THORNTON 5000TOC Sensor and 700MAX demonstrate online measurement capability

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1 5 THORNTON Leading Pure Water Analytics THORNTON 5000TOC Sensor and 700MAX demonstrate online measurement capability A US-based wafer tool manufacturer to the Semiconductor industry produces ultrapure water (UPW) for manufacturing and laboratory use in their plant. Like most modern Microelectronics facilities, they also recycle or reclaim a great deal of this water. The complexity of the system demands fast online TOC monitoring to insure quality requirements are met to optimize system performance and provide protection for individual unit processes. Utilizing an integrated water system for manufacturing and laboratory needs Wafer manufacturing equipment used in a Class 1000 clean room must be manufactured and tested in an ultra-clean environment to insure equipment cleanliness and, ultimately, to insure the equipment will perform as specified. To achieve this goal the facility s manufacturing and test areas operate in a clean room environment where equipment is fully tested using UPW prior to shipment. To accomplish this, the facility must therefore produce and distribute UPW in the same manner as a large-scale semiconductor facility. The demand for significant volumes of water also requires the facility to reuse as much water as possible in order to meet discharge requirements and reduce impact on the local water supply that feeds the facility. To achieve these goals an integrated water treatment system is employed to produce UPW and treat reclaimed water. Organic contamination control is essential for system operation The water treatment system includes many process steps integrated through an array of inter-connected piping and control valves. Organic contamination is a constant threat to the system s performance which can develop from various sources. The raw city water brought into the plant can contain varied levels of large molecular organics. Valves, piping and other mechanical components, within the treatment process, can also contribute to the organic load in the water production and delivery systems. Most notable, and often

2 Contents Semiconductor News 5 THORNTON 5000TOC Sensor and 700MAX demonstrate online measurement capability THORNTON now provides configuration and data logging software for the 770MAX Ultrapure/ reclaim water treatment system. TOC Imprint Publisher Mettler-Toledo GmbH Process Analytics CH-8902 Urdorf, Switzerland 2 Editorial office process.marketing@mt.com Production Marcom CH-8902 Urdorf, Switzerland Illustrations Archives of Mettler-Toledo GmbH, Urdorf (CH) Mettler-Toledo Thornton, Inc., Bedford (USA) Subject to technical changes. Mettler-Toledo GmbH 6 / 05 Printed in Switzerland. most difficult to measure and treat, are the low molecular weight, complex organics found in chemicals used by the wafer manufacturing tools, which in this facility will influence TOC measurements during the tool s factory test phase. Maintaining UPW quality The ultrapure water requirements specify 100 gallons per minute be delivered through distribution loop piping with a sustained resistivity of <18.2 MΩ-cm and TOC of <2 ppb. TOC and resistivity measurement is needed at the beginning of the distribution loop and at the end of the loop prior to returning to the distribution storage tank. This is necessary for a number of reasons. First, to insure the unit processes within the treatment process is working effectively. The distribution loop includes various components such as pumps, TOCreduction UV lights, deionizer beds and ultrafilters. These may all be the source of increasing organic levels if one component fails or if one or all componenets are not properly maintained. TOC reduction UV lights are designed to reduce TOC levels by oxidizing and breaking down the ionic bonds of trace organics prior to final TOC deionization. As the UV lamp ages its effectiveness diminishes, resulting in less organic reduction thus more organic load on the downstream deionizers. Organic build up in mixed bed deionizers can not only decrease their performance, but can also organically foul the expensive anion and cation resins inside these beds. Continuous TOC measurement is the key to system control The value of a fast online TOC measurement at both points of measurement provides users with a control system to react quickly to a TOC level outside the specified limits. The benefit of a quick response provides the plant with more effective process control to avoid costly equipment down-time caused by high TOC values. The reclaim treatment system is integrated directly into the UPW treatment process. The reverse osmosis (RO) product water fills a reclaim storage tank, which is also fed from reclaimed UPW waste water from the manufacturing and test areas.

3 This scenario is acceptable due to the fact that the reclaimed water is of higher quality than the RO product water. Water exiting the reclaim storage tank is exposed to ozone treatment, activated carbon filtration and deionization to insure the water quality is adequate for introduction into the final polishing system. TOC measurement for reclaim water is critical prior to entering the reclaim storage tank. If TOC levels increase beyond specified limits an alarm condition will alert the control system to divert the reclaimed water to the plant s waste neutralization system where further treatment prepares the water for discharge from the plant. Reducing operational and maintenance cost At this point the added value of a fast online TOC measurement prevents contamination of reclaim treatment processes that greatly impacts the service life of the activated carbon and deionizer resins, leading to increased operating costs. The benefit is recognized by implementing similar instrumentation used in both the reclaim treatment system and the UPW system. This greatly simplifies operator training and reduces additional service, support and maintenance costs. Treatment processes Collection (Tank) Filtration Reverse Osmosis CEDI Ozone UV light Ozone destruct UV light TOC reduction Two-bed deionization Bioreactors Recycle / Reclaim 770MAX parameters available Conductivity (2-E, 4-E, Inductive) TOC Temperature ph (HF resistant) ORP Flow Pressure / tank Level 3

