Background Statement for SEMI Draft Document #4403 New Standard: Specification for Substrate Management of FPD Production (SMS-FPD)

Transcription

1 Background Statement for SEMI Draft Document #4403 New Standard: Specification for Substrate Management of FPD Production (SMS-FPD) Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document. Note: ecipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, patented technology is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. Background Statement Comprehensive cost cutting is an important concern for manufacturing of Flat Panel Displays (hereinafter, FPD) regardless of their sizes. This becomes more remarkable as their sizes become larger. When substrate is loaded to and unloaded from manufacturing equipment in FPD fabs, host communication interface is not standardized between equipment/loader and MES, which causes a lot of kinds of customized specification in equipment/loader and MES. This also hinders cutting cost of development and delivery time. The Single Substrate Handling Interface (SSHI) Task Force believes that this proposed document enables to recycle standardized specification, which reduces enormous cost and time, even in case of a new fab construction. The voting results of Doc.#4403 will be adjudicated at the Japan FPD Factory Automation Committee meeting scheduled on Thursday April 16, If you have any questions, please contact the SSHI Task Force co-leader and document author as shown below: Yasunobu Otogawa (Daihen), yas.otogawa@daihen.co.jp Yoshihisa Shin (System V), y-shin@kyoto.sysv.co.jp

2 SEMI Draft Document #4403 New Standard: Specification for Substrate Management of FPD Production (SMS-FPD) 1 Purpose 1.1 At the production line of FPD, an automation evolution is underway; however, the reality is that each fab controls its equipment with its own specification. Because of this, a huge loss has been created in terms of the automation cost and lead time of equipment. Also, due to the migration to large substrate sizes in FPD production, the necessity to meet new demands such as single substrate transfer has been increasing. This document describes standard behaviors for automated transfer of substrates among automated material handling systems (AMHS) and equipment at FPD fabs. 2 Scope 2.1 The scope of this document is to standardize communication between host and equipment at the transfer points where substrates are transferred into /out of the equipment at FPD fabs. 2.2 This document defines standards that facilitate the host s knowledge and role in automated and manual substrate transfers. Also, it is intended to be useful for controlling material processing by equipment. Specifically, it covers the followings: Object definition of transfer points on the equipment Object state model of transfer points on the equipment Service commands to objects for transfer points on the equipment Behavior of transfer points on the equipment 2.3 This document clearly defines transfer positions for substrate transfer at the equipment and describes the interface useful for controlling substrate transfer, which is also applicable to AMHS installed in the FPD fabs. However, this should be implemented considering the applicability by facility manufacturers if it is to be applied to AMHS other than equipment. トランスファポイント Transfer Points EQP1 EQP2 EQP3 トランスファデバイス Transfer Device Figure 1 Transfer Points Example NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use. Page 1 Doc SEMI

3 3 Limitations 3.1 This standard only applies to transfer points on the equipment that transfer substrates with external equipment and does not cover the positions of substrate transfers within the same equipment. 3.2 This standard indicates modeling of substrate transfer positions on the equipment and substrate information entered in the equipment. This model indicates the substrate transfer service and behavior profile but does not depend on the protocol. Therefore, to fully implement, a complementary standard must be used. 3.3 In order to use this standard, the followings must be implemented: Implementation of transfer point objects Implementation of status management function of transfer points Substrate transfer management function at transfer points Information reporting function of transfer point objects 3.4 Priority of Substrate Transfer equests Equipment may become incapable of planned substrate transfer due to faults within the equipment or reject transfer-in as the transfer-out becomes priority depending on the equipment internal processing status. Priority is set by the equipment and the host should determine the substrate transfer information from the equipment and give appropriate information and instructions to the AMHS, etc Substrate transfer refusal/preference scheme during fault is not specified as it needs to consider the particular equipment structure for substrate transfer to/from the equipment. However, it needs to be studied and considered when this standard is implemented. 4 eferenced Standards and Documents 4.1 SEMI Standards SEMI E30 Generic Model for Communications and Control of Manumeturing EquiPment (GEM) SEMI E39 Object Services Standard: Concepts, Behavior, and Services SEMI E40 Standard for Processing Management SEMI E41 Exception Management (EM) Standard SEMI E53 Event eporting SEMI E90 Specification for Substrate Tracking SEMI D51 Specification for Handshake Protocol of Single Substrate for Handling off/on Tool in FPD Production 5 Terminology 5.1 Definitions direction of substrate viewed from the transfer point direction of substrate at the transfer point refers to the direction of transfer-in/-out against the transfer point and not left/right of the equipment or upstream/downstream of the processing sequence input direction of transfer-in to the transfer point output direction of transfer-out from the transfer point host factory automation system inline controller controller that controls overall inline equipment, which integrates multiple units inline equipment equipment that connects multiple equipment units transfer point substrate transfer position that exists on the equipment transfer device AMHS for transferring substrates Page 2 Doc SEMI

