm 2 30 µm µm 50 nm 5 µm *These probes can be designed as either straight, cantilevered or deep trench probes with the characteristics mentioned above. Nanotweezers: The Nanonics Nanotweezers probe also consists of two platinum wires tapered inside a nanopipette and kept electrically uncoupled. Applying a voltage of 70 V between these wires causes them to flex together as nanotweezers. Pt-wire Nanotweezers: when wires are at same potential they are uncoupled Nanotweezers: when 70 V is applied between the two wires they clench together. SEM of Nanotweezers showing length of tweezer hands: line is 2 µm long Sketch of Nanotweezers with two wires extending outside nanopipette. Nanotweezers* Wire Wire Length of Wires Distance Size of Material Diameter Outside Between Wires Wire Tips Pt 25 µm 4 20 µm 1-4 µm 50 nm 4 µm Pt 50 µm 4 20 µm 1-4 µm 50 nm 4 µm *These probes can be designed as either straight, cantilevered or deep trench probes with the characteristics mentioned above. 13

13 Dual Wire Thermo-Resistance: In the Dual Wire Thermo-Resistance probe, two platinum wires are stretched through the nanopipette and fused together at their tips. This fused junction has a resistance that is temperature-dependent. This unique tip allows simultaneous measurement of surface topography and thermal conductivity. Pt-wire SEM of Dual Wire Thermo-Resistance Probe showing fused junction: white line is 1 µm long Sketch of Dual Wire Thermo-Resistance Probe with fused junction whose resistance is temperature-dependent. Topography (top, 3x1 mm) and thermal conductivity (bottom, 3x1 mm) images of 500 nm spheres. Dual Wire Thermo-Resistance* Wire Wire Junction Length Sensitive Minimum Thermal Sensitivity Temperature Operating Material Diameter Material of Wires Tip size Sensing Response Coefficient of Range Outside Area Time Resistance Pt 25 µm Pt 2-6 µm 1-4 µm >100 nm 20 µs < 10 milli-degrees (Ω/ºC) 700 C Pt 50 µm Pt 2-6 µm 1-4 µm >100 nm 20 µs < 10 milli-degrees (Ω/ºC) 700 C *These probes can be designed as either straight, cantilevered or deep trench probes with the characteristics mentioned above. Nano-Heater and Nano-IR Source: In this probe,two uncoupled metal wires that run separately through a nanopipette are fused together at their tips. Running a current through them heats up their fused junction.this heat source can be used as a nano-source of infrared radiation (nano-ir), to heat very small regions on a surface,and to create micro-bubbles in a liquid medium that make fine incisions in biological tissue. Pt-wire SEM of Nano-Heater and Nano-IR Probe with 0.25 µm diameter junction Sketch of Nano-Heater Probe with fused junction at tip Nano-Heater and Nano-IR Source* Wire Wire Length of Wires Junction Junction Resistance Operating Range Material Diameter Outside Material Size Pt-Pt 25 µm 2 6 µm Pt µm Ω 700 C Pt-Pt 50 µm 2 6 µm Pt µm Ω 700 C *These probes can be designed as either straight, cantilevered or deep trench probes with the characteristics mentioned above. 14

14 Order Form (fax to ) First Name Last Name Institution Address City/State Zip Code Country Phone Fax All Probes " Straight " Cantilevered " Contact mode " LC x HC : 100 x 500 mm " LC x HC :... x... mm AFM Probes " Standard glass probe " Low force constant probes " Deep trench probe (check here, if any probe you want should be deep trench) " Non contact mode " Frequency khz " LC x HC : 100 x 500 mm " LC x HC :... x... mm " Frequency khz " LC x HC : 100 x 500 mm " LC x HC :... x... mm Nanopipette Probe " For deep UV NSOM " For Chemical Delivery " Pipette with Ag/Au nanoparticle Electrical / Wired Probes NSOM Probes " Single mode " nm " 780 nm " 630 nm " 820 nm " nm " Multi mode " nm " 350 nm (105 mm core) " 350 nm (200 mm core) " nm " Electrical/STM probe " Single wire nanopipette " Pt core " Ag core " Au core "... core " Coaxial probe " Pt core " Ag core " Au core "... core " Coating material " Ag coating " Cr coating " Au coating " Ni coating " Ai coating "... coating Aperture size for all NSOM probes: " 50 nm " 200 nm " 200 nm " 500 nm "... nm " Thermocouple probe " Dual wire probe " Nanotweezer " Dual wire thermo resistance probe / Nanoheater 15

15 Manhat Technology Park, Malcha Jerusalem 91487, Israel Tel: Fax: TMUNA MEDABERET