4 THORNTON now provides configuration and data logging software for the 770MAX Configuring and maintaining a 770MAX Multiparameter Analyzer / Transmitter installation is now easier than ever. With measurements from up to six sensors, there are many settings to be entered into the instrument. This can now be performed well in advance of startup on a laptop computer using Windows. This method of configuration provides an overview of all settings to optimize displays and functioning for the convenience of operators. THORNTON 770MAX Configuration Software is provided on a CD for convenient installation. Configuration All settings, for measurements, analog outputs, setpoints, relays, display, security, etc. can be established and viewed simultaneously, without pushing keys on the transmitter itself. Then with a mouse click, the optimized configuration is downloaded from the computer to the 770MAX at any time. In similar manner, the configuration of any 770MAX can be uploaded to the computer. Any number of configurations can be stored on the computer for backup security. They may be downloaded to duplicate configurations elsewhere or to set up a replacement instrument quickly if needed. 5000TOC Sensor joins the 770MAX configuration software package Along with the introduction of the new 5000TOC Sensor for total organic carbon, the 770MAX Configuration and Data Logging software now has the enhanced capability to incorporate TOC parameters from the 5000TOC Sensor, including TOC concentration units, display resolution, and measurement averaging selections. Data logging In addition to configuration, this software includes a data logging feature that collects measurement data at a selectable interval from a 770MAX. The data is stored in a file accessible to spreadsheet software such as Excel which allows easy graphing. Data logging also allows entry of comments into the file at the time they occur to note any system changes or calibrations for later review. This built-in data logging capability can be especially valuable for troubleshooting a monitoring system during startups or changes. THORNTON 770MAX Windows Configuration Software runs on computers using Microsoft Windows 98 or later versions and connects to the 770MAX with an RS232 cable. It is available for individual use or with site license for more widespread use. 4

5 Instrumentation that meets Semiconductor industry requirements s instruments demonstrate proven performance far beyond ultrapure water measurement applications. Innovative instrument technology provides the flexibility to configure a measurement system for specific process needs throughout today s facilities. THORNTON S 770MAX and 200/ 2000 measurement systems provide outstanding performance to monitor and control UPW (ultrapure water) make-up and distribution systems. They are also used in wafer processing tools, UPW re-use processes such as recycle, reclaim, waste neutralization and other facility operations such as scrubbers, cooling towers and boilers. The 770MAX is a most advanced instrument for online measurement. It offers six-channel multiparameter measurement capability for resistivity/conductivity, TOC, ph, ORP, dissolved oxygen and temperature plus flow, pressure and level. The configuration flexibility of the 770MAX is unmatched, providing a total of 16 measurements from the 6 input channels with unique features such as specialized temperature compensation modes and derived measurements. The 200 Series, comprised of the 200CR, 200pH, 200FLOW, 200CRS and 2000 instruments, provide two channel measurement of resistivity / conductivity, ph, ORP, dissolved oxygen, plus temperature. The 200 Flow provides up to four channels of flow measurement using a variety of sensor options. Wafer cleaning tools used in chip manufacturing require accurate flow measurement for the transport of UPW, chemicals, or combinations of the two. Flowrate, and the amount of fluids used, are critical to the efficient operation of this equipment. The 317 Series PFA Vortex flowmeter is ideally suited for this application. The molded PFA body offers excellent thermal and chemical resistant properties. No moving parts assures no particle shedding. Industry preferred Flaretek style connections are also available on this sensor. Flaretek is a registered trademark of Entegris Inc. 5

6 Training and technical services On-site instrument operation and calibration training workshops THORNTON s Operator Training Courses are tailored to each customer s requirements. The course is conducted in a classroom setting where interaction between instructor and participants is encouraged. Each attendee is supplied with material detailing the course content. Instruments are provided for hands-on participation. The areas covered in this training program focus on THORNTON instrumentation, calibration, and maintenance specific to your facility. Additional technical topics may be added or substituted as requested. Traceable instrument calibration THORNTON offers instrument calibration and validation services traceable to national standards, industry guidelines, and/or regulatory requirements. Services using factory-trained technicians are available at our facilities in Bedford, Massachusetts or on-site at your location. Each calibrated/validated instrument is supplied with the appropriate calibration documents. Specialized conductivity calibrations Choose one of seven unique conductivity calibrations to fit your application needs, from standard calibrations to customerspecified temperature and ASTM verification points. System calibrations are also available where the instrument and sensors are calibrated together, optimizing system accuracy. Service and calibration contracts A THORNTON representative will provide on-site service for items covered under the agreement. These services include, but are not limited to: Calibration/validation of instrument and sensor system Issuance of appropriate documentation Identification and verification of all software revisions Minor repairs or adjustment of instruments at a discounted labor rate Installation and validation support services TOC test services Power newsletter conference calendar Conference Location Dates 2005 Semicon WEST San Francisco, California USA July 12 Semicon Taipei, Taiwan September 12 Ultrapure Water Conference Portland, Oregon USA October 25 Mettler-Toledo Thornton 36 Middlesex Turnpike Bedford, MA 01730, USA Tel: Fax: THORNTON Leading Pure Water Analytics For local distributors please visit: 6