4 6 equirements 6.1 Substrate Management of FPD Production (SMS-FPD) compliant equipment is required to provide certain capabilities defined by other standards: accessibility to status information, event reporting, alarm management, and equipment control. These standards shall be satisfied through compliance with the following sets of standards: 6.2 Generic Equipment Model (GEM) Standard (SEMI E30) Event Notification Status Data Collection Equipment Constants Alarm Management Equipment Control Definition 6.3 Object-Based Standards Object Services Standard (SEMI E39) Event eporting (SEMI E53) Exception Management (SEMI E41) 7 Conventions 7.1 Objects Whenever the equipment is required to know about specific kinds of entities, and required to manage information concerning these entities, it is useful to treat these entities as objects that comply with the basic requirements of SEMI E39 Object Services Standard (OSS). This is especially true whenever there are a large number of objects of a given type or when the entities are transient rather than permanent. In both cases, it is difficult to describe a general way for the host and equipment to specify which particular entity is referenced and to get information related only to a specific one out of many By defining these entities as objects that comply with OSS, it is only necessary for the host to specify the type of object and its specific identifier in order to inquire about one or more properties of the specific entity of interest Object Properties A property (attribute) is information about an individual object that is presented as a name/value pair. The name is a formally reserved text string that represents the property, and the value is the current setting for that property Properties shall be accessible to the host via the service GetAttr for the Carrier object. Using SEMI E39 Object Services Standard, for example, it is possible to: get the list of IDs for the current substrates at the equipment, and get the specified properties for one or more individual substrates ules for Object Properties Attributes with O access can not be changed using SetAttr service as defined in OSS. Attributes with W access can be changed using SetAttr service as defined in OSS. Additional attributes may be specified by the user or the equipment supplier by using an attribute name starting with UD (User Defined). Care should be taken to ensure the name of the attribute is unique Object Attribute Table The object attribute table is used to list all the attributes related to the defined object as shown below the access is defined as ead only (O) or ead/write (W). The EQD column is used to specify whether the attribute is required for implementation. Finally, the Form column is used to specify the format of that particular attribute. Table 1 Object Attribute Table Attribute Name Definition Access eqd Form ObjType Object type O Y Text = Carrier Page 3 Doc SEMI

5 7.2 State Model Methodology A state model has three elements: definitions of each state and sub-state, a diagram of the states and the transitions between states, and a state transition table. The diagram of the state model uses the Harel State Chart notation. An overview of this notation is presented in an Appendix of SEMI E30. The definition of this notation is presented in Science of Computer Programming 8, Statecharts: A Visual Formalism for Complex Systems, by D. Harel, State Model equirements The state models included in this standard are a requirement for SMS-FPD compliance. A state model consists of a state model diagram, state definitions, and a state transition table. All state transitions in this standard, unless otherwise specified, shall correspond to collection events. More explicitly, there must be a unique collection event for each state transition Equipment must maintain state models for each of the required state models as defined in this document. Equipment shall maintain individual and unique state models for each logical entity instantiated or physical entity in the equipment that has state models associated with it. The event identifier reported during a particular state transition change for each of these state models shall be shared for all associated state models but unique for each transition. For example, if the equipment has two load ports and the load port state model defines 10 transitions, there must be exactly 10 event identifiers for each load port transfer state model but not 10 for each physical load port. The information identifying the physical entity or logical entity undergoing the transition will be contained within the associated event report A state model represents the host s view of the equipment, and does not necessarily describe the internal equipment operation. All SMS-FPD state model transitions shall be mapped sequentially into the appropriate internal equipment collection events that satisfy the requirements of those transitions. In certain implementations, the equipment may enter a state and have already satisfied all of the conditions required by the SMS-FPD state model for transition to another state. In this case, the equipment makes the required transition without any additional actions in this situation Some equipment may need to include additional sub-states other than those in this standard. Additional substates may be added, but shall not change the SMS-FPD defined state transitions. All expected transitions between SMS-FPD states shall occur Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State, Actions, and Comments. The trigger (column 3) for the transition occurs while in the previous state. The actions (column 5) includes a combination of: Actions taken upon exit of the previous state, Actions taken upon entry of the new state, and Actions taken which are most closely associated with the transition When a state model is defined with multiple AND sub-states, the equipment may report all state entry events with only one collection event. When conditional paths are defined in the state model, it is not necessary to report any state transition(s) until a terminal state is reached at which time each transition used to reach that state is reported. Table 2 State Transition Table Num Previous State Trigger New State Actions Comments Page 4 Doc SEMI

