Two-photon polymerization in 3D Printing sets new Standards in Micro and Nanofabrication. Nanoscribe GmbH Alexander Legant

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1 Two-photon polymerization in 3D Printing sets new Standards in Micro and Nanofabrication Nanoscribe GmbH Alexander Legant Northwestern University Evanston, IL 1 Alexander Legant 22-September 2017

2 Additive manufacturing on the micrometer scale 20 µm 30 µm 10 µm 2,000 layers 1 process step! 10 µm 4 Alexander Legant 22-September 2017

3 From 2D lithography to 3D printing 2D 2.5D 3D 20 µm 20 µm 2000 µm Resolution between e-beam / UV lithography 2D & 2.5D Lithography Higher aspect ratios than e-beam and UV litho Throughput comparable to state-of-the art e-beam lithography Design freedom, high structures, simple and reliable processes comp. to grey scale UV litho Additionally more than 10x higher throughput compared to diamond machining 3D Printing 100 x higher resolution and smaller feature sizes compared to stereolithography Surfaces in optical quality -> shiny! 5 Alexander Legant 22-September 2017

4 3D printing by two-photon polymerization Two-photon polymerization (TPP): Near-infrared laser Ultra-short laser pulses UV-curable photoresists Pioneering fabrication of 3D micro-objects in 1997 by Prof. Kawata, Osaka University 6 Alexander Legant 22-September 2017

5 3D printing by two-photon polymerization UV 365 nm NIR 780 nm 1P 2P Dorkenoo et al. (2012); InTech; DOI: /50496

6 From digital model to final product Model 3D printing Final product 8 Alexander Legant 22-September 2017

7 Easy workflow 9 Alexander Legant 22-September 2017

8 High speed 3D printing process on µm scale System: Photonic Professional GT Software: Describe 2.5 Resin: IP-Meso Recipe: IP-Meso standard settings 10 Alexander Legant 22-September 2017

9 High speed 3D printing process on µm scale 11 Alexander Legant 22-September 2017

10 Materials photoresists and casting / molding 12 Alexander Legant 22-September 2017

11 Negative & positive tone resists for maskless lithography Additive manufacturing by using negative tone resists: - SU-8 - Ormocere - Acrylates: Nanoscribe s IP-X series - and others Subtractive manufacturing by using positive tone resists: AZ 9260 AZ MIR 701 AZ 5214 AZ 40XT and others 13 Alexander Legant 22-September 2017

12 Other photoresists and beyond Various materials have been and are under investigation to expand the properties and functionality of 3D-printed objects. Examples from the publications of our customers are: 1) Thiol-Yne resist 2) Thiol-ene resist 3) Protein resist 4) Carbon nanotube mixed resist 5) Ionic liquid-polymer composite 6) PEG-DA hydrogel mixed with PETA 7) ph-sensitive shape-shifting protein microstructures 8) Cu nanoparticle based micro-temperature detectors 9) Superparamagnetic nanoparticle micro-machines 10) Photoreactive conjugated polymer 11) Arsenic trisulfide (As 2 S 3 ) as high refractive index optical material 12) Rare-earth doped temperature sensors 13) Liquid crystalline elastomers 14) Ablation 15) Deposition of graphene patterns 16) Fabrication of 3D polymer-gold nano-composites by metal salt reduction Numerous subsequent processes such as surface coatings or electroplating further increase the material properties in reach and hence superior functionalities. 15 Alexander Legant 22-September 2017

13 Materials Beyond polymers Dielectrics: Silicon Chemical Vapor Deposition (CVD) Silica Pulsed Layer Deposition (PLD) Titania Atomic Layer Deposition (ALD) Polymer SiO 2 Si 1 µm 1 µm 1 µm M. Hermatschweiler et al., Adv. Funct. Mater. 17, 2273 (2007) Metals: Gold Electroplating / Galvanization Silver Chemical Vapor Deposition (CVD) Polymer Gold J. Gansel et al., Science 325, 1513 (2009) 16 Alexander Legant 22-September 2017

14 Gold spirals J. Gansel et al., Science 325, 1513 (2009) 17 Alexander Legant 22-September 2017

15 Copper lattices Copper structure inverted from polymer template based on AZ4620 X. Wendy Gu et al., Extreme Mechanics Letters 2 (2015), 7-14, DOI: /j.eml Alexander Legant 22-September 2017

