ADVANCED MANUFACTURING CHOICES: TOWARDS A CARBON WORLD. ENG Spring 2017, Class 10, Carbon-MEMS/Carbon-NEMS

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1 ADVANCED MANUFACTURING CHOICES: TOWARDS A CARBON WORLD ENG Spring 2017, Class 10, Carbon-MEMS/Carbon-NEMS

2 Table of Content Why carbon? Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices Example Applications of C-MEMS and C-NEMS The International C-MEMS Research Ring Smart Batteries Molecular Electronics Redox amplification

3 Why carbon? Polymerizes better than Si Wide electrochemical stability window Biocompatible Low cost Chemically inert

4 Why carbon? Many allotropes : diamond, carbon nanotubes, graphene, Q-carbon, etc. : from super conductor to insulator, from weak and soft to the hardest material. Easy to derivatize to build sensors Well known already for batteries, fuel cells, catalysts, etc

5 Why carbon? Carbon is the most important element to living things because it can form many different kinds of bonds and form essential compounds.

6 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices C-MEMS is a method to make things in carbon from organic precursors. Shapes in carbon that are very hard to fabricate in any other way (carbon is hard to machine!)

7 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices Instead of using an organic precursor (wood) here we pattern, for example, a photoresist.

8 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices Sheet resistance: from insulator to good conductor. The shrinkage from polymer to glassy carbon is very substantial, for the smaller structures > 80 %. Sheet resistance

9 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices We found the microstructure of the carbon produced this specific way to be glassy carbon. A good conductor and an excellent electrode equivalent or superior to commercial glassy carbon electrodes and readily intercalated with Li!! The latter was the genesis of Enevate battery company.

10 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices Variations on a theme! Washline sensors. Smart batteries.

11 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices Using different manufacturing means leads to different microstructures in the carbon devices! When using electromechanical spinning (EMS, invented at UCI) we can make carbon nanowires that behave almost like carbon nanotubes (CNTs). Probing pads Carbon walls Carbon wall Suspended Fibers Carbon wall 20μm

12 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices We measured the Young s modulus (E) of the EMS carbon fibers to characterize their mechanical properties (stiffness) using laser Doppler vibrometer. Euler Bernoulli beam theory Fibers are cut using FIB. 5 μm 5 μm 5 μm

13 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices We measured the Young s modulus (E) of the EMS carbon fibers to characterize their mechanical properties (stiffness) using laser Doppler vibrometer. Euler Bernoulli beam theory Fibers are cut using FIB. 5 μm 5 μm 5 μm

14 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices 14

15 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices (CNT = 1 Tpa) Euler Bernoulli beam theory results: 15

16 Conductivity [S/m] Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices I-V curves have been obtained with a microprobe station where probes have been positioned as close as possible to the connecting fiber: Ohmic contact was observed! The thinner the wires the more graphitic they become and the more conductive 1.E+05 9.E+04 8.E+04 7.E+04 6.E+04 5.E+04 4.E+04 3.E+04 2.E+04 1.E+04 0.E+00 50% 55% 60% 65% 70% 75% 80% Diameter Shrinkage % 16

17 Carbon MEMS and Carbon NEMS: A New Way of Manufacturing Carbon Devices CNT s are not easily amenable to manufacturing but C-NEMS is! HR-TEM image of electrospun SU-8 derived carbon nanofiber: tubelike graphitic CNW with glassy carbon core and graphite shell. Sharma S, Sharma A, Cho YK, and Madou M. Increased Graphitization in Electrospun Single Suspended Carbon Nanowires Integrated with Carbon-MEMS and Carbon- NEMS Platforms. ACS Applied Materials and Interfaces, 2012, 4,

18 Example Applications of C-MEMS and C-NEMS Smart batteries in any shape; higher capacity, faster and reconfigurable 1 e.g. UCI and Enevate Redox amplification with IDAs (x 40) 2 e.g. UCI-Lund- UNIST-Tec de Monterrey and KIT 3D Dielectrophoresis (higher efficiency separation) 3 e.g. UCI and EPFL 3 Turon Teixidor G, Zaouk R, Park B, Madou M. Fabrication and characterization of three-dimensional carbon electrodes for lithium-ion batteries. Journal of Power Sources 2008;183(2): Martinez-Duarte R, Baylon J, Martinez S, Madou M. Characterization of Carbon-electrode Dielectrophoresis in a conductive media and its applications. Electrophoresis 2009 Heo, J.I., Shim, D.S., Turon Teixidor, G., Oh, S., Shin, H., Madou, M.J. Carbon Interdigitated Array Nanoelectrodes for Electrochemical Applications, Journal of the Electrochemical Society, (accepted), 2011.

