半導體水質及氣體分析的革新技術 Continuous Water Analyser (CWA) & Gas Analyser

Transcription

1 Max Chen 陳昌鈺, Process Automation Division, Measurement Products, ABB Taiwan, Oct. 29, 2014 半導體水質及氣體分析的革新技術 Continuous Water Analyser (CWA) & Gas Analyser November 3, 2014 Slide 1

2 Introduction CWA Analyzer PH/ORP Analyzer Conductivity Analyzer NH 3 Analyzer Silica Analyzer Others Analyzer November 3, 2014 Slide 2

3 Comparison of Liquid and Solid Matrix Reference Sensor Solid Matrix Reference Sensor Standard Sensor Mobile reference solution: Ag/AgCl Reference Wood Plug Epoxy Barriers Environment resistance -- Corrosive or Normal Respond time -- Dramatically PH change Wood Dowel Temperature Compensation Element Patented Plunger KCl Slurry Measuring Electrode November 3, 2014 Slide 3

4 A Solution for any Application Need TB5 Solid Matrix Reference Ultimate 3Ps Resistance Harsh processes Chemicals/Pulp&Paper AP300 Gel reservoir double junction water and wastewater light industry low cost AP200 Sealed Solid Gel reservoir Very quick TC Response CIP/Food applications Light Chemical 7660 KCl Reservoir Highest Integrity Maintainable Purest Waters Power Industry AP100 Cartridge KCl Slurry Double junction Clean Waters & Effluents Municipal & Boiler Water November 3, 2014 Slide 4

5 Analytical Product Groups Conductivity Sensors A C Electrodes 2 electrode for Low conductivity W H 4 electrode for High conductivity

6 November 3, 2014 Slide 6

7 Analytical Product Groups ph/redox (ORP) & conductive Analysers TB84 ph/orp & Conductive 2/4-Wire AC Power Analyzers FM and CSA Non-incendive approvals 2 analog outputs, 3-relays Sensor cleaning AX400 ph/orp & Conductive 4-Wire AC Power Analyzers( 多點式 ) 4-wire ph/orp analyzer for the water / power industries Single input with PID control or dual input (non-pid) NEMA 4X / IP 66 2 analog outputs & 3-relays / Expandable to 4 analog & 5 relays PROFUBIS DP 2 Sensors connection function(ph/conductive/do) November 3, 2014 Slide 7 Sensor cleaning

8 Introduction CWA Analyzer PH/ORP Analyzer Conductivity Analyzer NH 3 Analyzer Silica Analyzer Others Analyzer November 3, 2014 Slide 8

9 Why should I detect NH3? November 3, 2014 Slide 9

10 Aztec 600 ISE Ammonia Analyzers Installed Base November 3, 2014 Slide 10

11 Overview of Aztec 600 ISE Ammonia Analyzer November 3, 2014 Slide 11

12 Spec and Comparison of Ammonia Analyzer Principle Measurement range Accuracy ABB H 台灣自有品牌 Gas-sensing ammonia probe to 1000 ppm NH3 <±5 % of reading2 or ±0.02 ppm for 0.05 to 500 ppm NH3 (whichever is the greater) Gas-sensing ammonia probe to 1000 ppm NH3 納氏試劑比色法 0.02~300 ppm 3% ±0.05 mg/l Unknown Response time 5 minutes 5 minutes 7 minutes Repeatability Win!! <±2 % of reading3 or ±0.02 ppm (whichever is the greater) Win!! 2% ±0.05 mg/l Unknown Weight 15 kg 31 kg Unknown Dimensions 366 x 653 x 183 mm 540 x 720 x 390 mm Unknown November 3, 2014 Slide 12 Win!! Eng

13 Spec and Comparison of Ammonia Analyzers ABB H 台灣自有品牌 Analog outputs 6 Win!! 1~3 1 Average consumption of Reagent 2 months / 2.5 L 1 month / 1 L 3 months /? L Win!! Auto- calibration 4 times / day Win!! 2 times / days Unknown SD Card Yes No No Win!! November 3, 2014 Slide 13 Eng

14 Aztec 600 ISE Ammonia Analyzers Installed Base November 3, 2014 Slide 14

15 Introduction CWA Analyzer PH/ORP Analyzer Conductivity Analyzer NH 3 Analyzer Silica Analyzer Others Analyzer November 3, 2014 Slide 15

