Vacuum Viewports. Standard Viewports. Viewports with Defined Optical Quality. Viewports with Electrical Conductive Layers.

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1 Vacuum Viewports Standard Viewports Viewports with efined Optical Quality Viewports with Electrical Conductive ayers Special Viewports Viewports with d Socket Viewport Shutters

2 Contents Introduction Page - to -9 Standard Viewports Borosilicate, Exchangeable Windows Borosilicate, Unexchangeable Windows on KF, ISO Borosilicate, Unexchangeable Windows on CF Page -10 to -11 Page -12 Page -1 to -14 Viewports with efined Optical Quality Boron Crown Glass, BK7 Optically Polished, Unexchangeable Windows Page -15 to -16 Quartz, Exchangeable Windows Page -17 Quartz, Fused Silica Spectrosil 2000, Unexchangeable Windows Page -18 to -19 Quartz Z-Cut, Unexchangeable Windows Page -20 to -21 Magnesium Fluoride Optically Polished, Unexchangeable Windows Page -22 to -2 Calcium Fluoride Optically Polished, Unexchangeable Windows Page -24 to -25 Barium Fluoride Optically Polished, Unexchangeable Windows Page -26 to -27 ithium Fluoride Optically Polished, Unexchangeable Windows Page -28 to -29 IR Optics, Sapphire Optically Polished, Unexchangeable Windows Page -0 to -1 IR Optics, Zinc Selenide Optically Polished, Unexchangeable Windows Page -2 IR Optics, Zinc Sulfide Optically Polished, Unexchangeable Windows Page - IR Optics, Silicon Optically Polished, Unexchangeable Windows Page -4 IR Optics, Germanium Optically Polished, Unexchangeable Windows Page -5 Viewports with Electrical Conductive ayers Borosilicate, Unexchangeable Windows Page -6 to -8 Special Viewports Beryllium, Unexchangeable Windows Page -9 Viewports with d Socket KF, ISO and CF Viewports with d Socket Page -9 Viewport Shutters Viewport Shutters, Manual Page

3 Vacuum Viewports Introduction It is often necessary to observe the processes within the vacuum line visually. ifferent characteristics are required from a viewport depending on the individual processes ranging from simple visual inspection of positioning up to highly precise measurements by laser beams. The following aspects need to be considered in order to select the right viewport: 1. The correct material has to be selected for the viewport depending on the wavelengths it is exposed to. 2. The optical quality of the viewport needs to be specified in order to satisfy the optical requirements. This includes the surface quality itself, such as scratch and dig, flatness and parallelism of the optical planes towards each other, as well as the treatment of the surface with optical coatings (e. g. anti-reflection coatings with various transmission properties).. Your process defines the pressure range that has a great impact on the connection method between the optical material and the flange. 4. Furthermore it is important to consider other ambient conditions the viewport is exposed to, e. g. radiation level of the most different wave lengths, contact with aggressive gases or media, the temperature range of the application, or the interaction with magnetic fields. These parameters have a great impact on the lifetime and performance of the viewport. We would be pleased to give advice regarding these points. The requirements are versatile and still increasing with further applications. There are time-tested solutions, others have been developed in our company - in some extent in cooperation with partners - and listed in this catalogue. nd we will keep on searching for new solutions, if your needs go beyond. Our experienced team of optical specialists, material scientists and vacuum technologists always looks forward to facing new challenges. Besides the optical applications of viewports, it may be also necessary to provide dielectric materials with a conducting transparent layer in order to avoid charging effects. Please find solutions (ITO layers) for this aspect on page -7. If a viewport is going to be used in the high energetic range it may be necessary - due to protection of labour (x-ray absorption) - to provide viewports with an extra lead glass cover. Information about high-resolution RHEE windows which are used for instance in the MBE technology, are also shown on page -7. Transmission Ranges* Wavelength µm * Reproduction with kindly permission of Korth Kristalle GmbH -

4 Vacuum Viewports Viewport Material The following table shows the window materials offered by VCOM with transmission ranges, application areas as well as brand names if applicable: Material (brand names) Borosilicate (Borofloat, BK7 ) Quartz, crystalline SiO 2 / fused silica (Spectrosil 2000) pplications Neutron poisons, substrates for dielectrical coatings, photovoltaics, water substrates VUV filters, polarisation optics, excimer laser as well as other critical applications in VUV, FIR screens Optical transmission range (μm) (current max. possible clearview) Max. temperature* ( C) > 1200 Magnesium fluoride MgF 2 VUV optics, excimer laser, polarisation optics Calcium fluoride CaF 2 Barium fluoride BaF 2 ifferent qualities for IR, UV, VUV laser (best transmission in UV), IR analytics, astro optics stro optics, correctors in lens systems, scintillator materials ithium fluoride if X-ray monochromator crystals Sapphire l 2 O Spectroscopy, vacuum viewports, (birefringent : IR and UV transmission) Zinc sulfide ZnS (Cleartran ) IR spectroscopy Zinc selenide ZnSe CO 2 laser optics, cutting lenses Silicon Si enses, band-pass filters, thermography, TR crystals Germanium Ge Windows, lenses, band-pass filters, thermography, FIR optics, TR crystal Beryllium Be X-ray tubes (permeability of x-rays) - 50 *Note temperature gradients! Optical properties The quality of a viewport is always determined by the fact how unaltered a beam of a certain wavelength passes the optical medium. lterations can be caused by optical losses (absorption, reflection or scattering) and aberrations (refractive index inhomogeneities, cords, curvatures and corrugations of the surface, aberrations of the parallelism of the interfaces). Optical losses are mostly determined by the refractive index and the absorption coefficient. The transmission - that also depends on the thickness of the material and the wavelength - can be specified with the help of these parameters for the first approximation (the following is valid only in case of perpendicular incident light): Reflexion at two interfaces: bsorption in the medium: -4

