化學濾網與循環經濟 Bring Chemical Filters into Circular Economy Jason Liu

Transcription

1 化學濾網與循環經濟 Bring Chemical Filters into Circular Economy Jason Liu Sales Manager, GreenFILTEC Taiwan Ltd.

2 Services Modular Chemical Filter ChemFFU Mobile Pollution Filtration System AMC Sampling & Analysis

3 REGENERATE

4 What is AMC?

5 Gas Molecules Particulate Contaminants Types of Dust Biological Contaminants What is AMC? Migration of Filtration Targets in Clean Environments Pollen House Dust Mite Allergens Viruses Cat Allergens Bacteria Heavy Dust Setting Dust Suspended Atmospheric Dust Cement Dust Fly Ash Smog Oil Smoke Tobacco Smoke Gaseous Contaminants Chart above is a re-work from

6 What is AMC? Airborne Molecular Contamination chemical contamination in the form of vapors not relevant to the cleanroom classification effects on semiconductor process haze on wafer or lens corrosion, T-topping Source of photo: 工業安全衛生月刊 , P15, 應用化學濾網去除某晶圓廠黃光區潔淨室的氨氣

7 What is AMC? Classification of AMC Levels MA HF, H2SO4, HCl, HBr MC DOP,DBP, Siloxanes, BHT Not Classified IPA, Acetone, O 3, H 2 O 2 SEMI F MB Amine,NH3 NMP,HMDS MD B2H6,BF3, AsH3,TPP Molecular Acid Molecular Condensable Molecular Base Molecular Dopant

8 What is AMC? Sources of AMC Outside the cleanroom Auto & Motor exhaust gas Factory exhaust gas General environment 5~10% Inside the Cleanroom Interior / building materials Instrument / parts materials Process chemicals Operating persons 20~30% 25~30% 30~40%

9 AMC Solutions

10 AMC Solutions Decrease upstream AMC Air washer Remove downstream AMC Complete Air Supply

11 AMC Solutions Chemical (AMC) Filters How the AMC filter works MA MB MC Env. AMC concentration: MA: 10 ppb MB: 10 ppb MC: 10 ppb M A M B M C AMC outlet: MA: <1 ppb MB: <1 ppb MC: <1 ppb

12 AMC Solutions Chemical (AMC) Filters Filter structure Metal frame Faceguards Filter cloths Adsorption Materials Supporting Nets Approx. Spec. AMC Filter Spec. FFU 2x4 FFU 4x4 Length 80 cm 100 cm Width 50 cm 90 cm Height 20~30 cm 15~30 cm Weight 10~20 kgs 15~35 kgs

13 AMC Solutions Chemical (AMC) Filters Annual filter waste Resource Make Use Dump Headaches on handling the filter disposals Filter type Quantity (pc) Height (m) Box type 40,000 11,680 Panel type 50,000 10,000 Total 90,000 21,680 Labor on exchanging filters Cost of stocking the retired filters Cost on dumping and processing filter disposals

14 Bring Chemical Filters into Circular Economy

15 65nm/45nm/40nm 28nm/20nm/16nm 10nm Bring Chemical Filters into Circular Economy Roadmap of Tool/FFU Type AMC filter Single Target ACID BASE VOC 3-in-1 Filter Acid + Base + VOC Regenerable Filter Base & VOC Modular Regenerable AMC Filters (*) Reduce Reuse Regenerate Reduce Regenerate * Detachable media *

16 Bring Chemical Filters into Circular Economy A Breakthrough of AMC Filter Design Modular panel type AMC filter Designed & supplied by GreenFILTEC Features: a) Replaceable media b) Regenerable media (*) c) Reusable frame d) Quick & easy installation (save 30% installation time) e) Outgassing free (PU free) f) Low pressure drop (15 Pa/layer) g) Waste reduction

17 Bring Chemical Filters into Circular Economy Traditional 3-in-1 AMC Filter GreenFILTEC Modular AMC Filter One time use Frame Reusable Non-replaceable, Quality Media Replaceable, Quality + Cost + Env. Friendly Heavy Weight Light Long Installation Time Short ( 30%) Huge Waste Few ( 85%)

18 Bring Chemical Filters into Circular Economy Maximize the Usage and Lifetime of AMC Filters 65~80% FFU FFU FFU FFU 30~65% New Air 80~90% MAU Make Air Unit

19 Bring Chemical Filters into Circular Economy Resource Make Use Regenerate Dump Tool 85% 15% 67 % Cost Saving FFU MAU

20 REGENERATE Services Modular Chemical Filter ChemFFU Mobile Pollution Filtration System AMC Sampling & Analysis