Material Safety Data Sheet

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1 Material Safety Data Sheet 1. PRODUCT AND COMPANY IDENTIFICATION Revision date: 12/18/2007 Supplier ROHM AND HAAS ELECTRONIC MATERIALS LLC A Subsidiary of The Dow Chemical Company 455 FOREST STREET MARLBOROUGH, MA United States For non-emergency information contact: For non-emergency information contact: Emergency telephone number Local emergency telephone number COMPOSITION/INFORMATION ON INGREDIENTS Component CAS-No. Concentration Water > 70.0 % Hydrazine < 25.0 % Organic acid < 10.0 % 3. HAZARDS IDENTIFICATION Emergency Overview Appearance Form Colour Odour liquid clear ammoniacal Page 1 of 7 Revision date 12/18/2007

2 Hazard Summary DANGER! Corrosive alkaline liquid and vapor causes severe skin and eye burns. Causes respiratory irritation. Onset of symptoms may be delayed. Prolonged, repeated contact, inhalation, ingestion, or absorption through the skin, may cause adverse effects to internal organ systems. TOXIC. MAY BE FATAL IF SWALLOWED. Contains a material which may cause cancer, allergic respiratory reaction and/or skin reaction and possibly birth defects. Potential Health Effects Primary Routes of Entry: Inhalation, ingestion, eye and skin contact. Eyes: Will cause severe conjunctival irritation, corneal damage, and may result in loss of vision. Skin: Material will cause chemical burns. Prolonged or repeated contact may cause itching and soreness and possible sensitization. Absorption through burns or open wounds may have the following effects: liver damage kidney damage blood disorders central nervous system depression Ingestion: Swallowing may have the following effects: corrosion of mouth, throat and digestive tract Repeated doses may have the following effects: liver damage kidney damage blood disorders central nervous system depression May be fatal if swallowed. Inhalation: Inhalation may have the following effects: severe irritation of nose, throat and respiratory tract Higher concentrations may have the following effects: severe irritation to nose, throat and respiratory tract and possibly lung damage systemic effects similar to those resulting from ingestion Target Organs: Eye Respiratory System Skin nervous system Liver kidney Blood Carcinogenicity Hydrazine ACGIH Confirmed animal carcinogen with unknown relevance to humans. Hydrazine US CA CRT Carcinogenic. Hydrazine NTP CARC Anticipated carcinogen. Hydrazine IARC Possible carcinogen. Hydrazine IRIS Probable human Page 2 of 7 Revision date 12/18/2007

3 carcinogen - sufficient animal evidence. Hydrazine NIOSH Potentially carcinogenic. 4. FIRST AID MEASURES Inhalation: Remove from exposure. If there is difficulty in breathing, give oxygen. Immediate medical attention is required. Skin contact: Wash off with soap and water. Continue washing for at least 15 minutes. Obtain medical attention if blistering occurs or redness persists. Eye contact: Immediately flush the eye with plenty of water for at least 15 minutes, holding the eye open. Obtain medical attention if soreness or redness persists. Ingestion: Wash out mouth with water. Have victim drink 1-3 glasses of water to dilute stomach contents. Do NOT induce vomiting. Obtain medical attention. Notes to physician Treat symptomatically. 5. FIRE-FIGHTING MEASURES Flash point Suitable extinguishing media: not applicable Not readily combustible. Select extinguishing agent appropriate to other materials involved. Specific hazards during fire fighting: No specific measures necessary. Special protective equipment for fire-fighters: Wear full protective clothing and self-contained breathing apparatus. Further information: This product may give rise to hazardous vapors in a fire. 6. ACCIDENTAL RELEASE MEASURES Personal precautions Wear suitable protective clothing. Wear respiratory protection. Material can create slippery conditions. Environmental precautions Prevent the material from entering drains or water courses. Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation. Methods for cleaning up Spills may be absorbed with appropriate absorbent material for alkaline materials. Transfer into suitable containers for recovery or disposal. Page 3 of 7 Revision date 12/18/2007

4 7. HANDLING AND STORAGE Handling Use local exhaust ventilation. Avoid contact with eyes, skin and clothing. Facilities storing or utilizing this material should be equipped with an eyewash facility and a safety shower. Avoid breathing vapor. Keep container tightly closed. Wash thoroughly after handling. Further information on storage conditions: Practice good personal hygiene to prevent accidental exposure. Storage Storage conditions: Store in original container. Storage area should be: cool dry well ventilated out of direct sunlight away from incompatible materials 8. EXPOSURE CONTROLS / PERSONAL PROTECTION Exposure limit(s) Exposure limits are listed below, if they exist. Component Regulation Type of listing Value Hydrazine Rohm and Haas TWA 0.01 ppm Rohm and Haas STEL 0.03 ppm Rohm and Haas Absorbed via skin ACGIH SKIN_DES OSHA_TRANS SKIN_DES ACGIH TWA mg/m ppm OSHA_TRANS PEL 1.3 mg/m3 1 ppm Eye protection: Chemical goggles and face shield. Hand protection: Neoprene gloves Skin and body protection: not applicable Respiratory protection: No personal respiratory protective equipment normally required. Engineering measures: Local exhaust 9. PHYSICAL AND CHEMICAL PROPERTIES Appearance Form liquid Colour clear Odour ammoniacal ph >10 Boiling point/boilingrange 100 C ( 212 F) Flash point not applicable Vapour pressure Similar to water Page 4 of 7 Revision date 12/18/2007