19 Example Applications of C-MEMS and C-NEMS Fuel cells (PEM and Biofuel cell) 4 e.g. UCI (NIRT) Bulk metallic glasses molding 5 e.g. UCI and Yale Wash-line nano-sensors 6 e.g. UCI- IITK, Tec de Monterrey and UNIST Structural colors 7 e.g. UCI and EPFL 4 5 Martinez-Duarte R, Madou M. Novel carbon micro molds derived from SU-8. Journal of Micromechanics and Microengineering Swati S., Madou M., Yun Wang, Liem Pham, Guilherme Porto Salerno de Vasconcellos, Marc Madou, Fabrication and characterization of micro PEM fuel cells using pyrolyzed carbon current collector plates, Journal of Power Sources, Volume 195, Issue 15, 1 August 2010, Pages Bonzon D., Madou M.

20 Example Applications of C-MEMS and C-NEMS Carbon scaffolds 8 e.g. SDSU, DTU, UNAM Plasmonic nanoresonators 9 e.g. UCI Nano-gaps and nano-restrictions 10 e.g. UCI and Tec de Monterrey Carbon-cupercapacitors 11 e.g. FIU, UCB and UCI Potential application: Parkinson s disease 11

21 Example Applications of C-MEMS and C-NEMS Carbon electronics 12 e.g. McCreery Fractal electrodes 13 e.g. Madou et al Carbon-MEMS 14 Composites with Lorenzo Valdevit at UCI

22 Example Applications of C-MEMS and C- NEMS: Wash Line Sensors Suspended carbon nanowires feature a much higher resistance compared to the supporting electrodes. If a constant current is passed through the CMEMS circuit, the carbon nanowires act like nano-hot wires. These nano-hot wires can facilitate selected area CVD for depositing the desired material for gas sensing as well as other wash line sensor applications.

23 Example Applications of C-MEMS and C- NEMS: Wash Line Sensors WO 3 is well- known for selective detection of NO 2 W(CO) 6 can be disintegrated and converted into oxide under vacuum (~1 mbar) at ~ o C. The vapor pressure of the W(CO) 6 is 1.2 mmhg. One can observe this pressure during disintegration/ deposition.

24 Example Applications of C-MEMS and C-NEMS: Wash Line Sensors A granular tungsten oxide film was deposited onto a 30 micron long, 350 nm thick suspended CNW. Nanowire heats much faster at its center than the contact points. As a result, there is more deposition at the center. Polycrystalline materials with very fine grains have much gas higher sensitivity.

25 Example Applications of C-MEMS and C-NEMS; Most Important Science Breakthrough UCI Tec de Monterrey-Nanogaps for molecular electronics Also observed carbon sublimation till the wire breaks---nano-gap structure fabrication! Thinning is extremely fast, difficult to control. F. Léonard, Appl. Phys. Lett. 2011

26 Example Applications of C-MEMS and C-NEMS; Most Important Science Breakthrough UCI Tec de Monterrey-Nanogaps for molecular electronics

27 Example Applications of C-MEMS and C-NEMS; First UCI Tec de Monterrey Company-C-IDEAS C-IDEAS has developed a generic, inexpensive, sensitive, and simple to use electrochemical detection platform. Carbon IDEAs optimize and replace existing optical chemical sensing devices and molecular diagnostics.

28 Example Applications of C-MEMS and C-NEMS; First UCI Tec de Monterrey Company-C-IDEAS Customers & Current Approach C-IDEAs customers include: Water quality industry: FEMSA, Waters, Hach, LaMotte Food safety : Life Technologies, Agilent Technologies Medical diagnostics: Biogen, Quest Diagnostics, Abbot Diagnostics Research and Development: University and National Laboratories Table 1: Comparison of Optical and Electrochemical Immunosensors These markets so far have been dominated by more expensive optical detection techniques due to their lower limit of detection (LOD). The higher prices derive from more complicated and expensive electrochemical techniques. 28

29 International C-MEMS Research Ring

30 International C-MEMS Research Ring

31 QUESTIONS? By Dr, Samira Hosseini With Thanks to NSF, UCI, Tec de Monterrey and Conacyt. 31