16 Analytical Product Groups NAVIGATOR & Power Industry Analysers / Silica November 3, 2014 Slide 16

17 Routine Maintenance Yearly: - - Replace pump tube assemblies - Replace pump capstans

18 Silica Analyzer Comparison Brand Range Accuracy Silica Analyzer comparison Strea m No. Respon d time Reagent consumpti on Dimensions Weight storag e Win!! Win!! Win!! Win!! Win!! ABB 0 to 5000 ppb SiO2, minimum range 0 to 50 ppb 0~500 ppb:+/-0.5 ppb or +/-2% 500~5000ppb:+/- 5% 1~6 12 mins 2.5L/ 3 month 638x271x182( 15Kg mm) 2 Gb SD card Ho 0 to 2 / 0 to 20 µg/l, or 0 to 5 / 0 to 50 µg/l (ppb) ±2% of full scale 1~6 5 mins One week 580 (W) x 375 (H) x 500 (D) mm One-point measuremen t: approx. 41 kg (plus 1 kg No for an additional measuremen t point) H 0 to 5000 ppb SiO2 0~500 ppb:+/-1 ppb or +/-5% 500~5000ppb:+/- 7% 4 or 8 8.8~15 mins 2.9L/ 1month 856x563x419( 36.7Kg mm) No November 3, 2014 Slide 18

19 Silica analyzer Installed Base November 3, 2014 Slide 19

20 Introduction CWA Analyzer PH/ORP Analyzer Conductivity Analyzer NH 3 Analyzer Silica Analyzer Others Analyzer November 3, 2014 Slide 20

21 Analytical Product Groups NAVIGATOR & Power Industry Analysers Sodium, Hydrazine and Dissolved Oxygen November 3, 2014 Slide 21

22 ABB Packaged Analyser Systems Cabins, Steam Water Analyser System packages etc November 3, 2014 Slide 22

23 Summary ABB CWA Advantage Small and Uniform analyzers dimension, Superior Installation and set-up. Economic reagent consumption. Speed reaction time. Unique SD member card reporting. Comprehensive Measurement Capability November 3, 2014 Slide 23

24 November 3, 2014 Slide 24

25 LGR Analyzers: Rackmount & Portable All products are General Power Requirements: 115/230 VAC, 50/60 Hz (Check w/ LGR for optional availability at 12 VDC) Communication Outputs: 0-5V, RS-232 and Ethernet (4-20 mamp Pending for Rackmount configurations) Other accessories available include External Sample Pump Model N920 and Multiport Inlet Unit (MIU) for 8 or 16 sample line sequencing

26 Semiconductor On-site Power ; HCl, HF and NH 3 in Continuous Emissions Monitoring Applications include: HF,HCl, NH 3, CO, CO 2, O 2 System configured with or without Dilution, and for Preor Post scrubber operations

27 Semiconductor Market: Leak Detection & Safety FAB Cleanroom & Outside Ambient Air Monitoring Air monitoring systems installed using GP rack mount analyzers w/ environmentally-controlled enclosures and sample sequencing and booster pump where needed Long life & reliable operation: Wetted materials used to reduce memory effects in long sample lines (Teflon) Premium Swagelock SST fittings & connectors Sensitive, accurate leak detection for personnel protection Both short term and long term exposure tracking Lowest available performance for acid gases HF, 0.2 ppb 1σ NH 0.6 1σ

28 Competitive Landscape: Updates to Follow! Feature LGR P Laser-Based Sensors Ti op Sp Sen Ther Legacy Technologies Gas Chromatography Mass Spectroscopy Accuracy Sensitivity Time Response Dynamic Range Instrument Cost Markets Served Win!! Env, Ind, Pro, Med Env Ind Ind Env Environmental, Industrial, Protection, Medical Environmental, Industrial, Protection, Medical Manufacturability Field Deployment Consumables Field Serviceability Operating Cost Spectral Range of Products (mm) N/A N/A

29 Gas Leak Detecting and Monitoring 61 Analyzers for Global Semiconductor Company Ambient Air Monitoring Project for acid & neutralizing process solutions: Customer needed improved sensitivity & best value LGR won the competitive evaluation against Ion Mobility Spectroscopy and Ion Chromatography; 0.2 to 0.5 Parts per Billion HCl + HF and NH3 Leak Detection for both external environment and internal cleanroom Ultra-trace measurements for minimizing long term exposure to personnel Fast response for safety alarm systems: 1 second Two gases in one analyzer; HF+HCL for value purchase Service contract & 24-hour Support sold locally BU Measurement Products - Measurement made easy November 3, 2014 Slide 29

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