Microelectronic pressure sensors on the Silicon-on-Sapphire Technology

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2 Applications Industrial automatics Oil and gas industry Hydraulics/Pneumatic Pumping stations/ Compressors Heat metering Operation pressure range from 0-0,06 to MPa Operation temperature range from -45 to +200 C Titan sensor body The sensors are intended for proportional conversion of pressure into electric signal. Design features of pressure sensors Strain-sensitive membrane 1 - monocrystal silicon Wheatstone bridge; 2 - aluminum bonding pads; 3 - monocrystal sapphire membrane; 4 - titan membrane Sensitive element of pressure sensors is a two-layer sapphire-titanium membrane with monocrystal silicon resistance strain gauges. Monocrystal sapphire membrane is a perfect elastic element that due to connection with titanium acquires the best quality as to the deformation level, and preserves its elastic properties up to 400 C. Monocrystal silicon resistance strain gauges are automatically connected with sapphire (heteroepitaxy method) and provide almost no hysteresis or fatigue effects. Exceptional insulating properties and radiation resistance of sapphire enable to use the sensitive element within temperature range from -200 to +350 C under the effect of high electromagnetic interferences and radiation Strain gauges elements are manufactured in groups by solid-state microelectronic methods and provide high quality and good repeatability of the output parameters. 1. Two-membrane pressure sensors 2. One-membrane welded pressure sensors 3. One-membrane monolithic (weld-free) pressure sensors 1 - strain-sensitive membrane; 2 - dielectric connector; 3 - body; 4 - stem; 5 - intermediate membrane

3 1 Accuracy parameters Specifications 1.1 Resolution, % FS... 0, Non-linearity, % FS...±0, Variation, % FS...0, Output signal repeatability, % FS...±0, Long-term stability of the output signal range within 12 months, % Pressure sensors with operation pressure range from 0-0, 06 to 0-1 MPa...±0, Pressure sensors with operation pressure range from 0-1,6 to MPa...±0, Complementary drift due to the ambient temperature influence, % FS/1 C...±0,05 2 Electrical parameters 2.1 Output signal at normal conditions by stabilized DC voltage 10 V Initial output signal, mv...± Output signal range (FS), mv ± Strain gage bridge resistance at normal conditions, kohm... 3,40-4, Insulation resistance at normal conditions, MOhm Electrical insulation strength (AC voltage), V Pressure sensors HP, MD, MC, PT, P, TM, HPL, HD, MP, MP-P Series Pressure sensors D, H Series Power supply: Stabilized DC voltage, V Stabilized DC, ma...0,2-2 3 Mechanical parameters 3.1 Vibration resistance: Frequency range, Hz...from 10 to 5000 Acceleration amplitude, m/s Shock resistance (multiple mechanical shocks): Shock acceleration peak, m/s Shock pulse width, ms Operating conditions 4.1 IP level...ip Sensor body and membrane are made of titanium alloy with 87 % of Titan 5 Connection wiring diagrams 0 Supply (±) 0 Output 1 (±) 0 O utput 2 (±) 0 Supply {-) 1 «Closed bridge» diagram 2 «Open bridge diagram

4 1 Pressure sensors HP Series HP 0,06(0,1; 0,16)-... HP 0,25(0, )- «5,4 M 24x0,75-6g 14,8 M 24x11,75-6 III И i : f ОС i* V; U19 2 Connecting threads: from 0-0,06 to //4-18 NPT; Gl/4"; M 12xl, Pressure sensors MD Series MD 0,25(0,4...!)-... MD 1,6(2, ) _UI_ i ll П 04,S M 10xl,25-8g 6ti" 04,8 M10xl,25-8g \ 60",. from 0-0,25 to

5 3 Pressure sensors MC Series 4 Pressure sensors PT Series from 0-1,6 to Operation temperature range, C; from 0-4 to Pressure sensors P Series P 0,16(0,25...!)-... P 1,6(2,5...40)-!!!!!! I I from 0-0,16 to 0-40 from - 40 to from - 20 to from - 20 to ,5