5 Vacuum Viewports Viewport Material - ntireflection Coating The following table shows the reflection and transmission rates of selected materials (absorption at perpendicular incident light neglected): Material Index of refraction n (at 500 nm, * at μm) Reflection loss R % Transmission T % Magnesium fluoride MgF ithium fluoride if Calcium fluoride CaF Quartz SiO 2 (synthetic) Borofloat Barium fluoride BaF Borosilicate BK Zinc sulphide ZnS 2.42* Zinc selenide ZnSe 2.4* Silicon Si.4* nother important source of optical loss is light scattering. Optical inhomogeneities within the material (air bubbles, grid dislocations) in the range of µm function as stray centres. In addition to that stray losses are caused by rough surfaces (polishing, scratches) and accumulations on surfaces (dust particles, water vapour, cleaning residues). Even if an optical material is produced without causing aberrations, these can arise also when the material is fixed into the flange, because of thermal strains or mechanical tensions. If you have high requirements regarding the prevention of aberrations, please specify the necessary quality in your request for quotation. ntireflection coating of viewports It is possible to avoid reflections at the surface to increase the transmission rate, using the effects of interference. The basic principle is shown in the following illustration: Incident light beam Partially reflected beam estructive interference ow refractive layer n 2 < n 1 High refractive layer n 1 > n 0 Substrate, refractive index n 0 Passing beams Constructive interference -5

6 Vacuum Viewports Viewport Material - ntireflection Coating ntireflection coatings can be produced as narrow or broadband coatings for the most different applications. Coatings for standard applications are specified in this catalogue: 1QWOT (single layer), Multi ayer broad band and V coatings. Furthermore we can elaborate and manufacture special solutions for you in cooperation with experienced coating companies. Examples of different types of antireflection systems with which approximation to zero reflection (depending on technical complexity) can be achieved are shown below. Software is available to model antireflection coatings to customer requirements. We would be pleased to advise you in finding the optimum for your individual application. Single wavelength antireflection coating ouble wavelength antireflection coating Residual reflection R < 0.5 % per side R < 1 % per side Broad band antireflection coating R < 1 % per side Vacuum compatible combinations between optical and flange materials The main problem in the manufacture of viewports is the fact that the thermal expansion coefficients of optical and flange materials are not only very different but the temperature dependence proceeds completely in an other way. s a consequence of that, even little temperature changes can cause mechanical tension that can lead to vacuum leaks and in extrem cases damage the optic. The use of various connecting or adjustment materials between the stainless steel flange and optic material, for the different coefficients of expansion enabled to find solutions for special applications. Costs and efforts for these different solutions are quite different as well. We are able to offer the right solution for your individual needs, starting with exchangeable viewports using o-rings through nonexchangeable viewports (glass solder, diffusion bonding, mechanical and brazed connections) up to differentially pumped viewports. -6

7 Vacuum Viewports Viewports - Special Coatings ITO coated glass Indium tin oxide (ITO) is a transparent and semiconducting material. It is frequently used to apply a conducting and light-transmissive coating to glass or synthetic material. This coating is necessary e. g. to avoid electrostatic charging. Our viewports, which are made of high quality borosilicate glass, are coated with a thin layer of ITO during a sputtering process. We offer ITO coatings with a surface resistance of 10 Ω/square which reach a transmission of ~ 80 % as standard. RHEE screens RHEE is the abbreviation for High Energy Electron iffraction. This procedure uses electron diffraction for the analysis and inspection of surface structures at the atomic level e. g. in molecular beam epitaxy (MBE). The electrons reflected from the surface have a characteristic arrangement and show a typical diffraction pattern. It is possible to make this pattern visible by capturing the reflected electrons on a RHEE screen covered with a phosphor layer. standard viewport with a RHEE screen consists of an ITO covered CF viewport with a subsequently added phosphor layer. version with an additional lead glass covering is available which is suitable for applications with damaging x-rays. We offer RHEE screens suited for various applications. The thickness and type of the phosphor layer depends on the respective application. We offer four standard phosphor types: P20, P22, P11 and P4. Other phosphor types can be provided on request. Instructions for the handling of viewports Please note always the assembly instructions which are added to the viewports Use annealed copper gaskets for CF viewport assembly The temperature increase of 2 - C per minute must not be exceeded during the bakeout of welded viewports The pressure on the vacuum side of the viewport should always be lower than on the atmosphere side -7

8 Vacuum Viewports Transmission curves (principle curves) Borofloat BK7 Quartz Spectrosil 2000 Magnesium fluoride Calcium fluoride Barium fluoride ithium fluoride -8

9 Vacuum Viewports Transmission curves (principle curves) Sapphire Zinc sulfide Zinc selenide Silicon Germanium -9

10 Standard Viewports Borosilicate, Exchangeable Window KF flange ISO flange Technical data Specifications KF and ISO-K viewport with exchangeable borosilicate window - flat construction - easy assembly and disassembly Connection KF and ISO-K flange eak rate < 1.0E-8 mbar l/s Window material borosilicate (Borofloat ) Flatness < 4 material stainless steel Seal FKM O-ring Transmission range µm Temperature range to 150 C bakeable Coatings narrow band broadband (RVIS) broadband (RNIR) Options Standard for detailed information see introduction 50 and 1064 nm nm nm other wavelengths on request KVPZ40TCRSV N40KF KVPZ50TCRSV N50KF ISOVPZ6TCRSV N6ISO ISOVPZ100TCRSV N100ISO ISOVPZ160TCRSV N160ISO With antireflection coating Narrow band Broadband KVPZ40SV-R50 KVPZ40SV-RVIS N40KF KVPZ40SV-R1064 KVPZ40SV-RNIR N40KF KVPZ50SV-R50 KVPZ50SV-RVIS N50KF KVPZ50SV-R1064 KVPZ50SV-RNIR N50KF ISOVPZ6SV-R50 ISOVPZ6SV-RVIS N6ISO ISOVPZ6SV-R1064 ISOVPZ6SV-RNIR N6ISO ISOVPZ100SV-R50 ISOVPZ100SV-RVIS N100ISO ISOVPZ100SV-R1064 ISOVPZ100SV-RNIR N100ISO ISOVPZ160SV-R50 ISOVPZ160SV-RVIS N160ISO ISOVPZ160SV-R1064 ISOVPZ160SV-RNIR N160ISO

