Code for Construction and Acceptance of Cleanroom

Transcription

1 UDC NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA p GB () Code for Construction and Acceptance of Cleanroom Issued on: July 15, 2010 Implemented on: February 1, 2011 Jointly Issued by Ministry of Housing and Urban-Rural Construction of the People's Republic of China General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China

2 Contents 1 General Provisions Terms Building Structure General Requirements Structure Construction Requirements Section Acceptance Building Decoration Building Decoration Ground Wall Surface Suspended Ceiling Wall Comer Door and Window Seal Gap Section Acceptance Air Systein ~ General Requirements Duct and Fitting Manufacture Duct Installation Paits and Accessories Installation Air Outlet Installation Supply Air Terminal Installation Section Acceptance Gas Syste1n General Requireinents Pipe and Accessory Pipeline System InstaUation Strength Test of Pipeline System The Ablution of Pipeline System

3 6.6 Gas Supply Unit Section Acceptance Water System General Requirements Water Supply Drainage Hot Water Purified Water and High Purity Water Section Acceptance Chemical Materials Supply System General Requirements Storage Facility Pipeline and Components Section Acceptance Power Distribution System General Requirements Wiring Electrical Equipment and Device : Section Acceptance Automatic Control System General Requirements Automatic Control Equipment Installation Pipeline Construction of Automatic Control Equipment Integrated Debugging of Automatic Control Equipment Section Acceptance Device Installation General Requirements Purification Device Installation Air-conditioning Equipment and Cold and Heat Source Device Installation in the Equip1nent Level Biosafety Cabinet Installation

4 11.5 Process Equipment and Facility Section Acceptance Fire Control System General Requirements Smoke Control Syste1n Fire Curtain, Fire Door and Fire Window Emergency Lighting and Dispersal Indicator Section Acceptance Shielding Facility General Requireinents Shield Shielding Room Pipeline, Door Type Tunnel and Other Requirements Section Acceptance Antistatic Facilities General Requirements Antistatic Floor Antistatic Terrazzo Floor Antistatic PVC Floor Antistatic Porcelain Tile Floor Surface Course and Coating System Coinponents Section Acceptance Construction Organization and Management General Requircments Staff and File Construction Measures Safety Measures Environmental Protection and Energy Conservation Project Test General Requireinents.. _

5 16.2 Test Items Test Period Performance Test Acceptance General Requirements Section Acceptance Period Completion Acceptance Period Performance Acceptance Period Project Acceptance Operation Acceptance Appendix A Air Duct Leak Test Method A.l Test Equipment A.2 Test Method A.3 Air Leakage Rate Calculation of Pipe Section Appendix B Construction Inspection Tables Appendix C Construction Acceptance Tables Appendix D In Situ Leak Scan Test of HEPA Fitters D.1 Principle ; D.2 Photometer Method D.3 Particle Counter Method D.4 The Generation of Leak Test Aerosol Appendix E The Comprehensive Performance Test Method of Clean Room E. l Air Volume and Air Velocity Test E.2 Static Pressure Difference Test E.3 The Unevenness Test of Cross-sectional Air Velocity in Unidirectional Clean Room E.4 Particle Count Test E.5 Temperature and Humidity Test : E.6 Sound Level Test E.7 IlluminationTest E.8 Airborne Microorganism Test E.9 Surface Conductivity Test

6 E.10 Vibration Test E.11 Recovery Time Test E.12 Airflow Test E.13 Formaldehyde Concentration Test E.14 A1nmonia Concentration Test E.15 Ozone Concentration Test E.16 Carbondioxide Concentration Test Appendix F Biological Evaluation Method F.1 Microbe Transmittance of Return and Exhaust High Efficiency Particulate Air Filter Air Outlet F.2 The Inhibition Ability Evaluation of the Local Leak Diffusion of Microbiological Aerosol F.3 Isolation Coefficient of Biosafety Cabinet Appendix G Test Method for Cleanroom Airtight G.1 Principle G.2 Pressure-decay Method G.3 Constant Pressure Method G.4 Safety Requireinents Appendix H Airborne Molecular Contamination Test... :... ; H.1 Airborne Molecular Contamination (AMC) H.2 Test Method H.3 Impact Sampling Method H.4 Adsorbent Tube Sampling Method Explanation of Wording in This Code List of Quoted Standards

