Micro Injection Molding of Micro Fluidic Platform

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1 Micro Injection Molding of Micro Fluidic Platform S. C. Chen, J. A. Chang, Y. J. Chang and S. W. Chau Department of Mechanical Engineering, Chung Yuan University, Taiwan, ROC Abstract In this study, micro injection molding was applied to mold micro fluidic platform used for DNA/RNA test. LIGA like process using UV light aligner was applied to prepare silicon based SU-8 photoresist followed by electroforming to make Ni-Co based stamp be the mold insert. The micro features in the stamp with a size of 80 mm by 40 mm by 0.4mm includes 30 m by 100 m micro-channel size and 50 m pitch size. COC, PC and PS were utilized as molding materials. Micro channel depth and width in stamp can achieve an accuracy of about +1.5 m (+5%) and m -14.1%. For micro injection molded parts, the dimensional accuracy are about m (1.8%) and m (+1.4%) for depth and width, respectively. Vacuum during melt filling provide a better replication of micro features. Among injection processing parameters, the mold temperature and holding pressure are found to affect the molding accuracy significantly. Introduction Injection molding of plastics for micro and micro featured products gradually shows its great commercial potential over recent years. Because of the short cycle times, injection molding is the process most frequently used for micro molding in industry. Several micro molding machines are sold on the market and mold inserts fabricated with various techniques suitable for most applications are available. This is reflected by an increasing interest of industry in micro molding processes. In order to fabricate a micro structured tool (mold insert), the miniaturization of chemical and mechanical devices for micro electromechanical systems (MEMS) has gained a great deal of attention. The LIGA process is one of the main methods of fabricating microstructures, especially those with high aspect rations. However, synchrotron radiation is hard to obtain; the cost of X-ray masking is high and the process of fabrication is very complex [1]. A LIGA-like process that involves altered processes is inevitable. Unlike the standard L1GA process, the LIGA-like process evolved from the standard photoresist process is very compatible with the integrated circuit process and the equipment required is simpler than that required by the LIGA process [2,3]. In addition, implementation costs are more or less commercially acceptable. Micro-injection molding with a LIGA micromold insert becomes more important in micro-system industries because of economic and mass production of micro-components for most applications [4-5]. Many micro and micro-featured devices such as micro sampling cell, micro heat exchangers, micro pumps, optical grating elements, lab-on-a-chip technology [6], etc, has been successfully injection molded. Particularly in the biochemistry and biomedical field, polymeric materials are a better choice because of their lower cost and biocompatibility. Polymer micro-fabrication techniques, particularly, micro-featured injection molding is necessary for industry [7]. CAE (Computer Aided Engineering) has been long time becoming a useful tool for mold design and process optimization. However, to accurately predict melt flow through micro channel or micro-featured geometry still face certain challenge [8]. Fully 3D simulation recently developed may be proved to be a useful tool, yet its accuracy remained to be verified. In this paper, the micro fluidic platform used for DNA/RNA test (PCR chip) was injection molded using PC and COC polymer. The stamp used for mold insert was fabricated by LIGA-like process. 3D simulation for melt flow during filling process were also executed and compared with injection molding experiment. The influence of various molding conditions and cavity vacuum situation on the replication accuracy and roughness of micro-featured surface were investigated by comparison with the corresponding dimensions within the stamp. Experimental Works Fabrication of Micro-Feature Mold The micro channel of the micro fluidic platform is produced by a serious of LIGA-like process. The fabrication process is show schematically in Figure 1 and the detailed procedures include the following step: (a) spin coating of SU photoresist layer of about 30 m on a 5-inch silicon wafer of single-side polished; (b) soft baking of SU-8 photoresist at 95 to reduce the solvent; (c) exposure to UV light covered with properly designed mask; (d) post curing and hardening of photoresist unexposed to UV light; (e) removing UV-light exposed portion of photoresist to form (f) resist structure with micro patterns; (h) Ni-Co electroplating to