11 Standard Viewports Borosilicate, Exchangeable Window ccessories, replacement windows ccessories for KF40VPBORO KF40VPBORO-R-50 KF40VPBORO-R-1064 KF40VPBORO-R-VIS KF40VPBORO-R-NIR N40KF N40KF N40KF N40KF N40KF KVPZ40TCRSV KVPZ40SV-R50 KVPZ40SV-R1064 KVPZ40SV-RVIS KVPZ40SV-RNIR KF50VPBORO KF50VPBORO-R-50 KF50VPBORO-R-1064 KF50VPBORO-R-VIS KF50VPBORO-R-NIR N50KF N50KF N50KF N50KF N50KF KVPZ50TCRSV KVPZ50SV-R50 KVPZ50SV-R1064 KVPZ50SV-RVIS KVPZ50SV-RNIR ISO6VPBORO ISO6VPBORO-R-50 ISO6VPBORO-R-1064 ISO6VPBORO-R-VIS ISO6VPBORO-R-NIR N6ISO N6ISO N6ISO N6ISO N6ISO ISOVPZ6TCRSV ISOVPZ6SV-R50 ISOVPZ6SV-R1064 ISOVPZ6SV-RVIS ISOVPZ6SV-RVIS ISO100VPBORO N100ISO ISOVPZ100TCRSV ISO100VPBORO-R-50 ISO100VPBORO-R-1064 ISO100VPBORO-R-VIS ISO100VPBORO-R-NIR N100ISO N100ISO N100ISO N100ISO ISOVPZ100SV-R50 ISOVPZ100SV-R1064 ISOVPZ100SV-RVIS ISOVPZ100SV-RNIR ISO160VPBORO N160ISO ISOVPZ160TCRSV ISO160VPBORO-R-50 ISO160VPBORO-R-1064 ISO160VPBORO-R-VIS ISO160VPBORO-R-NIR N160ISO N160ISO N160ISO N160ISO ISOVPZ160SV-R50 ISOVPZ160SV-R1064 ISOVPZ160SV-RVIS ISOVPZ160SV-RNIR ccessories, replacement O-rings KF40VR KF50VR ISO6VR-VP ISO100VR-VP ISO160VR-VP N40KF N50KF N6ISO N100ISO N160ISO -11

12 Standard Viewports Borosilicate, Unexchangeable Window on KF, ISO KF flange ISO flange Technical data Specifications KF and ISO-K viewport with firmly connected borosilicate window Connection KF and ISO-K flange eak rate < 1.0E-10 mbar l/s Window material borosilicate Flatness < 8 material stainless steel (04) Seal material glass-to-metal connection (Kovar ) Transmission range µm Temperature range to 200 C bakeable Standard, on KF and ISO flange KVPZ16-V16 N16KF KVPZ25-V16 N25KF KVPZ40-V2 N40KF KVPZ50-V2 N50KF ISO6VPZ N6ISO ISO100VPZ N100ISO ISO160VPZ N160ISO ISO200VPZ N200ISO ISO250VPZ N250ISO

13 Standard Viewports Borosilicate, Unexchangeable Window on CF CF flange accessories, lead glass screen Technical data Specifications CF viewport with firmly connected borosilicate window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material borosilicate Flatness < 8 Transmission range µm type flange material glass-to-metal connection temperature range stainless steel - 04 (1.407) Kovar to 50 C type flange material glass-to-metal connection temperature range Coating narrow band (1QWOT or "V" coating) broadband Standard, on CF flange stainless steel - 16N (1.4429) tantalum detailed information see introduction possible coating range nm Please add the required wavelength or wavelength range to the order code VPZ16 VPZ16-BO-NM N16CF VPZ40-BO-NM N40CF VPZ40 - N40CF VPZ64 VPZ64-BO-NM N6CF VPZ100 VPZ100-BO-NM N100CF VPZ160 VPZ160-BO-NM N160CF With antireflection coating, 1QWOT VPZ16-MB-R VPZ16-BO-NM-R N16CF VPZ40-MB-R VPZ40-BO-NM-R N40CF VPZ40-MB-R - N40CF VPZ64-MB-R VPZ64-BO-NM-R N6CF VPZ100-MB-R VPZ100-BO-NM-R N100CF VPZ160-MB-R VPZ160-BO-NM-R N160CF

14 Standard Viewports Borosilicate, Unexchangeable Window on CF With antireflection coating, "V" coating VPZ16-MB-VR VPZ16-BO-NM-VR N16CF VPZ40-MB-VR VPZ40-BO-NM-VR N40CF VPZ40-MB-VR - N40CF VPZ64-MB-VR VPZ64-BO-NM-VR N6CF VPZ100-MB-VR VPZ100-BO-NM-VR N100CF VPZ160-MB-VR VPZ160-BO-NM-VR N160CF With antireflection coating, broadband VPZ16-MB-BBR VPZ16-BO-NM-BBR N16CF VPZ40-MB-BBR VPZ40-BO-NM-BBR N40CF VPZ40-MB-BBR - N40CF VPZ64-MB-BBR VPZ64-BO-NM-BBR N6CF VPZ100-MB-BBR VPZ100-BO-NM-BBR N100CF VPZ160-MB-BBR VPZ160-BO-NM-BBR N160CF With lead glass screen VPZ16G N16CF VPZ40G N40CF VPZ64G N6CF VPZ100G N100CF VPZ160G N160CF ccessories, lead glass screen ccessories for G16 N16CF VPZ16G G40 N40CF VPZ40G G64 N6CF VPZ64G G100 N100CF VPZ100G G160 N160CF VPZ160G -14

15 Viewports with efined Optical Quality Boron Crown Glass, BK7 Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected BK7 window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material boron crown glass, BK7 optically polished Transmission range µm Temperature range to 10 C Surface quality 20/10 (scratch/dig) Flatness < 4 (better surface quality and flatness on request) type flange material stainless steel - 04 (1.407) type flange material stainless steel - 16N (1.4429) Coating detailed information see introduction narrow band (1QWOT or "V" coating) possible coating range nm broadband Please add the required wavelength or wavelength range to the order code Standard VPZ16BK7-GS VPZ16BK7-GS-NM N16CF VPZ40BK7-GS VPZ40BK7-GS-NM N40CF VPZ40BK7-GS - N40CF VPZ64BK7-GS VPZ64BK7-GS-NM N6CF VPZ100BK7-GS VPZ100BK7-GS-NM N100CF VPZ160BK7-GS VPZ160BK7-GS-NM N160CF

