GREEN CLEANING MINIMIZE VOC S, EH&S ISSUES AND COST

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1 GREEN CLEANING MINIMIZE VOC S, EH&S ISSUES AND COST

2 02 OUTLINE Your Customers are Environmentalists The Sustainability challenge VOC Emissions & related consequences IPA is a major source of VOC s Why is used in the IPA fab? VOC Free wiping is production proven to reduce VOC s VOC Free Cleaning demonstrated Green Means Cost $avings PM applications Conclusion

3 03 The Modern Landscape Customers expect suppliers to be Green Communities and Governments demand sustainability and compliance The web and social media make accidents & environmental issues immediately visible. Green operations impact company reputation and brand recognition Competitive pressures are only increasing

4 04 Fabs Have Invested Heavily to Improve Sustainability Water & Energy usage have both been reduced VOC emission reductions have been very hard to come by Given the scope of the Investment, preventable fire risks are unacceptable Pre-saturated wipers and segregated waste containers are expensive and do not address the root cause problem

5 05 ENVIRONMENTAL CONSTRAINTS FOR THE SEMICONDUCTOR INDUSTRY ARE ONLY INCREASING Semiconductor industry is looking for Break-Thru suitable Non-VOC solvent as an alternative to IPA to perform PM related tasks - ISMI Symposium on manufacturing effectiveness

6 07 WHAT ARE VOLATILE ORGANIC COMPOUNDS(VOC)? Volatile Organic Compounds (VOC) are organic chemicals that have a high vapor pressure at ordinary room temperature VOCs present health, fire, and process risks and are costly to manage IPA is 100% VOC substance

7 06 THE PROBLEM VOC EMISSION ISSUES 20% - 50% fab VOC Sources come from Isopropyl Alcohol (IPA) saturated wipes for surface cleaning o Tool skins and chambers, work surfaces, laminated tool aids, safety glasses... To make matters worse o o More than half the IPA used on wipe remains on wipe when discarded Making 25% of fab VOC sources to come from discarded IPA saturated wipes

8 08 WHY IPA? Current clean room wipers require IPA to leave surfaces clean & dry The hydrophobic properties of polyester wipers require the use of solvents such as IPA to clean surfaces, especially in hivac tools. Polyester, when used with DI Water, leave surfaces wet. This results in facilities restrained to using harmful VOC Solvent IPA.

9 09 VOC EMISSIONS IMPACT MULTIPLE STAKEHOLDERS Employees Breathe It. Communities Are Exposed To It. EH&S Struggles with Reporting and Disposal Issues. Fab Management Must Contend With Health, Safety, and Process Risks.

10 10 To Reduce VOC s FABS NEED SOLVENT FREE WIPING For years the industry has searched in vain for an IPA replacement, when what was needed was a wiper that could be used with DI water Polyester w/ IPA VS. DI Water: DI water would be the perfect cleaning solution if only surfaces could be left clean and dry VOC Free Cleaning:

11 11 The Solution MiraWIPE with DI Water MiraWIPE advanced microfiber characteristics leaves a clean dry surface using DI water only

12 MiraWIPE & DI H2O More surface area and interstial spaces enable IPA like wiping performance 12

13 Unique Fabric Design = SOLVENT FREE WIPING 13 Non-symmetrical 1-2um micro fiber structure provides superior cleaning efficiency in removing sub-micron particles and metal contaminants from critical environments The star shape structure increases wiper surface area by 8 10X enabling faster more complete cleaning Lightly dampened w/ DI water enables VOC Free Wiping

14 Production Proven in the most advanced fabs 14 Polyester using 100% IPA MiraWIPE lightly dampened with DI water Alpha Wipe POST CLEAN READINGS.3 um.5 um 1 um 5 um 10 um MiraWIPE POST CLEAN READINGS.3 um.5 um 1 um 5 um 10 um Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE POSTClean Avg Total POSTClean Avg Total % Particle Defect Reduction 75.86% 78.34% 100% 100% 100% % Particle Defect Reduction 98.98% 99.34% 100% 100% 100% MiraWIPE VOC FREE WIPING LEAVES CLEANER SURFACE IMPROVING 1 ST PASS QUAL

15 Now you can hit for THE CYCLE!! IMPROVE FIRST PASS QUAL IMPROVE TOOL AVAILABILITY REDUCE PARTICLE CONTAMINATION REDUCE VOC ELIMINATE IPA

16 17 ELIMINATE VOC S AT THE SOURCE Why spend the high cost on VOC abatement systems that need to be monitored and serviced, when manufacturers can eliminate the source? To include; 1. Reduce wiper usage 2. Reduce cost associated with having to dispose of VOC Solvent waste 3. Improve 1 st Pass Quals - Reduction in cost of Test wafers 4. Improved PC Reduction in cost associated with tool downtime

17 WHERE TO USE MIRAWIPE with DI WATER PM related task on Front End Module, Wafer Handlers and Mini-Environment using DI water only 2. High Vacuum chamber PM s using DI water experience no pump down time penalty 3. Equipment skin external wipe downs, stainless steel carts and work surfaces using DI water only Following proper procedures and techniques will reduce wiper usage by 50%

18 19 MiraWIPE enables wafer fabs to replace IPA with DI Water greatly reducing VOC s and solvent waste while providing improved tool performance data at lower costs. contact@foamtecintlwcc.com