The future of surface treatments at ASML

Transcription

1 The future of surface treatments at ASML Katja Moors & Maarten ter Heerdt Week van de Oppervlaktetechnologie, Slide 2 Contents Surface treatment team ASML ASML technology Purpose of surface treatments Case: protective coating Case: RoHS compliancy Future 1

2 Surface treatment team ASML Slide 3 Slide 4 ASML technology 2

3 ASML makes machines for making chips Slide 5 Lithography is the critical tool for producing chips All of the world s top chip makers are our customers 2017 sales: 9 billion More than 20,000 employees (FTE) worldwide Driving the semiconductor industry: Moore s Law Slide 6 Gordon Moore (1965): Number of transistors per chip doubles every year. 3

4 Driving the semiconductor industry: Moore s Law Slide 7 Gordon Moore (1965): Number of transistors per chip doubles every year. Later adjusted to two years, the trend has held for more than four decades. The future of lithography: EUV Slide 8 Large vacuum chamber New light source Mirror optics 4

5 Great people in an integrated supply chain Slide 9 > 800 PhD/Dr. R&D: ~ 7,000 engineers ~ 17,000 payroll employees ~ 3,200 flex Supplier and technology network: ~ 40,000 people Slide 10 Purpose of surface treatments 5

6 A challenging environment? Not at all! Cleanroom temperature: C Cleanroom humidity: 45% RH Slide 11 Well, yes! (E)UV radiation Cleanliness requirements Liquid Sn High acceleration nm precision Vacuum Purpose of surface treatments Prevent particle shedding Prevent corrosion Slide 12 Provide cleanability Provide anti-reflectivity Provide electrical properties Corroding magnets after HAST Ensure low outgassing Ensure adhesion Ensure friction coefficient 30 µm SiC particles in NiP coating (source: AHC Benelux) 6

7 Testing treatments In-house particle test Pin-on-disk Falling particles on wafer Remaining particles by PartSense µ Tribometer Slide 13 Tribo-track on sample Testing treatments In-house particle test Pin-on-disk Falling particles on wafer Remaining particles by PartSense Slide 14 Climate chamber Corrosion HAST test Mimics lifetime requirements Comparison with bad metal HAST samples 7

8 Slide 15 Case: protective coating Liquid Tin is an essential material Melting point of Tin (Sn): 232 C Sn is constantly supplied. Upon laser firing: Plasma is created Tiny Sn droplets are formed Laser-Produced Plasma (LPP) source CO 2 drive laser Tin droplets Slide 16 Not all tiny droplets can be caught plasma Collector 8

9 Liquid Tin is an aggressive agent Slide 17 Liquid Tin is an aggressive agent Slide 18 Attack of a heating unit by liquid Sn through pores in braze. (test situation) 9

10 Testing of coatings by Sn exposure PVD CrWN / CrWON (500 C) PVD WC (500 C) CVD TiN (330 C) FeCrSn 2 crystals Slide µm Three droplets on coating, resulting in (from left to right): full wetting of the surface, non-sticking small droplets, sticking small droplets. Coatings were identified by literature search and asking known suppliers for suitable candidates. Sn droplet, with dirt on top 1 mm Slide 20 Case: RoHS-compliancy 10

11 ASML policy on RoHS Although not legally obliged, ASML strives to meet RoHS regulations. Therefore, all components, materials and coatings are judged for their compliance. Non-RoHS compliant parts are phased out or redesigned. Slide 21 Cr(VI)-containing Black Chromium needs to be replaced. Establishing requirements Original specifications are lost in history. Comparative testing needed: [equal or better]. Slide 22 Main requirement: non -reflective nm. Other requirements Adhesion Wear resistance Coating of complex parts Etc. 11

12 Searching for alternatives Slide 23 Extended Google Current suppliers Google Analyses and results (SEM) Old coating = 1 µm New coating Slide 24 12

13 Analyses and results 3D shapes, good and bad Slide 25 Slide 26 Future 13

14 Future needs IR absorption Sn-resistance H -resistance Clean! Compliant with legislation Detailed composition known Tailored coatings: functionality icw composition Slide 27 Opportunities Develop Coatings Processes Properties Slide 28 Specialize Technology Applications Communicate Ideas Requirements Developments 14

15 Contacting ASML Via your customer (ASML supplier) 1. Questions about designs 2. Suggestions for (design) improvements 3. GSAs Slide 29 Directly with Surface Treatment Team ASML 1. For new developments 2. Katja: ( ) 3. Maarten: ( ) Questions? Slide 30 15

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