16 Viewports with efined Optical Quality Boron Crown Glass, BK7 Optically Polished, Unexchangeable Window With antireflection coating, 1QWOT VPZ16BK7-GS-R VPZ16BK7-GS-NM-R N16CF VPZ40BK7-GS-R VPZ40BK7-GS-NM-R N40CF VPZ40BK7-GS-R - N40CF VPZ64BK7-GS-R VPZ64BK7-GS-NM-R N6CF VPZ100BK7-GS-R VPZ100BK7-GS-NM-R N100CF VPZ160BK7-GS-R VPZ160BK7-GS-NM-R N160CF With antireflection coating, "V" coating VPZ16BK7-GS-VR VPZ16BK7-GS-NM-VR N16CF VPZ40BK7-GS-VR VPZ40BK7-GS-NM-VR N40CF VPZ40BK7-GS-VR - N40CF VPZ64BK7-GS-VR VPZ64BK7-GS-NM-VR N6CF VPZ100BK7-GS-VR VPZ100BK7-GS-NM-VR N100CF VPZ160BK7-GS-VR VPZ160BK7-GS-NM-VR N160CF With antireflection coating, broadband VPZ16BK7-GS-BBR VPZ16BK7-GS-NM-BBR N16CF VPZ40BK7-GS-BBR VPZ40BK7-GS-NM-BBR N40CF VPZ40BK7-GS-BBR - N40CF VPZ64BK7-GS-BBR VPZ64BK7-GS-NM-BBR N6CF VPZ100BK7-GS-BBR VPZ100BK7-GS-NM-BBR N100CF VPZ160BK7-GS-BBR VPZ160BK7-GS-NM-BBR N160CF

17 Viewports with efined Optical Quality Quartz, Exchangeable Window KF flange ISO flange Technical data Specifications KF and ISO-K viewport with exchangeable quartz window - flat construction - easy assembly and disassembly Connection KF and ISO-K flange eak rate < 1.0E-8 mbar l/s Window material quartz Flatness < 4 material (magnetic) stainless steel - 04 (1.407) Seal FKM O-ring Transmission range µm Temperature range to 150 C bakeable Standard KVPZ40QTCRSV N40KF KVPZ50QTCRSV N50KF ISOVPZ6QTCRSV N6ISO ISOVPZ100QTCRSV N100ISO ISOVPZ160QTCRSV N160ISO ccessories, replacement windows KF40VPQURZ KF50VPQURZ ISO6VPQURZ ISO100VPQURZ ISO160VPQURZ N40KF N50KF N6ISO N100ISO N160ISO ccessories for KVPZ40QTCRSV KVPZ50QTCRSV ISOVPZ6QTCRSV ISOVPZ100QTCRSV ISOVPZ160QTCRSV ccessories, replacement O-rings KF40VR KF50VR ISO6VR-VP ISO100VR-VP ISO160VR-VP N40KF N50KF N6ISO N100ISO N160ISO -17

18 Viewports with efined Optical Quality Quartz, Fused Silica Spectrosil 2000, Unexchangeable Window Technical data Specifications CF viewport with firmly connected quartz (fused silica Spectrosil 2000 ) window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material fused silica Spectrosil 2000 Transmission range µm Temperature range to 200 C Surface quality 20/10 (scratch/dig) Flatness < 8 (better surface quality and flatness on request) type flange material glass-to-metal connection stainless steel - 04 (1.407) Kovar type flange material glass-to-metal connection stainless steel - 16N (1.4429) tantalum Coating narrow band (1QWOT or "V" coating) broadband Standard detailed information see introduction possible coating range nm Please add the required wavelength or wavelength range to the order code VPZ16QS-MB VPZ16QS-MB-NM N16CF VPZ40QS-MB VPZ40QS-MB-NM N40CF VPZ40QS-MB - N40CF ,5 VPZ64QS-MB VPZ64QS-MB-NM N6CF VPZ100QS-MB VPZ100QS-MB-NM N100CF VPZ160QS-MB VPZ160QS-MB-NM N160CF

19 Viewports with efined Optical Quality Quartz, Fused Silica Spectrosil 2000, Unexchangeable Window With antireflection coating, 1QWOT VPZ16QS-MB-R VPZ16QS-MB-NM-R N16CF VPZ40QS-MB-R VPZ40QS-MB-NM-R N40CF VPZ40QS-MB-R - N40CF VPZ64QS-MB-R VPZ64QS-MB-NM-R N6CF VPZ100QS-MB-R VPZ100QS-MB-NM-R N100CF VPZ160QS-MB-R VPZ160QS-MB-NM-R N160CF With antireflection coating, "V" coating VPZ16QS-MB-VR VPZ16QS-MB-NM-VR N16CF VPZ40QS-MB-VR VPZ40QS-MB-NM-VR N40CF VPZ40QS-MB-VR - N40CF VPZ64QS-MB-VR VPZ64QS-MB-NM-VR N6CF VPZ100QS-MB-VR VPZ100QS-MB-NM-VR N100CF VPZ160QS-MB-VR VPZ160QS-MB-NM-VR N160CF With antireflection coating, broadband VPZ16QS-MB-BBR VPZ16QS-MB-NM-BBR N16CF VPZ40QS-MB-BBR VPZ40QS-MB-NM-BBR N40CF VPZ40QS-MB-BBR - N40CF VPZ64QS-MB-BBR VPZ64QS-MB-NM-BBR N6CF VPZ100QS-MB-BBR VPZ100QS-MB-NM-BBR N100CF VPZ160QS-MB-BBR VPZ160QS-MB-NM-BBR N160CF

20 Viewports with efined Optical Quality Quartz, Z-cut, Unexchangeable Window Technical data Specifications CF viewport with firmly connected quartz (Z-cut) window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material quartz (Z-cut) Transmission range µm Temperature range to 200 C Surface quality 20/10 (scratch/dig) Flatness < 8 (better surface quality and flatness on request) type flange material glass-to-metal connection stainless steel - 04 (1.407) Kovar type flange material glass-to-metal connection stainless steel - 16N (1.4429) tantalum Coating narrow band (1QWOT or "V" coating) broadband Standard detailed information see introduction possible coating range nm Please add the required wavelength or wavelength range to the order code VPZ16QZCUT-MB VPZ16QZCUT-MB-NM N16CF VPZ40QZCUT-MB VPZ40QZCUT-MB-NM N40CF VPZ40QZCUT-MB - N40CF VPZ64QZCUT-MB VPZ64QZCUT-MB-NM N6CF VPZ100QZCUT-MB VPZ100QZCUT-MB-NM N100CF VPZ160QZCUT-MB VPZ160QZCUT-MB-NM N160CF

