Ultra Final Series bearings for clean environment with enhanced durability and lower particle generation at high temperatures, clean rooms and

Transcription

1 Ulta Final Seies beaings fo clean envionment with enhanced duability and lowe paticle geneation at high tempeatues, clean ooms and vacuums!

2 CONTENTS NTN beaings fo clean envionments 1. Standad specifications of beaings fo clean envionments 2 2. Ulta-clean beaings (vacuum / high tempeatue) 4 3. Long life ulta-clean beaings (vacuum / high tempeatue) 5 4. Beaings with low paticle geneation gease (atmosphee / oom tempeatue) 6 5. Beaings with low paticle geneation gease fo vacuum envionment (vacuum / high tempeatue) 7 6. Dimensions 6.1 Ulta-clean beaings / pat No. examples Long life ulta-clean beaings Beaings with low paticle geneation gease Beaings with low paticle geneation gease fo vacuum envionment Intoduction of beaings fo special envionments Cam followes 7.2 Beaing units stainless steel seies 7.3 Ball scews 7.4 Miniatue sliding scews with plastic nut 7.5 Plastic olling beaings

3 NTN beaings fo clean envionments Ulta Final Seies beaings fo clean envionments ae beaings that poduce minimal dust fo vacuum equipment, tansfe equipment, and equipment fo manufactuing semiconductos, liquid cystal and electonic components. Range of NTN beaings fo clean envionment Vacuum level (Pa) Tempeatue ( C) 1

4 1. Standad specifications of beaings fo clean envionments The standad specifications of beaings fo clean envionments ae as follows. Fo moe details, contact NTN Engineeing. Classification of beaings Appeaance Lubicant Configuation Ulta-clean beaings Special PTFE Raceway goove and olling elements Long life Ulta-clean beaings Special PTFE Special ball Raceway goove and olling elements Beaings with low paticle geneation gease NTN low paticle geneation gease Beaings with low paticle geneation gease fo vacuum envionment Fluoine gease

5 Inne and oute ings Mateials Rolling elements Cage Shield Page of beaing dimension table Matensite stainless steel Page 8 Matensite stainless steel Special ball Page 9 Matensite stainless steel Austenite stainless steel Austenite stainless steel Page 10 Matensite stainless steel Page 11

6 Beaings fo clean ooms and tansfe equipment 2. Ulta-clean beaings (vacuum / high tempeatue) Appeaance and configuation Standad specifications Inne and oute ings : Matensite stainless steel Rolling elements : Matensite stainless steel Cage Lubicant : Special PTFE Shield Chaacteistics of paticle geneation and duability 1 Pat No. 2 Axial load 3 Rotational speed 4 Vacuum level N 50min Pa 1 Pat No. 2 Axial load 3 Rotational speed 4 Vacuum level N 360min Pa NTN Ulta-clean beaings 150 C Room tempeatue NTN Ulta-clean beaings Room tempeatue Company A clean beaings 150 C Room tempeatue Company A clean beaings Room tempeatue Relative numbe of paticles (pieces/400 h) Enduance time (h) Featues 1. Low paticle geneation, coosion esistance. 2. Low toque. 3. Can be used in high tempeatue and high vacuum conditions. 4. Long life. Application example: Tansfe equipment of LCD panel Beaing Ex.) pat No. MT2 SEB08J1ZZ1C3 0G LCD panel Beaing Opeating tempeatue C

7 3. Long life ulta-clean beaings (vacuum / high tempeatue) Appeaance and configuation Standad specifications Inne and oute ings : Matensite stainless steel Rolling elements : Matensite stainless steel Cage Lubicant : Special PTFE and special ball Shield Duability Long life ulta-clean beaings Atmosphee Vacuum 1 Pat No Axial load 10N 3 Rotational speed 2500min 1 4 Atmosphee/vacuum (10 4 Pa) Ulta-clean beaings Atmosphee Vacuum Room tempeatue 300 C Enduance time (h) Featues Application example: Tansfe equipment of HD substate 1. Low paticle geneation, coosion esistance. 2. Low toque. 3. Longe life than ulta-clean beaing. Ex.) pat No. MT2 5PT SEB08J1ZZ1C3 0G Caie section 8 caies/pallet 2 beaings/caie Pallet section Opeating tempeatue 300 C Beaing 5