16 An indispensable tool for innovators requiring nano-, micro- and mesoscale objects ICT life sciences micro-optics metamaterials microfluidics pharmaceutics connectors microrobotics DOEs mechanics 23 Alexander Legant 22-September 2017

17 Optical security labels: n-level DOE Rapid Prototyping of DOEs Removing process steps: 1 step instead of n steps 1 printer instead of UV/e-beam + mask aligner No spin-coater, no soft-bake, no hard-bake, just print! Saving time & costs: 1 day instead of > 1week Less equipment No masks! Product lifecycle leverage effects! 24 Alexander Legant 22-September 2017

18 Directly printed diffractive optics: DOEs 8 level DOE for non centrosymmetric pattern 27 Alexander Legant 22-September 2017

19 High-speed optical interconnects Photonic Wire Bonds: Chip-to-chip optical integration Analog to electrical wire bonds of integrated circuits (IC) Data rates in information processing: >5 Tbit/sec Research at KIT-IPQ, headed by Prof. Dr. Christian Koos 29 Alexander Legant 22-September 2017

20 Ultralight microlattices Applications: Thermal insulation Battery electrodes Acoustic/vibration/shock damping J. R. Greer et al., Science 345, 1322 (2014) Ultra-lightweight designer mechanical material J. Bauer et al., PNAS, doi: /pnas (2014) 30 Alexander Legant 22-September 2017

21 Ultralight microlattices Applications: Pyrolysis scales down factor 5 Smallest Ever Lattice Structures of Unprecedented Strength 1 µm Approaching theoretical strength in glassy carbon nanolattices Bauer, J. et al., Nature Materials (2016), DOI: /nmat Alexander Legant 22-September 2017

22 Biomimicry: Painless microneedles Suzuki et al., State Sensors, Actuators and Microsys., Alexander Legant 22-September 2017

23 Biomimicry: Painless microneedles Suzuki et al., State Sensors, Actuators and Microsys., Alexander Legant 22-September 2017

24 Biomimicry: Painless microneedles Suzuki et al., State Sensors, Actuators and Microsys., Alexander Legant 22-September 2017

25 Biomimicry: Painless microneedles Suzuki et al., State Sensors, Actuators and Microsys., Alexander Legant 22-September 2017

26 Biomimetic applications Salvinia fern ACS Appl. Mater. Interf., 7(46), DOI: /acsami.5b07722 (2015) 37 Alexander Legant 22-September 2017

27 Biomimetic applications odor sensor T. Spencer et al., IEEE ISOEN 2017 conference, DOI: /ISOEN Alexander Legant 22-September 2017

28 Bacteria micro-traps 50 µm Deployable micro-traps to sequester motile bacteria R. Di Giacomo et al., Scientific Reports 7, 2017, DOI: /srep Alexander Legant 22-September 2017

29 Cell biology culturing cells in 3D designer environments F. Klein et al., Adv. Mater. 22, 868 (2010); DOI: /adma A. Marino et al., Acta Biomaterialia Vol.10 (2014) 4304 Mark Holm Olsen, Lab Chip, 2013,13, Alexander Legant 22-September 2017

30 Cell biological applications Controllable 3D-environment with: Tailored geometry Spatially functionalized matrix Multi-protein functionalization Passivation Dynamics A.M. Greiner, B. Richter, M. Bastmeyer, Macromol. Biosci., 12, 1301 (2012) F. Klein, B. Richter et al., Adv. Mater., 23, 1341 (2011) B. Richter et al., Adv. Mater., 25, 6117 (2013) B. Richter et al., doi: /cleo_si.2014.sm3p.1 43 Alexander Legant 22-September 2017

31 Single cells fuse to muscle fibers and differentiate to contractible muscle fibers MUSCLE-ACTUATED BIOMIMETIC HYDROGEL-BASED 3D MICROSKELETON Maurizio R. Gullo et al., IEEE 30th MEMS Conference, 2017, DOI: /MEMSYS Alexander Legant 22-September 2017

32 Nanoclip implanted nerve interface for therapy J. Neural Eng. 14 (2017) , A. White Boston University 46 Alexander Legant 22-September 2017