21 Viewports with efined Optical Quality Quartz, Z-cut, Unexchangeable Window With antireflection coating, 1QWOT VPZ16QZCUT-MB-R VPZ16QZCUT-MB-NM-R N16CF VPZ40QZCUT-MB-R VPZ40QZCUT-MB-NM-R N40CF VPZ40QZCUT-MB-R - N40CF VPZ64QZCUT-MB-R VPZ64QZCUT-MB-NM-R N6CF VPZ100QZCUT-MB-R VPZ100QZCUT-MB-NM-R N100CF VPZ160QZCUT-MB-R VPZ160QZCUT-MB-NM-R N160CF With antireflection coating, "V" coating VPZ16QZCUT-MB-VR VPZ16QZCUT-MB-NM-VR N16CF VPZ40QZCUT-MB-VR VPZ40QZCUT-MB-NM-VR N40CF VPZ40QZCUT-MB-VR - N40CF VPZ64QZCUT-MB-VR VPZ64QZCUT-MB-NM-VR N6CF VPZ100QZCUT-MB-VR VPZ100QZCUT-MB-NM-VR N100CF VPZ160QZCUT-MB-VR VPZ160QZCUT-MB-NM-VR N160CF With antireflection coating, broadband VPZ16QZCUT-MB-BBR VPZ16QZCUT-MB-NM-BBR N16CF VPZ40QZCUT-MB-BBR VPZ40QZCUT-MB-NM-BBR N40CF VPZ40QZCUT-MB-BBR - N40CF VPZ64QZCUT-MB-BBR VPZ64QZCUT-MB-NM-BBR N6CF VPZ100QZCUT-MB-BBR VPZ100QZCUT-MB-NM-BBR N100CF VPZ160QZCUT-MB-BBR VPZ160QZCUT-MB-NM-BBR N160CF

22 Viewports with efined Optical Quality Magnesium Fluoride Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected magnesium fluoride window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material magnesium fluoride Transmission range µm Temperature range to 120 C Surface quality 60/40 (scratch/dig) Flatness < 4 (better surface quality and flatness on request) type flange material stainless steel - 04 (1.407) type flange material stainless steel - 16N (1.4429) Coating detailed information see introduction narrow band (1QWOT or "V" coating) possible coating range nm broadband Please add the required wavelength or wavelength range to the order code Standard VPZ16MGF2-BO VPZ16MGF2-BO-NM N16CF VPZ40MGF2-BO VPZ40MGF2-BO-NM N40CF VPZ40MGF2-BO - N40CF VPZ64MGF2-BO VPZ64MGF2-BO-NM N6CF VPZ100MGF2-BO VPZ100MGF2-BO-NM N100CF VPZ160MGF2-BO VPZ160MGF2-BO-NM N160CF

23 Viewports with efined Optical Quality Magnesium Fluoride Optically Polished, Unexchangeable Window With antireflection coating, 1QWOT VPZ16MGF2-BO-R VPZ16MGF2-BO-NM-R N16CF VPZ40MGF2-BO-R VPZ40MGF2-BO-NM-R N40CF VPZ40MGF2-BO-R - N40CF VPZ64MGF2-BO-R VPZ64MGF2-BO-NM-R N6CF VPZ100MGF2-BO-R VPZ100MGF2-BO-NM-R N100CF VPZ160MGF2-BO-R VPZ160MGF2-BO-NM-R N160CF With antireflection coating, "V" coating VPZ16MGF2-BO-VR VPZ16MGF2-BO-NM-VR N16CF VPZ40MGF2-BO-VR VPZ40MGF2-BO-NM-VR N40CF VPZ40MGF2-BO-VR - N40CF VPZ64MGF2-BO-VR VPZ64MGF2-BO-NM-VR N6CF VPZ100MGF2-BO-VR VPZ100MGF2-BO-NM-VR N100CF VPZ160MGF2-BO-VR VPZ160MGF2-BO-NM-VR N160CF With antireflection coating, broadband VPZ16MGF2-BO-BBR VPZ16MGF2-BO-NM-BBR N16CF VPZ40MGF2-BO-BBR VPZ40MGF2-BO-NM-BBR N40CF VPZ40MGF2-BO-BBR - N40CF VPZ64MGF2-BO-BBR VPZ64MGF2-BO-NM-BBR N6CF VPZ100MGF2-BO-BBR VPZ100MGF2-BO-NM-BBR N100CF VPZ160MGF2-BO-BBR VPZ160MGF2-BO-NM-BBR N160CF

24 Viewports with efined Optical Quality Calcium Fluoride Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected calcium fluoride window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material calcium fluoride Transmission range µm Temperature range to 120 C Surface quality 80/50 (scratch/dig) Flatness < 4 (better surface quality and flatness on request) type flange material stainless steel - 04 (1.407) type flange material stainless steel - 16N (1.4429) Coating detailed information see introduction narrow band (1QWOT or "V" coating) possible coating range nm broadband Please add the required wavelength or wavelength range to the order code Standard VPZ16CF2-BO VPZ16CF2-BO-NM N16CF VPZ40CF2-BO VPZ40CF2-BO-NM N40CF VPZ40CF2-BO - N40CF VPZ64CF2-BO VPZ64CF2-BO-NM N6CF VPZ100CF2-BO VPZ100CF2-BO-NM N100CF VPZ160CF2-BO VPZ160CF2-BO-NM N160CF

25 Viewports with efined Optical Quality Calcium Fluoride Optically Polished, Unexchangeable Window With antireflection coating, 1QWOT VPZ16CF2-BO-R VPZ16CF2-BO-NM-R N16CF VPZ40CF2-BO-R VPZ40CF2-BO-NM-R N40CF VPZ40CF2-BO-R - N40CF VPZ64CF2-BO-R VPZ64CF2-BO-NM-R N6CF VPZ100CF2-BO-R VPZ100CF2-BO-NM-R N100CF VPZ160CF2-BO-R VPZ160CF2-BO-NM-R N160CF With antireflection coating, "V" coating VPZ16CF2-BO-VR VPZ16CF2-BO-NM-VR N16CF VPZ40CF2-BO-VR VPZ40CF2-BO-NM-VR N40CF VPZ40CF2-BO-VR - N40CF VPZ64CF2-BO-VR VPZ64CF2-BO-NM-VR N6CF VPZ100CF2-BO-VR VPZ100CF2-BO-NM-VR N100CF VPZ160CF2-BO-VR VPZ160CF2-BO-NM-VR N160CF With antireflection coating, broadband VPZ16CF2-BO-BBR VPZ16CF2-BO-NM-BBR N16CF VPZ40CF2-BO-BBR VPZ40CF2-BO-NM-BBR N40CF VPZ40CF2-BO-BBR - N40CF VPZ64CF2-BO-BBR VPZ64CF2-BO-NM-BBR N6CF VPZ100CF2-BO-BBR VPZ100CF2-BO-NM-BBR N100CF VPZ160CF2-BO-BBR VPZ160CF2-BO-NM-BBR N160CF

