(12) Patent Application Publication (10) Pub. No.: US 2013/ A1

Transcription

1 (19) United States (12) Patent Application Publication (10) Pub. No.: US 2013/ A1 Huh et al. US A1 (43) Pub. Date: Oct. 3, 2013 (54) TRANSISTOR, SEMICONDUCTOR DEVICE, AND SEMCONDUCTORMODULE INCLUDING THE SAME (71) Applicants: Ki-Jae Huh, Seoul (KR); Satoru Yamada, Seoul (KR); Jun-Hee Lim, Seoul (KR); Sung-Ho Jang, Hwaseong-si (KR) (72) Inventors: Ki-Jae Huh, Seoul (KR); Satoru Yamada, Seoul (KR); Jun-Hee Lim, Seoul (KR); Sung-Ho Jang, Hwaseong-si (KR) (21) Appl. No.: 13/779,179 (22) Filed: Feb. 27, 2013 (30) Foreign Application Priority Data Mar. 29, 2012 (KR) Publication Classification (51) Int. Cl. HOIL 29/78 ( ) HOIL 27/04 ( ) (52) U.S. Cl. CPC... HOIL 29/7827 ( ); HOIL 27/04 ( ) USPC /296; 257/330; 257/334 (57) ABSTRACT A semiconductor device including a buried cell array transis tor and an electronic device including the same are provided. The device includes a field region in a substrate and the filed region defines an active region. A first source/drain region and a second source/drain region are in the active region. A gate trench is between the first and second source/drain regions, and in the active region and the field region. A gate structure is within the gate trench. The gate structure includes a gate electrode, an insulating gate capping pattern on the gate elec trode, a gate dielectric between the gate electrode and the active region, and an insulating metal-containing material layer between the insulating gate capping pattern and the active region b (GS) b 24 9 A

2 Patent Application Publication Oct. 3, 2013 Sheet 1 of 111 US 2013/ A1 FIG. 1 GS-A is // //

3 Patent Application Publication Oct. 3, 2013 Sheet 2 of 111 US 2013/ A1 FIG 2

4 Patent Application Publication Oct. 3, 2013 Sheet 3 of 111 US 2013/ A1 FIG 3

5 Patent Application Publication Oct. 3, 2013 Sheet 4 of 111 US 2013/ A1 48b 48ck

6 Patent Application Publication Oct. 3, 2013 Sheet 5 of 111 US 2013/ A1 FIG. 5 al 24

7 Patent Application Publication Oct. 3, 2013 Sheet 6 of 111 US 2013/ A1 FIG (GS) S 236e 24

8 Patent Application Publication Oct. 3, 2013 Sheet 7 of 111 US 2013/ A1 FIG (GS) 345

9 Patent Application Publication Oct. 3, 2013 Sheet 8 of 111 US 2013/ A1 FIG (GS) (GS)

10 Patent Application Publication Oct. 3, 2013 Sheet 9 of 111 US 2013/ A1 FIG 13A 548' (GS) C 539:53a 54Ob " (GS)

11 Patent Application Publication Oct. 3, 2013 Sheet 10 of 111 US 2013/ A1 FIG 14 WACUUM LEVEL LOWER GATE ACTIVE ELECTRODE E REGION DIELECTRIC FIG. 15A WACUUM LEWEL UPPER GATE s N-TYPE SOURCE/ ELECTRODE GATE DRAIN REGION DIELECTRIC

12 Patent Application Publication Oct. 3, 2013 Sheet 11 of 111 US 2013/ A1 FIG. 15B WACUUM LEVEL EC areer awaa amaa am m E midgap m m. pm on EF E UPPER GATE s P-TYPE SOURCE/ ELECTRODE GATE DRAIN REGION DIELECTRIC 548a (GS) 545 o tg2 525 tgl TR 18a 18b

13 Patent Application Publication Oct. 3, 2013 Sheet 12 of 111 US 2013/ A1 FIG 17A 539a s: 530 TR 18a 18b -- 18

14 Patent Application Publication Oct. 3, 2013 Sheet 13 of 111 US 2013/ A1 FIG b (GS) 545 so FIG. 19A 539b 548b (GS) b' b - 534b b TR 18a 18b N-- 18 )

15 Patent Application Publication Oct. 3, 2013 Sheet 14 of 111 US 2013/ A1 FIG. 19B 548b" (GS) b." b - 534b b 634a sia

16 Patent Application Publication Oct. 3, 2013 Sheet 15 of 111 US 2013/ A1 FIG 21A 628 FIG 21B 648a" (GS) a 636a 2A : ) she-shot e 5 }7 / 3 1.