33 Magnetic helical micromachines 10 µm Adv. Mater. 24, 6, (2012) 47 Alexander Legant 22-September 2017

34 Magnetic helical micromachines 10 µm 10 µm C. Peters et al., Adv. Mater. 2015, DOI: /adma Antoine Barbot et al., DOI: /srep19041 (2016) N. Beyrand et al., 2015 IEEE/RSJ IROS conference Nano Lett. 16, (2016) Tian-Yun Huang et al., DOI: /adma (2015) 48 Alexander Legant 22-September 2017

35 Microscopic walker with LCE muscles 10 µm Light-Fueled Microscopic Walkers Zeng, H., Wasylczyk, P., Parmeggiani, C., Martella, D., Burresi, M. and Wiersma, D. S. Adv. Mater. (2015). DOI: /adma Alexander Legant 22-September 2017

36 Motion due to temperature change A. Nishiguchi et al., Advanced Science, 2017, DOI: /advs Alexander Legant 22-September 2017

37 Motion by difference of PH M. Power et al., IEEE ICRA 2017, DOI: /ICRA Alexander Legant 22-September 2017

38 Microfluidics in Mesoscale+ Tesla valve IP-S resist: 963 µm 3853 µm 200 µm mm 3 Writing time: 1h 10min new resist: 1686 µm 6743 µm 300 µm 3.41 mm 3 Writing time: 1h 15min Factor 4-5 faster! 54 Alexander Legant 22-September 2017

39 Microfluidics masters for moulds for diagnostics Microfluidic particle filters Design: Trilobite Microsystems AS Micro-textured surface 4 silicon wafer with cured IP-Meso 55 Alexander Legant 22-September 2017

40 High-fidelity gas dynamic virtual nozzles: Biological imaging by X-ray free electron lasers Garrett Nelson et. al., Optics Express (2016) 56 Alexander Legant 22-September 2017

41 Mechanics: Gears, mixers, springs 100 µm Elastic spring Miniaturized gear Microfluidic mixer High precision mechanics for luxury goods 57 Alexander Legant 22-September 2017

42 Nanoscribe history Printer prototypes 06/2008 Photonic Professional 1 st printer shipped 2009 Print Materials Global Expansion Growing markets via R&D st industry lead customer Strong R&D intensity 2016 Printjob editor with recipes Enabling Academia Enabling Industry 12/2007 Nanoscribe GmbH founded 09/2008 Carl Zeiss Venture acquires shares 12/2013 Photonic Professional GT 1,000 speed-up 2017 > 140 systems sold > 50 employees > 30 countries 59 Alexander Legant 22-September 2017

43 Nanoscribe Community and its results more than 100 customers with more than 500 users worldwide 60 Alexander Legant 22-September 2017

44 Microoptics first industrial applications getting ready for the market 20 µm 2 µm 100 µm Polymer master and Nickel shim Fresnel lens Cornercube retro-reflector 5 µm Hemispherical microlenses with 100% filling factor 10 µm Pyramidal micro-optics 100 µm Half-spheres 61 Alexander Legant 22-September 2017

45 Microoptics first industrial applications getting ready for the market 100 µm Half-spheres 63 Alexander Legant 22-September 2017

46 Printing on-top of optical fibers + on chips 20 µm 2 µm 70 µm T. Gissibl et al., Nature Photonics, 2016, DOI: /nphoton µm 10 µm Xie Z. et al., Adv. Opt. Mat., 2015, DOI: /adom Alexander Legant 22-September 2017

47 Parabolic light concentrators for LED applications +3D-Printed Sensor with Eagle Eye 3D-printed eagle eye: Compound microlens system for foveated imaging; S. Thiele et al, Science Advances, 3, 2017, DOI: /sciadv µm 2 µm 70 µm 5 µm 10 µm S. Thiele et al., Ultra-compact on-chip LED collimation optics by 3D femtosecond direct laser writing Optics Letters, Vol. 41, Issue 13, 2016, DOI: /OL Alexander Legant 22-September 2017

48 Smartcatch Capturing Circulating Tumor Cells Goal: Provide a powerful tool for clinical routine early diagnosis in oncology. 68 Alexander Legant 22-September 2017

49 Materializing ideas by additive microfabrication Questions & Contributions? 70 Alexander Legant 22-September 2017