2 from stamp of 0.4 mm thick; (h) insert stamp (with size of 80 mm by 40 mm by 0.4 mm; micro-channel size is 30 m by 100 m and 50 m pitch) into mold; (i) micro injection molding to form (j) micro-featured part. Injection Molding of Micro-Channels During injection molding, effect of characteristics resulting from different materials (COC and PC) and injection molding conditions including injection speed (200mm/sec, 300mm/sec and 400mm/sec), mold temperature (40, 50 and 60 ) and holding pressure (40, 60 and 80 Mpa) on the replication accuracy of micro-features are investigated. Influence from vacuum and non-vacuum conditions on part accuracy are studied as well. Figure 2 shows the injection mold with vacuum system and the stamp inserted into the center of the mold. The Ni-Co alloys were fabricated to serve as micro mold inserts and which have fine mechanical properties. Cavity size is 60 mm by 25 mm by 1 mm and can be vacuumed by the mold vacuum system. The mold vacuum system can achieve two purposes. One is to make sure the flatness of the stamp, the other is improvement the melt flow without causing air trap. During melt filling, vacuum to provide a better replication of micro features. The Sodick-TR30EH injection molding machine is used for the molding experiments. The machine uses reciprocal screw for melt plastification whereas plunger with V-line design provides the accuracy injection. Dimension Measurement The replication accuracy of micro-feature for micro channel dimensions and draft angle at positions of (A), (B) and (C) shown in Figure 3(a) was examined by 3D microscope (maximum magnification 16000, KEYENCE Corp., Japan) and compare with the dimensions of stamp. Five measurements were recorded at each position, the average values from these five measurements were used for analysis and correlation. The measured features including width, depth and draft angle of the micro channels were described in Figure 3(b). Surface roughness is measured on the bottom surface of the channel. Simulation Pseudo 3D based on dual surface plane and 2.5D numerical scheme as well as fully 3D simulation model of Moldflow@ package are used to simulate the melt front advancement passing through the micro-featured channels during the filling stage. The predictions are also verified by the short shot experiments. Hopefully, the investigation can provide the information about the appropriateness of current CAE simulation in the application of micro-feature molding. For fully 3D simulation model, solid elements were utilized. Simulated conditions are (1) 0.1 seconds filling time; (2) 240 melt temperature; (3) 60 mold wall temperature and TICONA Cyclic Olefin Copolymer (COC) was the molding materials. Results and Discussion Both 2.5D and 3D simulated results for melt front advancement are shown in Figure 4. Experimental results on the short shots (50, 70, 95 and 100% of injection stroke, respectively) were also shown for comparison. It is obvious that fully 3D simulation provides reasonable prediction for the melt flow whereas 2.5 D model and pseudo 3D model based on dual surface plane lost simulation accuracy because of the geometry simplification in the micro-features. Comparison the section profile of stamp and micro channel molded with COC and PC, respectively, are shown in Figure 5. It can be seen that shows that COC achieve a good replication in the micro-features of the stamp. Table I lists the detailed dimension data of the measurements. This is due to the lower viscosity of COC and resulting in an easier flow of melt. However, PC can achieve a better surface roughness. Figures 6 to 8 show the influence of mold vacuum and non-vacuum on replication accuracy of micro channels at various locations (A, B and C). The top view, and 3D structure can seem the replication situation. The profile of channel shape was describe by the A-B cross line. Three kinds of channel shapes are approximately close to the stamp. The surface replication of platform gained form the mold vacuum system. Table II, III and IV list the detailed geometry data correspondingly. From these data, it is obvious that cavity vacuum can improve the replication accuracy. Its influence is more significant on the draft angle and bottom width. In addition, its influence is larger at locations of A and B where micro channels turn around or branched out. The influence of the replication accuracy of micro-features for COC micro fluidic platform from molding conditions of different injection speeds (40%, 60% and 80% of maximum injection speed) was shown in Figure 9. The higher of the injection speed the replication accuracy in depth increases. Figure 10 and 11, depicted the effect of mold temperature (40, 50 and 60 ) and holding pressure (40, 60 and 80 Mpa) on the micro-feature geometry. Higher mold temperature and higher packing pressure lead to better replication accuracy. Comparing the holding pressure, Figure 11 shows the higher of holding pressure the depth replication will be better in this case of depth. Micro channel at position B seems to be affected most significantly.

