SiGe Technologies for Performance-Driven Applications

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1 SiGe Technologies for Performance-Driven Applications Delivering differentiated performance, integration advantages and value in chips for demanding RF applications Oceans of data are crossing today s communications networks. With increasing numbers and varieties of mobile devices connecting to these networks, mobile data traffic alone is forecasted to grow at a compound annual growth rate of nearly 60 percent through Industry dynamics, including the move to the cloud and the rise of the Internet of Things, will continue to drive unprecedented levels of network traffic and exploding volumes of data. Yet despite this growth, reliable high-speed connectivity is still expected from anywhere and anytime. Bottlenecks are not an option. Communications networks are evolving to handle these pressures. Semiconductor suppliers developing RF chips aimed for these networks are being pushed to deliver technology solutions designed to tackle the speed, performance and bandwidth challenges that next-generation hardware must handle. Solutions that can keep pace with new and changing standards. And for a competitive edge, that offer differentiation beyond performance alone. August 2015

2 SiGe expertise Our high-performance silicon germanium (SiGe) BiCMOS portfolio is optimized to deliver high performance in chips aimed at a range of solutions, including: Third, fourth and fifth generation wireless infrastructure High-speed optical transport Millimeter wave sensor and radar systems Next-generation wireless LAN applications Instrumentation and test equipment Aerospace and defense applications 25 years of SiGe expertise More than two decades of experience in developing and delivering SiGe technologies. GLOBALFOUNDRIES SiGe BiCMOS technologies are designed to provide chip designers with a differentiating balance of performance, integration and value. Built on a silicon base, SiGe advantages include: By using a less aggressive lithography than some other technologies alternatives, SiGe BiCMOS can provide a significant cost edge. SiGe BiCMOS also offers device and feature advantages that give chip designers more RF design capability and flexibility. The technology features thick dielectric options, thick metal options and other RF passive elements including through silicon-vias. With superior RF/analog performance, the heterojunction bipolar transistors (HBTs) available in SiGe BiCMOS can also help reduce design time and development costs. SiGe BiCMOS exploits a mature silicon technology base designed to deliver high integration capability, high yields and excellent RF performance. Chip designers can leverage SiGe BiCMOS to integrate extensive digital functionality and take advantage of a full menu of RF passive devices, including high Q inductors and transmission lines, to optimize their designs. Key specifications Feature node (nm) Isolation STI/TI STI/TI STI/TI STI/DT STI/DT STI/DT Minimum L drawn CMOS supply (V) 2.5, , 2.5, 3.3, , 1.5, 2.5, , , , 1.5, 1.8, 2.5, 3.3 BEOL metal type Cu/Al Cu/Al Cu/Al Cu/Al Cu/Al Cu/Al

3 Comprehensive enablement GLOBALFOUNDRIES broad foundry portfolio includes comprehensive design enablement that features world-class physical design kits, hyper-accurate model-to-hardware correlation and RF-specific tool support. You can exploit a flexible and sophisticated design environment that includes technology-specific design libraries and support for leading industry-standard platforms. We also offer expert application engineering support; packaging and test support and services; and end-to-end program management. Semiconductor wafers being processed in Fab 9 Supported design tools Tool Models: PSP BSIM VBIC HiCUM Design platforms: Keysight ADS Cadence Assura DRC Cadence Assura LVS Cadence Assura QRC Cadence Composer Cadence Virtuoso & Virtuoso XL Mentor Graphics Calibre DRC Mentor Graphics Calibre LVS Mentor Graphics Calibre XRC Mentor Graphics Eldo-RF Synopsys Hercules StarRCXT EM simulation: Keysight Momentum EMX SiGe Technologies for Performance-Driven Applications

4 Design flexibility GLOBALFOUNDRIES performance-optimized technologies feature a broad range of FETs, passive devices and advanced SiGe HBTs to help maximize design flexibility. Chip designers can leverage the differentiated devices and ongoing technology enhancements found in our high-performance SiGe technologies to tailor their designs to handle growing demands and complexity. SiGe semiconductor wafer Device menus at a glance Feature HBTs: HP NPN f T /f Max (GHz) 60/120 60/ / / / /360 HB NPN f T /f Max (GHz) 29/90 29/90 54/170 60/225 67/ /345 HP NPN BV CEO (V) HB NPN BV CEO (V) FETs: Reg Vt Zero Vt High Vt Triple well Other bipolars VPNP LPNP, VPNP VPNP VPNP High voltage devices ( 5 V) Resistors: n+/p+ diffusion n+/p+ poly High res poly Precision poly Metal Capacitors: MIM High-k MIM VN cap

5 The advantage is yours GLOBALFOUNDRIES is an industry leader in the design and production of mixed-signal technologies. We have the know-how, manufacturing scale and established, collaborative relationships with industry frontrunners to successfully deliver silicon optimized for the latest highperformance applications. This leadership enables us to offer you the flexibility and personalized attention of a foundry and the insights and strengths of an IDM. The advantage to you is that you get access to a full complement of services within one company. Access extensive in-house capabilities from design to manufacturing to test to failure analysis to packaging by choosing the engagement model that best suits your needs. With end-to-end enablement, deep manufacturing know-how and broad, practical expertise, GLOBALFOUNDRIES is ready to help you move from concept to production quickly with a differentiated solution that can help you gain a competitive edge. Device menus at a glance (continued) Feature Inductors: Single spiral Series/parallel spirals Symmetrical Varactors/diodes: MOS HA BC junction Schottky barrier diode PIN Thick metals Transmission lines: RF wire Coupled wires Coplanar waveguides SiGe Technologies for Performance-Driven Applications

6 For more information To learn more about GLOBALFOUNDRIES SiGe technologies, contact your sales representative or visit: globalfoundries.com 1. Cisco Visual Networking Index: Global Mobile Data Traffic Forecast Update White Paper, Feb This document, including any details regarding GLOBALFOUNDRIES products and services, is current only as of the date of publication and subject to change by GLOBALFOUNDRIES at any time. All information in this document is provided AS IS and without any warranty, express or implied, of any kind Great America Way, Santa Clara, CA USA Tel: GLOBALFOUNDRIES, the GLOBALFOUNDRIES logo and combinations thereof are trademarks of GLOBALFOUNDRIES Inc. in the United States and/or other jurisdictions. Other names used in this document are for identification purposes only and may be trademarks of their respective owners GLOBALFOUNDRIES Inc. All rights reserved. BI