CRITICAL MATERIALS HANDLING IMPACT POINT-OF-USE PHOTOCHEMICAL FILTERS

Transcription

1 CRITICAL MATERIALS HANDLING IMPACT POINT-OF-USE PHOTOCHEMICAL FILTERS Rapid changeout filters featuring superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents

2 superior retention performance for point-of-use photochemical filtration Overview The Impact point-of-use photochemical filters represent years of in-fab production expertise and customer collaboration. Entegris is committed to developing advanced filtration products that improve customer processes and overall operational efficiency. Impact filters offer workable solu tions that lower startup costs and minimize cost of ownership for existing process lines, leading to superior performance, reduced downtime and improved ease of use. LESS HANDLING, MORE CLEANLINESS AND SAFETY Impact filters provide ultra cleanliness when used in critical chemical processes and use the Connectology technology to quickly connect and seal with the Impact manifold and IntelliGen dispense systems. Impact filters provide rapid filter changeout while eliminating the handling of the filter element. The optimized surface area and hold up volume reduce chemical usage and exposure to hazardous chemicals during the filter s installation and disposal and promote a safer working environment. INNOVATIVE FILTER TECHNOLOGY Impact membrane and filter designs provide superior filtration alternatives that solve customer problems. The Impact 8G core-fill construction reduces filter startup costs and filter priming time, resulting in a more rapid return to a stable, repeatable production environment with lower defectivity. The Impact Duo technology removes difficult contaminants from specific resists where a single retention technology will not meet the requirements. The combination of the UPE membrane with a polyamide or nylon layer in the Impact Duo technology provides maximum chemical compatibility and extends the lifetime of the filter. The Impact RFID filter and manifold technology enables online monitoring of filters installed at any given time in a particular coater or coater cup and ensures that the correct filter is installed in the correct cup/chemistry. VARIETY OF FILTRATION FORMATS Impact filters are available in several formats that remove particles and prevent microbubble formation in the most demanding photochemical applications. They incorporate various membrane technologies that satisfy critical process needs and meet superior retention requirements. The asymmetric UPE membrane design promotes tighter retention with a lower pressure drop when compared to a standard symmetrical UPE membrane. The PTFE pleated membrane, combined with the PFA construction, provides maximum chemical compatibility and can be used with all chemicals including aromatics and ketone solvents. At two times the performance of existing nylon filters, Entegris nylon membrane s improved flow eliminates previous risks associated with tighter nylon retention filtration. Utilizing two times the nylon membrane thickness, the nylon design improves gel retention performance at a 1 nm retention rating for market-leading contamination control. 2 ENTEGRIS, INC.

3 The following table summarizes Impact filter attributes. Impact Filter Attributes Filter Series Filter Type Membrane Retention Applications* Impact 8G Impact 8G Asymmetric UPE 3,, 1 nm POU photoresist, ancillary Impact 8G-L photochemicals and Nylon 6 1 nm solvent filtration Duo, 1 nm PCM (surface modified 1 nm hydrophilic UPE) Impact 2 V2 Impact Asymmetric Nylon Nylon 6 1, 2, nm POU photoresist, ancillary photochemicals and solvent filtration Impact 2 V2 UPE UPE 3 nm 1 µm POU photoresist, ancillary photochemicals and solvent filtration Impact 2-Duo Sieving layers: UPE, 1, 3 nm POU photoresist, ancillary Nonsieving layers: Nylon 6 photochemicals and solvent filtration Impact 2 V2 Asymmetric PCM Surface modified UPE 2 nm,. µm Aqueous chemicals for photolithography Impact Plus V2 Impact Plus V2 UPE 3 nm 1 µm POU photoresist, ancillary photochemicals and solvent filtration Impact Plus-Duo Nonsieving layers: Nylon 6 1, 3 nm POU photoresist, ancillary Sieving layers: UPE photochemicals and solvent filtration Impact Plus Nylon Nylon 6 1, 2, nm POU photoresist, ancillary photochemicals and solvent filtration Impact Plus PCM Surface modified UPE 2 nm. µm Aqueous chemicals for photolithography Impact SR-LHVD PTFE 2 nm 1 µm Aggressive solvents Impact Mini Impact Asymmetric Mini UPE nm.1 µm POU Photoresist, ancillary photochemicals and solvent filtration Impact HV Impact high viscosity *Please contact your Regional Customer Service Center for specific recommendations. UPE, PTFE., 1. µm Polyimide process; wafer level packaging; 3-D lithography ENTEGRIS, INC. 3

