Contents. From microelectronics down to nanotechnology. Top down nanotechnology. Writing patterns

Transcription

1 Contents From microelectronics down to nanotechnology Lithography: scaling x- and y-dimensions MOS transistor physics Scaling oxide thickness (z-dimension) CNT transistors Conducting wires (metals and CNTs) Memories Moore s law and fabrication economics Top down nanotechnology Scaling from micrometer down Production-proven techniques Laboratory techniques Laboratory tricks Issues to be tackled: Cost Area Speed Defect density Writing patterns By pen easy to write anything slow to write long works easy to change your mind in the middle By printing press very fast for large number of copies expensive to make the first copy expensive to make changes

2 Pen vs. printing press AFM needle electron beam optical projection nanoimprint Lithography Printing press style: optical: mainstream EUV/X-ray: small linewidth but otherwise problematic imprint: partial solution at the moment; only certain aspects proven Pen-like: electron beam: slow writing speed ion beam: very slow writing speed, ultimate resolution AFM, dip-pen,... The goal of lithography is to make lines and spaces small (only this will increase device packing density) Contact/proximity lithography light from light source gap quartz mask with chromium pattern photoresist covered silicon wafer

3 Resolution= line + space Resolution =3 ( /n)* (gap + ½ thickness ) (Hg-lamp line) 436 nm gap between mask and resist g 5 µm d resist thickness d 1 µm n resist refractive index n 1.6 Projection lithography Sources of radiation (UV 365 nm-436 nm, DUV 193 nm-248 nm, EUV, X-rays, electrons, ions) Optical system I (lenses, mirrors) Mask (pattern) Optical system II (lenses, mirrors) 1 µm in production 100 nm in research Numerical aperture NA=sin Imaging medium (resist) Wafer (with patterns) Wafer stage (alignment mechanism) Resolution = k 1 /NA Depth of focus = k 2 /NA 2 Resist trimming trick Isotropically etch resist thinner & narrower lines line-to-line spacing unchanged Works best for narrow initial lines Used in industry

4 Phase shift masks (PSM) Phase Shift Mask Fabrication binary mask (quartz/chrome) phase shift mask (PSM) shifter 2-resist way Single resist way amplitude Conditions for phase shifter: quartz quartz = 2 L/ = 2 nl/. quartz quartz intensity L(n-1) = /2 quartz quartz resist exposure threshold quartz PSM produces /2 lines! X-ray lithography Contact/proximity lithography = 13 nm, resolution very good highly penetrating radiation not sensitive to particles, but need thick metal to block x-rays need 1X original because no x-ray mirrors

5 Optical vs. X-ray masks Electron beam lithography (EBL) -reduction optics -flat structures -mask is final size -highly 3D structures beam spot size 5 nm easily beam scattering in resist (in all solids) 10 nm can be made, but not easily 40 nm of metal stops UV light; Need >1 µm thick metal to stop X-rays use higher energy ( heating, charging) use thinner resist ( etch resistance down, defects up) Spot size vs. linewidth Raster vs. vector scanning linewidth typically 3*spot size to ensure reproducibility and reduce roughness Pixel-by-pixel raster scan; exposure / no exposure decision at each pixel Intelligent skipping of empty spaces missing pixels

6 EBL pros and cons flexible writing of structures individually writing speed very low indeed small areas only better resolution lower writing speed thinner resist better resolution, worse etch and implant resistance, danger of pin hole defects Nano imprint (NIL) 1X master is pressed against polymer force is used (pressure, temperature, UV) release of the master clearing the bottom residue feature size limited by master fabrication only NIL results NIL problems Problem 1: need 1X original pattern (cf. X-ray lithography) Problem 2: need 3D original master Problem 3: Lifetime of the master? Does repeated contact with the polymer damage or contaminate the master? Problem 4: Who is the first one to try something really new which may not work in production?

7 MOS transistor MOS gate oxide seem by TEM The goal of silicon processing and thin film technology is to control diffusion depths, film thicknesses and interfaces at atomic precision. Metal gate made of highly doped polycrystalline silicon gate length L g field oxide gate polysilicon gate oxide Amorphous oxide Single crystalline silicon substrate source channel drain Scaling of gate oxide Gate oxide thickness gate length/50 L g T ox 1960 s 30 µm 600 nm 1970 s 5 µm 200 nm 1980 s 1 µm 20 nm 1990 s 0.35 µm 7 nm 2000 s 100 nm 2 nm Oxide thickness limitations Leakage current (tunneling) Pinhole defects Trapped charge Interface traps Interface structure (dangling bonds) Crystallization and grain boundaries (not in SiO 2!)

