Development and Characterization of 300mm Large Panel ewlb (embedded Wafer Level BGA)

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1 Development and Characterization of 300mm Large Panel ewlb (embedded Wafer Level BGA) Seung Wook Yoon, Yaojian Lin and Pandi C. Marimuthu STATS ChipPAC Ltd. 5 Yishun Street 23, Singapore Seungwook.yoon@statschippac.com Abstract This paper will highlight some of the recent advancements in 300mm ewlb large panel development. Compared to 200mm case, 300mm large panel has more warpage and process issues due to its area increase. Thermo-mechanical simulation shows 100~150% more warpage with 300mm large panel compared to 200mm. So various design parameters were studied to optimized warpage, such as dielectric materials and thickness, molding compound thickness etc. This paper also presents study of process optimization for 300mm ewlb and on overall warpage behavior in different process steps. Finally 300mm ewlb test vehicles are fabricated and tested in JEDEC standard test conditions. It also describes mechanical characterization, reliability data including component/board level, challenges encountered and overcome, and future steps. Key words: embedded wafer level BGA (ewlb), Fanout WLP, 300mm large scale, process development, process optimization, reliability I. INTRODUCTION WLP applications are expanding into new areas and are segmenting based on I/O count and device. The foundation of passive, discrete, RF and memory device is expanding to logic ICs and MEMS. The WLP segment has matured over the past decade, with numerous sources delivering high-volume applications across multiple wafer diameters and expanding into various end-market products. With infrastructure and high volumes in place, a major focus area is cost reduction. One of the most well known examples of a FO- WLP structure is ewlb technology[1]. This technology uses a combination of front- and backend manufacturing techniques with parallel processing of all the chips on a wafer, which can greatly reduce manufacturing costs. Its benefits include a smaller package footprint compared to conventional leadframe or laminate packages, medium to high I/O count, maximum connection density, as well as desirable electrical and thermal performance. It also offers a high-performance, power-efficient solution for the wireless market[2]. Furthermore, next generation 3D ewlb technology enables 3D IC and 3D SiP (System-in-Package) with vertical interconnection. 3D ewlb can be implemented with through silicon via (TSV) applications as well as discrete component embedding. II. ewlb TECHNOLOGY ewlb technology is addressing a wide range of factors. At one end of the spectrum is the packaging cost along with testing costs. Alongside, there are physical constraints such as its footprint and height. Other parameters that were considered during the development phase included I/O density, a particular challenge for small chips with a high pin count; the need to accommodate SiP approaches, thermal issues related to power consumption and the device's electrical performance (including electrical parasitic and operating frequency). Figure 1. Structural comparison of FI-WLP and ewlb (FO-WLP) The obvious solution to the challenges was some form of WLP. But two choices presented

