MiraWIPE STOP ALLOWING POLYESTER WIPES HANDCUFF IPA TO YOUR CLEANROOM

Transcription

1 MiraWIPE STOP ALLOWING POLYESTER WIPES HANDCUFF IPA TO YOUR CLEANROOM

2 02 OUTLINE All Stakeholders are Environmentalists The Sustainability challenge VOC Emissions & related consequences IPA is a major source of VOC s Why is IPA used in the fab? VOC Free wiping is production proven to reduce VOC s VOC Free Cleaning demonstrated Green Means Cost $avings PM applications Conclusion

3 03 ENVIRONMENTAL CONSTRAINTS FOR THE SEMICONDUCTOR INDUSTRY ARE ONLY INCREASING Semiconductor industry is looking for Break-Thru suitable Non-VOC solvent as an alternative to IPA to perform PM related tasks - ISMI Symposium on manufacturing effectiveness

4 04 The Modern Landscape Customers expect suppliers to be Green Communities and Governments demand sustainability and compliance The web and social media make accidents & environmental issues immediately visible. Green operations impact company reputation and brand recognition

5 05 Fabs Have Invested Heavily to Improve Sustainability Water & Energy usage have both been reduced VOC emission reductions have been very hard to come by Given the scope of the Investment, preventable fire risks are unacceptable Pre-saturated wipers and segregated waste containers are expensive and do not address the root cause problem

6 06 VOC EMISSIONS IMPACT MULTIPLE STAKEHOLDERS Employees Breathe It. Communities Are Exposed To It. EH&S Struggles with Reporting and Disposal Issues. Fab Management Must Contend With Health, Safety, and Process Risks.

7 07 WHAT ARE VOLATILE ORGANIC COMPOUNDS(VOC)? Volatile Organic Compounds (VOC) are organic chemicals that have a high vapor pressure at ordinary room temperature VOCs present health, fire, and process risks and are costly to manage IPA is 100% VOC substance

8 08 THE PROBLEM VOC EMISSION ISSUES 20% - 50% fab VOC Sources come from Isopropyl Alcohol (IPA) saturated wipes for surface cleaning o Tool skins and chambers, work surfaces, laminated tool aids, safety glasses... To make matters worse o o More than half the IPA used on wipe remains on wipe when discarded Making 25% of fab VOC sources to come from discarded IPA saturated wipes

9 WHY IPA? Engineers are led to believe they need IPA to leave a surface clean & dry 09 Polyester wipers restrict operators due to Its fabric design. When used with DI Water, the surface remains wet. This results in facilities restrained to using harmful VOC Solvent - IPA POLYESTER WIPES HAVE HANDCUFFED THE INDUSTRY TO IPA FOR DECADES

10 The Solution MiraWIPE with DI Water 10

11 11 To Reduce VOC s FABS NEED SOLVENT FREE WIPING For years the industry has searched in vain for an IPA replacement, when what was needed was a wiper that could be used with DI water Polyester w/ IPA VS. DI Water: DI water would be the perfect cleaning solution if only surfaces could be left clean and dry VOC Free Cleaning:

12 MiraWIPE & DI H2O More surface area and interstial spaces enable IPA like wiping performance 13

13 Unique Fabric Design = SOLVENT FREE WIPING 14 Non-symmetrical 1-2um micro fiber structure provides superior cleaning efficiency in removing sub-micron particles and metal contaminants from critical environments The star shape structure increases wiper surface area by 8 10X enabling faster more complete cleaning Lightly dampened w/ DI water enables VOC Free Wiping

14 Production Proven in the most advanced fabs 15 Polyester using 100% IPA MiraWIPE lightly dampened with DI water Alpha Wipe POST CLEAN READINGS.3 um.5 um 1 um 5 um 10 um MiraWIPE POST CLEAN READINGS.3 um.5 um 1 um 5 um 10 um Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE Alpha Wipe MiraWIPE POSTClean Avg Total POSTClean Avg Total % Particle Defect Reduction 75.86% 78.34% 100% 100% 100% % Particle Defect Reduction 98.98% 99.34% 100% 100% 100% VOC FREE WIPING & VERY HIGH 1ST PASS QUAL RATES LEAD TO REDUCE COSTS!

15 16 Cleaning With Water VOC FREE CLEANING DEMONSTRATION Standard polyester wipers used with 100% IPA will leave 35% more contaminants on a critical surface than using MiraWIPE lightly dampened with DI water. MIRAWIPE DEMONSTRATION MiraWIPE Lightly Dampen Video: MiraWIPE Comparison Video: a) Visible contaminants left on surface after using polyester wipe

16 17 Data from recent fab wide conversion: 1. 42% reduction in wiper usage provided 17% reduction in overall wiper cost 2. Reduction in hazardous waste removal cost 3. 1 st Pass Quals - Reduction in cost of Test wafers 4. Improved PC Reduction in cost associated with tool downtime 5. MiraWIPE w/di water - Eliminated cost associated with having to dispose of VOC Solvent Waste a) Cost of disposing VOC Solvent waste greater than initial cost of bringing material into the fab MiraWIPE provides a reduction in VOC emissions at a lower cost

17 WHERE TO USE MIRAWIPE with DI WATER PM related task on Front End Module, Wafer Handlers and Mini-Environment using DI water only 2. High Vacuum chamber PM wipe downs using DI water only 3. Equipment skin external wipe downs, stainless steel carts and work surfaces using DI water only Following proper procedures and techniques will reduce wiper usage by 50%

18 19 THE CONCLUSION MiraWIPE enables wafer fabs to replace IPA with DI Water greatly reducing VOC s and solvent waste while providing improved tool performance data at lower costs. contact@foamtecintlwcc.com