7 1 General Provisions This code is formulated to implement relevant national principles and policies, standardize construction requirements, unify inspection method and define acceptance standard so as to ensure construction and installation quality and to achieve energy saving, material and water conservation, environmental protection and safety operation during the construction and acceptance of cleanrooms and associated controlled environment (referred to as cleanroom from Chapter 3) This code is applicable to the construction and acceptance of newly-built and reconstructed, entire and assembling as well as fixed and moving cleanrooms and associated controlled environment The construction and acceptance of cleanrooms and associated controlled environment shall meet the following requirements: 1 It shall be carried out by professional qualified construction enterprise approved by competent development department according to approved documents and drawings. The constructors shall receive training and assessment on construction and acceptance specification of cleanroom; the special category of workers shall have work license and shall be supervised all over the process by supervision organization with professional supervision aptitude and specialized training. 2 Construction organization design shall be fonnulated before construction. During construction, different categories of workers shall be keep close coordination and carry out construction according to the specified procedure. No construction shall be carried out for engineering projects without drawings, technical requirements and construction organization design. The change file from design unit shall be provided during engineering construction to modify the design. No performance acceptance shall be carried out on engineering projects without completion drawing. 3 The specification, model, performance and technical index of all materials, equipments, finished products and semi-finished products used in projects shall meet the requirements of design and current relevant national standards, and there shall be complete legal quality evidentiary documents. Inspection must be carried out if there is any doubt on their quality. The overdue materials shall not be used any more. 4 After finishing complex procedure construction of section subitem project and engineering, itshall carry out section acceptance. If the section acceptance is unqualified, it must be reworked until qualified and shall be recorded and filed This code shall be used together with the current national standard "Unified Standard for Constructional Quality Acceptance of Building Engineering" GB The construction and acceptance of cleanrooms and associated controlled environment shall not only comply with the requirements stipulated in this code, but also shall meet those in the relevant current ones of the nation.

8 2 Terms Cleanrooms and associated controlled environment Cleanrooms and open or closed internal or peripheral space of their affiliated, auxiliary and associated environment; the suspended particle concentration and other parameters in this space shall also meet the relevant standards Unidirectional airflow cleanroom A type of cleanrooms, where unidirectional and parallel air current flows through the whole section of room working area at even and stable rate Non-unidirectional airflow cleanroom A type of cleanrooms, where unparallel, non-undirectional and disorderly intersected and circled air current flows through the whole section of room working area at uneven rate; it is also called turbulent airflow cleanroom Mixed airflow cleanroom A type of cleanroom with two airflow pattern-unidirectional airflow and non-unidirectional airflow exist simultaneously Patticle A kind of solid or liquid as well as active or inactive substance suspended in the air; its particle size ranges from 1Onm~1 OOµm (in this standard) Aerosol The dispersion system of small solid or liquid particles suspended in the air Bio-aerosol The biologic medium dispersed in gaseous environment Airborne bacteria Germ-carrying paiticle suspended in the air Settlemental bacteria Germ-carrying pa1ticle falling on the surface Test aerosol Solid or liquid patticle suspended in gas state; its particle diameter distribution and concentration has been given and controlled Leak The contamination penetration of air filter system caused by bad completeness or defects; the penetrated contaminations exceed the expected concentration value at downwind Leak test 2

9 3 Building Structure 3.1 General Requirements Construction organization design or construction scheme shall be compiled before construction of cleanroom structure engineering to coordinate with cleanroom construction Before acceptance of major structure, the next procedure shall not be constructed. 3.2 Structure Construction Requirements The cleanrooms with assembled-type concrete structure shall be reserved with pores and holes on prefabricated units according to the design drawing As for cleanroom concrete construction with pressure-tight and anti-seep requirements, it shall adopt watertight concrete and shall formulate operation procedure of mixture proportion. The impermeability test shall be carried out on test pieces according to relevant requirements and then it shall be tamped down by layer and cured intensively after pouring Large hardwood veneer board with thick surface layer, instead of assembly steel formwork with abutted seams, should be used by cast-in-place concrete shear wall formwork inside clean zone The structure formwork used in large clean space shall be set up with control points by zone as well as multi-level recheck to prevent arch camber caused by damping. Clear water concrete should be used for delicate construction and it shall be tamped while trowelling so as to reach the building design elevation at a time. All formwork shall be caulked and fixed by sealing gum simultaneously without any omission The quality control level of masonry construction shall meet the requirements of Grade A in Article of the current national standard "Code for Acceptance of Construction Quality of Masonry Engineering" GB As for the percurrent filler wall of independent sealing bodies developing from space dividing cleanroom associated controlled environment, the gap between wall (plate) and girder as well as plate bottom shall be fully filled and sealed The dimensional errors of structure members shall be strictly controlled during steel structure construction inside large high clean space. The joints not required in design shall be filled with sealing materials after the steel-structure main body passes the acceptance. The anti-corrosive and fire-proof paint shall be coated on all surfaces of steel structures When the existing building is reconstructed into cleanrooms, the structures of existing building shall be checked and calculated as well as carefully inspected. If there are cracks or gaps in existing structures, measures shall be taken to strengthen or s ~ al them. 3.3 Section Acceptance The construction and acceptance of structures shall be carried out according to the construction technological procedures of subitem project. 5