New proposal of the environmental friendly abatement system for LED MOCVD process

Transcription

1 CNF-1927 New proposal of the environmental friendly abatement system for LED MOCVD process March 2012 Tsutomu Tsukada Kanken Techno co., Ltd. 1

2 Agenda 1. Process gases for CVD and Dry Etch application 2. Abatement methods for process gas and byproduct 3. Advantage of Electric Heating Abatement System 4. Abatement systems for GaN MOCVD 2

3 Material Balance CVD and Dry Etching Systems Dilution N 2 Exhaust Water etc. Byproducts Air etc. Process Tools CVD, Etching Pump Abatement System Process gases Process Gases Water On Wafer Wall of tools Solid byproducts Water soluble chemicals 3

4 Reaction in the CVD Systems Deposition SiO 2 deposition Si(OC 2 H 5 ) 4 SiO 2 + O(C 2 H 5 ) 2 Si(OC 2 H 5 ) 4 + O 3 SiO 2 + CO 2 + H 2 O + etc SiH 4 + N 2 O SiO 2 + H 2 + N 2 SiN deposition SiH 4 + NH 3 Si 3 N 4 + H 2 SiOC deposition (CH 3 ) 3 SiH + H 2 O CH 3 SiO x + C n H m + etc Metal deposition M(C x H y O z ) n + H 2 M + C n H m +etc 4

5 Reaction in the CVD Systems Cleaning C 2 F 6 (PFC) plasma cleaning C 2 F 6 + SiO 2 SiF 4 + CO 2 NF 3 remote plasma cleaning NF 3 F 2 + N 2 F 2 + SiO 2 SiF 4 + O 2 SF 6 plasma cleaning SF 6 + SiO 2 SiF 4 + SOF 2 + SF 4 +etc ClF 3 gas cleaning ClF 3 F 2 + Cl 2 F 2 + SiO 2 SiF 4 + O 2 HCl gas cleaning (Need temperature) HCl + Si SiH 4 + Cl 2 5

6 Byproducts formation during Dry Etching Si Si + CF 4 + O 2 SiF 4 + CO 2 Si + Cl 2 SiCl 4 Si + Br 2 SiBr 4 Dopant P + Cl 2 PCl 3 As + Cl 2 AsCl 3 SiO 2 SiO 2 + CHF 3 SiF 4 + CO 2 + HF Al Al + Cl 2 AlCl 3 Photo resist C n H m + Cl 2 C x H y Cl + HCl 6

7 Necessity of abatement system for process tools Toxic gases are produced as byproducts during process. Then, the exhausted gases should be introduced into the abatement system, and are converted to safety gases. Air pollution gases such as ODS, Photochemical smog and global warming gases should be made harmless through the abatement system. Abatement system must be treated process gases and byproducts. If the substance exhausted from the dry pump is low vapor pressure or react with water to produce solid byproduct, the pipe between the pump and the abatement system must be heating, or the exhausted gas will be diluted by sufficient nitrogen. If there is no flame arrester system, inflammable gases should be diluted to less than LEL. 7

8 Methods of the abatement Combustion Combustion with fuel gases and combustion air Electric heated oxidation Oxidized or decomposed in the electric heated reactor Catalysis Oxidized or reduced by catalysis Adsorption (Dry bed) Adsorbed chemically or physically on the adsorbents Plasma abatement Oxidized or decomposed using plasma Water scrubber Scrubbing by water Hydrolyzed 8

9 Company Profile Company Name: Kanken Techno Co., Ltd. Established: 1978 Headquarter: Kyoto, Japan President: Hiroshi Imamura (Founder&Engineer) Number of Employee: 450 Product: Abatement systems, Factory scrubber, Deodorizing system(voc abatement), etc. *Specialist of Abatement Admission Group: The Energy Conservation Center, Japan Semiconductor Equipment Association of Japan 9

10 Share in Japan( ) Ref:Gas Reviw Total Market 16 Billion Yen 21 Billion Yen 22 Billion Yen Combustion (a dozen companies) 55.0% 40.0% 33.0% Kanken Techno 17.5% 22.2% 30% Showa Denko 6.5% Japan Pionics 12.5% 4.0% 4.5% 5.0% Ebara 11.5% Other 1.0% Taiyo Toyo Sanso 10.0% Kanken Techno 17.5% 3.0% 3.0% 4.0% 5.5% Nippon Sanso Ebara 6.0% 6.0% Showa Denko 6.5% Japan Pionics 12.5% other 20.8% Ebara 12.5% Kanken Techno 22.2% Japan Pionics 5% Edwards Taiyo 15% Nippon Sanso 14% Edwards 11.5% Ebara 11% Others 14% Kanken Techno 30% Taiyo Nippon Sanso 25% Share of Combustions are decreasing, and that of electric heater are increasing. 10

11 Abatement System of KT1000 The combination of inlet and outlet wet scrubbers, and electric heated reactor is our original technology The First KT1000 (POU Scrubber) was released in 1993 based on the 15 years of designing and manufacturing experiences in central abatement systems and deodorizers for many fields of plants. We have been manufacturing those systems more than 30 years. U.S Pat : No Japan PT : No No No No No No No No

12 Feature & Result Feature Abatement with oxidation using Electric Heater Safe Low running Cost Low environmental load Scrubber at front & back side Unique system with Patent High efficiency Installation Result 5000unit as of Jan