17 Patent Application Publication Oct. 3, 2013 Sheet 16 of 111 US 2013/ A1 FIG b (GS) 645 TR 18a 18b

18 Patent Application Publication Oct. 3, 2013 Sheet 17 of 111 US 2013/ A1 FIG. 23B 748a (GS)

19 Patent Application Publication Oct. 3, 2013 Sheet 18 of 111 US 2013/ A1 FIG. 25A 748a (GS) 736 is a 748a" (GS) a" (TOC 73a is a TR 18a 18b

20 Patent Application Publication Oct. 3, 2013 Sheet 19 of 111 US 2013/ A1 FIG b (GS) 745

21 Patent Application Publication Oct. 3, 2013 Sheet 20 of 111 US 2013/ A1 FIG 27B 748b" (GS) b." o ' (GS) 845 s: 24 9a 1 TR 18a 18b

22 Patent Application Publication Oct. 3, 2013 Sheet 21 of 111 US 2013/ A1 FIG. 29A 839a 835 TR 18a 18b M

23 Patent Application Publication Oct. 3, 2013 Sheet 22 of 111 US 2013/ A1 FIG. 31A 939a a (GS) a o: y 9b 9a TR 18a 18b. -- )

24 Patent Application Publication Oct. 3, 2013 Sheet 23 of 111 US 2013/ A1 FIG 31B CH3CH2 CHl

25 Patent Application Publication Oct. 3, 2013 Sheet 24 of 111 US 2013/ A1 FIG. 33A WACUUM LEWEL LOWER GATE s P-TYPE ELECTRODE GATE LOWER CHANNEL DIELECTRIC REGION FIG. 33B WACUUM LEVEL MIDDLE GATE ( P-TYPE ELECTRODE A UPPERCHANNEL DIELECTRIC REGION

26 Patent Application Publication Oct. 3, 2013 Sheet 25 of 111 US 2013/ A1 FIG. 33C WACUUM LEVEL UPPER GATE s N-TYPE SOURCE/ ELECTRODE GATE DRAIN REGION DIELECTRIC FIG. 34A CD WACUUM LEWEL LOWER GATE N-TYPE ELECTRODE GATE LOWER CHANNEL DIELECTRIC REGION

27 Patent Application Publication Oct. 3, 2013 Sheet 26 of 111 US 2013/ A1 FIG. 34B WACUUM LEWEL MIDDLE GATE N-TYPE ELECTRODE GATE UPPER CHANNEL DIELECTRIC REGION FIG. 34C WACUUM LEWEL UPPER GATE ( P-TYPE SOURCE/ ELECTRODE A DRAIN REGION DIELECTRIC

28 Patent Application Publication Oct. 3, 2013 Sheet 27 of 111 US 2013/ A1 FIG 35A 1048a (GS) ' 1039a O39a O28 24 FIG. 35B 1048b (GS) b

29 Patent Application Publication Oct. 3, 2013 Sheet 28 of 111 US 2013/ A1 FIG (GS) TR 18a 185 N-- ) 18 9 FIG 37A 1148a (GS) a a not b (E.

30 Patent Application Publication Oct. 3, 2013 Sheet 29 of 111 US 2013/ A1 FIG. 37B 1148b (GS) b b. 1127a

31 Patent Application Publication Oct. 3, 2013 Sheet 30 of 111 US 2013/ A1 FIG l. w / IV GS-A / \ ( /./7) 1209b G VI VI SA GS-A / \ v/ / V 1209 / Fr. 1209a GS'- A W1 he \ U 1209b GS-A /)

32 Patent Application Publication Oct. 3, 2013 Sheet 31 of 111 US 2013/ A1 FIG. 39 e

33 Patent Application Publication Oct. 3, 2013 Sheet 32 of 111 US 2013/ A1 FIG. 40A 1248 (GS) R WW 12) R1 N A \l 5 7 \ s- ass- a bes-- -e- D E F FIG 4OB 12O7