6 7.3 Services Services are functions or methods that may be provided by either the equipment or the host. A service message may be either a request message, which always requires a response, or a notification message that does not require a response Service Message Description A service message description table defines the parameters used in a service, as shown in the following table: Table 3 Service Message Description Table Service Name Type Description #1 Type can be either N = Notification or = equest & esponse Notification type messages are initiated by the service provider (e.g., the equipment) and the provider does not expect to get a response from the service user. equest messages are initiated by a service user (e.g., the host). equest messages ask for data or an activity from the provider. equest messages expect a specific response message (no presumption on the message content) Service Message Parameter Definition A service parameter dictionary table defines the description, range, and type for parameters used by services, as shown in the following table: Table 4 Service Message Parameter Definition Table Parameter Name Form Description #1 A row is provided in the table for each parameter used on a service Service Message Definition A service message description table defines the parameters used in a service message. It also describes each message and its cause/effect to the equipment. The columns labeled eq/ind and sp/conf link the parameters to the direction of the message. Table 5 Service Message Definition Table Service Parameter eq/ind esp/conf Description The columns labeled eq/ind and sp/conf link the parameters to the direction of the message. The message sent by the initiator is called the equest. The receiver terms this message the Indication. The receiver may then send a esponse, which the original sender terms the Confirmation The following codes appear in the eq/ind and sp/conf columns and are used in the definition of the parameters (e.g., how each parameter is used in each direction): M Mandatory Parameter must be given a valid value. C Conditional Parameter may be defined in some circumstances and undefined in others. Whether a value is given may be completely optional or may depend on the values of other parameters. U User-Defined Parameter. - The parameter is not used. = (for response only) Indicates that the value of this parameter in the response must match that in the primary (if defined). Page 5 Doc SEMI

7 8 Explanation 8.1 High Efficiency of Substrate Transfers This standard provides the specification for substrate transfer to the equipment; however, it also deals with predictive transfer which can be enabled when substrate information is provided to the equipment including substrate processing conditions prior to the processing. It uses the ProcessJob queue management function specified by SEMI E40 as a method to provide information including the substrate processing conditions prior to the processing. Therefore, Create service of ProcessJob shall be used for the host to inform the processing conditions to the equipment. 8.2 eserving Substrates This standard is characterized by the host providing substrate information to the equipment before the processing, the equipment puts that substrate information into the queue, and starts processing the substrate transferin requests from the top of the queue, and when the substrate transfer is complete, runs the substrate processing using the substrate information processing conditions previously obtained The equipment shall retain the substrate information provided by the host within the equipment as the substrate objects. 8.3 Substrate Transfer When substrates are transferred to the equipment using this standard, the substrate corresponding to the substrate information at the top of the queue in the equipment shall be securely transferred to the equipment. In order to conduct a smooth substrate transfer, the AMHS can be arranged to recognize which substrate must be transferred to the equipment beforehand, to ensure preliminary transfer work is completed. Therefore, the host shall also consider providing the substrate sequence information which is provided to the equipment, to the AMHS. The host may be able to conduct more efficient material transfer by understanding the ProcessJob sequence that the equipment puts into the queue and informing the process sequence to the AMHS. This operation must be applied by thoroughly considering the AMHS and method In the case of inline equipment, the host can regard the inline equipment as one unit and provide the same substrate sequence information to all the equipment connected to it, provided there is no bypassing or alteration of sequence within the equipment. Also, when the inline controller is connected or different equipment units are communicating with each other, the host can set all the equipment conditions into the process conditions within the substrate information allowing each production equipment unit to retain the necessary information for itself as substrate objects. 9 Overview 9.1 SMS-FPD defines required behavior, data and services for the equipment that supports substrate transfer along with automation. This document describes the standard interface for host/equipment communication concerning substrate transfer. 9.2 Single Connection equirement Equipment suppliers are expected to implement this standard only by connecting the equipment through the GEM interface, without requiring individual connection for communication. 10 Definitions of Transfer Point Objects 10.1 Transfer Points Transfer points are the locations where the equipment transfers substrates and can be used as input, output or both input/output depending on equipment type and configuration. This classification may be fixed or it may be programmable by the user. However, the host shall be able to obtain the classification Transfer points shall be numbered for easier reference. The numbering may be fixed or programmable by the user; however, it shall start with 1 as the minimum number with increments of 1. The host shall be able to obtain these numbers. Page 6 Doc SEMI

8 The information regarding transfer points shall be capsuled as objects and the host shall be able to exchange individual information of one or multiple transfer points with the equipment using services defined by SEMI E39 Object Services Standard. Transfer point objects are permanent objects as equipment resources. Transfer point objects have attributes defined in Table 6 Transfer Point Attribute Definition. Table 6 Transfer Point Attribute Definition Table Attribute Name Definition Access eqd Form ObjType Object Type O Y Text 1 to 40 characters equal to TransferPort. ObjID Object ID O Y Equivalent to Transfer Point Numbering String 1 - n Increments of 1 TPType Operation Type of Transfer Point O Y LOAD, UNLOAD, UNI TPStatus Transfer Point State O Y Enumerated: OUT OF SEVICE, IN SEVICE, TANFE EADY, NOT EQUEST, EQUEST, TANSFE BLOCKED TPTactTime Guideline of Processing Tact of the Equipment (Accuracy is not required) O Y xxxx Sec TPeqTime Guideline of cycle time for substrate transfer at the transfer points (Accuracy is not required) O Y xxxx Sec TPeqType Substrate Transfer equest Type O Y Enumerated: IUT, OUTPUT Page 7 Doc SEMI

