Sustainable Requirements from Advanced Technology Viewpoints

Transcription

1 Sustainable Requirements from Advanced Technology Viewpoints Fang-Ming Hsu Corporate ESH, TSMC

2 2 About Sustainable Development Sustainable development consists of balancing local and global efforts to meet basic human needs without destroying or degrading the natural environment. The 2005 World Summit on Social Development identified sustainable development goals, such as economic development, social development and environmental protection. This view indicates the three pillars of sustainability are not mutually exclusive and can be mutually reinforcing.

3 3 ESH and Energy Are Main Concerns on Sustainable Manufacturing Environmental Protection and Energy Supply Climate change mitigation and adaptation Energy supply Water supply Pollution prevention Workplace Safety and Health Performance Measurement 3 things to be done well: Actual Performance Creditable Third Party Recognition Communication and Outreach

4 4 Some Questions 1. Shall we consume more energy? Risk: Energy shortage 2. Shall we emit more carbon? Risk: Regulatory related 3. Shall we consume more water? Risk: Water shortage or flood 4. Shall we use more types and volume of hazardous chemical substances? Induce less safe and high employee health risk workplace? Cause higher environmental impacts? Cause higher property loss risk? 2015 TSMC, Ltd

5 5 Advanced Manufacturing on Energy (1/3) WSC average energy consumption: 2014 Electricity NER was slightly above 2010 mainly due to increase in process complexity Electricity kwh/cm2.wafer

6 6 Advanced Manufacturing on Energy (2/3) 1. Energy consumption is now the biggest carbon emission contributor, higher than PFC emissions. 2. UNFCCC COP21 conference will be held in Paris in Dec. 2015: Will, for the first time in over 20 years of UN negotiations, aim to achieve a legally binding and universal agreement on climate, with the aim of keeping global warming below 2 C. 3. Taiwan s new legislations: Greenhouse Reduction and Management Act ( 溫室氣體減量及管理法 ) Announced new regulation on July 1, 2015 Principles of Energy development and use ( 能源開發及使用準則 ) Will be revised by Energy Resource Bureau

7 7 Advanced Manufacturing on Energy (3/3) Fab Energy Saving Update: 1. Advanced fabs energy consumption distribution: Process tools ~ 56% Facility systems ~ 41% Others ~ 3% 2. Future efforts needed Process tools: Apply idle mode better; Renew old dry pumps; Special study: EUV, EPI energy saving Tool motors need to be legally regulated with energy efficiency(?) Facilities: Exhaust reduction; Electrical device energy saving Supply chain: ISO50001 promotion; Carbon foot printing

8 8 Advanced Manufacturing on Water (1/3) WSC average water consumption: 2014 Water NER was below 2010 mainly due to improvements in efficiency and recycling Water consumption l/cm2. wafer

9 9 Advanced Manufacturing on Water (2/3) 1. Water shortage (drought) or flood is consequence of climate change. It s expected to happen even oftener for 30 years or longer in most of countries. 2. Water management has drawn people s equal attention as carbon reduction did. Seen from CDP and DJSI sustainability survey: Both of CDP and DJSI measure corporations sustainability maturity on managing climate change by knowing their carbon and water related issues with almost equal importance. 3. Taiwan, California US and some areas in China experienced serious water shortage in 2015 spring. Under global climate change, it may also happen in most of other countries.

10 10 Advanced Manufacturing on Water (3/3) 1. Water recycling could be needed and more difficult than before. Single wafer cleaning processes continue to generate top difficulties in water recycling. More complex chemical combination in processes causes worse water recycling possibility. 2. Taiwan s wafer fabs got 85% or higher process water recycling rate. Should we do even more? Increasing water recycling rate will increase energy consumption and product carbon footprint also. 3. Taiwan paid more efforts to have stable water supply. Seeking opportunity to build new dams (difficult) Promote comprehensive used residential water reclamation for industries use (like Singapore does) Develop applications of subterranean water (for drought emergency) 2015 TSMC, Ltd

11 11 Advanced Manufacturing on Chemical Substance (1/3) 1. Using more types of hazardous chemicals induced society s concern. Some people living near high-tech facilities do not trust the latter. 2. This happened in most of countries with well developed high-tech industries on - General Health Risk: arsenic, heavy metals, CMR materials and organic substances Water (river) pollution: NH3-N, TMAH, H2O2, conductivity Air pollution: PM2.5 with heavy metals and CMR, VOCs 3. Well doing environmental protection as well as communication with communities become very critical.

12 12 Advanced Manufacturing on Chemical Substance (2/3) 1. New regulations and rules were announced in Taiwan Water Pollution Control Act Need to do complicated risk assessment; Penalties much higher than before Limit PM2.5 in ambient by reducing SOX and NOX emissions, focusing on industrial sources especially Strengthen Community health risk assessment while companies applying for new site constructions 2. What can we do? Do not use CMR materials if possible. Try other chemical substances during R&D stage. Chemical substance suppliers provide sufficient ESH data to users. Chemical users exactly inventory chemical substances in fab sites. Do best air, water and waste abatements.

13 13 Advanced Manufacturing on Chemical Substance (3/3) 1. Generating more chemical wastes is a world trend in our industry: Waste. Kg/cm 2. wafer 2. Specific situation in Taiwan Waste landfill in 2014 was one of the best performers within WSC but still has post-treatment issues. Action Plans: Facilities to reduce chemical use so as to reduce waste generated; Will centralize waste facility by joint efforts of waste sources and treatment contractors.

14 14 Workplace Safety and Health (1/3) 1. If occupational disease is concerned? Any significant case happens in any country will harm entire high-tech industries. Need to get lessons learnt. 2. Chemical management in workplace is the most critical thing to do but rather difficult to do well. Chemical suppliers need to provide SDS to the best. Chemical uses need to build strong defense systems on both safety and workers health. Health risk control within workplace, including exposure reduction, is not easy to do. Epidemiological analysis also needs to be done. The issue is we know risk is there but have no enough happened samples.

15 15 Workplace Safety and Health (2/3) Higher S&H Challenges: Data Gap: Limited information Insufficient information of hazards Trade secret Usage quantity Safety Gap: Real time monitor not available More difficult to mitigate potential health and environmental risk. More try and error activities at R&D stage. (operate manually) Need to self-set new ESH rules Technology Gap: 1 st tool in the world Insufficient information on processes Unknown byproducts Best control practices not available

16 Exposure Likelihood 16 Workplace Safety and Health (3/3) Example of Chemical Exposure Risk Assessment: Health Risk = Hazard Level x Exposure Likelihood Chemicals Work Type Spreading Risk Hazard Level Note: Hazard level based on GHS

17 17 Property Loss Control (1/2) Q&A Q1. Will advanced technologies induce higher wafer fab property loss risk Answer: Yes! Q2. Why? Answer: New generation process tools become more expensive, therefore property loss becomes more centralized also. More hazardous chemical substances are used including pyrophoric and water-reactive substances. More difficult to properly segregate incompatible materials.

18 18 Property Loss Control (2/2) A specific example of loss control improvement: Raised floor anchorage enhancement for seismic concern: Rule: stand for 400 gal earthquake acceleration and above Improvement needed: to add anchorage rod stress distributers at backside of raised floor panels Tool vs. Raised floor anchorage is current weakness. (Taiwan) As is Tool Raised Floor Anchorage To be Equipment Front view Panel Pedestal Backside view

19 19 Summary Advanced technologies are for sure to induce higher challenges on sustainable manufacturing viewpoints. We have to manage those challenges within ESH scope, and we can make it even though many more efforts are still required.