26 Viewports with efined Optical Quality Barium Fluoride Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected barium fluoride window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material barium fluoride Transmission range µm Temperature range to 120 C Surface quality 60/40 (scratch/dig) Flatness < 4 (better surface quality and flatness on request) type flange material stainless steel - 04 (1.407) type flange material stainless steel - 16N (1.4429) Coating detailed information see introduction narrow band (1QWOT or "V" coating) possible coating range nm broadband Please add the required wavelength or wavelength range to the order code Standard VPZ16BF2-BO VPZ16BF2-BO-NM N16CF VPZ40BF2-BO VPZ40BF2-BO-NM N40CF VPZ40BF2-BO - N40CF VPZ64BF2-BO VPZ64BF2-BO-NM N6CF VPZ100BF2-BO VPZ100BF2-BO-NM N100CF VPZ160BF2-BO VPZ160BF2-BO-NM N160CF

27 Viewports with efined Optical Quality Barium Fluoride Optically Polished, Unexchangeable Window With antireflection coating, 1QWOT VPZ16BF2-BO-R VPZ16BF2-BO-NM-R N16CF VPZ40BF2-BO-R VPZ40BF2-BO-NM-R N40CF VPZ40BF2-BO-R - N40CF VPZ64BF2-BO-R VPZ64BF2-BO-NM-R N6CF VPZ100BF2-BO-R VPZ100BF2-BO-NM-R N100CF VPZ160BF2-BOX-R VPZ160BF2-BO-NM-R N160CF With antireflection coating, "V" coating VPZ16BF2-BO-VR VPZ16BF2-BO-NM-VR N16CF VPZ40BF2-BO-VR VPZ40BF2-BO-NM-VR N40CF VPZ40BF2-BO-VR - N40CF VPZ64BF2-BO-VR VPZ64BF2-BO-NM-VR N6CF VPZ100BF2-BO-VR VPZ100BF2-BO-NM-VR N100CF VPZ160BF2-BO-VR VPZ160BF2-BO-NM-VR N160CF With antireflection coating, broadband VPZ16BF2-BO-BBR VPZ16BF2-BO-NM-BBR N16CF VPZ40BF2-BO-BBR VPZ40BF2-BO-NM-BBR N40CF VPZ40BF2-BO-BBR - N40CF VPZ64BF2-BO-BBR VPZ64BF2-BO-NM-BBR N6CF VPZ100BF2-BO-BBR VPZ100BF2-BO-NM-BBR N100CF VPZ160BF2-BO-BBR VPZ160BF2-BO-NM-BBR N160CF

28 Viewports with efined Optical Quality ithium Fluoride Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected lithium fluoride window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material lithium fluoride Transmission range µm Temperature range to 120 C Surface quality 60/40 (scratch/dig) Flatness < 4 (better surface quality and flatness on request) type flange material stainless steel - 04 (1.407) type flange material stainless steel - 16N (1.4429) Coating detailed information see introduction narrow band (1QWOT or "V" coating) possible coating range nm broadband Please add the required wavelength or wavelength range to the order code Standard VPZ16IF2-BO VPZ16IF2-BO-NM N16CF VPZ40IF2-BO VPZ40IF2-BO-NM N40CF VPZ40IF2-BO - N40CF VPZ64IF2-BO VPZ64IF2-BO-NM N6CF VPZ100IF2-BO VPZ100IF2-BO-NM N100CF VPZ160IF2-BO VPZ160IF2-BO-NM N160CF

29 Viewports with efined Optical Quality ithium Fluoride Optically Polished, Unexchangeable Window With antireflection coating, 1QWOT VPZ16IF2-BO-R VPZ16IF2-BO-NM-R N16CF VPZ40IF2-BO-R VPZ40IF2-BO-NM-R N40CF VPZ40IF2-BO-R - N40CF VPZ64IF2-BO-R VPZ64IF2-BO-NM-R N6CF VPZ100IF2-BO-R VPZ100IF2-BO-NM-R N100CF VPZ160IF2-BO-R VPZ160IF2-BO-NM-R N160CF With antireflection coating, "V" coating VPZ16IF2-BO-VR VPZ16IF2-BO-NM-VR N16CF VPZ40IF2-BO-VR VPZ40IF2-BO-NM-VR N40CF VPZ40IF2-BO-VR - N40CF VPZ64IF2-BO-VR VPZ64IF2-BO-NM-VR N6CF VPZ100IF2-BO-VR VPZ100IF2-BO-NM-VR N100CF VPZ160IF2-BO-VR VPZ160IF2-BO-NM-VR N160CF With antireflection coating, broadband VPZ16IF2-BO-BBR VPZ16IF2-BO-NM-BBR N16CF VPZ40IF2-BO-BBR VPZ40IF2-BO-NM-BBR N40CF VPZ40IF2-BO-BBR - N40CF VPZ64IF2-BO-BBR VPZ64IF2-BO-NM-BBR N6CF VPZ100IF2-BO-BBR VPZ100IF2-BO-NM-BBR N100CF VPZ160IF2-BO-BBR VPZ160IF2-BO-NM-BBR N160CF

30 Viewports with efined Optical Quality IR Optics, Sapphire Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected sapphire window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material sapphire Transmission range µm Temperature range to 4500 C Surface quality 60/40 (scratch/dig) Flatness < 8 (better surface quality and flatness on request) type flange material glass-to-metal connection stainless steel - 04 (1.407) Kovar type flange material glass-to-metal connection stainless steel - 16N (1.4429) tantalum Coating narrow band (1QWOT or "V" coating) broadband Standard detailed information see introduction possible coating range nm Please add the required wavelength or wavelength range to the order code VPZ16S-MB VPZ16S-MB-NM N16CF VPZ40S-MB VPZ40S-MB-NM N40CF VPZ40S-MB - N40CF VPZ64S-MB VPZ64S-MB-NM N6CF VPZ100S-MB VPZ100S-MB-NM N100CF VPZ160S-MB VPZ160S-MB-NM N160CF

