SmalTec.com / SmartManufacturingSeries.com

Transcription

1 SmalTec.com / SmartManufacturingSeries.com

2 (a) Traditional metrology technologies have limitations when inspecting micro features (b) Optical Metrology (a) Microscope (b) Scanning Electron Microscope (SEM) (c) White light interferometry Contact/Tactile Metrology (d) Coordinated Measurement Machine (CMM) (e) Atomic Force Microscope (AFM) Destructive Testing. (d) (e) (c)

3 How many here are involved with Metrology Micro parts How many different types of equipment do you have available to you How small of a hole/feature and what aspect ratio can you measure How small do you need to go Are you ready to Lean Forward with me today?

4 EFM Micro Probe System is an Ultra High Precision metrology method for measuring micro features in conductive parts. This process is non contact and nondestructive. Conventional CMM feedback system Laser Laser The Control System SmalTec Ultra low energy sensing circuit Nanometers of energy gap Pico Joule energy levels Real Time Control Closed Loop Feedback Nanometer Level Precision Programmable Motion and Data Acquisition Contact event -Spark- SmalTec Feedback Control System + µamps µamps In situ data collection 1 AA Battery could run a continuous sensing energy for 70 hours. Non-contact event -EFM-

5 By keeping the part in a single machining space; reference points, and/or part centers are maintained from process to process. Examining and verifying a part without removing it from its machining space allows the user to return to the part for additional machining processes to complete the part. Machining/ Metrology Check List On Platform Tooling/Re Tooling Machining Tools Metrology Tools Complex Probes < 100 micron Diameter Motion and Response Highly Precise Motion Rapid Response to Surroundings Measuring Process EFM Micro Probe System TM Software data acquisition. 70 micron Probe tip 45 micron by 1.0 mm stem Shank 55um wide Shank 3mm long Disk 45 um tall Disk 80 um radius Material W

6 Topographies Micro holes come in many sizes, shapes and depths. Entrance 111 um diameter ( ) Small diameters 5um to 250 um ( to.010 ) High Aspect ratios 10:1 25:1 35:1 Complex geometries Straight hole Defined angle Parabolic shape. Length of hole 750 um (0.03 ) Exit 102 um diameter (0.004 ) (a) Probe (a) 31 um ( ) diameter (b) 34 um ( ) disk diameter (b)

7 Nozzle orifices are a dominant feature type in the Micro machining industry. There are a variety of applications that demand exacting shape control and diameter precision. Applications exist in many industries today Industrial Medical Aerospace Automotive Clothing And even art. Entrance 78 um diameter ( ) Exit 36 um diameter ( ) Probe 18 um diameter ( )

8 Blind through hole an oxymoron or reality? There are several applications that require this type of hole. Today the method to measure this hole is to destroy the part and apply one of the traditional metrology methods Pick up Point Fuel injectors Cooling holes for jet engines Medical devices with features on tubes. Entrance 50 um diameter (0.002 ) Reverse taper 70 um diameter ( )

9 Wide variety of applications and features can be measured using EFM technology. On CNC Machine Micro threads Complex Inside Angles Under Hangs Reverse taper Surface Inside Micro Holes High Aspect Micro Holes Steep Angles Micro Holes Micro Features Steep Corners Small Features Small Parts

10 This is a critical step for any metrology equipment or device. It is critical that the device can achieve accuracy, precision, and stability #1 Wall Thickness mm inches Application description Wall thickness measurement Diameter calculation Inner Diameter Outer Diameter Ten parts total. Probe shape ID Y axis mm inches #4 #2 Wall Thicknes s Wall Thickness mm mm inches inches ID X axis mm inches mm inches mm inches #3 Wall Thickness mm inches

11 Real data collected using the EFM Micro Probe System TM Test parts data Repeatability Reproducibility 2.65 Gage R&R Range Gauge Repeatability & Reproducibility (GR&R) -- Variable Data Part Name: Test part #1 USL = Operators = 1 Date: Device: SmalTec EFM Machine LSL = Trials = 3 Name: DJW/JM Characteristic: Wall Thickness #1 Tolerance = Parts = 10 Operator B C A Sample Trial 1 Trial 2 Trial 3 Range Trial 1 Trial 2 Trial 3 Range Trial 1 Trial 2 Trial 3 Range * Average = Average = Average = EV 0.00 AV 0.00 R&R 0.00 UCL Range = = = (Equipment Variation) (Appraiser Variation) Check SigmaEV = 0.00 SigmaAV = 0.00 SigmaR&R = R dbar = Repeatability = Reproducibility = 2.65 Gage R & R = UCLRange = Your results are adequate. Your results are excellent. Your results are adequate. X bar difference = Check to see if any of the individual EV = R dbar * K1 AV = (X bar diff * K2) 2 - (EV 2 / (parts*trials)) R&R = EV 2 + AV 2 range values are above this control limit SigmaEV SigmaAV SigmaR&R UCLRange *D4 = EV / 5.15 = AV / 5.15 = R&R / = R dbar Repeatability = 100 * (EV / Tolerance) Reproducibility = 100 * (AV / Tolerance) Gage R&R = 100 * (R&R / Tolerance) Results Key 0 to 10 Excellent EV and AV are based on 5.15sigma Constants 10 to 20 Adequate 5.15s igma = (99% of the area under the normal distribution curve) Trials D4 K1 K2 20 to 30 Marginal > 30 Unacceptable Check = 10 Operators*Samples must be greater than Range by Part Number Average by Part Average Part Part

12 EFM Micro Probe System is an Ultra High Precision metrology method for collecting data and measuring micro features in conductive parts. Currently in use Capable of measuring micro features Non Contact Non Destructive In situ metrology Process refinement Reduces wasted material and time Future of micro metrology? So go ahead and add a few pages to your Design For Manufacturing book.

13 SmartManufacturingSeries.com