Dave Jarzynka. Brooks Semiconductor Solutions Group

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1 Dave Jarzynka Brooks Semiconductor Solutions Group 1

2 Agenda The business today Growth drivers Brooks Automation, Inc. Proprietary Information

3 Semiconductor Group at a Glance FY15 Revenue Breakdown $553M Key Metrics FY15 Revenue $485M Semiconductor 88% Life Sciences 12% Gross Margin* 36% R&D spend $38M Operating Income* $54M Operating Margin* 11% Employees 1, Brooks Automation, Inc. Proprietary Information * Non-GAAP financial measures see reconciliation tables

4 Brooks Semiconductor Solutions Group (BSSG) Brooks provides mission critical automated transport and controlled environments that enable advanced semiconductor processes We Enable a Process Advantage Brooks Automation, Inc. Proprietary Information

5 Proven Success and Market Leadership #1 Vacuum Automation Trusted Global Service Platform #1 Contamination Control Cryogenic Pumping and Cooling #1 #1 Advanced Packaging Wafer Transport Enabling a Process Advantage Brooks Automation, Inc. Proprietary Information

6 Trusted Partners with Industry Leading Customers Fabrication Equipment Manufacturers Semiconductor Device Makers Solving Highly Valued Problems to Enable a Process Advantage Brooks Automation, Inc. Proprietary Information

7 Semiconductor Group Performance Highlights $M Revenue Operating Income* Operating Margin* $379 $420 $485 $28 $54 7% 11% $16 4% FY13 FY14 FY15 FY13 FY14 FY15 FY13 FY14 FY15 Revenue growth and improved profitability Brooks Automation, Inc. Proprietary Information * Non-GAAP financial measures see reconciliation tables.

8 R E C E N T D E V E L O P M E N T S : Focus to Accelerate Value and Profitable Growth Integrated to Serve Customers Streamlined Results Automation Cryogenics Global Service Operations Created Brooks Semiconductor Solutions Group (BSSG) > $12M in cost synergies Customer solution focus Optimize footprint Leverage large installed base Accelerate innovation Brooks Automation, Inc. Proprietary Information

9 Agenda The business today Growth drivers Brooks Automation, Inc. Proprietary Information

10 Targeted Higher Growth Segments $M Segments in Semi Product Revenue $319 * +11% +21% +22% $390 Contamination Control Deposition / Etch Wafer-Level Packaging 57% of product revenue grew at a CAGR of 22% Other Semi Cryo Vacuum ATM Robots Other FY13 FY15 Brooks Semi product revenue growth exceeds market by 2-4 points Brooks Automation, Inc. Proprietary Information * Note: Granville-Phillips business sold in 2014.

11 Solving Technical Challenges Within Growth Segments Market Growth Driver Brooks Growth Position SMART / Handheld FinFET Vacuum Automation for Etch / Deposition Contamination Control for FOUPs Enterprise Server 3D NAND Vacuum Automation for Etch / Deposition Contamination Control for FOUPs Advanced Packaging Thru Silicon Via Advanced Wafer Transport in Atmosphere and Vacuum Vacuum Automation for Etch / Deposition Brooks Automation, Inc. Proprietary Information

12 1. Vacuum Automation, Increasing Share in a High Growth Market Etch and Deposition Growth Large Captives Moving to OEM 7% CAGR 7 nm node 1x nm node 3x nm node 2x nm node Reliable Automation Clean Automation High Speed Automation Precise Matching SMART Compensation Increased Value by Solving Our Customers Technical Challenges Brooks Automation, Inc. Proprietary Information

13 2. Contamination Control, Increasing Share in a High Growth Market 2X More Clean Steps With Each Node Moving from Logic to Memory 24% CAGR 7 nm node 1x nm node 2x nm node 3x nm node Carrier Wash Carrier Particle Clean Organic Compound Clean Inspection and Monitoring SMART Conditioning Increased Value by Solving Our Customers Technical Challenges Brooks Automation, Inc. Proprietary Information

14 3. Advanced Packaging Wafer Transport, Increasing Share in a High Growth Market 300mm WLP Growth 25 Customers 6 Applications 13% CAGR 300mm wafer level 200mm wafer level Wafers 200mm bump Warped Wafers Bonded Wafers Framed Wafers SMART Wafer Detect Increased Value by Solving Our Customers Technical Challenges Brooks Automation, Inc. Proprietary Information

15 BSSG 2019 Revenue Exceeds Market Growth by 2-4 pts and Operating Margin Reaches 15%+ $M Revenue ($M) Operating Margin* (%) +2-4 pts 5 pts $485 Exceeds market growth by 2-4 pts 11% 15-17% FY15 FY19 FY15 FY Brooks Automation, Inc. Proprietary Information * Non-GAAP financial measures see reconciliation tables for historical results. Projections exclude intangibles amortization, restructuring expense, and other special charges.

16 I N S U M M A R Y Proven Leadership with Valued Growth Proven success and market leadership Gaining share in high growth segments Increasing value for leading customers Accelerating profitable growth Brooks Automation, Inc. Proprietary Information

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