4 Features and Benefits Features Superior retention Innovative filter technologies Low hold up volume Quick filter installation Benefits Available to 3 nm, Entegris UPE asymmetric membranes promote tighter retention with a lower pressure drop when compared to a standard symmetrical UPE membrane. The Impact Duo technology utilizes dual retention mechanisms. The UPE membrane with nylon layer maximizes sieving and nonsieving retention capabilities, thereby reducing advanced process defects caused by gels, particles and/or molecular polymers in some advanced chemistries. The nylon design increases membrane contact time, thereby improving gel retention performance at a 1 nm retention rating for market-leading contamination control. The Impact family of filter products provides a diverse and innovative portfolio of solutions that tackle the most demanding industry challenges. The Impact 8G core-fill construction reduces overall filter priming time and startup costs. The Impact Duo technology removes difficult contaminants from specific resists where a single retention technology will not meet the requirements. The Impact RFID filter and manifold technology, combined with IntelliGen AFS, enables online monitoring of filters installed at any given time in a particular coater or coater cup. The low hold-up volume reduces chemical waste and lowers cost of ownership. The advanced design limits the handling of hazardous chemicals during the installation and disposal processes. 4 ENTEGRIS, INC.

5 Impact 8G and 8G-L Filters Specifications Materials: Membrane UPE, nylon, Duo (UPE/nylon, PCM) Maximum operating conditions: Surface area 8G UPE 12 cm 2 (1.29 ft 2 ) Supports, core shell Maximum inlet pressure Maximum forward/reverse differential pressure Maximum operating temperature Nylon/Duo 8 cm 2 (.86 ft 2 ) PCM 13 cm 2 (1.4 ft 2 ) 8G-L Nylon/Duo 16 cm 2 (1.72 ft 2 ) HDPE UPE 24 cm 2 (2.8 ft 2 ) PCM 26 cm 2 (2.8 ft 2 ) Kalrez perfluoroelastomer (OF).34 MPa (3.4 bar, 2 C (77 F).27 MPa (2.7 bar, 39 2 C (77 F) 4 C (14 F) Hold up volume: Impact 8G cc Impact 8G-L 11 cc Compatibility:* PGMEA, PGME, NMP, ethyl lactate, MMP, cyclohexanone and other photochemical solvents. Wettability:* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA and other photochemical solvents. Fittings: (uses Impact 2 Manifold**) 4 mm / 3 mm Flowell TM 6 Type for OF filters mm / 3 mm Flowell 6 Type for OF filters 6 mm / 4 mm Flowell 6 Type for OF filters 6.3 mm/3.9 mm Flowell 6 Type for OF filters 6.3 mm/4.3 mm Flowell 6 Type for OF/OM filters 6.3 mm/3.9 mm Super Type Pillar for OF filters 6.3 mm/4.3 mm Super Type Pillar for OF/OM filters * Please contact your Regional Customer Service Center for specific recommendations. ** See the Impact 2 V2 Filters section for information about the Impact 2 Manifold. Performance Data Impact 8G UPE 1 nm 8G-L nm 8G-L 3 nm 3 nm nm 8G-L 1 nm Typical Flow Rate (cc/sec) 1 2 C Impact 8G Nylon and Duo 8G 1 nm Duo 8G nm Duo 8G-L 1 nm Duo 8G 1 nm Nylon 8G-L 1 nm Nylon Typical Flow Rate (cc/sec) 1 2 C ENTEGRIS, INC.

6 Dimensions IMPACT 8G/8G-L Top View: 8G, 8G-L Side View: 8G Side View: 8G-L 49 mm (1.93 ) 73 mm (2.87 ) 6 mm (2.6 ) 88 mm (3.46 ) 136 mm (.3 ) IMPACT 8G WITH MANIFOLD Front View Side View 127. mm (. ) 4. mm (1.77 ) 79. mm (3.11 ) 3. mm (1.38 ) 172 mm (6.77 ) 138 mm (.43 ) 122 mm (4.8 ) 94 mm (3.7 ) 9. mm (2.34 ) Ordering Information* 82. mm (3.2 ) 1 mm (.39 ) Impact 8G and 8G-L Filters Part Number A2 C 1 Membrane S = Asymmetric D = Duo N = Nylon M = PCM Retention Rating K = 3 nm F = nm T = 1 nm X = 2 nm Open = Standard L = Long Pleating Style = Standard M = M-pleat = OM K = Kalrez * This information serves as a guide. Please contact your local representative to confirm part numbers. Quantity 1 = 1/pack 6 ENTEGRIS, INC.

