Technology nodes in China

Transcription

1 Strategies for Emerging Markets Shannon Hart Senior Director, Aftermarket Products March 16, 2011

2 Requirements of each technology node Building a Fab is expensive, complex and requires experience. Operating the technology within the Fab requires even more experience. Technology Value Cost Technology nodes in China Wafer Capacit ty (normalized) 300mm 200mm <150mm 45nm 65nm 90nm 130nm 180nm 0.25µm 0.35µm 0.5µm 0.75µm 1µm 2µm Most China Manufacturers are Focused on Value and Cost P. 2

3 Extending 200mm equipment across technology nodes CMP 372/ /776 Metal (tungsten) Oxide M2i, M2000, Inline PVD Metal Sputtering Same 200mm platforms also widely used beyond traditional chip manufacturing MEMS LED SOI wafer manufacturing Labs in R&D Institutions and Universities Concept one, C2 SEQUEL C2 SEQUEL EXPRESS Barrier Stressed Nitrides ARL, AHM Passivation TEOS CMP- 372/472/676/776 Cu W P. 3

4 Challenges for Reused Tool Users Unpredictability of costs Obsolescence Technical support availability Capability/quality of used tools Options for extendibility Supply of quality spares IP concerns >75% of all worldwide Fabs were built before 2001 and these are the primary source for China fabs today >85% of all 200mm tools in China were manufactured prior to 2005 Understanding the hidden cost associated with reused tools is the key to successfully adopt and implement reused tools in production line P. 4

5 Novellus is Helping to Manage Risks Partnering with 3 rd party companies Current Relationship Fab New Relationship Fab Licensed 3 rd Parties & Refurbishment Partners OEMs 3 rd Parties Novellus Separation of OEM & 3 rd parties wastes time, energy & money for the Fab Lower cost of engineering Products tailored to Fab needs OEM safety and quality standards Customer maintains relationship with 3 rd party P. 5

6 Novellus is Helping to Manage Risk Taking the risk out of buying used tools with multiple options Classic TM Broker / Unlicensed Refurb Core NEW USED New Process Kit YES NO Safety Upgrades YES NO OEM Parts YES NO Factory Test YES NO OEM Warranty & Support YES NO S/W License & IP Control YES NO Options YES NO Capital Cost MODERATE LOW Start Up OpEx (Hiddent Cost) 0 HIGH Total Cost MODERATE MODERATE In 2006 Novellus launched the Classic TM as a lower cost alternative to new tools. Cost is not competitive with 3 rd parties but offers the lowest risk and highest performance. P. 6

7 Novellus is Helping to Manage Risk Taking the risk out of buying used tools with multiple options Classic TM Novellus Factory Refurb Broker / Unlicensed Refurb Core NEW USED USED New Process Kit YES YES NO Safety Upgrades YES YES NO OEM Parts YES YES NO Factory Test YES YES NO OEM Warranty & Support YES YES NO S/W License & IP Control YES YES NO Options YES YES NO Capital Cost MODERATE LOW LOW Start Up OpEx (Hiddent Cost) 0 LOW HIGH Total Cost MODERATE LOW MODERATE P. 7 In 2008, Novellus launched Factory Refurbishment of used cores. Cost was competitive with 3 rd parties and offered great value and low risk

8 Novellus is Helping to Manage Risk Taking the risk out of buying used tools with multiple options Classic TM Novellus Factory Refurb Novellus In-region Refurbishment Broker / Unlicensed Refurb Core NEW USED USED USED New Process Kit YES YES YES NO Safety Upgrades YES YES YES NO OEM Parts YES YES YES NO Factory Test YES YES Licensed Partner NO OEM Warranty & Support YES YES Licensed Partner NO S/W License & IP Control YES YES YES NO Options YES YES Limited NO Capital Cost MODERATE LOW LOW LOW Start Up OpEx (Hiddent Cost) 0 LOW LOW HIGH Total Cost MODERATE LOW LOWEST MODERATE In 2010, Novellus launched In-Region Refurbishment of used cores. Cost & lead time competitive with 3 rd parties, with trusted Novellus value & performance. P. 8

9 Novellus Extends 200mm Technology Roadmap <130nm 110nm 90nm 65nm C2 Sequel Standard Express Remote Plasma Clean Defectivity Package C2 Speed Nanofill I Nanofill II NExT Max & MaxLite C2 Altus Standard Remote Plasma Clean Pulsed Nucleation Layer Low Resistivity Tungsten 90 new Performance Enhancements released over the last 4 years P. 9

10 Technology Enabling Enhancements Leading Edge Environmental Advantage C2 Sequel Express RPC Increased Throughput 30-90% Extended Part Lifetime Reduced AIFx &Defects Increases Yield Reduces PFC Emissions C2 Altus PNL with RPC Increased Throughput Extended Part Lifetime Reduced AIFx $ Defects Reduced PM Time Reduced PFC Emissions C2 Speed NEXT with RPC Advanced Gapfill Reduced Defects Increased Throughput Reduced Clean Time Reduced Gas Consumption P. 10 Novellus Systems Proprietary Information

11 Novellus has Lowered Costs Innovative programs to reduce costs, increase return on investments Quantity Number of Refurbished Parts Available Increased number of refurbished parts Like-new performance 6-month warranty 50% discount from new New additions upon request P. 11 Recycle Spare Service (RS 2 ) Allows the customer to recycle their previously purchased Novellus spare parts Extends spares life Increases spare performance Increase return on investments Example of Part on Recycle Spare Service Example of Part on Recycle Spare Service RE generator Matches Power supplies Domes Chucks Robots

12 LED Manufacturing Processes Novellus offers more processes for LED fabrication than any other supplier P. 12 Novellus Systems Proprietary Information

13 Novellus is changing to meet the customer Help manage the risks of using older equipment Low-Risk, Low-Cost Refurbished Tools Able to leverage specialists in 3 rd parties Expanded obsolescence engineering Be more focused on reducing your costs Substantial increase in number of Refurbished Parts Introduced Recycle Spare Service All upgrades have payback <1 year Support extendibility of older products Added dedicated engineering resources Increased information available online >90 Performance Enhancements Adapting our proven products to emerging markets Novellus is Offering More Flexibility, More Products P. 13