8 Leakage current explodes below 2 nm High-k dielectrics (e.g. HfO 2 ) Because most high dielectric constant materials (high-k) are oxides, some oxygen is present during deposition, and some SiO 2 is formed at the interface. The question is: can you control its formation and thickness with Ångström accuracy? EOT: Equivalent Oxide Thickness Control of oxide layer EOT = ( SiO2 / high ) * t high- + t SiO2 where t SiO2 is the interfacial silicon dioxide thickness, if any. ZrO 2 film of 6 nm physical thickness with 23 has EOT 1 nm Gate First High-k/Metal Gate Stacks With Zero SiO x Interface Achieving EOT=0.59 nm for 16 nm Application, VLSI Technology Symposium 2009

9 Half time CNT transistors Transistor characteristics CNT network transistors (TKK) Random network, many current paths from source to drain. High performance compared with polymer transistors

10 CNTN transistors (TKK) CNT circuitry by IBM (2006) The five-stage CMOS type nanotube ring oscillator using palladium p-type gates and aluminum n-type gates. The upper right inset shows the nanotube itself with a diameter of ~2 nm. CNT transistor time scales Metallization 1998 first CNT transistor (FET) 2001 logic gate 2002 Schottky switch 2002 top gate FET 2003 ballistic transport demonstrated 2004 AC characterization 2006 circuit demo, 72 MHz ring oscillator 2015? commercial devices (IBM guess) 6 levels of metal, cross section IC complexity increase over time

11 IC metal wire scaling (by n>1) C = (W/n)L/(T/n) = C R = L/(H/n)(W/n) = n 2 R RC time delay is then given by = R C = n 2 RC Electromigration Momentum transfer and displacement of lattice atoms by electrons Depends on bond strength (which can be gauged by melting point) Aluminum, low melting point, 650 o C, low electromigration resistance Copper 1083 o C improved EM resistance Tungsten 3387 o C W While transistor performance improves with downscaling, scaled metal wires are worse! H metal dielectric L T Hu, C.-K. et al: Electromigration of Al(Cu) two-level structures: effect of Cu kinetics of damage formation, J.Appl.Phys. 74 (1993), p. 969 Grain size effects in metals Resistivity depends on patterns! Mechanical properties scale beneficially with smaller grain size Thermal properties mostly unchanged Resistivity increases with decreasing grain size You cannot calculate thickness from resistance R = L/Wt because thin film resistivity is linewidth and thickness dependent (use e.g. X-rays to get an independent thickness value) Erb et al: in The Nano-Micro Interface, Wiley-VCH 2004 G.B. Alers, J. Sukamto, S. Park, G. Harm and J. Reid, Novellus Systems, San Jose -- Semiconductor International, 5/1/2006

12 Grain size affected by: -underlying film (chemistry and texture) -deposition process (sputtering vs. plating; & plating A vs. plating B) -material purity -thermal treatments -geometry of structures on wafer Current density barrier Electromigration limit of metals ca. 1 MA/cm 2 G.B. Alers, J. Sukamto, S. Park, G. Harm and J. Reid, Novellus Systems, San Jose -- Semiconductor International, 5/1/2006 Vertical CNT connections CNT s show ohmic behaviour at current density 4*10 8 A/cm 2 Seeded growth in contact holes

13 Flash memory: close to limits tunnel oxide 10 nm interpoly oxide/nitride/oxide 50 nm Gate linewidth 100 nm PCM: phase change memory Chalcogenide materials exhibit 100X resistivity difference between crystalline and amorphous states factor of 2 difference in reflectivity Memory programmed and read electrically and/or optically Limit: thinner tunnel oxide traps charge and does become leaky ( to rewrites) GST = Ge 2 Sb 2 Te 5 Chalcogenide PCM Programming pulse: 100 ns GST hot spot heated > 620 o C molten GST rapid cooling amorphous GST resistance Reverse programming: also 100 ns 550 o C, crystallization resistance

14 Reliability & problems Actual GST device Moore s law: Intel view Linewidth goes down Year Node Lg EOT nm 30 nm 0.8 nm nm 20 nm 0.7 nm nm 15 nm 0.6 nm nm 10 nm 0.5 nm nm not clear how -carbon nanotubes? -III-V on Si? 2019 non-electronic devices? -spintronics -optical devices

15 Chip size vs. wafer size Chip size goes up! Chip size determined by: how many functions needed how small lines used Wafer size determined by: production economics Lithography cost up exponentially Cost of top-down nanofabrication 28 mask levels with 32 nm minimum lines cost of finished chips 10$/cm 2 cost per mask level = 30 cents/cm 2 lithography equipment cost 35 M$ need to fabricate > cm 2 /year defects: 1 failed devices in 5 million cf. DNA self-assembly: ppm error rates correspond to very slow replication

16 Continued scaling till Å minimum linewidth 0.04 Å gate oxide thickness 2 mv operating voltage 64 exabit DRAMs (exa = ) This is not a scaled MOS transistor but something completely different But Moore s law is general; it is about economics of device manufacturing; not about transistors