7 Impact 2 V2 Filters Specifications Materials: Membrane UPE, nylon, Duo (UPE/nylon), PCM Maximum operating conditions: Hold up volume: Compatibility:* Wettability:* Fittings: (uses Impact 2 Manifold) Surface area Asymmetric nylon 8 cm 2 (.86 ft 2 ) Supports (upstream, downstream, mold) Maximum inlet pressure Maximum forward/reverse differential pressure Maximum operating temperature cc Asymmetric PCM 13 cm 2 (1.4 ft 2 ) Duo, nylon 8 cm 2 (.86 ft 2 ) HDPE Kalrez perfluoroelastomer 8 cm 2 (.92 ft 2 ).34 MPa (3.4 bar, 2 C (77 F).27 MPa (2.7 bar, 39 2 C (77 F) 4 C (14 F) PGMEA, PGME, NMP, ethyl lactate, MMP and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons. Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA, NMP and other photochemical solvents. 4 mm / 3 mm Flowell 6 Type for OF filters mm / 3 mm Flowell 6 Type for OF filters 6 mm / 4 mm Flowell 6 Type for OF filters 6.3 mm/3.9 mm Flowell 6 Type for OF filters 6.3 mm/4.3 mm Flowell 6 Type for OF/OM filters 6.3 mm/3.9 mm Super Type Pillar for OF filters 6.3 mm/4.3 mm Super Type Pillar for OF/OM filters *Please contact your Regional Customer Service Center for specific recommendations. ENTEGRIS, INC. 7

8 Performance Data 4 Impact 2 V2 Asymmetric UPE Filters 2 Impact 2-Duo nm nm 1 nm Typical Flow Rate (cc/sec) 1 2 C nm 1 nm 3 nm Typical Flow Rate (cc/sec) 1 2 C Impact 2 V2 Asymmetric Nylon Filters nm 2 nm nm Typical Flow Rate (cc/sec) 1 2 C Dimensions IMPACT 2 V2 FILTER WITH IMPACT 2 MANIFOLD 6.3 MM FLOWELL 6 TYPE Front View Side View 127. mm (. ) 4. mm (1.77 ) 79. mm (3.11 ) 3. mm (1.38 ) 172 mm (6.77") 138 mm (.43") 122 mm (4.8 ) 94 mm (3.7 ) 9. mm (2.34 ) 82. mm (3.2 ) 1 mm (.39 ) 8 ENTEGRIS, INC.

9 IMPACT 2 V2 FILTER WITH IMPACT 2 MANIFOLD 6.3 MM SUPER TYPE PILLAR Front View Side View 127. mm (. ) 63. mm (2.48 ) 3. mm (1.38 ) 17 mm (6.18") 128 mm (.4") 122 mm (4.8 ) 94 mm (3.7 ) 9. mm (2.34 ) 82. mm (3.2 ) 1 mm (.39 ) IMPACT 2 RFID MANIFOLD Rear View Side View 23. mm (9. ) 2.8 mm (1.2 ) 1. mm (2.3 ) 2 Ø3.3 mm (.13 ). mm (.2 ) Front View 94. mm (3.7 ) 11. mm (4.33 ) 12. mm (4.72 ) 97.6 mm (3.84 ) mm (.22 ) mm (.1 ) Top View 2. mm (.79 ) 4. mm (1.7 ) 2. mm (.8 ) 2 Ø3.3 mm (.13 ) 2.8 mm (1.2 ) 9. mm (2.34 ) 97.7 mm (3.8 ) 94.6 mm (3.72 ) 4.6 mm (2.1 ) 9. mm (.37 ) 19. mm (.7 ) 18. mm (.73 ) ENTEGRIS, INC. 9

