For Work Safety at the Vicinity of Overhead Transporta8on Vehicle Systems

Transcription

1 For Work Safety at the Vicinity of Overhead Transporta8on Vehicle Systems Shigehito Ibuka Tokyo Electron Limited May 19, Arizona, USA

2 Outlines Pictures of Overhead Transporta8on Vehicles Background Case Study of some Incidents SEMI Workshop Risk Engineering Control Administra8ve Control Summary

3 Pictures of Overhead Transporta8on Vehicles 3 OHS

4 Huge semiconductor fab High produc5vity demand Background Automation Unmanned transportation vehicle system (UTV), Especially, Overhead transportation vehicle system (OHV / ) High speed More than 100 vehicles in a fab Collision Near-miss How to prevent? Start- up or maintenance work on semiconductor manufacturing tools

5 When a person climbed the ladder to do wiring work on the system carrier stage, he turned to face the system and was struck on the shoulder by an OHV running from his right. Case Study: Ver8cal Furnace

6 Case Study: Wet Cleaning System At mounting a sub-frame on top of a system, an OHV suddenly moved and collided with the sub frame that was being mounted. The sub-frame was pushed and hit the worker opposite the collision in the head. The injured person got his head caught between the system behind him and the subframe. Fortunately, the injured person was wearing a helmet and did not fall off the ladder, so he avoided injury. (overhead hoist transport) collision 1 collision 2 Sub-frame was stopped about 10 m away from the system, but suddenly started moving. TEL System TEL system Other System Non-TEL system

7 Case Study: Coater and Developer A person had known that a ladder set in front of the system was a hindrance to the work and temporarily moved the ladder to the CSB side. Immediately after moving the ladder, he determined that his help was needed to support other work and he left the area without confirming appropriate position of the ladder. At that point, the OHV struck the ladder, causing the cover to break.

8 SEMI Safety Workshop Held in SEMICON Japan 2010

9 Cited from materials used in the Workshop

10 Position of Semiconductor Manufacturing Equipment and The numerical value is one example. 3000mm/sec 1500mm/sec 3500mm SEMI E72 Max FOUP 2800mm mm

11 Potential Hazard and Risk Estimation Risk Estimation Severity:1, Likelihood C ---> Risk Rank Ⅳ High

12 Potential Hazard and Risk Estimation Risk Estimation Severity:1, Likelihood C ---> Risk Rank Ⅳ High

13 Potential Hazard and Risk Estimation Risk Estimation Severity:1, Likelihood C ----> Risk Rank Ⅳ High

14 Potential Hazard and Risk Estimation Risk Estimation Severity:2, Likelihood C ----> Risk Rank Ⅲ Medium

15 Potential Hazard and Risk Estimation Risk Estimation Severity:3, Likelihood C ----> Risk Rank Ⅱ Low

16 Examples of Engineering Controls Partition or Defense equipment Position tracking by sensor I/F based on SEMI E84 Interlock between SME and Collision prevention means with Prevention interlock between worker and FOUP

17 An Example of Engineering Controls Obstacle sensor function Detection Area Obstacle Sensor Obstacle Sensor Detection Area (straight) detection2 detection1 stop Slowdown

18 Examples of Administrative Controls 1. Conduct Job Hazard Analysis (JHA) {Work Risk Assessment or Pretask Planning (PTP)} Refer to SEMI S21 2. Request the user of a fab to have the vehicle stop before entry in the area 3. Share hazard or risk information among personnel of multiple suppliers and contractors to work in the adjacent area simultaneously Hold "Safety Supervisors Communication Council" among the user, multiple suppliers and contractors --- Refer to SEMI S24 Conduct joint Safety patrol --- Refer to SEMI S24 4. Conduct safety training for all workers Refer to SEMI S19

19 An Example of Administrative Controls Board Setting Detection Board Elevated Work Stop by front sensor

20 Summary of the Workshop

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25 Comments / Suggestions after the Workshop Shared what are issues for tool & vehicle suppliers To plan how to share the issues with Asian IDMs and how to improve work environment in a fab More cases and experiences to be shared To consider how to utilize a protection board set on the OHV rail protect Importance of SEMI S17 understood Torque of OHV to be recognized among users & tool suppliers To consider engineering controls such as sensor or some ideas to utilized by public train systems To specify roles of users & suppliers and share them among concerned entities To consider hooking points on the OHV run-yard To hold similar concept workshops globally

26 Thank you for your aten8on!