9 Attribute Name Definition Access eqd Form TPActMaterialList Material list of cassettes and substrates, etc. which exist at transfer points O Y List L,n (n=number of materials) 1. L,2 (Material 1) 1. Cassette ID1 2.L,m (m=number of substrates) 1. Substrate object ID 1 : m. Substrate object ID m 2. L,2 (Material 2) 1. Cassette ID2 2.L,m (n=number of substrates) 1. Substrate object ID 1 : m. Substrate object ID m n. L,2 (Material n) 1. Cassette IDn 2.L,m (m=number of substrates) 1. Substrate object ID 1 : m. Substrate object ID m * When a single substrate is requested L,1 1. L,2 (Material 1) 1. A[0] no cassette ID 2.L,1 1. Substrate object ID TPeqMaterialList Material list of cassettes and substrates, etc. which is requested by transfer points O Y List Same as TPActMaterialList TPMtlType Material in question O Y Substrate/Cassette TPAccessStatus Transfer Point Access State O Y Enumerated: MANUAL AUTO 10.2 Transfer Point Substrate Transfer State Model The objective of the Transfer Point Substrate Transfer State Model is to define the substrate transfer requests and states viewed from the host. This includes communication interaction required to transfer substrates between the host and the equipment. Each of the equipment transfer points has an individual instance in this state model Transfer Point Transfer State Model Diagram Figure 1 shows dynamic behavior of the transfer point described using Harel state chart notation Transfer Point Transfer State Definition TP TANSFE STATUS The upper most state of IN SEVICE state and OUT OF SEVICE state OUT OF SEVICE No transfer-in/-out is possible in this state. In order to use this transfer point for continuous operation, transition into IN SEVICE is required. Page 8 Doc SEMI

10 IN SEVICE Transfer into/out of this transfer point is possible. By transitioning into OUT OF SEVICE, transferring in/from this transfer point will be disabled TANSFE EADY Substrate of IN SEVICE in which this transfer point is ready to transfer substrates, whereas the substrate transfer operation is not underway. This state has two substrates which can be selected depending on whether the transfer request exists or not (NOT EQUEST and EQUEST) NOT EQUEST Substrate of TANSFE EADY. State where substrate transfer request does not exist when transitioned to TANSFE EADY state EQUEST Substrate of TANSFE EADY state. State where substrate transfer request exists when transitioned to TANSFE EADY state. In this state, the substrate with the substrate ID requested from the equipment can be transferred at this transfer point TANSFE BLOCKED State where substrate is transferred or moved at this transfer point. In this state, this transfer point is in operation and no substrate transfer request can be executed Transfer Point Transfer State Transition Table 1 4 H C OUT OF SEVICE IN SEVICE TP TANSFE STATUS C NOT EQUEST TANSFE EADY 6 7 EQUEST 8 9 TANSFE BLOCKED 10 Figure 2 Transfer Point Dynamic Behavior Model Page 9 Doc SEMI

11 Table 7 Transfer Point Transfer State Transition Definition Num Previous State Trigger New State Actions Comments 1 (no state) System eset OUT OF SEVICE or IN SEVICE (History) 2 OUT OF SEVICE The host or an operator has requested ChangeServiceStatus service with a parameter value of IN SEVICE to this transfer point. 3 IN SEVICE The host or an operator has requested ChangeServiceStatus service with a parameter value of OUT OF SEVICE to this transfer point. 4 IN SEVICE Service: The host or an operator has requested ChangeServiceStatus service with a parameter value of IN SEVICE to this transfer point. 5 TANSFE EADY 6 NOT EQUEST System reset: this transition can be invoked by equipment reinitialization. IN SEVICE OUT OF SEVICE TANSFE EADY or TANSFE BLOCKED Service: Host or operator requested NOT ChangeServiceStatus service with a EQUEST parameter value of IN SEVICE to or this transfer point. EQUEST System reset: this transition can be invoked by equipment reinitialization. When substrate transfer is completed or transfer motion is completed at the transfer point, transition #10 will trigger this transition. Automated: The equipment requested substrate transfer, identifying the target substrate ID recognizing the need for transfer. EQUEST This transition is based on the transfer status before system reset occurred. Data required to be available for this event: TPID TPStatus The transfer point becomes available for substrate transfer at this point. Data required to be available for this event: TPID TPStatus The transfer point becomes unavailable for transfer. An alarm will be issued by an attempt to use this transfer point for substrate transfer after the state transition. Data required to be available for this event: TPID TPStatus Default state of transition into IN SEVICE. If the transfer point is not available because it is in operation with substrate or transfer, the state becomes TANSFE BLOCKED. Otherwise, it will become TANSFE EADY. Data required to be available for this event: TPID TPStatus TPActMaterialList TPeqType TPeqMaterialList When becoming TANSFE EADY state, if substrate transfer request exists, the substrate is EQUEST and otherwise, NOT EQUEST. Data required to be available for this event: TPID TPStatus TPActMaterialList TPeqType TPeqMaterialList At this point, substrate can be transferred with external entity at the transfer point. Attribute data: Transferring in is possible when eq.type is IUT, transferring out is possible when it is OUTPUT. Data required to be available for this event: TPID TPStatus TPActMaterialList TPeqType TPeqMaterialList Page 10 Doc SEMI