10 Ordering Information* Impact 2 V2 Filters Part Number A2 2 1 Membrane A = Thin UPE (symmetric) S = Asymmetric D = Duo (PE/nylon) M = PCM N = Nylon Retention Rating K = 3 nm F = nm T = 1 nm X = 2 nm Y = 3 nm Z =. µm V =.1 µm G =.2 µm Open = Standard L = Long ** The M-pleat style only applies to Impact filters with a UPE membrane of up to 3 nm. Pleating Style = Standard M = M-pleat** = OM K = Kalrez Quantity 1 = 1/pack Impact 2 Manifolds (for Impact 8G and Impact 2 V2), Impact 2 RFID Manifolds Part Number Description A2MX222K1 Impact 2 manifold, Flowell 6, 6.3 mm OD and 3.9 mm ID, Kalrez o-ring (for OM filters) A2MX2221 Impact 2 manifold, Flowell 6, 6.3 mm OD and 3.9 mm ID, no o-ring (for OF filters) A2MX222KT Impact 2 manifold, Flowell 6, 6.3 mm OD and 4.3 mm ID, Kalrez o-ring (for OM filters) A2MX222ET Impact 2 manifold, Flowell 6, 6.3 mm OD and 4.3 mm ID, EPDM o-ring (for OM filters) A2MX222T Impact 2 manifold, Flowell 6, 6.3 mm OD and 4.3 mm ID, no o-ring (for OF filters) A2MX4441A Impact 2 manifold, Flowell 6, 4 mm OD and 3 mm ID, no o-ring (for OF filters) A2MX1A Impact 2 manifold, Flowell 6, mm OD and 3 mm ID, no o-ring (for OF filters) A2MX6661A Impact 2 manifold, Flowell 6, 6 mm OD and 4 mm ID, no o-ring (for OF filters) A2MP222K1 Impact 2 manifold, Super Type Pillar, 6.3 mm OD and 3.9 mm ID, Kalrez o-ring (for OM filters) A2MP222KT Impact 2 manifold, Super Type Pillar, 6.3 mm OD and 4.3 mm ID, Kalrez o-ring (for OM filters) A2MP2221 Impact 2 manifold, Super Type Pillar, 6.3 mm OD and 3.9 mm ID, no o-ring (for OF filters) A2MP222T Impact 2 manifold, Super Type Pillar, 6.3 mm OD and 4.3 mm ID, no o-ring (for OF filters) A2RX1 Impact 2 RFID manifold, Flowell 6, mm OD and 3 mm ID, no o-ring (for OF filters) A2RX6661 Impact 2 RFID manifold, Flowell 6, 6 mm OD and 4 mm ID, no o-ring (for OF filters) * This information serves as a guide. Please contact your local representative to confirm part numbers. 1 ENTEGRIS, INC.

11 Impact Plus V2, Plus Duo and Impact SR LHVD Filters Specifications Impact Plus V2 Impact Plus Duo Impact SR LHVD Materials: Membrane UPE, nylon, PCM UPE/nylon PTFE Maximum operating conditions: Hold up volume: Compatibility:* Wettability:* Surface area Supports and molded components Supports, core, sleeve, shell Maximum inlet pressure Maximum forward/ reverse differential pressure Maximum operating temperature Fittings: (uses Impact 2 Manifold) 1 nm asymmetric 13 cm 2 (1.46 ft 2 ) 1 nm, 2 nm 14 cm 2 (1.1 ft 2 ). μm PCM 13 cm 2 (1.4 ft 2 ) 2 nm PCM 14 cm 2 (1.1 ft 2 ) All others 12 cm 2 (1.29 ft 2 ) 8 cm 2 (.92 ft 2 ) 6 cm 2 (.6 ft 2 ) HDPE PFA.34 MPa (3.4 bar, 2 C (77 F).27 MPa (2.7 bar, 39 2 C (77 F) Kalrez perfluoroelastomer.39 MPa (3.9 bar, C (77 F).29 MPa (2.9 bar, 42 2 C (77 F) 4 C (14 F) 3 C (86 F) cc PGMEA, PGME, NMP, ethyl lactate, MMP and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons. Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, ECA, NMP and other photochemical solvents. *Please contact your Regional Customer Service Center for specific recommendations. 1 4 Flaretek 4 cc All photochemical solvents Prewetting should be considered with higher surface tension solvents such as NMP, cyclohexanone, GBL, EGMEA ethyl lactate and MMP. ENTEGRIS, INC. 11

12 Performance Data Impact Plus V2 Asymmetric UPE 3 nm nm 1 nm Impact SR LHVD 2 nm Typical Flow Rate (cc/sec) 1 2 C Typical Flow Rate (cc/sec) 1 2 C Impact Plus V2 UPE GPM µm 4.2 µm 2.1 µm Typical Flow Rate (cc/sec) 1 2 C Impact Plus Duo nm 3 nm Typical Flow Rate (cc/sec) 1 2 C 12 ENTEGRIS, INC.

13 Dimensions IMPACT PLUS V2, IMPACT PLUS DUO, IMPACT SR LHVD FILTERS Top View Side View 9. mm (3.76 ) 82. mm (3.2 ) 19. mm (.7 ) 71. mm (2.8 ) 9. mm (3.4 ) 3.8 mm (1.41 ) 21. mm (.83 ) 21. mm (.83 ) 71.9 mm (2.83 ) IMPACT PLUS V2, IMPACT PLUS DUO, IMPACT SR LHVD FILTERS WITH IMPACT ST MANIFOLD Side View 2.4 mm (2.6 ) Side View with required filter changeout space for filters 19. mm (7.48 ) 4. mm (1.7 ) 76. mm (2.99 ) 14. mm (.1 ) 19. mm (7.48 ) 6. mm (.24 ) 11. mm (4.3 ) ENTEGRIS, INC. 13