5 Vapour pressure kpa at 25 C (77 F) Relative vapour density Heavier than air. Water solubility Miscible Relative density Evaporation rate Slower than ether VOC's 0 g/l NOTE: The physical data presented above are typical values and should not be construed as a specification. 10. STABILITY AND REACTIVITY Hazardous reactions Stable under normal conditions. Conditions to avoid Materials to avoid Hazardous decomposition products polymerization contact with incompatible materials Strong acids Oxidizing agents Metals oxides of phosphorus, nitrogen oxides (NOx), oxides of carbon, Hydrogen, Ammonia, Will not occur. 11. TOXICOLOGICAL INFORMATION Toxicological information on this product or its components appear in this section when such data is available. Acute oral toxicity Acute inhalation toxicity Acute dermal toxicity Skin irritation Eye irritation Sensitisation LD50 rat 60 mg/kg LC50 rat 4 h 0.75 mg/l Vapor LD50 rabbit 93 mg/kg rabbit Corrosive rabbit Corrosive guinea pig Causes sensitization. Page 5 of 7 Revision date 12/18/2007

6 Carcinogenicity: In laboratory animals, evidence of carcinogenic activity was observed. Mutagenicity In vitro tests showed mutagenic effects 12. ECOLOGICAL INFORMATION Ecotoxicological information on this product or its components appear in this section when such data is available. Hydrazine Ecotoxicity effects Toxicity to fish Toxicity to algae Toxicity to aquatic invertebrates LC50 Bluegill sunfish (Lepomis macrochirus) 96 h 1.08 mg/l EC50 Algae (Selenastrum capricornutum) 72 h mg/l EC50 Daphnia magna 24 h 0.81 mg/l 13. DISPOSAL CONSIDERATIONS Environmental precautions: Prevent the material from entering drains or water courses. Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation. Disposal Dispose in accordance with all local, state (provincial), and federal regulations. Under RCRA, it is the responsibility of the product's user to determine at the time of disposal, whether the product meets RCRA criteria for hazardous waste. This is because the product uses, transformations, mixtures, processes, etc. may render the resulting materials hazardous. Do not remove label until container is thoroughly cleaned. Empty containers may contain hazardous residues. This material and its container must be disposed of in a safe way. 14. TRANSPORT INFORMATION DOT Proper shipping name Hydrazine, aqueous solution UN-Number UN 3293 Class 6.1 Packing group III Reportable Quantity Hydrazine IMO/IMDG Proper shipping name HYDRAZINE, AQUEOUS SOLUTION UN-Number UN 3293 Class 6.1 Packing group III Reportable Quantity Hydrazine Page 6 of 7 Revision date 12/18/2007

7 Transportation classifications may vary by container volume and may be influenced by regional or country variations in regulations 15. REGULATORY INFORMATION SARA TITLE III: Section 311/312 Categorizations (40CFR370): Immediate health hazard Delayed (chronic) Health Hazard SARA TITLE III: Section 313 Information (40CFR372) This product contains a chemical which is listed in Section 313 at or above de minimis concentrations. SARA Title III Components: Hydrazine US. Toxic Substances Control Act (TSCA) All components of this product are in compliance with the inventory listing requirements of the U.S. Toxic Substances Control Act (TSCA) Chemical Substance Inventory. California (Proposition 65) This product contains a component or components known to the state of California to cause cancer and/or reproductive harm. Components: Hydrazine OTHER INFORMATION Hazard Rating Health Fire Reactivity NFPA Legend ACGIH BAc OSHA PEL STEL TLV TWA American Conference of Governmental Industrial Hygienists Butyl acetate Occupational Safety and Health Administration Permissible Exposure Limit Short Term Exposure Limit (STEL): Threshold Limit Value Time Weighted Average (TWA): Bar denotes a revision from prior MSDS. The information provided in this Safety Data Sheet is correct to the best of our knowledge, information and belief at the date of its publication. The information given is designed only as a guidance for safe handling, use, processing, storage, transportation, disposal and release and is not to be considered a warranty or quality specification. The information relates only to the specific material designated and may not be valid for such material used in combination with any other materials or in any process, unless specified in the text. Version: 3.0 Print Date: 02/05/2013 Layout Page 7 of 7 Revision date 12/18/2007