12 Num Previous State Trigger New State Actions Comments 7 EQUEST Automated: The equipment released the need for substrate transfer and cancelled transfer request. NOT EQUEST 8 EQUEST Automated: The equipment changed the substrate ID or transfer request type in the substrate transfer request. EQUEST 9 TANSFE EADY 10 TANSFE BLOCKED Automated: The PIO substrate transfer is beginning and the PIO EADY signal is activated. Internal operation: The substrate begins to move at this transfer point. TANSFE BLOCKED Automated: Substrate transfer by TANSFE PIO has been completed. Internal EADY operation: The transfer operation of the substrate on the transfer point has been completed. At this point, the substrate cannot be transferred. The transferring mechanism which has been transferring the substrate to the transfer point must immediately halt substrate transfer. Data required to be available for this event: TPID TPStatus At this point, the substrate can be transferred with external entity at the transfer point. Attribute data: Transferring in is possible when eq.type is IUT, transferring out is possible when it is OUTPUT. Data required to be available for this event: TPID TPStatus TPActMaterialList TPeqType TPeqMaterialList At this time, the substrate is being transferred from an external entity or moved within the equipment by material transfer mechanism. Data required to be available for this event: TPID TPStatus TPActMaterialList At this time, substrate transfer from the external entity or transfer within the equipment by the material transfer mechanism has been completed and the transfer point is ready to accept the substrate transfer request. Data required to be available for this event: TPID TPStatus TPActMaterialList TPeqType TPeqMaterialList Transfer Point Access Definition MANUAL Substrate transfer to the transfer point is not controlled by the host but manually by operation of a member of staff AUTO Substrate transfer to the transfer point is conducted by the automatic AMHS controlled by the host. Page 11 Doc SEMI

13 Transfer Point Access State Transition Table Figure 3 Transfer Point Access Dynamic Behavior Model Table 8 Transfer Point Access State Transition Definition Num Previous State Trigger New State Actions Comments 1 (no state) System eset MANUAL or AUTO (History) 2 MANUAL The host or an operator has requested ChangeAccess service with the parameter value of AUTO to this transfer point. 3 AUTO The host or an operator has requested ChangeAccess service with the parameter value of MANUAL to this transfer point. H MANUAL 2 3 AUTO MANUAL TNSFE POINT ACCESS AUTO This transition is based on the transfer status before system reset occurred. Data that need to be available when this event is reported are: TPID TPServiceStatus Substrate transfer at this transfer point is under the host control ん bbenabling substrate transfer by the automatic AMHS. Data that need to be available when this event is reported are: TPID TPServiceStatus Substrate transfer at this transfer point is outside the host control disabling substrate transfer by the automatic AMHS. Data that need to be available when this event is reported are: TPID TPServiceStatus 11 Substrate Transfer 11.1 Substrate Object The information regarding substrate shall be capsuled as an object and the host shall be able to exchange individual information of one or multiple substrates with the equipment using services defined by SEMI E39 Object Services Standard. Substrate object, defined by SEMI E90, is used for substrate objects The timing for substrate object creation is when the equipment physically or logically recognizes the substrate. The equipment logically recognizes the substrate when it receives substrate information from the host Substrate Transfer equest at Transfer Point Page 12 Doc SEMI

14 The timing for requesting substrate transfer is left to the equipment. The equipment may be able to make a request when the substrate to be transferred is identified, instead of when the transfer is to be made. The actual transfer timing is determined by the substrate transfer PIO (SEMI D51 and SEMI E84) interface Substrate Transfer-In equest The equipment shall manage the process condition instructions created by ProcessJob in the queue, which shall be processed sequentially from the top of the queue, requesting material (substrate) transfer to the transfer point Substrate Transfer-Out equest The equipment shall be able to manage substrate processing conditions within the equipment and transfer substrates to the transfer point. When the equipment detects a condition where substrates become accumulated if more substrates are transferred into the transfer point, then a request must be made to the transfer point, to transferout material (substrate) acing of Transfers When a transfer-in request is given but changed to a transfer-out after the material is about to be supplied to the transfer point, the equipment has priority until the beginning of PIO for transfer, therefore, the transferring equipment must be responsible for following the transfer point request change When the PIO begins for substrate transfer at the transfer point, the transfer point status changes to TANSFE BLOCKED and the transfer point shall execute prompt substrate transfer Substrate Transfer Handshake It is desirable to use SEMI D51 or SEMI E84 for the substrate transfer handshake. 12 Services 12.1 The purpose of this section is to define message services required to support SMS-FPD functionality The service definition is divided into 4 parts: Service Description Table Service Parameter Table Service Parameter Value Table that specifies type and range of parameters Service Status Mapping Table that defines available services in each status 12.2 Service Message Description There are two types of services: Primary message and response between service requestor and service provider Notification message that is sent by service provider to service requestor without requiring response In the following table, Type column indicates if the service requires the equest/esponse pair ( ) or only notification message ( N ). Table 9 Service Message Description Service Name Type Description ChangeServiceStatus This service shall change the transfer status of a specified Transfer Point at the production equipment. ChangeAccess This service shall change the access mode of the specified Transfer Point at the production equipment. If the equipment is unable to change one or more of the specified Transfer Point (s) to the specified Access Mode, then the equipment shall accept the command (with appropriate response acknowledgement), and shall change only the Access Mode of those Point(s) allowed by the equipment, supplying host with an indication that not all Transfer Point were successfully changed Service Message Parameter Definition Page 13 Doc SEMI