34 Patent Application Publication Oct. 3, 2013 Sheet 33 of 111 US 2013/ A1 FIG (GS) N s , ' D 1336 t---- E 1A48(GS) A 1436 LJ) 1209a 1209) TR s

35 Patent Application Publication Oct. 3, 2013 Sheet 34 of 111 US 2013/ A1 1548(GS') a I 7 D E 1648(GS')

36 Patent Application Publication Oct. 3, 2013 Sheet 35 of 111 US 2013/ A1 FIG FIG. 46A (GS) a 1740b 1740c 1740d

37 Patent Application Publication Oct. 3, 2013 Sheet 36 of 111 US 2013/ A1 1748" (GS) FIG 46B 1739" a 174Ob 1740c' : D F 1748 (GS) s 1728a N c 1736a 1209a

38 Patent Application Publication Oct. 3, 2013 Sheet 37 of 111 US 2013/ A1 1748a (GS) FIG. 48A a 1224 N s a a 1209a 1748a" (GS) a" a a

39 Patent Application Publication Oct. 3, 2013 Sheet 38 of 111 US 2013/ A1 1748b (GS) to 1734b b (GS) b 1739b b tra 1734a }7

40 Patent Application Publication Oct. 3, 2013 Sheet 39 of 111 US 2013/ A1 FIG 5OB 1748b" (GS) b. 1739b s. 1734a D rs-o-o-o-e- E (GS) \ 1845N N It 1825 / 1209a

41 Patent Application Publication Oct. 3, 2013 Sheet 40 of 111 US 2013/ A1 FIG. 52A 1848a (GS) a : D E 1848b (GS) b a :

42 Patent Application Publication Oct. 3, 2013 Sheet 41 of 111 US 2013/ A1 FIG (GS) \ b 1209 s D 1948a(GS") a 1224 FIG. 54A

43 Patent Application Publication Oct. 3, 2013 Sheet 42 of 111 US 2013/ A1 1948b (GS) FIG. 54B b (GS) N -1 s-or-es

44 Patent Application Publication Oct. 3, 2013 Sheet 43 of 111 US 2013/ A1 2048a (GS) FIG. 56A a b (GS) b

45 Patent Application Publication Oct. 3, 2013 Sheet 44 of 111 US 2013/ A1 FIG (GS') FIG. 58A 2148a (GS) a : a 1. 2 O 9

46 Patent Application Publication Oct. 3, 2013 Sheet 45 of 111 US 2013/ A1 FIG. 58B 2148b (GS) N b 2135N 23: b } (GS) / 1209a TR 1209 : s D E F

47 Patent Application Publication Oct. 3, 2013 Sheet 46 of 111 US 2013/ A1 FIG 60A 2248a (GS) ' 2139a a 2248b (GS) b. 2239b e-

48 Patent Application Publication Oct. 3, 2013 Sheet 47 of 111 US 2013/ A1 FIG (GS) b. ( a (GS) a 2345" 2339a

49 Patent Application Publication Oct. 3, 2013 Sheet 48 of 111 US 2013/ A1 FIG 62B 2248b (GS) b (

50 Patent Application Publication Oct. 3, 2013 Sheet 49 of 111 US 2013/ A1 FIG. 64 se 3037 (PG) O3O 3O15a O20 75 AIZ-47 S. A 75 o: HH-3039a

51 Patent Application Publication Oct. 3, 2013 Sheet 50 of 111 US 2013/ A1 FIG (PG) a es sols? 39(38. 36{ T 24 y 9 C Tal es