14 Ordering Information* Impact Plus V2 Filters Part Number AP 2 1 Membrane A = Symmetric UPE S = Asymmetric UPE D = Duo N = Nylon M = PCM Impact ST Manifolds Pleating Style M = M-pleat** = All others Retention Rating K = 3 nm Z =. µm F = nm V =.1 µm T = 1 nm G =.2 µm X = 2 nm = OM K = Kalrez Quantity 1 = 1/pack * This information serves as a guide. Please contact your local representative to confirm part numbers. ** The M-pleat style only applies to Impact filters with a UPE membrane of up to 3 nm. Part Number DZUM 44 C1 DZUM 44 E1 Description Impact ST manifold Impact ST manifold, no o-ring Impact SR LHVD Filters Part Number AT Pore Size F = Flushing shell TX = 2 nm FZ =. um FV =.1 um FG =.2 um *** Flushing shell and. µm only. K1 = Kalrez*** 1 = No o-ring 14 ENTEGRIS, INC.

15 Impact Mini Filters Specifications Materials: Membrane UPE Maximum operating conditions: Hold up volume: Compatibility:* Wettability:* Surface area 2 cm 2 (.27 ft 2 ) Supports (upstream, downstream, mold) Maximum inlet pressure Maximum forward/reverse differential pressure Maximum operating temperature 1 cc HDPE Kalrez perfluoroelastomer (on filter).34 MPa (3.4 bar, 2 C (77 F).27 MPa (2.7 bar, 39 2 C (77 F) 4 C (14 F) PGMEA, PGME, NMP, ethyl lactate, MMP and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons. Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA, NMP and other photochemical solvents. Note: The Impact Asymmetric Mini uses a pump (Entegris IntelliGen Mini or IntelliGen ASF) instead of a manifold. *Please contact your Regional Customer Service Center for specific recommendations. Performance Data Dimensions Impact Mini GPM Front View 1. 2 Differential Pressure (bar) nm. µm.1 µm cm (2.19 ) Ø.69 cm (2.24 ) 1 Typical Flow Rate (cc/sec) 1 2 C Side View Ordering Information** Impact Mini Filters Part Number AM 2K1 Membrane A = Symmetric UPE S = Asymmetric UPE Quantity 1 = 1/pack Retention Rating X = 2 nm Z =. µm V =.1 µm F = nm T = 1 nm ** This information serves as a guide. Please contact your local representative to confirm part numbers cm (2.87 ) Note: The top view dimensions of Impact Mini are the same as Impact 2 V2. ENTEGRIS, INC. 1

16 Impact HV Filters Specifications Materials: Membrane UPE, PTFE Maximum operating conditions: Available manifold connections: Surface area 34 cm 2 (3.66 ft 2 ) Supports, core, sleeve Maximum inlet pressure Maximum forward/reverse differential pressure Maximum operating temperature HDPE Kalrez perfluoroelastomer.34 MPa (3.4 bar, 2 C (77 F).27 MPa (2.7 bar, 39 2 C (77 F) 4 C (14 F) Dispense system IntelliGen HV two-stage dispense system Standalone (Optimizer ST2 manifold) Inlet/outlet 1 4, 3 8 and 1 2 Flowell 6 1 4, 3 8, 1 2 and 6 mm tube stubs Vent/drain 1 4 Flowell and 4 mm tube stubs Performance Data Dimensions 6 Impact HV GPM Top View 91. mm (3.6 ). µm UPE 4 1. µm UPE µm Teflon Typical Flow Rate (cc/sec) 1 2 C Outlet Vent Side View Inlet 1. mm (4.2 ) Ordering Information Impact HV Filters Part Number ATAALKM1 AWAALKM1 AWAHLKM1 Description Impact HV PTFE 1. μm OF Kalrez o-ring Impact HV 1. μm OF Kalrez o-ring Impact HV. μm OF Kalrez o-ring Ø89.7 mm (3. ) Ø19.9 mm (6.3 ) 16 ENTEGRIS, INC.

17 For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select the Customer Service link for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Creating a Material Advantage, Impact, Connectology, IntelliGen and Flaretek are registered trademarks of Entegris, Inc. Teflon and Kalrez are registered trademarks of E. I. du Pont de Nemours and Company. Flowell is a trademark of Flowell Corporation. Pillar is a registered trademark of Nippon Pillar Packing Company, Ltd. ENTEGRIS, INC. Corporate Headquarters 129 Concord Road Billerica, MA 1821 USA Customer Service Tel Customer Service Fax In North America Entegris, Inc. All rights reserved Printed in USA ENT-41