31 Viewports with efined Optical Quality IR Optics, Sapphire Optically Polished, Unexchangeable Window With antireflection coating, 1QWOT VPZ16S-MB-R VPZ16S-MB-NM-R N16CF VPZ40S-MB-R VPZ40S-MB-NM-R N40CF VPZ40S-MB-R - N40CF VPZ64S-MB-R VPZ64S-MB-NM-R N6CF VPZ100S-MB-R VPZ100S-MB-NM-R N100CF VPZ160S-MB-R VPZ160S-MB-NM-R N160CF With antireflection coating, "V" coating VPZ16S-MB-VR VPZ16S-MB-NM-VR N16CF VPZ40S-MB-VR VPZ40S-MB-NM-VR N40CF VPZ40S-MB-VR - N40CF VPZ64S-MB-VR VPZ64S-MB-NM-VR N6CF VPZ100S-MB-VR VPZ100S-MB-NM-VR N100CF VPZ160S-MB-VR VPZ160S-MB-NM-VR N160CF With antireflection coating, broadband VPZ16S-MB-BBR VPZ16S-MB-NM-BBR N16CF VPZ40S-MB-BBR VPZ40S-MB-NM-BBR N40CF VPZ40S-MB-BBR - N40CF VPZ64S-MB-BBR VPZ64S-MB-NM-BBR N6CF VPZ100S-MB-BBR VPZ100S-MB-NM-BBR N100CF VPZ160S-MB-BBR VPZ160S-MB-NM-BBR N160CF

32 Viewports with efined Optical Quality IR Optics, Zinc Selenide Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected zinc selenide window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material zinc selenide (optically polished) Transmission range µm Temperature range to 120 C Surface quality 60/40 (scratch/dig) Flatness < 2 (better surface quality and flatness on request) type flange material glass-to-metal connection stainless steel - 04 (1.407) Kovar type flange material glass-to-metal connection stainless steel - 16N (1.4429) tantalum Coating R 10.6 Standard for detailed information see introduction antireflection coating at 10.6 µm VPZ16ZNSE-BO VPZ16ZNSE-BO-NM N16CF VPZ40ZNSE-BO VPZ40ZNSE-BO-NM N40CF VPZ40ZNSE-BO - N40CF VPZ64ZNSE-BO VPZ64ZNSE-BO-NM N6CF VPZ100ZNSE-BO VPZ100ZNSE-BO-NM N100CF VPZ160ZNSE-BO VPZ160ZNSE-BO-NM N160CF With antireflection coating, R 10.6 VPZ16ZNSE-BO-R VPZ16ZNSE-BO-NM-R N16CF VPZ40ZNSE-BO-R VPZ40ZNSE-BO-NM-R N40CF VPZ40ZNSE-BO-R N40CF VPZ64ZNSE-BO-R VPZ64ZNSE-BO-NM-R N6CF VPZ100ZNSE-BO-R VPZ100ZNSE-BO-NM-R N100CF VPZ160ZNSE-BO-R VPZ160ZNSE-BO-NM-R N160CF

33 Viewports with efined Optical Quality IR Optics, Zinc Sulfide Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected zinc sulfide window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material zinc sulfide Transmission range µm Temperature range to 120 C Surface quality 60/40 (scratch/dig) Flatness < 2 (better surface quality and flatness on request) type flange material glass-to-metal connection stainless steel - 04 (1.407) Kovar type flange material glass-to-metal connection stainless steel - 16N (1.4429) tantalum Coating R 10.6 Standard for detailed information see introduction antireflection coating at 10.6 µm VPZ16ZNS-BO VPZ16ZNS-BO-NM N16CF VPZ40ZNS-BO VPZ40ZNS-BO-NM N40CF VPZ40ZNS-BO - N40CF VPZ64ZNS-BO VPZ64ZNS-BO-NM N6CF VPZ100ZNS-BO VPZ100ZNS-BO-NM N100CF VPZ160ZNS-BO VPZ160ZNS-BO-NM N160CF With antireflection coating, R 10.6 VPZ16ZNS-BO-R VPZ16ZNS-BO-NM-R N16CF VPZ40ZNS-BO-R VPZ40ZNS-BO-NM-R N40CF VPZ40ZNS-BO-R N40CF VPZ64ZNS-BO-R VPZ64ZNS-BO-NM-R N6CF VPZ100ZNS-BO-R VPZ100ZNS-BO-NM-R N100CF VPZ160ZNS-BO-R VPZ160ZNS-BO-NM-R N160CF

34 Viewports with efined Optical Quality IR Optics, Silicon Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected silicon window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material silicon optically polished Transmission range µm Temperature range to 120 C Surface quality 20/10 (scratch/dig) Flatness < 4 (better surface quality and flatness on request) type flange material stainless steel - 04 (1.407) type flange material stainless steel - 16N (1.4429) Standard VPZ16SI-BO VPZ16SI-BO-NM N16CF VPZ40SI-BO VPZ40SI-BO-NM N40CF VPZ40SI-BO - N40CF VPZ64SI-BO VPZ64SI-BO-NM N6CF VPZ100SI-BO VPZ100SI-BO-NM N100CF VPZ160SI-BO VPZ160SI-BO-NM N160CF

35 Viewports with efined Optical Quality IR Optics, Germanium Optically Polished, Unexchangeable Window Technical data Specifications CF viewport with firmly connected germanium window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material germanium optically polished Transmission range µm Temperature range to 120 C Surface quality 20/10 (scratch/dig) Flatness < 4 (better surface quality and flatness on request) type flange material stainless steel - 04 (1.407) type flange material stainless steel - 16N (1.4429) Standard VPZ16GE-BO VPZ16GE-BO-NM N16CF VPZ40GE-BO VPZ40GE-BO-NM N40CF VPZ40GE-BO - N40CF VPZ64GE-BO VPZ64GE-BO-NM N6CF VPZ100GE-BO VPZ100GE-BO-NM N100CF VPZ160GE-BO VPZ160GE-BO-NM N160CF

36 Viewports with Electrical Conductive ayers Borosilicate, Unexchangeable Window Technical data Specifications CF viewport with firmly connected borosilicate window Connection CF flange eak rate < 1.0E-10 mbar l/s Window material borosilicate Transmission range µm Temperature range to 50 C Surface quality 80/50 (scratch/dig) Flatness < 4 type flange material stainless steel - 04 (1.407) type flange material stainless steel - 16N (1.4429) Coating for detailed information see introduction ITO ITO + phosphor (standard phosphor types are RHEE screen P11, P20, P22 and P4, further types on request) With ITO coating VPZ16ITO-MB VPZ16ITO-MB-NM N16CF VPZ40ITO-MB VPZ40ITO-MB-NM N40CF VPZ40ITO-MB - N40CF VPZ64ITO-MB VPZ64ITO-MB-NM N6CF VPZ100ITO-MB VPZ100ITO-MB-NM N100CF VPZ160ITO-MB VPZ160ITO-MB-NM N160CF With ITO coating and lead glass screen VPZ16ITOG-MB VPZ16ITOG-MB-NM N16CF VPZ40ITOG-MB VPZ40ITOG-MB-NM N40CF VPZ64ITOG-MB VPZ64ITOG-MB-NM N6CF VPZ100ITOG-MB VPZ100ITOG-MB-NM N100CF VPZ160ITOG-MB VPZ160ITOG-MB-NM N160CF