52 Patent Application Publication Oct. 3, 2013 Sheet 51 of 111 US 2013/ A1 FIG (PG) O3O 3O15b

53 Patent Application Publication Oct. 3, 2013 Sheet 52 of 111 US 2013/ A1 FIG (PG) O a

54 Patent Application Publication Oct. 3, 2013 Sheet 53 of 111 US 2013/ A1 FIG (PG)

55 Patent Application Publication Oct. 3, 2013 Sheet 54 of 111 US 2013/ A1 FIG a

56 Patent Application Publication Oct. 3, 2013 Sheet 55 of 111 US 2013/ A1 FIG b -

57 Patent Application Publication Oct. 3, 2013 Sheet 56 of 111 US 2013/ A1 FIG

58 Patent Application Publication Oct. 3, 2013 Sheet 57 of 111 US 2013/ A1 FIG. 72

59 Patent Application Publication Oct. 3, 2013 Sheet 58 of 111 US 2013/ A1 FIG 73A FORM FIELD REGION IN SUBSTRATE TO DEFINE ACTIVE REGION -S7 FORM (GATE TRENCH IN SUBSTRATE -S18 FORM GATE DIELECTRIC -S24 FORM GATE ELECTRODE -S36 FORM METAL-CONTAINING MATERIAL LAYER -S39 FORM GATE CAPPING PATTERN -$45 FIG 73B S51 FIRST REGION OF ACTIVE REGION S52 S54 S63

60 Patent Application Publication Oct. 3, 2013 Sheet 59 of 111 US 2013/ A1 FIG 73C FORM UPPER INTERLAYER INSULATING LAYER S75 FORM SECOND CONTACT HOLE TO EXPOSE SECOND REGION OF ACTIVE REGION S78 FORM CONTACT STRUCTURE WITHIN SECOND CONTACT HOLE S90 FORM FIRST ELECTRODE S93 FORM STORAGE DIELECTRIC S95 FORM SECOND ELECTRODE S97 FIG 74A A B C

61 Patent Application Publication Oct. 3, 2013 Sheet 60 of 111 US 2013/ A1 FIG 74B

62 Patent Application Publication Oct. 3, 2013 Sheet 61 of 111 US 2013/ A1 FIG. 74D

63 Patent Application Publication Oct. 3, 2013 Sheet 62 of 111 US 2013/ A1 FIG 7AF s : A st -s. B. FIG 7AG

64 Patent Application Publication Oct. 3, 2013 Sheet 63 of 111 US 2013/ A1 FIG 7AH

65 Patent Application Publication Oct. 3, 2013 Sheet 64 of 111 US 2013/ A1 FIG. 74J A. B FIG 74K

66 Patent Application Publication Oct. 3, 2013 Sheet 65 of 111 US 2013/ A1 FIG. 74L

67 Patent Application Publication Oct. 3, 2013 Sheet 66 of 111 US 2013/ A1 FIG. 74M

68 Patent Application Publication Oct. 3, 2013 Sheet 67 of 111 US 2013/ A1 FIG 74N

69 Patent Application Publication Oct. 3, 2013 Sheet 68 of 111 US 2013/ A1 FIG 740 H

70 Patent Application Publication Oct. 3, 2013 Sheet 69 of 111 US 2013/ A1 FIG. 75 FORM GATE ELECTRODE S36 FORM METAL SOURCE LAYER S137 PERFORMANNEALING PROCESS TO DIFFUSE METAL FROM METAL SOURCE LAYER INTO GATE DIELECTRIC 1. S139 FORM CONDUCTIVE LINE S140 FORM GATE CAPPING PATTERN S45 FIG 76A { 30 24

71 Patent Application Publication Oct. 3, 2013 Sheet 70 of 111 US 2013/ A1 FIG 76B (GS) , 24

72 Patent Application Publication Oct. 3, 2013 Sheet 71 of 111 US 2013/ A1 FIG 77 PARTIALLY ETCH METAL-CONTAINING MATERIAL LAYER S439 FORM GATE CAPPING PATTERN S45 FIG 78A

73 Patent Application Publication Oct. 3, 2013 Sheet 72 of 111 US 2013/ A1 FIG 78B A

74 Patent Application Publication Oct. 3, 2013 Sheet 73 of 111 US 2013/ A1 448 (GS) FIG. 78D FORM GATE TRENCH IN SUBSTRATE S18 FORM GATE DIELECTRIC S24 FORM FIRST GATE CONDUCTIVE LAYER S527 PARTIALLY ETCH FIRST GATE CONDUCTIVE LAYER TO FORM FIRST CONDUCTIVE PATTERN S528 FORM SECOND GATE CONDUCTIVE LAYER HAWING DIFFERENT WORK FUNCTION FROM FIRST CONDUCTIVE PATTERN S533 PARTIALLY ETCH SECOND GATE CONDUCTIVE LAYER TO FORM SECOND GATE CONDUCTIVE PATTERN S534 FORM (GATE CAPPING PATTERN -S45

