Investor Overview July 10, 2008

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1 Investor Overview July 10, 2008

2 Safe Harbor Statement This presentation contains certain information that may constitute forward-looking statements within the meaning of the Private Securities Litigation Reform Act of These forward-looking statements are based on current management expectations only as of the date of this presentation, which involve substantial risks and uncertainties that could cause actual results to differ materially from the results expressed in, or implied by, these forward-looking statements. Statements which are modified by words such as anticipate, believe, estimate, expect, forecast, may, will, should or the negative thereof and similar expressions as they relate to Entegris or our management are intended to identify such forward-looking statements. These statements are not guarantees of future performance and involve risks, uncertainties and assumptions which are difficult to predict. These risks include, but are not limited to, fluctuations in the market price of Entegris stock, future operating results of Entegris, other acquisition and investment opportunities available to Entegris, general business and market conditions and other factors. Additional information concerning these and other risk factors may be found in previous financial press releases issued by Entegris and Entegris periodic public filings with the Securities and Exchange Commission, including the discussion described under the headings Risks Relating to our Business and Industry, Manufacturing Risks, International Risks, and Risks Related to Securities Markets and Ownership of Our Securities in Item 1A of our Annual Report on Form 10 K for the fiscal year ended December 31, 2007, as well as other matters and important factors disclosed previously and from time to time in the filings of Entegris with the U.S. Securities and Exchange Commission. Except as required under the federal securities laws and the rules and regulations of the Securities and Exchange Commission, we undertake no obligation to update publicly any forward-looking statements contained herein. Page 2

3 Entegris: Creating A Material Advantage Key provider of technology solutions to highperformance industries Market leader in contamination control and microenvironments Technology-generation-driven model with high unitdriven/recurring revenue Broad customer base; Nearly 75% of sales are outside of US Strong balance sheet and cash flow Page 3

4 Entegris At A Glance Sales of $626.2 million in ,500 employees worldwide Headquartered in Chaska, MN Manufacturing facilities in U.S., Japan and Malaysia Sales and service centers in eight countries Publicly traded on NASDAQ under ENTG 1966 Founded as Fluoroware, Inc IPO Entegris Milestones 2005 Merged with Mykrolis, previously part of Millipore 2007 Acquired the Surmet Semiconductor Coatings Division Page 4

5 The Entegris Mission Our mission is to improve our customers' productivity, performance, and technology through innovative materials-science enabled solutions Page 5

6 Core Products and Technologies; Leveraging Materials Science Contamination Control Microenvironments Specialty Coatings Filtration/Purification Liquid systems Fluid handling components Containers PVA brushes Wafer carriers Wafer shippers Data storage shippers E-Chucks High-purity PECVD coatings Entegris has more than 40 years of experience in applying polymer science Page 6

7 Entegris Serves Key High-Performance Markets IDMs/Foundries OEMs Wafer growers Materials Cos. Integrators 2007 Sales by Customer Market Non- Semi Flat-panel Data storage Alt. energy OLED Cons. electronics Semi Page 7

8 Serving Semiconductor Customers, From Production to Consumption MEMC SEH Siltronic SUMCO Wafer Growers Chartered Inotera Intel Micron TI Samsung IDMs, Foundries, and Test and Assembly ST Micro TSMC UMC OEMs Applied Materials ASML DNS Tokyo Electron Microelectronics, Display, Storage Western Digital Seagate Corning Page 8

9 Surrounding Key Processes in the Fab Sales by Process - FY2007* FOUPS, Shippers Microenvironments 36% WEC/Plating 35% Liquid Filters CMP 6% Lithography 23% Purification Systems Fluid Handling * Reflects semiconductor sales of approximately $500 million in FY2007 Page 9

10 Wet Etch and Clean Solutions Products: Liquid filters Flow control Containers Manifolds Page 10

11 Total CMP Solutions Products: Filters Flow control PVA brushes Valves Fittings Containers Page 11

12 Photolithography Solutions Products: Pumps POU filters Gas filters Chemical filters HUGs Reticle Pods LiquidLens Clarilite Page 12