37 Viewports with Electrical Conductive ayers Borosilicate, Unexchangeable Window With ITO coating and RHEE screen (P11) VPZ16ITO-MB-11 VPZ16ITO-MB-NM-11 N16CF VPZ40ITO-MB-11 VPZ40ITO-MB-NM-11 N40CF VPZ40ITO-MB-11 - N40CF VPZ64ITO-MB-11 VPZ40ITO-MB-NM-11 N6CF VPZ100ITO-MB-11 VPZ64ITO-MB-NM-11 N100CF VPZ160ITO-MB-11 VPZ160ITO-MB-NM-11 N160CF With ITO coating and RHEE screen (P20) VPZ16ITO-MB-20 VPZ16ITO-MB-NM-20 N16CF VPZ40ITO-MB-20 VPZ40ITO-MB-NM-20 N40CF VPZ40ITO-MB-20 - N40CF VPZ64ITO-MB-20 VPZ64ITO-MB-NM-20 N6CF VPZ100ITO-MB-20 VPZ100ITO-MB-NM-20 N100CF VPZ160ITO-MB-20 VPZ160ITO-MB-NM-20 N160CF With ITO coating and RHEE screen (P22) VPZ16ITO-MB-22 VPZ16ITO-MB-NM-22 N16CF VPZ40ITO-MB-22 VPZ40ITO-MB-NM-22 N40CF VPZ40ITO-MB-22 - N40CF VPZ64ITO-MB-22 VPZ64ITO-MB-NM-22 N6CF VPZ100ITO-MB-22 VPZ100ITO-MB-NM-22 N100CF VPZ160ITO-MB-22 VPZ160ITO-MB-NM-22 N160CF With ITO coating and RHEE screen (P4) VPZ16ITO-MB-4 VPZ16ITO-MB-NM-4 N16CF VPZ40ITO-MB-4 VPZ40ITO-MB-NM-4 N40CF VPZ40ITO-MB-4 - N40CF VPZ64ITO-MB-4 VPZ64ITO-MB-NM-4 N6CF VPZ100ITO-MB-4 VPZ100ITO-MB-NM-4 N100CF VPZ160ITO-MB-4 VPZ160ITO-MB-NM-4 N160CF

38 Viewports with Electrical Conductive ayers Borosilicate, Unexchangeable Window With ITO coating and RHEE screen (P11) and lead screen VPZ16ITOG-MB-11 VPZ16ITOG-MB-NM-11 N16CF VPZ40ITOG-MB-11 VPZ40ITOG-MB-NM-11 N40CF VPZ40ITOG-MB-11 - N40CF VPZ64ITOG-MB-11 VPZ64ITOG-MB-NM-11 N6CF VPZ100ITOG-MB-11 VPZ100ITOG-MB-NM-11 N100CF VPZ160ITOG-MB-11 VPZ160ITOG-MB-NM-11 N160CF With ITO coating and RHEE screen (P20) and lead screen VPZ16ITOG-MB-20 VPZ16ITOG-MB-NM-20 N16CF VPZ40ITOG-MB-20 VPZ40ITOG-MB-NM-20 N40CF VPZ40ITOG-MB-20 - N40CF VPZ64ITOG-MB-20 VPZ64ITOG-MB-NM-20 N6CF VPZ100ITOG-MB-20 VPZ100ITOG-MB-NM-20 N100CF VPZ160ITOG-MB-20 VPZ160ITOG-MB-NM-20 N160CF With ITO coating and RHEE screen (P22) and lead screen VPZ16ITOG-MB-22 VPZ16ITOG-MB-NM-22 N16CF VPZ40ITOG-MB-22 VPZ40ITOG-MB-NM-22 N40CF VPZ40ITOG-MB-22 - N40CF VPZ64ITOG-MB-22 VPZ64ITOG-MB-NM-22 N6CF VPZ100ITOG-MB-22 VPZ100ITOG-MB-NM-22 N100CF VPZ160ITOG-MB-22 VPZ160ITOG-MB-NM-22 N160CF With ITO coating and RHEE screen (P4) and lead screen VPZ16ITOG-MB-4 VPZ16ITOG-MB-NM-4 N16CF VPZ40ITOG-MB-4 VPZ40ITOG-MB-NM-4 N40CF VPZ40ITOG-MB-4 - N40CF VPZ64ITOG-MB-4 VPZ64ITOG-MB-NM-4 N6CF VPZ100ITOG-MB-4 VPZ100ITOG-MB-NM-4 N100CF VPZ160ITOG-MB-4 VPZ160ITOG-MB-NM-4 N160CF

39 Special Viewports Beryllium, Unexchangeable Window Technical data Specifications Connection eak rate Window material Flatness type flange material glass-to-metal connection temperature range CF viewport with firmly connected beryllium window CF flange < 1.0E-10 mbar l/s beryllium < 8 stainless steel - 04 (1.407) Kovar to 50 C Standard VPZ16BE-MB VPZ16BE-MS-NM N16CF VPZ40BE-MB VPZ40BE-MS-NM N40CF VPZ40BE-MB - N40CF Viewports with d Socket KF, ISO nd CF Viewports with d Socket KF, ISO and CF viewports with flanged socket made of different glass materials are available on request. Please contact your customer advisor or send a request for quotation to: info@vacom -vacuum.com. -9

40 Viewport Shutters Viewport Shutters, Manual Viewport Shutters ue to different flange standards and tube dimension viewports shutters are available in sizes N6, N100 and N160 also with smaller blades. This option is specified by an S at the end of the order code M16 rive The M16 Magirive serves as drive for all viewport shutters. The basic version of the rotary feedthrough is equipped with an internal friction brake. This enables to pivot and hold the shutter in any position. Other drive options for the rotary feedthrough are shown on page 8-18ff. These viewport shutters are also appropriate to RHEE applications due to very low magnetic stray fields. Technical data Specifications Viewport shutters serve the protection of the vacuum side of the viewport during coating processes. Four flange dimensions are available. rive mechanical rotary feedthrough type Magirive M16 Connection CF flange Bakeable to to 250 C Standard shutters VPS40 N40CF VPS64 N6CF VPS100 N100CF VPS160 N160CF Small shutters VPS64S N6CF VPS100S N100CF VPS160S N160CF