75 Patent Application Publication Oct. 3, 2013 Sheet 74 of 111 US 2013/ A1 FIG. 8OA

76 Patent Application Publication Oct. 3, 2013 Sheet 75 of 111 US 2013/ A1 FIG. 80C sa-e-his-or-le 5 } 7 1.

77 Patent Application Publication Oct. 3, 2013 Sheet 76 of 111 US 2013/ A1 FIG. 8OE

78 Patent Application Publication Oct. 3, 2013 Sheet 77 of 111 US 2013/ A1 FIG. 81 FORM GATE TRENCH IN SUBSTRATE S18 FORM GATE DIELECTRIC S24 FORM LOWER BARRIER CONDUCTIVE LAYER S625 FORM FIRST CONDUCTIVE LAYER S626 PARTIALLY ETCH FIRST CONDUCTIVE LAYER TO FORM FIRST CONDUCTIVE PATTERN S627 FORM BUFFER CONDUCTIVE LAYER S628 PARTIALLY ETCH BUFFER AND LOWER BARRIER CONDUCTIVE LAYERS TO FORM BUFFER CONDUCTIVE PATTERN AND LOWER BARRIER CONDUCTIVE PATTERN S629 FORM SECOND CONDUCTIVE LAYER HAWING DIFFERENT WORK FUNCTION FROM FIRST CONDUCTIVE PATTERN S633 PARTIALLY ETCH SECOND CONDUCTIVE LAYER TO FORM SECOND CONDUCTIVE PATTERN S634 FORM GATE CAPPING PATTERN S45

79 Patent Application Publication Oct. 3, 2013 Sheet 78 of 111 US 2013/ A1 FIG. 82A 528a a 524

80 Patent Application Publication Oct. 3, 2013 Sheet 79 of 111 US 2013/ A1 FIG 82C a. 24

81 Patent Application Publication Oct. 3, 2013 Sheet 80 of 111 US 2013/ A a (GS) a- 528a a }7 : ) : ) 7 A B C 1

82 Patent Application Publication Oct. 3, 2013 Sheet 81 of 111 US 2013/ A1 FIG. 83B 548a (GS) a a 528a

83 Patent Application Publication Oct. 3, 2013 Sheet 82 of 111 US 2013/ A1 FIG 84A a- 528a FIG 84B 548b (GS) b s 528a

84 Patent Application Publication Oct. 3, 2013 Sheet 83 of 111 US 2013/ A1 FIG 85 FORM GATE TRENCH IN SUBSTRATE S18 FORM GATE DIELECTRIC S24 FORM FIRST CONDUCTIVE PATTERN S728 FORM GATE CONDUCTIVE LAYER HAVING DIFFERENT WORK FUNCTION FROM FIRST CONDUCTIVE PATTERN 1. S73 FORM SUBSIDIARY CONDUCTIVE LAYER S732 ETCH GATE CONDUCTIVE LAYER AND SUBSIDIARY CONDUCTIVE LAYER TO FORM SECOND CONDUCTIVE PATTERN AND SUBSIDIARY CONDUCTIVE PATTERN S733 FORM GATE CAPPING PATTERN S45

85 Patent Application Publication Oct. 3, 2013 Sheet 84 of 111 US 2013/ A1 FIG. 86A so 535 2A 528. as.. se 9

86 Patent Application Publication Oct. 3, 2013 Sheet 85 of 111 US 2013/ A1 FIG. 86C b (GS) o E --- so A 9b 5 TR 18a 18b / 3 2 i! i A B C FIG b (GS) b sists b' b.