3 Conclusion In this study, micro fluidic platform used for DNA/RNA test was injection molded using Ni-Co based stamp with micro channel layout. Effects of various molding conditions and cavity vacuum situation on the replication accuracy and roughness of micro-featured surface were investigated by comparison with the corresponding dimensions within the stamp. 3D simulation for melt flow during filling process were also executed and compared with molding experiment. Based on the measured results, the following conclusions can be made: 1. Using low viscosity polymer can result in a better replication accuracy in micro channel. However, the roughness depends on the melt and roughness. Low viscosity polymer can achieve to get better surface property. The replication accuracies in width and draft angle increase when cavity vacuum was applied prior to melt injection. 2. Higher injection speed, higher mold temperature and higher packing pressure can lead to better replication accuracy. It shows greater influence on micro channel at the position where channel turn around. Vacuum prior injection molding also improves the replication accuracy. 3. Fully 3D simulation for the melt front advancement through micro-featured channels during the filling process shows reasonably accurate compared with experiments, particularly when the depth of micro geometry is not too high. Pseudo 3D based on dual plane model or 2.5D shell model loose simulation accuracy due to the simplification in micro-featured geometry. 4. Micro channel depth and width in stamp can achieve an accuracy of about +1.5 m (+5%) and m -14.1%. For micro injection molded parts, the dimensional accuracy are about m (1.8%) and m (+1.4%) for depth and width, respectively. 7. Marc J. Madou1, L. James Lee, Kurt W. Koelling, Sylvia Daunert, SPE ANTEC, 227, (2003). 8. K. W. Koelling, Experimental and Numerical Analysis of Injection Molding with Micro-Features presented in workshop for Advanced Materials, Molding and Mold Technology, September 1, Chung-Li, Taiwan, (2003). Key Words Micro Injection Molding, Micro Fluidic Platform, Micro Channel, PCR Biochip. Figure 1. Fabrication steps for micro-feature part molding. Acknowledgement This work was supported by National Science Council NSC grant NSC E Reference 1. M. J. Madou, Fundamentals of Microfabrication, second ed., CRC Press. NBT York, (2002). 2. R. Klein, A. Neyer, Electron. Lett., 30, 1672 (1994). 3. S. Kalveram, A. Neyer, SPIE, 3135, 2, (1997). 4. T. Hanemann, V. Piotter, R. Ruprecht and J. H. Hausselt, Polymeric Mater. Sci. Eng., 77, 404, (1997). 5. R. Ruprecht, W. Bacher, J. H. Hausselt and V. Piotter, SPIE Int. Soc. Opt. Eng., 2639, 146, (1995). 6. M. Freemantal, Chem. Eng. News, 22, 27, (1999). Figure 2. Micro molding experiment mold designed with micro-feature stamp insert.

4 (a) Figure 6. Measured section profiles at position (A). (b) Figure 3. (a) Measured positions of the micro channels. (b) Characterization of micro feature by width, depth, draft angle ( ) and surface roughness place. Figure 7. Measured section profiles at position (B). Figure 4. Comparison of pseudo 3D (2.5D) and 3D simulation results in melt front advancements with short shot experiments (50,70,95 and 100 injection stoke). Figure 5. Comparison on the section profile of stamp and channel size molded with COC and PC, respectively. Figure 8. Measured section profiles at position (C). Figure 9. Replication depth increases with increased injection speed.

5 Table III Measured geometry data of stamp and channel molded with and without vacuum (position B) Figure 10. Replication depth increases with the mold temperature. Table IV Measured geometry data of stamp and channel molded with and without vacuum (position C) Figure 11. Replication depth increases with holding pressure. Table I Measured micro-geometry for PC and COC Table II Measured geometry data of stamp and channel molded with and without vacuum (position A)

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