Technical Data Sheet

Transcription

1 Technical Data Sheet Photo-Imageable, Aqueous Processable Liquid Innerlayer Resist Broad processing windows Specific designed functional binder polymer High photo speed Compatible with broad range of wet chemistry for preclean High resolution One temperature profile up to 0.8 mm panel thickness High contrast after exposure, permanent color change system Ready-to-use product ISO 9001 certified

2 PRODUCT INFORMATIONS General Product Overview Probimage 1020 is a photosensitive liquid etch resist for the production of innerlayers. It is a negative working photopolymer sensitive to UV radiation in the nm range. The resist is designed to be applied by roller coating, especially via the Probimage RC Systems. Probimage 1020 is capable of resolving patterns down to 25 µm (1 mil). Probimage 1020 can be processed with well established aqueous develop-etch-strip (DES) technology. The resist exhibits excellent mechanical resistance to automated handling processes and chemical resistance to common acidic etch media. Probimage 1020 is designed as a cost effective alternative to dry film, performing in equivalent DES equipment with standard wet chemical processes. Special Features and Benefits Broad processing windows High photo speed, high resolution Compatible with broad range of wet chemistry for preclean One temperature profile up to 0.8 mm panel thickness High contrast after exposure, permanent color change system Ready-to-use product Material Properties (Typical values) Color, unexposed - Light blue After exposure - Dark blue, permanent color change Density (liquid) g/cm 3 25 C (77 F) Density (dry) g/cm 3 25 C (77 F) Viscosity [mpas] 25 C (77 F) Photosensitivity mj/cm ) Resist Surface - Suitable for hard contact exposure Thinner - 1-Methoxy-2-Propanol Acetate (PGMEA; CAS# ) 1) Measured at resist surface. When processed according to recommendations of this TDS, using a Stouffer 21 sensitivity gauge, results in a step 6-8 Cu free Storage and Expiration Probimage 1020 is formulated to yield consistent results within the specified shelf life. To ensure that these products exhibit consistent quality in application we recommend to store them under the following conditions: PROBIMAGE 1020 in original container at 2-18 C ( F) Shelf life is 12 months from the date of manufacturing Under EXP on the package label the expiry date is indicated. Within this period the product should be used. Probimage 1020 Page 2 of 2

3 PROCESS RECOMMENDATIONS Room Requirements on Working Environment In order to reach best results the following room requirements should be respected: Room Temperature: 22 ± 2 C (71.6 ± 35.6 F) Relative Humidity 55 ± 5% Cleanroom Class , internal RC-HEPA filter provide: Class Floor Antistatic, load-carrying: min 10 kn/dm 2, vibration-free surrounding Lightning Yellow light fluorescent tubes e.g.: Philips (TLD 36W/16), Sylvania (F40/T12 gold), Osram (L 58W/62 yellow) Pot Life At room temperature the ready-to-use mixture has a pot life on rollers of 3 days. Surface preparation In order to remove residual stains and to micro-roughen the copper surface, it is recommended that copper clad boards be chemically cleaned with a two step preparation process consisting of an acid cleaner + water rinse and a persulphate-solution treatment + acid rinse + final rinse. Alternative preparation processes such as stabilized Sulphuric acid + Hydrogen peroxide or proprietary solutions may also be used. In order to render the panel surface neutral and free of residues before coating, DIwater should be used in the final rinse section prior to drying. To ensure good adhesion and uniform coating results precleaned layers should be coated without delay (<1 hour). Coating Probimage 1020 is a ready-to-use product with a viscosity slightly above the working range. The viscosity measurement and control device provided with most coating equipment automatically controls the operating viscosity of the resist. The resist is designed for a final thickness of 10 µm when using following process parameters. Application roll grooving 48 TPI 1) Doctor roll pressure As a function of targeted thickness but at least enough to obtain a smooth roll-surface 2) Application roll impression mm depending upon roll usage Coating speed Variable from 2 5 m/min Viscosity set point (DIN Cup 4) 130 sec (range: sec) 1) Coating and drying speed up to 5 m/min is possible provided drying and cooling sections are designed adequately 2) Other groove-designs may be used as a function of required film thickness-range When processed as recommended coated panels will show adequate film quality. After drying, thickness uniformity (measured with an eddy current system, e.g. Fischer s Isoscope MP 30) across the entire panel surface will be ± 1 µm. Probimage 1020 Page 3 of 3

4 PROCESS RECOMMENDATIONS Drying Correct set-up of the Roller Coating System guarantees optimum drying results for various board thicknesses. Dryer settings extremely depend upon machine type and configuration. As various machine types and drying-techniques are being used today, it is not possible to provide standard machine settings. However, Huntsman will assist customers in selecting appropriate equipment configuration and or will determine optimum conditions for each individual case during implementation. Dryer settings should be chosen as a function of required throughput and available length of heating and cooling sections. The longer available drying dwell is, the lower optimum surface temperature will result. The table below may be used as a rule of thumb for setting drying conditions. Drying speed 1) Variable from 2 5 m/min Drying time s Peek surface temperature in C (in F) ( ); measured on a panel surface 1) Coating and drying speed up to 5 m/min is possible provided drying and cooling sections are designed adequately Hold Time after Drying No hold time is required. However, under yellow light and cleanroom-conditions, coated and dried boards may be held for up to 3 days before exposure. Handling Probimage 1020 has a tack free surface after drying which allows hard contact printing. In common with other liquid photoresists Probimage 1020 will fuse under pressure and over time. Maximised yield is obtained via in-line processing. However, panels may be stacked in conjunction with separator sheets. Exposure Resolution capability under hard contact conditions exceeds 30 µm after developing. A non-collimated light source is mandatory. Probimage 1020 requires exposure energy between 100 to 150 mj/cm 2. The resolution after etching depends on copper thickness and equipment capabilities. Hold Time after Exposure No hold time is required. However, under yellow light and cleanroom-conditions, exposed boards may be held for up to 3 days before developing. Developing Aqueous sodium or potassium carbonate solutions are recommended. Antifoam (non silicon containing) may be required for foam control. Volume depends upon machine- and antifoam properties. Concentration 1.0 % Temperature Spray pressure Developing time C ( F) bar < 1 min Proper conditions have to be determined individually to obtain a break point between 40 to 50% of the active developing-chamber length. Probimage 1020 Page 4 of 4