15 The following table is a list of required parameters for service messages: Table 10 Service Message Parameter Definition Parameter Name Form Description AccessMode Enumerated AUTO, MANUAL. The desired access mode of the Transfer Point specified. AttributeData Could be several different data types. The data value associated with AttributeID. AttributeID Text Identifier of the object attribute in the PropertiesList. 1 to 40 characters. CMAcknowledge Enumerated: Acknowledge, command has been performed Acknowledgement of request. Some services are commanding a certain task to be Invalid command performed. This task is only completed if the expected end-condition is reached or has failed. Cannot perform now Those services in general can be acknowledged right Invalid data or argument Acknowledge, request will be performed with completion signaled later by an event ejected, invalid state away after having performed the task. Other services that include triggering of physical movements (e.g. CarrierOut, CancelCarrier) most likely will be interpreted as request action to be initiated rather than do action. The equipment will reply in those cases the command is going to be performed. This alleviates transaction timeouts for these services that may take a long time to perform. It is however up to the supplier to decide if this is applicable. The completion of the task initiated by the services commanding some task to be performed (either acknowledged or going to be performed) must result in either a state transition or other action that generates a collection event upon normal / abnormal completion. CMStatus A structure consisting of CMAcknowledge and eturn information for a service. Status. ErrorCode Enumerated: Contains the code for the specific error found. Valid for all services listed below Unsupported option [service] requested Command not valid for current state Insufficient parameters specified Parameters improperly specified ChangeAccess TransferPoint does not exist ChangeServiceStatus TransferPoint does not exist ErrorText Text Text in support of the error code. TPID Integer 1 to n. ID number of a TransferPoint. The PortID number should be the same as the TransferPoint number. TPList List 1 to n items. List of n items TPID 1.. TPID n ServiceStatus Enumerated: IN SEVICE, The desired transfer service status of the specified list of TransferPoint. or OUT OF SEVICE. Status A list of ErrorCode/ErrorText pairs. eports any errors found. Page 14 Doc SEMI

16 The Acknowledge, request will be performed with completion signaled by a later event response to a service may apply to services listed in the table below. If this does apply, the supplier must document the event that signals completion. Any service not included in Table 11 shall respond with Acknowledge, command has been performed Events that may signal completion are listed in Table 11. Table 11 Deferred Completion Events Service Name Type Description ChangeAccess Transfer Point Access State Change Event (transition 2 and 3) This service shall change the access mode of the specified TransferPoint at the production equipment. If the equipment is unable to change one or more of the specified TransferPoint t(s) to the specified Access Mode, then the equipment shall accept the command (with appropriate response acknowledgement), and shall change only the Access Mode of those TransferPoint (s) allowed by the equipment, supplying host with an indication that not all ports were successfully changed. ChangeServiceStatus TP Transfer Status Change Event (transition 2 and 3) This service shall change the transfer status of a specified TransferPoint at the production equipment Service Message Definitions The following tables specify the allowable/required parameters for each service. The column marked EQ/IND specifies which parameters are required to be supported for SMS-FPD compliance (see ) ChangeAccess The ChangeAccess message requests a change of access mode for the transfer point specified in the TPList. Table 12 Change Access Service Parameter Definitions Parameter Name eq/ind sp/conf Description AccessMode M The new desired access mode. TPList M The list of ports to use the new access mode. CMStatus M Information concerning the result of the service ChangeServiceStatus The ChangeServiceStatus service is used to request the production equipment change a TP transfer status service state. Table 13 Change Service Status Service Parameter Definitions Parameter Name eq/ind sp/conf Description TPID M TPID to designate the new service status. ServiceStatus M The new service state. CMStatus M Information concerning the result of the service. 13 elated Documents 13.1 SEMI Standards E39 Object Services Standard: Concepts, Behavior, and Services E40 Standard for Processing Management E87 Specification for Carrier Management Page 15 Doc SEMI

17 E90 Specification for Substrate Tracking D51 Specification for Handshake Protocol of Single Substrate for Handling off/on Tool in FPD Production Page 16 Doc SEMI