13 Entegris Full Suite of Wafer and Reticle Handling Solutions Wafer Process Carriers Wafer Shippers Reticle Pods & Shippers Page 13

14 Specialty Coatings Hard Carbon Coatings UltraC-Diamond UltraC-EC UltraC-HT High-purity PECVD Coatings Silicon Silicon Carbide Silicon Nitride Silicon Oxide Electrostatic Chucks Specialty PVD Coatings Yttria Alumina Aluminum Oxynitride Metals Cermets Solutions for wear, corrosion and lubricity problems and metal and particle contamination reduction Page 14

15 New Products at Semicon West 2008 Torrento TM 15nm The industry s first 15nm rated high flow liquid filter for advanced recirculated wet etch & clean applications SiLVERSET TM Chemical air filter using new blend of media to control organic contamination in scanners Impact 5nm Filter Offers finest filtration availlable on the market today for photochemical applications 450mm FOUP Prototype Wafer carrier (Front Opening Unified Pod) for 450mm wafer size Scanner Pre-Filter System Advanced system extends life of integrated scanner filters IntelliGen HVSystem Newest version of successful two-stage pump for point-of-use dispense of high viscosity coatings Page 15

16 Entegris Strategy FINANCIAL PERFORMANCE CUSTOMER Growth Growth through customer intimacy Growth through Innovation Growth through diversification Productivity Improve Entegris productivity through operational excellence Page 16

17 Executing Our Strategy Growth through customer intimacy Clarilite reticle haze prevention Reduction of photo resist waste Growth through innovation Torrento 20 nm filtration HVAC purification Growth through diversification Entegris Specialty Coatings Expansion into adjacent markets Higher productivity via operational excellence LeanSigma throughout organization CRM systems Contract manufacturing Page 17

18 Global Presence Strong local organizations leverage key growth geographies Page 18

19 Financial Results - Continuing Operations GAAP results in US$ millions, except per share amounts FY-07 FY-08 Q1-07 Q2-07* Q3-07 Q4-07 ** Q1-08 Revenue $159.6M $153.5M $151.8M $161.3M $148.2M GM 42.9% 42.7% 43.2% 41.4% 41.5% SGA R&D Amortization Op. margin 7.5% 7.5% 8.0% 5.0% 1.7% EPS $0.08 $0.11 $0.07 $0.09 $0.01 * Q2-07 results include a one-time gain from the sale of an equity investment. ** Q4-07 reflects tax benefit from intercompany dividend from Japanese subsidiary Q1-08 includes $3.8 million charge related to severance expense from headcount reduction Page 19

20 Unit-Driven Model Provides Stability and Strong Cash Flow Approximately 60% of sales are recurring Products require replacement every 2 weeks to 18 months Driven by production levels and output of customer 40% of sales are driven by capital spending and new infrastructure Key products: wafer carriers, fluid handling components and systems 36% Unit-driven vs. Capital-Driven Sales Q Unit-driven Capital-driven 64% Page 20

21 Strong Cash Flow Unit-Driven business model and working capital improvements help drive cash flow Cumulative Cash Flow Inventories $ Millions 100 $ Millions Q1-06 Q2-06 Q3-06 Q4-06 Q1-07 Q2-07 Q3-07 Q4-07 Q Q1-06 Q2-06 Q3-06 Q4-06 Q1-07 Q2-07 Q3-07 Q4-07 Q1-08 Page 21

22 Balance Sheet Can Support Growth and Share Repurchases In millions Mar. 29, 2008 Dec. 31, 2007 Cash $139 $161 Working Capital, net of Cash $122 $96 Total Assets $1,042 $1,035 Debt $48 $47 Shareholders Equity $873 $852 Shares Outstanding million common shares repurchased since September 2006 $49 million share buyback is ongoing $230 million revolving credit facility put in place in February 2008 Page 22

23 The Market Leader in Process Purity Solutions Key solutions provider to the semiconductor and other microelectronics industries Market leader in contamination control and microenvironments Technology-generation-driven model with high unitdriven/recurring revenue Broad customer base; Nearly 75% of sales are outside of US Strong balance sheet and cash flow Page 23

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