Wet Chemicals and Specialty Cleaning Chemistries

Transcription

1 2017 Wet Chemicals and Specialty Cleaning Chemistries For Semiconductor Device Process Applications TECHCET s Supply Chain & Market Critical Materials Report Prepared by Yu Bibby, Ph.D. With contributions from Terry Francis & Lita Shon-Roy TECHCET CA LLC PO Box 3056 Rancho Santa Fe San Diego County, CA info@techcet.com Copyright 2017 TECHCET CA, LLC. #WetChem-CMCFabs LS

2 Table of Contents Page # 1 EXECUTIVE SUMMARY Electronic Wet Chemicals Market Results The Worldwide Chemical Industry in Brief Electronic Chemicals Supply Chain Issues Environmental, Health, and Safety Market Assessment SCOPE WORLDWIDE INDUSTRIAL CHEMICALS MARKET US: Marked by Optimism Cost of Manufacturing Wet Chemicals in US Europe: Sustainability to offer growth opportunities Asia: China is slowing down, but regional growth is solid WW HIGH PURITY ELECTRONIC WET CHEMICAL MARKET Market Revenues Market Overview - Basic Wet Chemicals Sulfuric Acid Hydrogen Peroxide Phosphoric Acid HF / BOE products Nitric Acid RAW MATERIAL AND RELATED SUPPLY CHAIN ISSUES Hydrochloric Acid (HCI) - Raw Material Supply Chain Solvents and the Petrochemical Market Phosphoric Acid and Phosphor Rock Phosphor Rock and China China s new Rare Earth Policy & impact on the worldwide rare earth industry The World s Phosphor Rock Production and Reserves Phosphor Rock and Low Grade Bulk Phosphoric Acid Price Phosphoric Acid Usage Worldwide HF and the Fluorspar Supply Chain Fluorspar Trade and Production Copyright 2017 TECHCET CA LLC P a g e 2 of 175

3 6... ADVANCED CLEANING CHEMISTRIES- BLENDS AND ADVANCED FORMULATIONS Front End of Line Specialty Cleans in Brief Low Temperature EPI Hi K Gate Preclean Back End of Line Post-Etch Residue Removal Aluminum Cleans Copper Cleans MATERIALS OPPORTUNITIES Green Chemistries D.I. Water Pirana Waste Disposal Blending systems Metrology Challenges Ge Wet clean TiN Wet Etching Effect of Additives in HF cleans POST CMP CLEANING The post CMP cleaning market overview/dynamics The pcmp cleaning solutions requirements New pcmp cleaning chemistries/ solutions Cu pcmp W pcmp Ceric pcmp III-V pcmp The pcmp cleaning Market Growth SUPPLY CHAIN CONNECTIONS-MAKERS & SUPPLIERS ENVIRONMENTAL, HEALTH AND SAFETY US Global Warming Regulation Updates Chemical Regulations-TSCA reform crossed the finish line REACH COMPANY PROFILES China Suppliers & Makers JM (JiangyinJianghua Microelectronics Materials Co), Jiangyin Runma Electronic Material Co Rudong Zhenfeng Yiyang Chemical Co., Ltd. (maker) Copyright 2017 TECHCET CA LLC P a g e 3 of 175

4 Bluestar New Chemical Material Co., Ltd. (Maker and Supplier) Air Liquide (Supplier) BASF (Maker, Purifier and Supplier) Dongwoo Fine Chemicals, Ltd. (Korea, Purifier& Supplier) Dow Chemical (Maker) Eastman Chemical Company (Maker) FUJIFILM Ultra Pure Solutions, Inc. (Maker, Purifier & Supplier) Honeywell International Inc. (Maker, Purifier & Supplier) Israel Chemicals Ltd. (Maker) Phosphoric Acid Kanto Chemical Co., Inc. (Purifier & Supplier) KMG Chemicals Inc. (Maker, Purifier & Supplier) Avantor / Mallinckrodt Baker, Inc. (Purifier & Supplier) Mitsubishi Gas Chemical Group, Inc. (Maker & Supplier) One Equity Partners Peroxychem (Maker) Solvay* (Maker) APPENDIX A: CHINA S 5 YEAR PLAN APPENDIX B: PHOSPHORIC ACID MARKET APPENDIX C: NITRIC ACID DATA ON WORLD CONSUMPTION APPENDIX D: WORLD S PHOSPHOR ROCK PRODUCTION AND RESERVES APPENDIX E: SEMICONDUCTOR HF/BOE MARKET SIZE APPENDIX F: SPECIALTY CLEANING PRODUCTS - BACKGROUND APPENDIX G: WET CHEMICAL PURITY REQUIREMENTS AND TRENDS APPENDIX H: POST CMP CLEANS BACKGROUND Copyright 2017 TECHCET CA LLC P a g e 4 of 175