8 Beaings fo clean ooms and tansfe equipment 4. Beaings with low paticle geneation gease (atmosphee / oom tempeatue) Appeaance and configuation Standad specifications Inne and oute ings : Matensite stainless steel Rolling elements : Matensite stainless steel Cage Lubicant : NTN low dusting gease ZD-1 (L635) Shield Chaacteistics of paticle geneation and duability 1 Pat No Axial load 10N 3 Tempeatue Room tempeatue 1 Pat No. 2 Axial load 3 Rotational speed N 10000min 1 NTN Beaings with low paticle geneation gease 1500min min 1 NTN Beaings with low paticle geneation gease 100 C B company clean gease beaings 1500min min 1 B company clean gease beaings 100 C Numbe of paticles (pieces/30 min) Enduance time (h) Featues Application example: Tansfe obot 1. Low paticle geneation, coosion esistance. 2. Low toque. 3. Long life. Ex.) pat No. SEB08J1ZZ1C3 L635QMP Opeating tempeatue 70 C 6 Cam followe and beaing unit with low paticle geneation gease ae available.

9 5. Beaings with low paticle geneation gease fo vacuum envionment (vacuum / high tempeatue) Appeaance and configuation Standad specifications Inne and oute ings : Matensite stainless steel Rolling elements : Matensite stainless steel Cage Lubicant : Low paticle geneation gease fo vacuum envionment (LX23) Shield Dusting chaacteistics of paticle geneation NTN Beaings with low paticle geneation gease fo vacuum envionment Beaings with geneal fluoine gease 1 Pat No. 2 Axial load 3 Rotational speed 4 Vacuum level N 200min Pa Relative numbe of paticles (pieces/24 h) Featues Application example: LCD tansfe obot 1. Low paticle geneation, coosion esistance. 2. Can be used in high tempeatue and high vacuum conditions. 3. Long life. Ex.) pat No. SEB08J1ZZ1C3 LX23Q109 Opeating tempeatue 200 C Cam followe and beaing unit with low paticle geneation gease fo vacuum envionment ae available. 7

10 6. Dimensions 6. 1 Ulta-clean beaings B Main dimensions (mm) Allowable adial load 3 Pat No. 1 d D B s min N kgf D d MT2-F-BC4-8C MT2-F-684AX50C MT2-F-BC4-10C MT2-F-604ZZ1C MT2-SEB24J1ZZ1C3/0G MT2-F-BC5-10C MT2-SEB95AJ1ZZ1C3/0G MT2-F-605ZZ1C3/0G MT2-SEB25J1ZZ1C3/0G Open type MT2-F-BC6-12C MT2-SEB96J1ZZ1C3/0G MT2-SEB06J1ZZ1C3/0G MT2-SEB26J1ZZ1C3/0G MT2-SEB97J1ZZ1C3/0G MT2-SEB07J1ZZ1C3/0G MT2-SEB27J1ZZ1C3/0G Shielded type MT2-SEB98J1ZZ1C3/0G MT2-SEB08J1ZZ1C3/0G MT2-SEB28J1ZZ1C3/0G MT2-F-R6J1ZZ1C3/0G MT2-SEB900J1ZZ1C3/0G MT2-SEB000J1ZZ1C3/0G MT2-SEB200J1ZZ1C3/0G MT2-SEB300J1ZZ1C3/0G MT2-SEB901J1ZZ1C3/0G MT2-SEB001J1ZZ1C3/0G MT2-SEB201J1ZZ1C3/0G MT2-SEB902J1ZZ1C3/0G MT2-SEB002J1ZZ1C3/0G MT2-SEB202J1ZZ1C3/0G MT2-SEB903JR1XZZ1C3/0G MT2-SEB003J1ZZ1C3/0G MT2-SEB203J1ZZ1C3/0G MT2-SEB904J1ZZ1C3/0G MT2-SEB004J1ZZ1C3/0G MT2-SEB204J1ZZ1C3/0G ) Minimum allowable chamfe dimension. 2) Goove may be povided fo seal in some cases. 3) Allowable adial load is the maximum load when adial load is applied. 4) Allowable tempeatue fo this beaing is 120 C. Fo othes, 260 C MT2-SEB905J1ZZ1C3/0G MT2-SEB005J1ZZ1C3/0G MT2-SEB205J1ZZ1C3/0G MT2-SEB906J1ZZ1C3/0G MT2-SEB006J1ZZ1C3/0G MT2-SEB206J1ZZ1C3/0G Example pat No: MT2 SEB08 J1 ZZ1 C3 0G 8 Intenal cleaance code (C3 cleaance) Shield code ZZ1 : No shield No code Cage code: J1 Basic No. Solid lubicant code: Special PTFE MT2 (ulta-clean beaing) MT2-5PT (long life ulta-clean beaing) Gease lubication No suffix (indicated at end of pat pat No.) Gease lubicant code Solid lubicant OG Low paticle geneation gease L635 Low paticle geneation fluoine gease LX23

