Fine Pitch Circuit Pattern Inspection/Metrology Project

Transcription

1 Fine Pitch Circuit Pattern Inspection/Metrology Project Project Leaders: IBM: Feng Xue Intel: Kinya Ichikawa Call for Sign-up Webinar March 1, 2016 inemi Staff: M. Tsuriya

2 Agenda Introduction of Project Chairs and Facilitators inemi Project Development Process Project Briefing Background & Objectives Project Scope Project IS/IS Not Preliminary Measurement Plan Timeline How to Join Q&A Note: All phones will be on mute until the end of the presentation

3 Introduction of Project Chairs & Facilitators Project Leader: Feng Xue, IBM Project Leader: Kinya Ichikawa, Intel inemi Staff: M. Tsuriya 3

4 inemi Project Development Process - 5 Steps 0 1 INPUT SELECTION DEFINITION PLANNING EXECUTION / REVIEW CLOSURE Initiative Open for Industry input inemi Technical Committee (TC) Approval Required for Execution Project Limited to committed Members

5 inemi Project Management Policy Two governing documents for projects SOW (statement of work): sets out project scope, background, purpose, benefits, and outlines required resources, materials, processes, project schedule, etc. Project Statement (PS): signed by participating companies to secure commitment on resource and time contributions. inemi Project requires inemi membership Signed membership agreement Commitment to follow inemi By-laws and IP policy 5

6 Project Briefing

7 7 Key Challenges

8 8 Advanced Design Rule

9 9 Metrology Pattern AOI

10 Project Opportunity

11 Project Objective Assess the measurement and inspection capability for fine circuit pattern substrate for high bandwidth application Assure Fine Line and Space Integrity: Electrical, Dimensional and Reliability

12 The Purpose of Project The purpose of this project is to assess the measurement and inspection capability for fine circuit pattern substrate for high bandwidth application. This is defined the technical gaps in the inemi package roadmap as 2/2 & 1/1 Design rules Define product detail requirements and process/material equipment sets needed. This project is defined in a phased approach. The anticipated benefits are to provide the guideline of the inspection and metrology for the high bandwidth application substrate.

13 Project Proposal Phase One: to conduct the benchmarking on the metrology for the fine pitch design on the panel size areas. This includes the technology needs for the fine pitch design, inspection technique and capability for less than 5um line space traces and defect inspection, and known defect modes, yield detractors and reliability concerns. Scope of Work: The goal of phase 1 is to survey the inspection/ metrology capability status and future trend. Conduct the on-line surveys on the inspection equipment manufacturers, substrate manufacturers, users and other consortiums. Follow up by the discussion on key respondents further. Publish the survey results

14 Project Proposal Phase Two to conduct the experiment to study the metrology on line space and micro bump, and other features.. Use several evaluation vehicles with line space design features AOI inspection, New techniques, Access Reliability study and FA Scope of Work The goal of phase 2 is to conduct the inspection capability limitation study and correlate the inspection results with the reliability test results. This phase will take approximately 2 years to complete the reliability study and make the report.

15 Milestone

16 IS / IS NOT Analysis

17 Outcome of Project Survey results are shared among the project members, which include the metrology options, technical gaps and technical plans on the metrology and inspection systems. Assessment of reliability tests to compare the inspection results, and recommendations are provided for the metrology option in selection. A summary report is available to all inemi members in reports from this project.

18 How to Join

19 Sign-Up Due on March 31, 2016 inemi membership is required to join the project Download SOW and PS from inemi web: Sign the PS Signature of representative of participants Signature of manager approval Send scanned PS to inemi VP of Operations will sign and approve your participation and send you back the completed PS with acceptance Join inemi membership, or questions, contact M. Tsuriya 19

20 Questions? Project web page:

21 Masahiro Tsuriya