5 List of Figures Page # Figure 1: World Chemical Production at a Glance Figure 2: World Chemicals Sales by Country: Top Figure 3: World Chemicals Sales by Regions...22 Figure 4: International Comparison of Chemical Production Growth by Regions ( )..23 Figure 5: US Chemical output changes...27 Figure 6: Fuel, Power and Feedstock Cost as a Percent of Total Costs for Selected Chemical Products...30 Figure 7: Annual GDP growth for China, India and Developing Asia...34 Figure 8: Asian Countries GDP Comparison...35 Figure 9: Historical data for China s GDP Annual growth rate...37 Figure 10: WW Electronic Wet Chemicals & Specialty Cleaning Chemicals...43 Figure 11: WW Sulfuric Acid Revenue Estimate ($M s)...44 Figure 12: WW Hydrogen Peroxide Revenues Estimate ($M s)...46 Figure 13: WW high Purity Phosphoric Acid Revenues Estimate ($M s)...47 Figure 14: WW HF/BOE Revenues Estimate ($M s)...48 Figure 15 WW Nitric Acid Revenues Estimate ($M s)...49 Figure 16: The World Consumption of Hydrochloric Acid...51 Figure 17: Worldwide Spot Market Petroleum Price History...53 Figure 18: China s new rare earth materials Resource Tax...56 Figure 19: 2016 Worldwide Phosphor Rock Productions...59 Figure 20: Phosphor Rock Price Trends...60 Figure 21: Worldwide Usage of Phosphoric Acid...61 Figure 22: Worldwide Fluorspar Production Figure 23: Worldwide Fluorspar Reserves Figure 24: Growth in Cleaning Volumes/...66 Figure 25:Photoemission spectra of HF-Passivated Si Surface...68 Figure 26: High K Logic Gate Structure...69 Figure 27: Aluminum Cleans Market Figure 28: WW Copper Cleans Market Revenue Estimate ($M's)...71 Figure 29: CMP Challenges in 10nm/7nm...76 Figure 30: UPW Usage Billions of Gallons Per Year - Estimate for Total Semiconductor Device Wafer Starts Figure 31: Total SPM Waste Millions of Gallons per Year Estimate Copyright 2017 TECHCET CA LLC P a g e 5 of 175

6 Figure 32: Ge Wet Clean NH40H versus...83 Figure 33: Surface Cleaning Metal REmoval Efficiency on Si and Ge...84 Figure 34: Wet Cleaning of WF Metals in FinFET...85 Figure 35: Chelating Agents for Different Metals...86 Figure 36: Total Revenue for Post CMP Cleans...87 Figure 37: Post CMP Cleaning Market Shares by % of WW Revenues...89 Figure 38: Advance Cu Cleaning Mechanism...92 Figure 39: Design of EKC Gen IV Cleaner...93 Figure 40: III-V Cleaning and Etching...95 Figure 41: Annual Wafer Starts...96 Figure 43: World Consumption of Nitric Acid Figure 44: World Phosphoric Acid Capacity Profile (fertilizer grade) Figure 45: China s Phosphoric Production vs Capacity Figure 46: World Phosphoric Acid Supply (Production) vs Demand Figure 47 Basic usages for fluorspar and hydrofluoric acid (HF) Figure 48: Average Acid-Spar Price Trends Figure 49 CMP Process Steps per Node Copyright 2017 TECHCET CA LLC P a g e 6 of 175

7 List of Tables Page # Table 1: Global Chemical production by Country/Region Percentage Change...16 Table 2: Global Chemical production by Segment, Percentage Change...17 Table 3: Major Chemical Mergers & Acquisitions in Table 4: C&EN s Global Top 50 Chemical Companies for Table 5: Worldwide Chemical Industry Growth...26 Table 6: Worldwide (WW) High Purity Wet Chemicals Market Ranking...41 Table 7: Semiconductor Wet Chemical Regional Market Leaders & Market Shares...42 Table 8: Annual Production of Phosphoric Acid by Region...62 Table 9: Wet Chemical Suppliers for Selected Chemicals...98 Table 10: JJM Product Listing Table 11: Runma Product Listing Table 12: Air Liquide Sales and Earnings Table 13: BASF Sales and Earnings Table 14: Dow Sales and Earnings Table 15: Eastman Sales and Earnings Table 16: Honeywell Sales and Earnings Table 17: ICL Performance Products Group (ICL-PP) Sales and Earnings Table 18: Kanto s Ultra Pure Chemicals products list Table 19: KMG Sales and Earnings Table 20: UltraPure Chemicals/OM Group products lists (Part of KMG) Table 21: Mitsubishi Sales and Earnings Table 22: The new Solvay Business Structure with Five Operating Segments Table 23: Solvay Sales and Earnings Table 24: Aluminum and Copper Clean Product Examples Table 25: Phosphoric Acid Specification - SEMI Standards Copyright 2017 TECHCET CA LLC P a g e 7 of 175