11 6. 2 Long life ulta-clean beaings B Main dimensions (mm) Allowable adial load Pat No. 2 d D B s min Basic load atings dynamic static D d MT2-5PT-SEB26J1ZZ1C3/0G MT2-5PT-SEB27J1ZZ1C3/0G MT2-5PT-SEB08J1ZZ1C3/0G MT2-5PT-SEB28J1ZZ1C3/0G MT2-5PT-SEB000J1ZZ1C3/0G MT2-5PT-SEB200J1ZZ1C3/0G MT2-5PT-SEB300J1ZZ1C3/0G MT2-5PT-SEB001J1ZZ1C3/0G MT2-5PT-SEB201J1ZZ1C3/0G Shielded type MT2-5PT-SEB902J1ZZ1C3/0G MT2-5PT-SEB002J1ZZ1C3/0G MT2-5PT-SEB202J1ZZ1C3/0G MT2-5PT-SEB903JR1XZZ1C3/0G MT2-5PT-SEB003J1ZZ1C3/0G MT2-5PT-SEB203J1ZZ1C3/0G MT2-5PT-SEB904J1ZZ1C3/0G MT2-5PT-SEB004J1ZZ1C3/0G MT2-5PT-SEB204J1ZZ1C3/0G MT2-5PT-SEB905J1ZZ1C3/0G MT2-5PT-SEB005J1ZZ1C3/0G MT2-5PT-SEB205J1ZZ1C3/0G MT2-5PT-SEB906J1ZZ1C3/0G MT2-5PT-SEB006J1ZZ1C3/0G ) Minimum allowable chamfe dimension. 2) Allowable adial load is the maximum load when adial load is applied. 9

12 6. Dimensions 6. 3 Beaings with low paticle geneation gease B Main dimensions (mm) d D B s min 1 Pat No F-604ZZ1C3/L635QMP SEB24J1ZZ1C3/L635QMP D d SEB95AJ1ZZ1C3/L635QMP F-605ZZ1C3/L635QMP SEB25J1ZZ1C3/L635QMP F-WBC6-12ZZ1C3/L635QMP SEB96J1ZZ1C3/L635QMP SEB06J1ZZ1C3/L635QMP SEB26J1ZZ1C3/L635QMP Shielded type SEB97J1ZZ1C3/L635QMP SEB07J1ZZ1C3/L635QMP SEB27J1ZZ1C3/L635QMP SEB98J1ZZ1C3/L635QMP SEB08J1ZZ1C3/L635QMP SEB28aJ1ZZ1C3/L635QMP F-R6J1ZZ1C3/L635QMP SEB900J1ZZ1C3/L635QMP SEB000J1ZZ1C3/L635QMP SEB200J1ZZ1C3/L635QMP SEB300J1ZZ1C3/L635QMP SEB901J1ZZ1C3/L635QMP SEB001J1ZZ1C3/L635QMP SEB201J1ZZ1C3/L635QMP SEB902J1ZZ1C3/L635QMP SEB002J1ZZ1C3/L635QMP SEB202J1ZZ1C3/L635QMP SEB903JR1XZZ1C3/L635QMP SEB003J1ZZ1C3/L635QMP SEB203J1ZZ1C3/L635QMP SEB904J1ZZ1C3/L635QMP SEB004J1ZZ1C3/L635QMP SEB204J1ZZ1C3/L635QMP SEB905J1ZZ1C3/L635QMP SEB005J1ZZ1C3/L635QMP SEB205J1ZZ1C3/L635QMP SEB906J1ZZ1C3/L635QMP SEB006J1ZZ1C3/L635QMP SEB206J1ZZ1C3/L635QMP 1) Minimum allowable chamfe dimension. 10

