Specifications TRANSPORT WAFER CARRIERS. Safely protect and transport 300 mm wafers

Transcription

1 TRANSPORT WAFER CARRIERS Safely protect and transport 300 mm wafers Overview Entegris transport wafer carriers allow the transport and storage of 300 mm wafers in a more traditional, open cassette format. Open cassettes are fabricated from carbon-filled PEEK TM polymer material for extremely low particle generation during wafer transfer and contact. To ensure equipment operability, each cassette has a kinematic coupling equipment interface. Wafers are held at the standard 10 mm spacing. The cassettes are mainly used in R&D operations, or as a wafer buffer inside a process tool minienvironment. Superior Automation Performance SEMI E1.9 compliant High rigidity and dimensional stability Open sidewall style Integrated grooves in endwall for precise alignment with KC pins in the vertical orientation Four-point contact for horizontal orientation Specifications 13-Capacity Carrier Length: 312 mm (12.3 ) Width: 332 mm (13.1 ) Height: 183 mm (7.2 ) 25-Capacity Carrier Length: 312 mm (12.3 ) Width: 332 mm (13.1 ) Height: 303 mm (11.9 ) DESCRIPTION MATERIAL PITCH PART NUMBER 13 capacity, 300 mm wafer carrier STAT-PRO mm A300-13MJ-47C02 25 capacity, 300 mm wafer carrier STAT-PRO mm A300-25MJ-47C02 Material Description Material STAT-PRO 3000 Application High performance wafer transport carrier material Description An advanced, static dissipative blend of polyetheretherketone and carbon fiber Surface Resistivity (Ohms/sq.) Continuous Use Temp. Limit 120 C Wafer Insertion Temp. Limit 300 C

2 Silicon Delivery Systems and Services To optimize wafer and device handling in your facilities, Entegris offers Silicon Delivery Systems and Services our unique materials integrity management solution to cost-effectively manage silicon from production to consumption. Wafer Handling Systems Raw wafer processing and shipping Wafer processing Related product handling Device Handling Systems Bare die shipping and handling Packaged device shipping and handling WaferCare and DeviceCare SM Services Certified reuse and recycle Product cleaning Logistics management On-site and off-site programs Cleaning systems Terms and Conditions of Sale WARRANTY Entegris warrants each new product against defects in materials and workmanship for the following periods of time from shipment: Microelectronic products, Custom products 90 days; Entegris Cleaning Systems and AutoPod Wafer Carriers 1 year; Fluid Handling products (except as separately identified below) including FluoroPure Chemical Container products 1 year; Sheetlined Chemical Container products and FluoroPure PFA Liners (blistering, cracking or leakage only) 18 months; FluoroPure o-rings and gasket materials 90 days. Entegris makes no warranty, express or implied, with respect to any components, products or services provided by any third party. With respect to products specially manufactured to Buyer s specifications, Entegris warrants only that such products have been manufactured, without testing, to Buyer s specifications but makes no other warranty, express or implied. Upon Entegris confirmation of defects, Entegris agrees, as its exclusive remedy to repair or, in its discretion, replace defective product without charge. Entegris is not responsible for product damage resulting from accident, misuse, or lack of reasonable care. IMPORTANT: No other warranty, written or verbal, is authorized by Entegris. Entegris is not liable for any special, incidental or consequential damages. Implied warranties of merchantability and fitness for a particular purpose are specifically disclaimed. For More Information Contact your local Entegris representative or your local Entegris Regional Customer Service Center for more information on wafer handling products. Entegris Regional Customer Service Centers Telephone Fax North America North America Toll Free Europe Japan Malaysia Korea Taiwan For the latest information on open process carriers, visit Entegris Web site at Entegris, Silicon Delivery, WaferCare, STAT-PRO, FluoroPure and AutoPod are registered trademarks of Entegris, Inc. DeviceCare SM is a service mark of Entegris, Inc. PEEK TM is a trademark of Victrex plc Entegris, Inc. Printed in USA ENT-1204

3 PROCESS ENHANCEMENT WAFER CARRIERS For effective chemical processing Overview Entegris process enhancement wafer carriers are designed to optimize automated wet bench processes. The carriers have minimum surface area so as to allow the liquid process chemicals unobstructed access to the wafers. Wafers are held at 5 mm spacing to maximize the throughput of any wet bench tool, providing a more effective, consistent processing across the surface of each wafer. Superior Automation Performance Open-flow carrier allows solutions to pass through evenly and quickly One-half the volume and mass of traditional process carriers One-fourth the surface area of traditional process carriers Modular construction includes reinforcement rods for added rigidity and strength Lift points on carrier ends for automated handling V-notch locators on carrier ends and rails for location on equipment Chemical resistant PFA material wetted surface Specifications 52-Capacity Carrier Length: 345 mm (13.6 ) Width: 302 mm (11.9 ) Height: 106 mm (4.2 ) 26-Capacity Carrier Length: 215 mm (8.5 ) Width: 302 mm (11.9 ) Height: 106 mm (4.2 ) DESCRIPTION MATERIAL PITCH PART NUMBER 52 capacity, Natural PFA 5 mm A BH capacity, Natural PFA 5 mm A BH Material Description Material Natural PFA Application Process wafer carrier material Description Translucent perfluoroalkoxy Surface Resistivity (Ohms/sq.) >10 12 Continuous Use Temp. Limit 180 C Wafer Insertion Temp. Limit 290 C

