5/30/18. Cali Jones Cali Jones, Coordinator. See attached approval. Cali Jones. 12:00 p.m. 12:00 p.m. 1821

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2 Cali Jones Cali Jones, Coordinator 5/30/18 See attached approval. 12:00 p.m. 12:00 p.m Cali Jones

3 Cali Jones From: Sent: To: Cc: Subject: William Merck Friday, June 1, :50 PM Gregory Robinson Cali Jones; Myrnellie Nido; Angie Carloss RE: Sole Source (MSE - Spectroscopic Ellipsometer) Approved. Bill William F. Merck II Vice President Administration and Finance Chief Financial Officer From: Gregory Robinson Sent: Friday, June 01, :46 PM To: William Merck <William.Merck@ucf.edu> Cc: Cali Jones <cali.jones@ucf.edu>; Myrnellie Nido <nellie.nido@ucf.edu>; Angie Carloss <Angie.Carloss@ucf.edu> Subject: FW: Sole Source (MSE Spectroscopic Ellipsometer) Importance: High Mr. Merck, I support this as a sole source purchase. Need your approval/disapproval. Thanks. Greg From: Cali Jones Sent: Thursday, May 31, :02 AM To: Myrnellie Nido <nellie.nido@ucf.edu> Subject: Sole Source (MSE Spectroscopic Ellipsometer) Importance: High Nellie, Please review the attached sole source request from MSE. Product/Service: Spectroscopic Ellipsometer ellipsometer#tab id 3 Supplier: J.A. Woollam Cost: $116,000 Woollam is the only supplier capable to meet the below key technical requirements specified by the PI. Integration w/ FIJI Gen 2 ALD Software (pre approved pending UCF purchase) In situ adapters Parallel fast detection using CCD (Charge Coupled Device) Additional information: UCF PO# / Sole Source# 1233 for the purchase of a Variable Angle Spectroscopic Ellipsometer 1

4 Patented RCE technology combines Rotating Compensator Elliposometry with high speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. Thank you, Cali 2

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11 M2000D - Film- Angstrom Sun Requirements UVISEL - Horiba Sentech Woollam Sense Technologies 1 Integration with FIJI Gen 2 ALD software YES Unknown Unknown NO NO 2 In situ adapters available YES YES YES NO YES 3 Automated z-height adjustment of beam YES YES NO YES YES 4 Automated angle adjustment of beam YES YES NO YES Unknown Wide database of optical constants and YES YES NO YES 5 models available Unknown nm < Wavelength < 1690 nm YES YES NO NO YES 7 Combine with fast CCD detection YES NO NO NO NO 8 Measure all Ψ/Δ accurately YES Requires 2 measurements NO NO YES 9 Measure Depolarization YES Requires 2 measurements NO NO YES 10 Measure Δ handedness YES YES NO NO YES 11 Continuous Wavelength YES YES NO YES YES 12 Able to work under ambient light YES YES NO YES YES

12 Quotation Page 1 of M Street, Suite 102 Phone: (402) Lincoln, NE 68508, USA Fax: (402) sales@jawoollam.com Customer: Washington University - St. Louis Quote #: 0318G-009 Contact: Prof. Parag Banerjee Quoted By: Greg Pribil parag.banerjee@gmail.com Date: March 28, 2018 Phone: (314) Ref #: Shipping Terms: F.O.B. Origin (Lincoln, NE) Payment Terms: Net 30 Days upon credit approval Conditions: Prices and terms on this quotation are not subject to verbal change or other agreements unless approved in writing by the Seller. All quotations and agreements are contingent upon accidents, fires, availability of materials, and all other causes beyond seller control. Typographical and stenographic errors subject to correction. Buyer shall not disclose or announce the purchase price without written permission from seller. Item Qty Product Description Domestic Customer Price (in USD) M-2000 in situ, No Computer 1 1 Model D nm; 500 wavelengths Basic Package Includes: Patented Rotating Compensator (RCE) design All wavelengths are acquired simultaneously Minimum data acquisition time approximately 50 msec Typical data acquisition times 1-5 sec Collimated light beam (diameter varies with model: 2-5 mm) Test base for ex situ testing; angles of incidence: 65 & straightthrough (90 ), horizontal sample stage Pair of tilt stages, and mounts to attach to ConFlat flanges specify whether using 2.75 or 1.33 viewport size. Windows not provided. CompleteEASE software for data acquisition & analysis (5-seat license) 1 day on-site installation and training Customer provides operator computer and monitor. Customer provides viewports for chamber. Ship Date* A.R.O. $ 116, days 2 1 NIR Upgrade nm; 190 wavelengths Extend spectral range to include near infrared. Adds I to model name. $ 20, days 3 1 Ellipsometry Short Course Attendance Includes fee for attending the CompleteEASE Ellipsometry Short Course in USA for one person. Does not include airfare, travel, accommodations, meals, or other expenses. Must be used within two years of purchasing the ellipsometer. Free with ellipsometer purchase