13 System Flow Inlet Scrubber Reactor Outlet Scrubber Feed Gas P INV Fan F Exhaust N 2 H Air F Fan Water Pump P Drain 13

14 Product Lines of KT Series Process Tools CVD Gas Cleaning Gas KT1000M CVD gas abatement KT1000MF/MFS/MFH/MFT/FA For high flow abatement CVD SiH 4 SiH 2 Cl2 Si2H6 PH 3 NH 3 B2H6 TEOS N 2 O WF6 F 2,HF NF 3 C2F6 KT1000H-mini Mini model with KT1000H KT1000F For NF 3 abatement KPL-C AP Plasma abatement with anti-powdery performance MOCVD Etching Ion Implant Epitaxial O3 H 2 NH 3 SiH 4 etc Implantation AsH3 PH 3 BF3 Epitaxy H 2 base SiH 2 Cl2 HCl COF 2 Etch Gas SiF4 HBr HCl CF4 SF 6 BCl3 etc KT1000MOC/MOCA For MOCVD abatement KD101&KD102 Abatement by Adsorbent KC100 Ozone killer by Catalyst KT1000EP Abatement incl. High concentration H 2 KW100/300 Wet Scrubber KPL-W&D AP Plasma abatement KT1000H/HA For PFC abatement incl. C2F6 KT1000EX/EXA For PFC abatement incl. CF4 14

15 Comparison between KT(Electrically Heated) & Fuelled-Combustion 15

16 Combustion Abatement Toxic substances are detoxified using flame Pros : All gases can be processed. Cons : Need Fuel Need Fuel Line Using Flame Not Safety Non-uniform Temperature distribution Make local high temperature region Local high temperature Producing thermal NOx Need Combustion Air Large volume of exhausted gas Combustion Byproduct CO 2 and other combustion gases 16

17 Electric Heater Abatement Toxic substances are detoxified using electric heaters Pros: Cons: All gases can be processed. No Fuel No Fuel Line No Flame Safety Uniform Temperature distribution Controllable No thermal NOx No Combustion Air Small volume of exhausted gas No Combustion Byproduct No CO 2 Energy can be saved during combustion gases abatement Long heat up time and cool down time Heater replacement (2-5 years, ~9 k$) Electric heater is the most superior abatement system for environmental load. 17

18 Low Environmental Load (NF 3 Abatement) Electric Heated Electrically- Heated N 2 :1L/min HF:6L/min Heater Exhaust Total 107L/min is cooling Exhaust prosess gas N 2 :100L/min by outlet scrubber. NF 3 :2L/min N 2 :100L/min Fuelld-Combustion NOx:2L/min Air:600L/min Combustion Exhaust Fuelledcombustion Fuel CO 2 :90L/min Fuel H 2 O:120L/min Total 918L/min is cooling by outlet scrubber. C 3 H 8 : 30L/min Air: 750L/min thermal NOx 18

19 Water included in the Exhausted Gases Prosess gas 100L Exhausted gas volume Electric Heated 120L Fuelld-Combustion Water in the Exhausted gas 4.04g Cause of corrosion and water condensed on the exhausted pipe 35 times 890L 140g 19

20 Abatement system for LED application KT1000MOC-W 20

21 GaN MOCVD Process Gases High Flow Rate of H 2 Around 200 SLM for 1 CVD chamber High Flow Rate of NH 3 Around 100 SLM for 1 CVD chamber Small amounts of dopant gases TMG, TMI, TMA, Cp 2 Mg, SiH 4, etc. High concentration of H 2 and NH 3 N 2 is almost equal of H 2. Abatements of NH 3, H 2 and MO should be required. Water Scrubber Problem of aqueous ammonia Combustion Problem of NOx byproduct Catalysis Problem of space and running cost Need New Proposal!! 21

22 Advantage Technology of KT1000MOC-W High flow rate of NH 3 is decomposed and oxidized using the electric heated high temperature reactor, which is Kanken Techno patent pendent. High flow rate of H 2 is simultaneously oxidized in the reactor. No supplying water and no aqueous ammonia drain. Very low emission of NOx ( less than 50 ppm) DREs of NH 3 and H 2 are more than 99.99%. Electricity also can be saved because of making full use of the reaction energy and of lower flow of the exhausted gas from the abatement system. It is possible to reuse the reaction energy of much volumes of NH 3 and H 2 as hot water or steam. 22

23 Schematic Flow 2NH 3 N 2 + 3H 2 2H 2 + O 2 2H 2 O 2(CH 3 ) 3 Ga + O 2 Ga 2 O 3 + 6CO 2 + 9H 2 O etc. F Exhaust ~40 Inlet H 2 ~800 SLM NH 3 ~400 SLM MO gases few Reactor Cooling Water Cooling Tower & Powder Trap Reaction Air Heat Exchanger 23

24 Comparison of NH 3 abatement systems Item Unit KT1000MOC Water Scrubber Catalysis LNG Combustion Processing Stand-by Processing Stand-by Processing Stand-by Processing Stand-by Electric Power MW/year Fuel km 3 /year % H 2 SO 4 ton/year Fresh Water m 3 /year (NH 4 ) 2 SO 4 treatment m 3 /year CO 2 Emission ton/year Total Cost 1000Yen/year H SLM, NH SLM, the other gases 550 SLM (Processing), 200 SLM (Stand-by), Processing 50 %. CO 2 Emission from Electricity Generation: kgco 2 /kw, Electric Power: 7 yen/kw, LNG 54 en/m 3, Fresh Water: yen/ton, H 2 SO 4 : 8120 yen/ton, Drain Treatment: 2000 yen/m 3.