18 ELATED INFOMATION 1 Communication Interface Guide for Sheet Substrate Transfer in FPD Equipment NOTICE: This related information is not an official part of SEMI (doc#) and was derived from (origin of information). This related information was approved for publication by (method of authorization) on (date of approval). 1-1 Purpose At the production line of FPD, an automation evolution is underway; however, the reality is that each fab controls its equipment with its own specification. Because of this, a huge loss has been created in terms of the automation cost and lead time of equipment. Also, due to the migration to large substrate sizes in FPD production, the necessity to meet new demands such as single substrate transfer has been increasing. This document describes how to use the communication interface required for automated transfer of substrates and material process control across automated material handling systems (AMHS) and equipment at FPD production plants. 1-2 Scope This guide includes reference to other SEMI Standards and particular definitions and usage of those SEMI Standards for the FPD fabs This document is a guideline to automate substrate transfer and material process control of equipment installed in the FPD fabs This guide uses SEMI Standards E40 and E90 for material process control of the equipment This guide does not intend to be applied to all the equipment. This is to be used as an example of a fab automation system and equipment communication interface and their control policy trend for enabling single substrate transfer at the FPD fabs. 1-3 Limitations The other SEMI Standards referenced in this guide are carefully checked for application to the FPD fabs. However, when the other SEMI Standards referenced in this document are used, the readers are expected to be flexible with the expressions in applying them to the FPD fabs. For example, if the term wafer is used in the other SEMI Standards, the readers are expected to read it as substrate. This difference of expressions does not have much impact on the interpretation of standards or work on the FPD manufacturing equipment and fab automation system This document is not a guideline that includes all the aspects of the FPD fab automation, but it does describe how to make substrate transfer efficient without loss and how to instruct material processing, and is a guide for that operation In order to enable this guide, the following must be implemented: Process management function for notifying the substrate ID to be transferred and its process conditions (recipe, etc.) before the substrate transfer into the equipment (Process Job object) Substrate information management function to manage transfer, process and ejection substrates (substrate object) Service to provide substrate information and control by the host (Process Job service) Queue to manage the material processing sequence by the equipment (Process Job queue) This guide uses SEMI E40 and E90; however, there are different forms of usage as described in those standards for application to the FPD fabs. For example, the Process Job create service parameter, PMtrlOrder, essentially is for instructing how to manage the material processing sequence in the PMtlNameList; however, this guide uses it for instructing how the corresponding Process Job is attached to the queue. Also, as for the substrate object creation timing, substrate objects are created using the substrate ID within PMtlNameList when the Process Job is created. Page 17 Doc SEMI

19 1-4 Overview This guide uses SEMI E40 and SEMI E90 also as a means to effectively use this standard (SMS-FPD), to enable notification of substrate information to the equipment, retention of the substrate information at the equipment and substrate transfer sequence according to the substrate transfer request by the equipment based on the substrate information High Efficiency of Substrate Transfers This guide enables advance notification of substrate information including substrate process conditions so that the equipment itself can request the required substrate from the host for the efficient substrate transfer to the equipment It uses SEMI E40 for the method to notify the substrate process conditions from the host to the equipment eserving Substrates This guide is characterized by the host providing substrate information including the substrate process conditions to the equipment before the processing, the equipment puts that substrate information into the queue, and starts processing the substrate transfer-in requests from the top of the queue, and when the substrate transfer is complete, runs the substrate processing using the substrate information processing conditions previously obtained The queue management of substrate information provided by the host is performed by the equipment following SEMI E In addition to the queue management, the substrate information itself needs to be retained within the equipment. This substrate information is retained as the substrate object using SEMI E Explanation Notification of Substrate Information Notification of substrate information from the host to the equipment is conducted using the Process Job create service. The substrate ID is set in the parameter PMtlNameList and recipe condition is set in ecid, when create service is requested. When the host needs to transfer substrates to the equipment in a cassette, it should set the IDs of the existing substrates that need to be processed in the desirable processing order in PMtlNameList Examples of Parameters equired for Create Table 1-1 Process Job Create Service Parameter Definitions Attributes Name Definition Format Data Implemented ObjType Object Type A[10] POCESSJOB YES NO ObjID Object Identifier A[1,80] Process Job ID YES NO PMtlNameList Material Identifier L Substrate Designation <L[n] (n=number of target substrates) <A[16] MID1 : <A[16] MIDn MID (A[16]) :Substrate ID YES NO PMtlType Material Identifier Type B1 14: Substrate YES NO PProcessStart Automatic Start Setting BOOLEAN TUE: Automatic/ FALSE: Manual YES NO PMtrlOrder Substrate Processing Order Type U1 2:OPTIMIZE/3:LIST YES NO PecipeMethod Variable Parameter Valid/Invalid U1 1: Invalid/2: Valid YES NO Page 18 Doc SEMI

