Background Statement. If you have any questions on this ballot, please contact the following Task Force leaders or SEMI Staff:

Transcription

1 Background Statement for SEMI Draft Document 5371 New Standard: Test Method for Tensile Strength Applied to Welded Connections Made by PFA Weld Fitting. Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document. Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, patented technology is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. Background Statement Welding fitting connections made of PFA are used in the semiconductor manufacture in recent years. The standard of the test method and the specification for welding fitting connections is requested. We developed a standard for the test method for tensile strength applied to welded connections made by PFA weld fitting. The voting results of this ballot will be reviewed by the Welding Fitting Task Force, and will be adjudicated by the Japan Liquid Chemicals Committee at their meeting scheduled on Friday, April 5, 2013 at SEMI Japan, Tokyo, Japan. If you have any questions on this ballot, please contact the following Task Force leaders or SEMI Staff: Welding Fitting Task Force co-leaders: Kimihito Sasao (Advance Electric Company) at k.sasao@advance-e.co.jp Takashi Hasegawa (KITZ SCT) at t.hasegawa@kitz-sct.co.jp SEMI Staff Naoko Tejima (SEMI Japan) at ntejima@semi.org

2 SEMI Draft Document 5371 New Standard: Test Method for Tensile Strength Applied to Welded Connections Made by PFA Weld Fitting. 1 Purpose 1.1 This method provides a uniform procedure to determine the tensile strength applied to welded connections made by PFA weld fitting. 2 Scope 2.1 This method can be used to characterize welded connections on the basis of test data developed under the conditions described herein, but the results are not intended to imply a performance rating. 2.2 Tube defined in this method has a circular cross section and is made of PFA. 2.3 Welded connections tested by this method are made by PFA weld fitting. 2.4 The seal between the tube and the welded fitting and between the welded fitting and the welded fitting is within the scope of this document. All other, threaded seals are beyond the scope of this document. 2.5 When using this method for making comparisons among various welded fitting designs and manufacturers, the user must be specific in the selection of the tube and welded fitting s to be evaluated. 2.6 The International System of Units (SI) is used as the standard unit of measure in this document. The U.S. Customary units are in parentheses for reference purposes only and have been rounded to the nearest whole value. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 3 Referenced Standards and Documents 3.1 ASTM Standards 1 ASTM D3307 PFA Fluorocarbon Molding and Extrusion Materials 4 Summary of Method 4.1 Subject welded connections made by PFA weld fitting to extreme tensile forces. 5 Significance and Use 5.1 In the manufacturing of semiconductor products, many types of hazardous chemicals and solvents are required. As a result, tubing and various welded connections made by PFA weld fitting (which are chemically resistant to these fluids) are used to transport those fluids. It is important to control the testing process when evaluating various fitting designs, so that comparisons of the tensile strength can be made. 5.2 It is the intent of this method to provide a procedure in which the tensile force will be applied to welded connections made by PFA weld fitting. By using this method, comparisons of various welded connection designs can be achieved. 5.3 The results obtained when using this method are applicable only to conditions that specifically duplicate the procedures used within this method. 5.4 When using this test method, it is assumed that the test specimens are truly representative of the material and manufacturing process specified for that product. Departure from this assumption could introduce discrepancies that are greater than those introduced by departure from the details of the procedure outlined in this method. 6 Terminology 6.1 characterize to describe the quality of. 6.2 failure tube separation from a welded connection or tearing of the tube. Page 2

3 6.3 subject to expose to. 6.4 tensile longitudinal, so as to lengthen the test object. 7 Description of Test Equipment 7.1 A test apparatus capable of securing the test specimen while accurately providing a uniform rate of pull to the specimen. The test instrument shall have the capability of recording the maximum tensile force applied to the test specimen. 7.2 See Figure 1 for basic tensile test apparatus. Figure 1 / 2 Basic Tensile Test Apparatus 8 Safety Precautions WARNING: This test method will subject test specimens to conditions that may exceed the normal performance rating of the products under evaluation. Adequate precautions must be taken to prevent injury to the person conducting the test. 9 Test Specimens and Conditioning 9.1 Sample Size A minimum of three specimens shall be tested. 9.2 Specimen Size The case with tensile strength test of welded connection of the fitting and the tube : leaving a minimum of 100mm (4 in.) of exposed tube. (see Figure 1.) 9.3 Specimen Surface All surfaces of the specimens shall be free of visible flaws, scratches, or other imperfections, unless typically found on a representative sample of the product. 9.4 Specimen Conditioning All specimens must be conditioned for a minimum of one hour in an air environment of 23 ± 2.8 C (73 ± 5 F) prior to being subjected to tensile forces. 10 Calibration 10.1 Calibrate the tensile test equipment's rate of pull to 25mm (1 in.) per minute, ±5% Calibrate the tensile force instrument to ±2% full scale. 11 Test Procedure 11.1 Assemble a test fitting connection, per manufacturer's specification, to one end of the tube. (see Figure 1 2.) Page 3

4 11.2 Install the fitting connection to the tensile fixture (see Figure 1 2.) in a manner that prevents distortion of the connection Begin pulling the test specimen at a rate of 25mm (1 in.) per minute Continue applying tensile force until tearing of the welded connection or until tearing of the tube occurs If the tube releases from the tensile fixture, the data from that specimen must be disregarded and an additional specimen tested Record on test data sheet (see Appendix 1 for a sample) the mode of failure and the maximum tensile force applied, in Newtons (lbs.). 12 Calculations 12.1 Calculate the average maximum tensile force and record Calculate the standard deviation of maximum tensile force and record. 13 Data Accuracy 13.1 Tensile Force Newtons: ±2% 14 Test Data Sheet 14.1 The test data sheet shall include the following information: Date tested Operator and test facility Description of items tested, including: Tubing Manufacturer, O.D., wall thickness, part number, and material type Fitting Manufacturer, type, size, part number, and material type Conditions of welding Some examples are described in the following. Decide appropriate items referring to examples, and record those items. Model code and manufacturer name of welding machine Preset temperature of heater Heating time Amount of overlap Cooling-down time Parameters of welding machine Other data necessary for reproduction Maximum tensile force for each specimen Average and standard deviation of maximum tensile forces Mode of failure for each specimen. NOTE 1: A sample test data sheet is provided as Appendix 1. Page 4

5 APPENDIX 1 SAMPLE TEST DATA SHEET NOTICE: The material in this Appendix is an official part of SEMI [designation number] and was approved by full letter ballot procedures on [A&R approval date]. Test Date: Operator: Test Facility: Tube Manufacturer: Tube O.D.: Tube Wall Thickness: Tube P/N: Tube Material: Tensile Force Newtons Fitting Manufacturer: Fitting Type(Brand): Fitting Size: Fitting P/N: Fitting Material: Sample Maximum Tensile Force Mode of Failure Average = Standard Deviation = NOTICE: (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility. Page 5