2 IMAPS-European Microelectronics and Packaging Conference (EMPC-2011), September 12-15, 2011, Brighton, UK themselves: Fan-out or Fan-in. FO-WLP is an interconnection system processed directly on the wafer and compatible with motherboard technology pitch requirements. It combines conventional frontand back-end manufacturing techniques, with parallel processing of all chips. There are three stages in the process. Additional fab steps create an interconnection system on each die, with a footprint smaller than the die. Solder balls are then applied and parallel testing is performed on the wafer. Finally, wafers are sawn into individual units, which are used directly on the motherboard without the need for interposers or underfill. Figure 1 shows the structural comparison between FI-WLP and ewlb. ewlb does have thick Cu-RDL so UBM is not required. (UBM is optional for ewlb). Schematics of redistribution layer (RDL) are compared for single-rdl and doublerdl as shown in figure 2. Figure 2. Schematics of ewlb RDL structure; single-layer RDL and double-layer RDL Advantage of ewlb Technology The current BGA package technology is limited by the organic substrate capability. Moving to ewlb helps overcome such limitations and also simplifies the supply chain. Building the substrate on the package itself, allows for higher integration and routing density in less metal layers. ewlb is a next generation platform that will support future integration, particularly for wireless devices and this packaging technology has a number of important features. Transition to ewlb packaging technology enables a significant reduction in recurring costs by eliminating the need for expensive substrates. The advantage of ewlb packaging can be summarized in Table 1. BGA packaging also faces a challenge with technology nodes beyond 65nm as the device performance density drives the need for flip chip. But advanced flip chip nodes drive fine pitch combined with weaker low-k dielectric structures resulting in flip chip becoming narrower in terms of packaging process margin,. In addition, there is a big trend in being environmentally friendly, driving lead free and halogen free, or green, material sets. With ultra low-k and interconnects pitch becoming smaller and smaller and with the shift to lead free materials, the technical limitations faced by the packaging industry are becoming more challenging. ewlb technology provides a window for packaging next generation devices in a generic, leadfree/halogen free, green packaging scheme. Table 1. Advantage of ewlb packaging. 1. The smallest and thinnest package other than fan-in WLCSP 2. Excellent electrical and thermal performance Great for high frequency application Excellent for RF and mixed signal due to low parasitics compared to any laminate-based packages The lowest thermal resistance 3. High density routing is easily implemented in RDL 4. No ELK damage issues for advanced Si nodes devices 5. Proven low cost path using a batch process & simple supply chain 6. Path to the flexible 3D packages any array patterns on the top 7. Scalable technology to a larger panel production Lower cost III. 300mm large panel ewlb A. Challenge of 300mm large scale ewlb For 300mm ewlb, there is area increase of more than 230% times compared to 200mm as shown in Figure 3. So warpage is most critical for larger scale wafer handling as like in wafer fabrication process. Warpage affects wafer handling, processability, throughput as well as process stability thus yield so it is critical to optimize and well control its warpage behavior. Figure 4 shows clear warpage difference between 200mm and 300mm ewlb wafers. With computational simulation work for 300mm ewlb, it showed more than 2 time warpage than 200mm case. Figure 5 shows warpage change with different carrier thickness in 300mm ewlb. It clearly showed trend of less warpage with optimized carrier thickness. Figure 3. Wafer size difference between 200mm and 300mm ewlb wafers.

3 wafer warpage. After basic thermal-mechanical simulation study of these parameters with several DOE (Design of experiment), key parameters were identified such as dielectric materials and thickness, molding compound thickness etc. Based on those parameters, in-depth simulation was carried out for several combinations of each parameter. Figure 6 show the warpage behavior with different materials sets. With different set of materials, it showed significant warpage behaviors with maximum difference of 1000um (1mm). Figure 6. Computational mechanical warpage simulation data with different material DOE of 300mm ewlb. Figure 4. Warpage of 200mm and 300mm ewlb with thermo-mechanical simulation This warpage behavior is very critical for overall process flow, manufacturability and overall yield. But reliability is another key challenge for products. So reliability evaluation was also carried out for different material DOE sets to investigate materials in 300mm ewlb packages. With comprehensive study of reliability study, final material set was selected for final test vehicle fabrication. (c) Figure 5. The warpage change with carrier thickness of wafer level molding in 300mm To optimize these warpage behaviors, various material/process parameters were studied. Each material has different physical properties as like CTE (coefficient of thermal expansion), Young s modulus, and Poison ratio. So combination of each physical properties critically affect overall ewlb Figure 7. Comparison of die shift and movement after wafer level molding in 200mm and 300mm ewlb carriers. B. Comparison of process variation between 200mm and 300mm. With test vehicles of 5x5mm die in 8x8mm ewlb, each major process variables are monitored and compared. Figure 8 shows the die displacement