20 Attributes Name Definition Format Data Implemented ecid ecipe ID A[1,80] Equipment ecipe Name YES NO ecvariablelist ecipe Variable Parameter List L <L[n] (n=number of parameters) <L ecipevariable1 : <L ecipevariablen ecipevariable ecipe Variable Parameter L <L[2] <A[] ecipevarname <I4 <ecipevarvalue YES NO YES NO ecipevarname ecipe Variable Parameter Name A[] Parameter Name YES NO ecipevarvalue ecipe Variable Parameter Value I4 YES NO etention of Substrate Information (Queuing) When the host requests the Process Job create service, the equipment shall check the given parameters for no errors, and if the process conditions are executable, create the Process Job with the provided Process Job ID and attach it to the queue Order in the Queue The order of the created Process Job in the queue depends on the PMtrlOrder parameter. If PMtrlOrder is set with LIST, it is attached to the last of the queue. If PMtrlOrder is set with OPTIMIZE, the equipment must attach the job to the most appropriate processing position in the Process Job order of the queue, to minimize the preprocessing work required when the conditions change. A simple method for calculating the best position to attach a job may be to find the same recipe ID in the queue and attach the job after it. However, it is desirable for the equipment manufacturer to consider the equipment efficiency for implementing the best method Substrate Object Creation The equipment must generate a substrate object for the target substrate when a Process Job is created. The MID provided by PMtlNameList should be used as substrate object ID Substrate Transfer-In equest The equipment shall request substrate transfer to the host following the queuing order of the created Process Job How to equest Substrate Transfer-In Substrate transfer-in request by the equipment to the host is enabled by making the attribute of the transfer point object TPStatus as EQUEST. At this time, the host is able to recognize the substrate ID for which the equipment requests transferring-in by setting the requested substrate ID for transfer in TPeqMaterialList and IUT in TPeqType Timing for Substrate Transfer-In The timing for the equipment to make a request to the host for substrate transfer-in is up to the equipment. A simple method to identify the request timing is when there is no substrate on the transfer point. However, in order to improve the throughput by continuous substrate transfer, the equipment should manage the substrate acceptance timing at the transfer point by notifying the throughput time guideline at the transfer point to the host, as well as making an advance transfer-in request. For notifying throughput guideline to the host, attribute data of the transfer point object TPTactTime and TPeqTime may be used. This operation must be determined by the equipment manufacturer and panel manufacturer taking the AMHS and transfer method fully into account Substrate Transfer-Out equest The equipment shall request the host removal of substrates whose processing has been completed in the equipment How to equest Substrate Transfer-Out Substrate transfer-out request by the equipment to the host is enabled by making the attribute of the transfer point object TPStatus as EQUEST. At this time, the host is able to Page 19 Doc SEMI

21 recognize the substrate ID for which the equipment requests transferring-out by setting the requested substrate ID for transfer-out of TPeqMaterialList and OUTPUT in TPeqType Timing for Substrate Transfer-Out The timing for the equipment to make a request to the host for substrate transfer-out is up to the equipment. A simple method to identify the request timing is when there is a substrate to be transferred out on the transfer point. However, in order to improve the productivity by minimizing the time substrate remaining on the transfer point, the equipment should manage the substrate transfer-out timing at the transfer point, by notifying the throughput time guideline at the transfer point to the host, as well as making an advance transfer-out request. For notifying throughput guideline to the host, attribute data of the transfer point object TPTactTime and TPeqTime may be used. This operation must be determined by the equipment manufacturer and panel manufacturer taking the AMHS and transfer method fully into account Substrate Transfer Status The equipment shall notify execution and completion of substrate transfer to the host. The method to be used for this purpose is the transfer point object attribute data TPStatus. The equipment shall set TANSFE BLOCKED when transfer interface starts based on the transfer interface with external equipment (SEMI Standard E84 and D51) and NOT EQUEST when the transfer interface is completed. However, should the equipment request continuous substrate transfer, it may set EQUEST acing of Substrate Transfer The equipment may become incapable of planned substrate transfer due to faults within the equipment or reject transfer-in as the transfer-out becomes priority depending on the equipment internal processing status. The priority is given to the equipment at this point. Therefore, the host shall determine the substrate transfer information of the equipment from the transfer point object attribute data TPStatus and TPeqType Boundary of acing TPStatus and TPeqType may be changed by the equipment when the external AMHS arrives at the equipment for substrate transfer with the equipment. The host is required to respond to the new request from the equipment canceling the substrate transfer with the external AMHS. However, the equipment shall not change the request when transfer interface has already started based on the transfer interface with external equipment (SEMI Standard E84 and D51) and shall continue conducting the substrate transfer. If substrate transfer is technically not possible due to transfer problems, etc., it shall issue an alarm canceling the transfer interface and notify the alarm details from the equipment to the host Deleting etained Substrate Object A substrate object is generated when a Process Job is created. When a Process Job is deleted because the material has not arrived, the equipment shall be responsible for deleting the substrate object to be processed by that Process Job. The substrate object for an existent substrate in the equipment shall not be deleted as long as the equipment has the substrate, even when the corresponding Process Job is deleted. 1-6 Sequence Example Equipment Configuration Assumptions The equipment is assumed to have a single or multiple transfer points (TPn) and a single processing module (MDL1). TP1 MDL1 TP2 Figure 1-1 Basic Configuration Page 20 Doc SEMI