SEMI AUX mm PIC Interoperability Report

Transcription

1 SEMI AUX mm PIC Interoperability Report The information in this Document has been furnished by the International 450 mm Physical Interfaces & Carriers Task Force, for informational use only and is subject to change without notice. The SEMI Standards Program is publishing this information as furnished by the group in the form of Auxiliary Information so that it may be referenced by the industry, as desired. No material in this Document is to be construed as an official or adopted Standard. SEMI assumes no liability for the content of this Document, which is the sole responsibility of the authors, nor for any errors or inaccuracies that may appear in this Document. SEMI grants permission to reproduce and distribute this document provided that (1) the Document is maintained in its original form, and (2) this disclaimer and the notice below accompany the Document at all times. NOTICE: By publication of this Document, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned herein. Users of this document are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights, are entirely their own responsibility Copyright 2017 by SEMI (673 S. Milpitas Blvd., Milpitas, CA 95035). See above for information on limited rights for reproduction and distribution; all other rights reserved. SEMI AUX SEMI 2017

2 450mm PIC Interoperability Report International 450 mm PIC Task Force PI&C Global Technical Committee

3 Contents 1. Overview 2. Problem Types and Root Cause 2-A. Kinematic Coupling Functionality 3. Revisit 300 mm Carrier Door Drop Prevention 4. Revision History 2

4 1. Overview 3

5 1. Overview The first version of major SEMI Standards related with 450 mm were published before Since then, production equipment compliant with those standards has been adopted and evaluated by some entities such as Global 450 mm Consortium (G450C) that started their activities in G450C has found some problems in the course of evaluation and reported them to the PIC global Technical Committee. This document is to provide our consideration of possible causes of the following problems and promote awareness of them so that similar problems would not occur, not to provide solutions for them: 1. Analysis results of the problem of interoperability between MAC and load port, and 2. Analysis results of the problem reported between load port and PGV. Another purpose of this document, based on our experience with 300 mm production equipment, is to revisit the drop of the 300 mm carrier door which is not obvious yet with 450 mm carrier. 4

6 2. Problem Types and Root Cause 5

7 2. Problem Types and Root Cause The problems reported by G450C can be classified into the following 3 types: A. Vacuum error for MAC door. B. Difficulties for closing MAC door. C. Particles shed from MAC found on LP during PGV operation. 6

8 A. Root Cause Analysis: Vacuum error for MAC door Vacuum error when opening MAC door Gap between MAC door and vacuum cup Expansion of MAC door Poor rigidity of LP door open/close mechanism No sliding of wafers Poor MAC door rigidity Wafer edge condition Shape of the MAC in rear contact area with each wafer Necessary factor Enhancing factor 7

9 B. Root Cause Analysis: Difficulties for closing MAC door Unable to close MAC door Gap between door and shell of the MAC Tilting of LP door Tilting of MAC Poor rigidity of LP door open/close mechanism No sliding of wafers Inadequate structure of LP hold-down devices Wafer edge condition Shape of the MAC in rear contact area with each wafer Distortion of MAC hold-down feature Necessary factor Enhancing factor 8

10 C. Root Cause Analysis: Particles shed from MAC found on LP during PGV operation Particles on LP Necessary factor Enhancing factor Friction between MAC bottom and LP hold-down devices when PGV was placing MAC on LP Inappropriate shape of LP holddown devices (See Section 2-A.) Insufficient PGV Z-axis stroke See E154/E158. Particles PGV arm Narrow clearance 9

11 2-A. Kinematic Coupling Functionality 10

12 Load Port: Interference Between Hold-down Devices and Kinematic Coupling Lead-in Grooves at the time of Carrier Delivery Requirement: Background: In order to avoid interference between Carrier and LP features except KC-pins, lead-in function should be considered. Related Standards: E154, E158, E159 and M80 Impact to Standards: No change Application Note: None. Features that extend above the imaginary plane created by the three kinematic pins have been found to compromise the function of the 10 mm lead-in provided by the kinematic coupling. Critical area the Carrier clamping mechanism must not collide with the bottom of the Carrier Approach: Ensure that no equipment features compromise the lead-in function provided by the kinematic coupling mechanisms. Note: The following page presents the interference issue described herein. 11

13 Load Port: Interference Between Load Port Features and Kinematic Coupling Lead-in Grooves at the time of Carrier Delivery lead-in Critical area the Carrier clamping mechanism could collide with the bottom of the Carrier if the lead-in volume of the Carrier is violated by the clamping mechanism during Carrier delivery z6=11±0.5mm E158, E159, M80 HP z11<21mm E158, E159, M80 r15 15mm E158, E159, M80 Kinematic Coupling z48 11mm E158, E159, M80 Hold Down Devices Clamp Mechanism should not exist in this volume during Carrier delivery. 12

14 Bad example 13

15 3. Revisit 300 mm Carrier Door Drop Prevention 14

16 Root Cause Analysis (1/2) Potential factors for Carrier Door drop Carrier Load Port LP start latch action at incomplete door close position Damaged Carrier Shortage of Carrier stabilities Carrier deformation by - High reaction force of : Door seals Wafer retaining Shortage of FIMS door closing force Shortage of docking force Robot incorrect wafer unloading position ( Door side ) Increase reaction force 15

17 Root Cause Analysis (2/2) Possible to detect latch key rotation only Carrier Shell Latch bar Complete Rotation to Latch position Cam Latch key Carrier Door Correct Position Typical incorrect case ( not latched into Carrier) 16

18 Loadport: Confirmation of proper Carrier door close Requirement: To prevent Carrier door drop during Carrier transfer by AMHS, for secure FAB operation. Related Standards: E154, E158, E159 and M80 Impact to Standards: No change Application Note: None. Background: Detection of latch-key rotational position is not enough to confirm proper Carrier door close. Approach: Load port to confirm proper Carrier door close by at least following 2 steps. Note: 1. Locate and confirm the Carrier door to designed position. 2. Rotate and confirm latch keys to designed position. Even with above 2 steps approach, complete confirmation of door close can not be realized, because latch bar insertion into Carrier shell can not be directly detected with current latch system. 17

19 Carrier: Avoidance of intermediate state of door open/close Requirement: To prevent Carrier door drop during Carrier transfer by AMHS, for secure FAB operation. Related Standards: E154, E158, E159 and M80 Impact to Standards: No change Application Note: None. Background: Latch mechanism require many components to satisfy requirement. Due to parts distortion and accumulation of parts allowance, latch bar may not be inserted into Carrier shell properly even latch key turned into correct position. Approach: Carrier design to avoid staying at intermediate state of door open/close after latch key rotation. Note: None. 18

20 4. Revision History 19

21 Revision History First published - June