4 or movement after wafer level molding and compared with 200mm and 300mm carriers. As shown in figure 7, 300mm shows quite small die shift as similar as 200mm case after process optimization and stabilization. Cu plating thickness, dielectrics thickness, ball shear strength are key comparison variables to investigate 300mm ewlb process stability as compared to 200mm ewlb. 300mm ewlb has larger standard deviation than 200mm mainly due to 230% times area, but measured average value and its standard deviation values in 300mm ewlb is close to 200mm in most cases. These shows the stability of 300mm ewlb process developed and established from 200mm baseline. Table 6. Summary of ewlb Component level and Board level reliability test result Figure 9. Weibull plot of drop test results of ewlb from 300mm carriers. D. Next movement for large scale ewlb; panel approach Significant cost and productivity advantages can be achieved with the larger scale reconstituted wafer ewlb format as compared to the existing WLB wafer format due to higher efficiency and economies of scale. For 300mm square panel, it has more than 30% more area compared 300mm wafer because square panel can save corner space. C. Component level and Board level reliability test result For 300mm ewlb package s reliability tests, test vehicle were prepared with 8x8mm and 183balls with 5x5mm die size. JEDEC standard reliability tests were carried and ewlb passed all reliability conditions. For board level reliability, JEDEC TCoB (temperature cycle on board) and drop test were carried out and it also successfully passed all test requirements as shown in Table 6. Figure 9 shows board level drop test performance and it showed first failure was over 100 drops in industry standard test conditions. Figure 10. Potential trend of area increase with panel scale approach; more throughput with lower cost and economies of scale Figure 11. Scale of economics of ewlb; moving to large scale; panel approach for further cost reduction

5 Economies of scale arise when the cost per unit falls as output increases. Economies of scale are the main advantage of increasing the scale of production and becoming big. Firstly, because a large business can pass on lower costs to customers through lower prices and increase its share of a market. Secondly, a business could choose to maintain its current price for its product and accept higher profit margins. Based on Fan-out WLP costs comparison study from SavanSys Solutions and TechSearch [3], for all die sizes in the 6x6mm and 8x8mm ewlb packages, there is a significant cost advantage. However, the cost of fan-out WLP is much higher for larger packages. This is largely due to the fact that fan-out WLP technology is a semiconductor process, as opposed to flip chip and wire bond packaging which is primarily a printed circuit board (PCB) process. PCB processes use a large fabrication panel compared to the wafer used for a semiconductor process. For small packages, the wafer versus panel size difference is not as significant as with large packages. So moving to large scale ewlb with panel approach, ewlb would be on further costeffective solution with inline batch process of fab technology. V. CONCLUSION Advanced packaging plays a crucial role in driving products with increased performance, low power, lower cost and smaller form factor. The industry requires innovation in packaging technology and manufacturing to meet current demands and the ability to operate equipment in high volume with large throughput. ewlb technology is an enhancement to standard WLPs, allowing the next generation of a WLP platform due to its fan-out capability. ewlb is a low-cost solution with batch process and larger area utilization such as 12 and panel approaches. The ability to integrate passives like inductors, resistors and capacitors into the various thin film layers, active/passive devices into the mold compound and 3D vertical interconnection opens additional design possibilities for new Systems-in- Package (SiP) and 3D stacked packaging. Moreover, 3D ewlb technology provides more value-add in performance and promises to be a new packaging platform that can expand its application range to various types of devices as well as 3D TSV integration for true 3D SiP systems. For further cost reduction approach after 300mm ewlb, scaling-up such as panel approach would be next steps to move. It provides breakthrough productivity, compatible process for advanced Si node devices as well as functional Integration /combination of different node devices (32nm, 28nm or 22nm) with RF, discrete or memory devices. Electronic product differentiation today is driven by ever-expanding functionality, feature sets, multi-functionality and faster communications. At the same time, consumers have made clear their desires for feature-rich products in compact form factors to enable maximum portability. ewlb technology is successfully enabling semiconductor manufacturers to provide the smallest possible, highest-performing semiconductors as cost-effective packaging solution. ACKNOWLEDGEMENT Authors appreciate Mr. Chow Seng Guan, for thermo-mechanical simulation of warpage behavior, design and characterization group in Statschippac LTD. REFERNCE [1] M. Brunnbauer and Thorsten Meyer, Embedded Wafer Level Ball Grid Array (ewlb), IMAPS Device Packaging Conference 2008, March 2008, Arizona, US (2008) [2] Graham pitcher, Good things in small packages, Newelectronics, 23 June 2009, p18-19 (2009) [3] Chet A. Palesko, Amy J. Palesko and E. Jan Vardaman, COST COMPARISON FOR FLIP CHIP, WIRE BOND, AND WAFER LEVEL PACKAGING, Proceedings of IWLP2010, Santa Clara, US (2010)