5 PROCESS RECOMMENDATIONS Etching Common acidic etch media such as CuCl 2 or FeCI 3 have been used successfully. Variables such as temperature, spray pressure and distribution, nozzle angles as well as dwell time should be optimized in dependence of specific board sizes, copper thickness and line/space geometries. Cu concentration g/l HCL concentration N ORP Temperature mV C ( F) Stripping Probimage 1020 resist peels off in small flakes within less than 30 s when exposed to potassium hydroxide solutions at recommended temperature. Commercially available stripping solutions containing Butyldiglycol and/or Ethanol Amines may be used to further increase stripping speed in case of special requirements KOH Concentration <2 % Temperature C ( F) Spray pressure 1 3 bar Dwell time 60 s To remove flakes from the stripping solution, mechanical filters such as cyclone- or mesh-filters can be used. In order to optimize resist-particle size for any filtration method it is recommended to test combinations of stripping solution type, concentration, temperature and spray pressure. In general particle size is reduced with solution concentration. Process integration In order to avoid any chemical interference and to optimize the process for Probimage 1020 a dedicated develop - etch - strip line is recommended. If a DES-line is used for both dry film and Probimage 1020, interactions may occur. In such case it may be required to select suitable DES-chemistry and process parameter Since, opposite to dry film a cover sheet does not protect Probimage 1020, specific operator training and discipline is required. To avoid defects, different handling procedures are necessary. For the same reason it is a pre-requisite that any individual piece of equipment be properly designed and adjusted for processing Probimage Liquid Etch Resist. In order to minimize manual handling and ensure maximum productivity specific attention must be given using horizontal buffer stations between some process steps (Preclean - Coating - Printing - DES). Probimage 1020 Page 5 of 5

6 SAFETY AND TECHNICAL SUPPORT Safety When working with our products, the appropriate hygiene precautions and safety regulations should always be observed. For details, please see our EC Safety Data Sheets and the brochure Hygienic Precautions for Handling of Plastic Products. Probimage products contain flammable solvents. When the line is in operation no open flame or light is allowed in the vicinity. Before carrying out maintenance or repair work the line should be cleaned and the work area thoroughly ventilated. Disclaimer IMPORTANT LEGAL NOTICE: Sales of the product described herein ( Product ) are subject to the general terms and conditions of sale of Huntsman Advanced Materials LLC, Huntsman Advanced Materials (Europe) BVBA, Huntsman Advanced Materials Americas Inc., Huntsman Advanced Materials (Hong Kong) Ltd., or its appropriate affiliate( Huntsman ). The following supercedes Buyer s documents. WARRANTY: Huntsman warrants that at the time and place of delivery all Products sold to Buyer shall conform to the specifications provided to Buyer by Huntsman. DISCLAIMER AND LIMITATION OF LIABILITY: EXCEPT AS SET FORTH ABOVE, HUNTSMAN MAKES NO OTHER WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO ANY WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, NONINFRINGEMENT OF ANY INTELLECTUAL PROPERTY RIGHTS, OR WARRANTIES AS TO QUALITY OR CORRESPONDENCE WITH PRIOR DESCRIPTION OR SAMPLE, AND THE BUYER ASSUMES ALL RISK AND LIABILITY WHATSOEVER RESULTING FROM THE USE OF SUCH PRODUCT, WHETHER USED SINGLY OR IN COMBINATION WITH OTHER SUBSTANCES. No statements or recommendations made herein are to be construed as a representation about the suitability of a Product for the particular application of Buyer or user or as an inducement to infringe any patent. Buyer is responsible to ensure that its intended use of the Product does not infringe any intellectual property rights. Huntsman s maximum liability for any claim related to the Products or breach of an agreement associated therewith shall be limited to the purchase price of the Products or portion thereof to which such claim pertains. IN NO EVENT SHALL HUNTSMAN BE LIABLE FOR ANY CONSEQUENTIAL, INCIDENTAL, SPECIAL OR PUNITIVE DAMAGES, INCLUDING BUT NOT LIMITED TO ANY DAMAGES FOR LOST PROFITS OR BUSINESS OPPORTUNITIES OR DAMAGE TO REPUTATION. WARNING: Technical data and results are based upon tests under controlled laboratory conditions and must be confirmed by Buyer by testing for its intended conditions of use. The Product described herein has not been tested for, and is therefore not recommended or suitable for, uses for which prolonged contact with mucous membranes, abraded skin, or blood is intended or likely, or for uses for which implantation within the human body is intended, and Huntsman assumes no liability for any such uses. Furthermore, Huntsman shall not be liable for, and Buyer assumes all risks related to, the technical or other information or advice contained herein, or hereafter provided by Huntsman whether or not at Buyer s request. Probimage is a registered trademark of Huntsman LLC or an affiliate thereof in one or more, but not all countries. Status: April 2005 Probimage 1020 Page 6 of 6