4 Silicon Delivery Systems and Services To optimize wafer and device handling in your facilities, Entegris offers Silicon Delivery Systems and Services our unique materials integrity management solution to cost-effectively manage silicon from production to consumption. Wafer Handling Systems Raw wafer processing and shipping Wafer processing Related product handling Device Handling Systems Bare die shipping and handling Packaged device shipping and handling WaferCare and DeviceCare SM Services Certified reuse and recycle Product cleaning Logistics management On-site and off-site programs Cleaning systems Terms and Conditions of Sale WARRANTY Entegris warrants each new product against defects in materials and workmanship for the following periods of time from shipment: Microelectronic products, Custom products 90 days; Entegris Cleaning Systems and AutoPod Wafer Carriers 1 year; Fluid Handling products (except as separately identified below) including FluoroPure Chemical Container products 1 year; Sheetlined Chemical Container products and FluoroPure PFA Liners (blistering, cracking or leakage only) 18 months; FluoroPure o-rings and gasket materials 90 days. Entegris makes no warranty, express or implied, with respect to any components, products or services provided by any third party. With respect to products specially manufactured to Buyer s specifications, Entegris warrants only that such products have been manufactured, without testing, to Buyer s specifications but makes no other warranty, express or implied. Upon Entegris confirmation of defects, Entegris agrees, as its exclusive remedy to repair or, in its discretion, replace defective product without charge. Entegris is not responsible for product damage resulting from accident, misuse, or lack of reasonable care. IMPORTANT: No other warranty, written or verbal, is authorized by Entegris. Entegris is not liable for any special, incidental or consequential damages. Implied warranties of merchantability and fitness for a particular purpose are specifically disclaimed. For More Information Contact your local Entegris representative or your local Entegris Regional Customer Service Center for more information on wafer handling products. Entegris Regional Customer Service Centers Telephone Fax North America North America Toll Free Europe Japan Malaysia Korea Taiwan For the latest information on open process carriers, visit Entegris Web site at Entegris, Silicon Delivery, WaferCare, FluoroPure and AutoPod are registered trademarks of Entegris, Inc. DeviceCare SM is a service mark of Entegris, Inc Entegris, Inc. Printed in USA ENT-1204

5 PROCESS DEVELOPMENT WAFER CARRIERS Safely protect and transport 300 mm wafers Overview Process development wafer carriers are fabricated from Teflon PFA material for universal liquid chemical compatibility. Integrated handles allow easy manipulation of the carrier. The primary use for these wafer carriers is in research and 300 mm process development. Superior Wafer Protection Open-flow carrier allows solutions to pass through evenly and quickly Chemical-resistant PFA material wetted surface Two handle design Full side walls to protect entire wafer during manual handling Specifications 13-Capacity Carrier Length: 220 mm (8.7 ) Width: 353 mm (13.9 ) Height: 538 mm (21.2 ) 6-Capacity Carrier Length: 175 mm (6.9 ) Width: 353 mm (13.9 ) Height: 538 mm (21.2 ) Material Description Material Application Natural PFA Process wafer carrier material Description Translucent perfluoroalkoxy Surface Resistivity >10 12 (Ohms/sq.) Continuous Use 180 C Temp. Limit Wafer Insertion 290 C Temp. Limit DESCRIPTION MATERIAL PITCH PART NUMBER 13 capacity, Natural PFA 10 mm capacity, Natural PFA 10 mm

6 Silicon Delivery Systems and Services To optimize wafer and device handling in your facilities, Entegris offers Silicon Delivery Systems and Services our unique materials integrity management solution to cost-effectively manage silicon from production to consumption. Wafer Handling Systems Raw wafer processing and shipping Wafer processing Related product handling Device Handling Systems Bare die shipping and handling Packaged device shipping and handling WaferCare and DeviceCare SM Services Certified reuse and recycle Product cleaning Logistics management On-site and off-site programs Cleaning systems Mykron Mykron Microelectronics Co., Ltd. 上海资方微电子有限公司 Suite 318, B Office Tower, Poly Plaza No.14, Dong Zhi Men Street (South), Dong Cheng District Beijing, , China Tel. (86) Fax (86) Terms and Conditions of Sale WARRANTY Entegris warrants each new product against defects in materials and workmanship for the following periods of time from shipment: Microelectronic products, Custom products 90 days; Entegris Cleaning Systems and AutoPod Wafer Carriers 1 year; Fluid Handling products (except as separately identified below) including FluoroPure Chemical Container products 1 year; Sheetlined Chemical Container products and FluoroPure PFA Liners (blistering, cracking or leakage only) 18 months; FluoroPure o-rings and gasket materials 90 days. Entegris makes no warranty, express or implied, with respect to any components, products or services provided by any third party. With respect to products specially manufactured to Buyer s specifications, Entegris warrants only that such products have been manufactured, without testing, to Buyer s specifications but makes no other warranty, express or implied. Upon Entegris confirmation of defects, Entegris agrees, as its exclusive remedy to repair or, in its discretion, replace defective product without charge. Entegris is not responsible for product damage resulting from accident, misuse, or lack of reasonable care. IMPORTANT: No other warranty, written or verbal, is authorized by Entegris. Entegris is not liable for any special, incidental or consequential damages. Implied warranties of merchantability and fitness for a particular purpose are specifically disclaimed. For More Information Contact your local Entegris representative or your local Entegris Regional Customer Service Center for more information on wafer handling products. Entegris Regional Customer Service Centers Telephone Fax North America North America Toll Free Europe Japan Malaysia Korea Taiwan For the latest information on open process carriers, visit Entegris Web site at Entegris, Silicon Delivery, WaferCare, AutoPod and FluoroPure are registered trademarks of Entegris, Inc. DeviceCare SM is a service mark of Entegris, Inc. Teflon is a registered trademark of E.I. dupont de Nemours & Co. used under license. ENTEGRIS, INC. Corporate Headquarters / 3500 Lyman Boulevard / Chaska, Minnesota USA Customer Service Tel / Customer Service Fax / The materials integrity management company 2004 Entegris, Inc. Printed in USA ENT-1204