13 6. 4 Beaings with low paticle geneation gease fo vacuum envionment B Main dimensions (mm) d D B s min 1 Pat No. D d F-604ZZ1C3/LX23Q SEB24J1ZZ1C3/LX23Q SEB95AJ1ZZ1C3/LX23Q F-605ZZ1C3/LX23Q SEB25J1ZZ1C3/LX23Q F-WBC6-12ZZ1C3/LX23Q SEB96J1ZZ1C3/LX23Q SEB06J1ZZ1C3/LX23Q SEB26J1ZZ1C3/LX23Q31 Shielded type SEB97J1ZZ1C3/LX23Q SEB07J1ZZ1C3/LX23Q SEB27J1ZZ1C3/LX23Q SEB98J1ZZ1C3/LX23Q SEB08J1ZZ1C3/LX23Q SEB28J1ZZ1C3/LX23Q F-R6J1ZZ1C3/LX23Q SEB900J1ZZ1C3/LX23Q SEB000J1ZZ1C3/LX23Q SEB200J1ZZ1C3/LX23Q SEB300J1ZZ1C3/LX23Q SEB901J1ZZ1C3/LX23Q SEB001J1ZZ1C3/LX23Q SEB201J1ZZ1C3/LX23Q SEB902J1ZZ1C3/LX23Q SEB002J1ZZ1C3/LX23Q SEB202J1ZZ1C3/LX23Q SEB903JR1XZZ1C3/LX23Q SEB003J1ZZ1C3/LX23Q SEB203J1ZZ1C3/LX23Q SEB904J1ZZ1C3/LX23Q SEB004J1ZZ1C3/LX23Q SEB204J1ZZ1C3/LX23Q SEB905J1ZZ1C3/LX23Q SEB005J1ZZ1C3/LX23Q SEB205J1ZZ1C3/LX23Q SEB906J1ZZ1C3/LX23Q SEB006J1ZZ1C3/LX23Q SEB206J1ZZ1C3/LX23Q65 1) Minimum allowable chamfe dimension. 2)Allowable tempeatue fo this beaing is 120 C. Fo othes, 200 C. 11

14 7. Intoduction beaings fo special envionments 7. 1 Cam followes 7. 2 Beaing units /Stainless steel seies Featues NTN offes a ich assotment of stainless steel cam followes that use low dusting gease o solid gease to maintain a clean envionment Ball scews Featues Housing and inne/oute ings ae made of stainless steel. Maintain a clean envionment by using low paticle geneation gease o beaings with solid gease Miniatue sliding scews with plastic nut Featues All pats ae made of stainless steel except the dust seal. Ball scews ae vacuum gease sealed o povided with RAYDENT depending on woking envionment and conditions. Low dusting; can be used in both atmosphee and vacuums Plastic olling beaings Featues Combination of nuts made of BEAREE AS5000 and scews made of stainless steel (SUS304) povides esistance to vaious envionments, like coosion and high tempeatue etc. Less noise than stainless steel ball scews. Featues Equipped with self-lubicating, coosion-esistant plastic aceways and glass o ceamic balls. Doesn't equie lubication; offes lowe toque than sliding beaings. Low dusting. 12