87 Patent Application Publication Oct. 3, 2013 Sheet 86 of 111 US 2013/ A1 FIG b b." s: 24 FIG. 89A

88 Patent Application Publication Oct. 3, 2013 Sheet 87 of 111 US 2013/ A1 FIG. 89B 628 9a TR 18a 18b. S-- ) is ls-s-sh-os B FIG. 89C 628 TR 18a 18b sha--as-a- 5 7 / 3 I

89 Patent Application Publication Oct. 3, 2013 Sheet 88 of 111 US 2013/ A1 FIG. 89D Gas 634a B e--a C e 648a (GS) a sia A TR 18a 18b \

90 Patent Application Publication Oct. 3, 2013 Sheet 89 of 111 US 2013/ A1 FIG. 90A

91 Patent Application Publication Oct. 3, 2013 Sheet 90 of 111 US 2013/ A1 FIG 91 FORM GATE TRENCH IN SUBSTRATE S18 FORM GATE DIELECTRIC S24 FORM FIRST CONDUCTIVE PATTERN S828 FORM GATE CONDUCTIVE LAYER HAWING DIFFERENT WORK FUNCTION FROM FIRST CONDUCTIVE PATTERN S830 ETCH GATE CONDUCTIVE LAYER TO FORM PRELIMINARY GATE CONDUCTIVE PATTERN S831 FORM SUBSIDIARY CONDUCTIVE LAYER S832 ETCH PRELIMINARY GATE CONDUCTIVE LAYER AND SUBSIDIARY CONDUCTIWE LAYER TO FORM SECOND CONDUCTIVE PATTERN AND SUBSIDIARY CONDUCTIVE PATTERN S833 FORM GATE CAPPING PATTERN S45

92 Patent Application Publication Oct. 3, 2013 Sheet 91 of 111 US 2013/ A1 FIG. 92A TR 18a 1.8b

93 Patent Application Publication Oct. 3, 2013 Sheet 92 of 111 US 2013/ A1 FIG 92C

94 Patent Application Publication Oct. 3, 2013 Sheet 93 of 111 US 2013/ A1 848b (GS) b s TR 18a 18b

95 Patent Application Publication Oct. 3, 2013 Sheet 94 of 111 US 2013/ A1 FIG 95 ETCH LOWER BARRIER CONDUCTIVE LAYER AND LOWER GATE CONDUCTIVE LAYER TO FORM LOWER BARRIER CONDUCTIVE PATTERN AND FIRST CONDUCTIVE PATTERN S928 FORM UPPER GATE CONDUCTIVE LAYER HAWING DIFFERENT WORK FUNCTION FROM FIRST CONDUCTIVE PATTERN S930 ETCH UPPER GATE CONDUCTIVE LAYER TO FORM PRELIMINARY UPPER GATE CONDUCTIVE PATTERN S931 FORM SUBSIDIARY CONDUCTIVE LAYER S932 ETCH PRELIMINARY UPPER GATE CONDUCTIVE LAYER AND SUBSIDIARY CONDUCTIVE LAYER TO FORM SECOND CONDUCTIVE PATTERN AND SUBSIDIARY CONDUCTIVE PATTERN S933 FORM GATE CAPPING PATTERN S45

96 Patent Application Publication Oct. 3, 2013 Sheet 95 of 111 US 2013/ A1 FIG. 96A }

97 Patent Application Publication Oct. 3, 2013 Sheet 96 of 111 US 2013/ A1 FIG 96C FIG 96.D TR 18a 18b / Ha-m-m-ie- -si-e- 5

98 Patent Application Publication Oct. 3, 2013 Sheet 97 of 111 US 2013/ A1 FIG 96E TR 18a 18b S-- 18 TR 18a 18b V-- 18

99 Patent Application Publication Oct. 3, 2013 Sheet 98 of 111 US 2013/ A1 FIG a b (GS)

100 Patent Application Publication Oct. 3, 2013 Sheet 99 of 111 US 2013/ A1 FIG 99 FORM GATE TRENCH IN SUBSTRATE S18 FORM GATE DIELECTRIC S24 FORM LOWER GATE CONDUCTIVE PATTERN S1028 FORM FIRST CONDUCTIVE PATTERN HAWING DIFFERENT WORK FUNCTION FROM LOWER GATE CONDUCTIVE PATTERN S1031 FORM SECOND CONDUCTIVE PATTERN HAWING DIFFERENT WORK FUNCTION FROM FIRST CONDUCTIVE PATTERN S1034 FORM GATE CAPPING PATTERN S45

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