6 6 Pressure sensors TM Series TM 0,1(0,16)-... TM 0,25(0, )-... from 0-0,1 to Pressure sensors HPL Series HPL 0,06(0,1; 0,16)-... HPL 0,25(0, )-. 027,5 М 2 lx0,75-6g 22,4 M 2ix0,75-6g Ш n o n 0 19 и з О 19 from 0-0,06 to Connecting threads: 1//4-18 NPT; Gl/4"; M 12xl,25, M 14xl,5 35

7 8 High pressure sensors HD Series HD 100( )-... HD 100( )-... M 24xll,75-7H 1Л M21x(l,75-6g Connecting threads: from to M 16xl,5; M 18xl,5; 9/16-18UNF 34 9 Pressure sensors D Series D 0,25 - D 1,6 D 0,25-T - D 1,6-T D 2,5 - D 150 D 2,5-T - D 150-T M12xl,25-8g Operation temperature range, C from 0-0,25 to from - 50 to

8 10 Force sensors H Series H 100(200; 300)-l H 100(200; 300)-2 r- 1! 1 Cs1 1 ; «л n Operation force range, N from to (pressure range, MPa) (from 0-6 to 0-20) Operation temperature range, C from - 45 to + 80 Connecting threads: M 1 Ox 1; M20x Pressure sensors MP Series MP 1(1,6...25)-... MP 1(1, )-.,6 012 ОС ON 010 X I T Y o c f O 12-03,7 Operation temperature range,cc: Connecting threads: from 0-1 to M l0x1; 3/8-24UNF; 3/8-24UNJF; M 8xl; 5/16-24UNF; M5x0,8; 10-32UNF 7,7

9 12 Pressure sensors MP-P Series MP-P 1(1,6...25)-... MP-P 1(1, )-... Connecting threads: M l0x1; 3/8-24UNF; 3/8-24UNJF; M 8xl; 5/16-24UNF; M5x0,8; 10-32UNF 28 HP-P 0,06(0,1; 0,16) Pressure sensors HP-P Series HP-P 0,25(0, ) ,7 50# from 0-0,06 to from 0 to Connecting threads: 1/4-18 N P T ;G l/4";m 12xl,25 70

10 M icroelectronic pressure transducers 1 Accuracy parameters Specifications 1.1 Main drift, % FS...±0,25; ±0, Total drift, % FS... ±1 1.2 Variation, % FS...±0,1 1.3 Complementary drift due to the ambient temperature influence, %FS/10 C ±0,15; ±0,25 2 Electrical parameters 2.1 Output signals: For PTM1, PTM1-M, ma For PTM2, PTM2-M, В For РТМЗ-М, В... 0,5-4,5 2.2 Insulation resistance at normal conditions, MOhm Electrical insulation strength (AC voltage) Voltage supply, V For PTM1, PTM1-M, PTM2, PTM2-M For PTM3-M...4,5-5,5 3 Mechanical parameters 3.1 V ibration resistance: Frequency range, Hz...from 10 to 150 A cceleration am plitude, m/s Operating conditions 4.1 IP level... IP Materials o f pressure transducers, which are in contact with target medium: Stainless steel and titanium alloy with 87 % of Titan 1 Pressure transducers PTM-M 2 Pressure transducers PTM ,6 Q 19 D from 0-0,1 to Operation temperature range, C: from - 40 to + 85 from +5 to + 50 Connecting threads: 1/4-18 NPT; G l/4"; M 12xl,25; M 14xl,5;M 20xl,5 120 from 0-0,16 to from - 40 to + 85 from +5 to

11 PRODUCTION OF PRESSURE SENSORS Vacuum deposition area Vacuum soldering area Machinery areas Engineering process Thermal oxidation process Assembly process

12 M ICROTEN SO R Lomonosov stre et, 6, , Orel, R ussia tel: +7 (4862) ; Fas.: +7 (4862) m ail@ m icrotensor.ru icrotensor.com