LIMMS! From Microelectronics

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1 LIMMS!! A joint lab. between IIS (University of Tokyo) and CNRS! CNRS/INSIS! National Institute for Sciences of Engineering and Systems! AURA network Sept 20-21, From Microelectronics 2 1

2 To Microsystems H Fujita lab Historical viewpoint 1995 IIS in Old Roppongi Campus IIS Moving to Komaba Years review Renewal + EUJO-LIMMS UMI Promotion International Research Unit 4 2

3 New Building in Komaba (2001) 5 LIMMS operation (1) Established in 1995, UMI since 2004! 110 (107 French and 3 Japanese) researchers welcomed at LIMMS! CNRS senior researchers (28)! JSPS Post-Doc fellows (59) + CNRS PD (5) + PhD (7) + Trainee (11)! 6 3

4 LIMMS operation (2) CNRS researchers! - From 13 lab. from 1995! - From 6 lab. for last 4 years! 15 hosting groups at U. Tokyo! - 13 groups at IIS! - 2 in Hongo Campus! 7 LIMMS operation (4) Since its creation (1995) : MICRO & NANOTECHNOLOGY NOWADAYS : 3 research axes - ADVANCED INTEGRATION of MEMS & NEMS functions - NANOTECHNOLOGIES (process and characterization) - Micro and Nanotech applied to the BIOLOGY 4

5 Research Environment LIMMS takes advantage of the up-to-date micro fabrication facilities! of CIRMM / IIS (Center for International Research on Micro Mechatronics)! Silicon-Process Cleanrooms! Photolithography, Low-Pressure Chemical Vapor Deposition, Ion-Implantation,and equipment for MOS processes MEMS-process Cleanrooms! Deep RIE, Wafer Bonders, Electron-Beam Patterning Semiconductor Characterization Cleanrooms! Probestations, Laser Doppler Vibrometer, Field-Emission SEM, Laser Microscopes Bio-Engineering Cleanrooms! Chemical Draft Chambers for Bio-Processes, Cell Culture & Molecular biology Facilities Nano scale measurement platform! Sub-atomic precision AFM equipment, FIB, STM Page 9 Silicon Nano Tweezers Nano opto MEMS Wireless MEMS Mita Fujita Hibara Someya Mita-Tixier Toshiyoshi Labs. Hybrid MEMS Flexible MEMS Green MEMS 10 5

6 Surface phonon polaritons Nanowires MEMS in TEM Kim Nomura Arakawa Hirakawa Kawakatsu Labs. Quantum dots In-liquid AFM 11 Fujii Fujita Sakai Kohno Takeuchi Tissue Engineering Labs. Microfluidic Single cell Membrane Protein chip Molecular computing Protein chip Molecular motors 12 6

7 EUJO-LIMMS FP7 : INCOLAB : Open 1 international lab. / region - - Brazil, USA, Russia, India, China, Japan based on existing structure + EU opening LIMMS/CNRS-IIS Univ. Tokyo : 16 years operation NAMIS partners: EPFL (Swiss), IMTEK (Germany), VTT (Finland) Proposal : Europe Japan open of LIMMS 友情 -LIMMS Rank 1/5 for Japan (2 / 31 worldwide) EUJO-LIMMS is the first EU laboratory in Japan 13 First EU laboratory in Japan Consortium : CNRS Centre National de la Recherche Scientifique (FRANCE) UT-IIS University of Tokyo Institute of Industrial Science (JAPAN) EPFL Ecole Polytechnique Federale de Lausanne (SWITZERLAND) IMTEK Albert Ludwig Freiburg Universitaet (GERMANY) VTT - Valtion Teknologian Tutkimuskeskus (FINLAND) 14 7

8 JSPS Core-to-core Program Objective : creating world-class research hubs through networking to advance multilateral collaboration in cutting-edge fields of science. Targeted countries : USA, Canada, Austria, Belgium, Finland, France,Germany, Italy, the Netherlands, Spain, Sweden, Switzerland, the UK, Australia, New Zealand Needs matching funds as EUJO-LIMMS : supporting IIS to send researchers to the EUJO-LIMMS partners in Europe Grant : 16 Million Yens / Year for 5 years 15 LIMMS operation (3) 16 8

9 Function of LIMMS administrative 1. Human Resource Support Hosting Researchers OISS-like Functions Staff recruitment & development Consulting for personal problem 2. Financial Account-Planning Joint Research Contract (CNRS, ANR, CEA, Company, etc. ) CNRS, IIS Account Management by Labintel, Xlab, etc Patent 3. France-Japan Administrative Operations LIMMS Administrative in CNRS LIMMS Administrative in IIS Interface to External Institutions Information management 4. LIMMS Running for Daily Life Daily care of researchers Visits / Events / scientific committee Record keeping (publication, reference, reports) LIMMS alumni relation 17 Personnel as today CNRS Specific permanent Position ( 1 person since 2008) CNRS Permanent Researcher (1) (3) (3) JSPS Post-doc. Industrial Collaborator (1) (15) IIS Host Professors CNRS & IIS Post-doc. PhD student CNRS (4) (5) LIMMS/CNRS-IIS (3) CNRS Short term master trainee student (2) (3) IIS EPM Contract Secretaries CNRS ITA* *ITA = Technical Administrative Engineer 18 9

10 CNRS : Special event 2012 CNRS President : Prof. Alain Fuchs Visit IIS and LIMMS on 2010 May, 2010 and 2012 Feb. 7 Thank you 20 10