13 Quotation Page 2 of M Street, Suite 102 Phone: (402) Lincoln, NE 68508, USA Fax: (402) sales@jawoollam.com Item Qty Product Description Domestic Customer Price (in USD) Ship Date* A.R.O. 4 1 System Package Includes items 1-3 from this quotation 0318G-009. $ 136, Minus 1-time Discount $ 116, days *Quoted Ship Date is worst case. Please call for better estimate at time of order.

14 Unless otherwise agreed in writing, all orders are subject to the following terms and conditions: Definitions The J.A. Woollam Co., Inc. shall be referred to as the COMPANY and the person and/or agency issuing a purchase order shall be referred to as the CUSTOMER. Price All quotations are valid for 90 days, unless otherwise stated in writing. Prices and terms on this quotation are not subject to verbal change or other agreements unless approved in writing by the COMPANY. CUSTOMER shall not disclose or announce the purchase price without written permission from COMPANY. Taxes All prices exclude taxes, tariffs, duties and customs that may be imposed. Where applicable, they must be paid by the CUSTOMER. Payment Terms The standard payment terms for domestic sales are net 30 days upon credit approval. The COMPANY charges 1% monthly late fee with 30 day grace-period. In certain instances, the COMPANY has the discretion to require C.O.D terms. Delivery Terms The standard shipping term for domestic sales is F.O.B. Origin (manufacturing facility in Lincoln, NE USA). The standard shipping term for international sales is F.C.A. Origin (manufacturing facility in Lincoln, NE, USA). In both cases, the risk of loss transfers to CUSTOMER as the goods leave our dock. COMPANY shall not be liable for delays due to accidents, fires, availability of materials, and all other causes beyond COMPANY control. Cancellations CUSTOMER will be charged a restocking fee if order is cancelled before the goods are shipped. The restocking fee will be calculated at the COMPANY's discretion based on three factors: 1) original PO value, 2) percent of original order that is custom, and 3) timing of cancellation compared to production schedule. The typical range of restocking fee is between 10% and 30%. Parts Guarantee Unless otherwise specified on the quote, all parts are guaranteed by COMPANY as brand new. Terms and Conditions Warranty The COMPANY warrants all parts (excluding consumables - such as lamps) and materials for a period of twelve months under use as designed and as instructed by the COMPANY. Warranty period starts when CUSTOMER takes possession of equipment. COMPANY shall repair or replace, at its option, any parts determined to be defective in materials or workmanship during the warranty period. Whenever possible, the COMPANY will send replacement parts and instructions via overnight service (at COMPANY expense during the warranty period) in order to return equipment to a normal operating state. CUSTOMER is responsible for shipping parts back to COMPANY and should request an official RMA from COMPANY prior to shipment. When COMPANY employees are required at CUSTOMER site (to be decided by COMPANY) during the warranty period, reasonable cost of both labor and transportation required for replacement or repair of a defective part shall be at the expense of the COMPANY. This warranty does not apply to parts damaged as a result of abuse or misuse by the CUSTOMER or any of its agents. Software All COMPANY software programs (WVASE, CompleteEASE, VASEManager, RETMEAS, etc.) are copyright by the COMPANY and intended for use only by its CUSTOMERS. Unauthorized use, modification, reproduction, or distribution of this software may result in severe civil and criminal penalties, and will be prosecuted to the maximum extent possible under law. General software upgrades will be provided free for up to two years. Any bugs will be repaired free of charge for up to one year. Reasonable requests for software additions or changes that improve the usefulness of COMPANY products will be seriously considered. Ellipsometry Data COMPANY products (spectroscopic ellipsometers) are designed to measure the change in polarization caused by interaction with a material structure. The measurement values, psi and delta, are measured accurately when operated properly on valid sample structures. However, the COMPANY assumes no responsibility for data that was improperly acquired or analyzed, and will not be held liable for the consequence of incorrect results. Errors Typographical and stenographical errors are subject to correction.

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