Wavelength Dispersive XRF Spectrometer

Transcription

1 ISO9001 ISO14001 for Wafers, Media Disks, and Large Samples Wavelength Dispersive XRF Spectrometer

2 ADVANCED XRF For Large and Irregularly Shaped Samples Is there any solution to analyze a large sample directly? Rigaku developed the ZSX 400 to meet this demand with new functions and capabilities based on Rigaku's decades of XRF know-how. Sample Adapter System - Adaptable to various sample sizes and shapes Diffraction Interference Rejection - Provides accurate results for single-crystal substrates Sample View Camera - Specify analyzing points on screen Compliance with industry standards - SEMI S2 and S8, CE marking Small footprint - 50% footprint of the previous model 1

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4 Advanced Hardware & Software Sample Adapter System Without preparing the sample, a wide variety of samples can be analyzed using adapters in accordance with sample shapes. Point Measurement Results Comparing spectra from clean and contaminated points can help identify contamination sources. Diffraction Interference Rejection ( Optional ) Diffraction peaks from a single-crystal substrate are eliminated using a primary beam filter. Point Analysis Capability Specified points on screen can be analyzed. 3

5 Display of Measurement and Data Analysis Flow The software guides the user through measurement and analysis. Easy-to-use Thin Film Analysis Film layers are graphically displayed for easy setting. Analysis Modeling Setting window of ZSX 400 software Ta Layer PtMn layer Ru Layer CoFe Layer Cu Layer NiFe Layer Average Max Min Range Std. Dev RSD () unit: nm Repeatability of 30 measurements Smaller Footprint 50 footprint of the previous model was achieved by a compact design integrating the X-ray generator and data processing unit into the main unit. Ergonomic Design The ZSX 400 design is based on the SEMI S8 standard which is the guideline for safety engineering based on ergonomics and human factors. The safety and comfort of the operator are assured. unit: mm Compliance with Industry Standards SEMI S2 and S8 for safety and ergonomics CE Marking 4

6 Application Data AlOx Thin Film Analysis An AlOx thin film serves as the tunnel effect layer in TMR heads for highcapacity hard disks. TMR head performance depends on tight thickness control of the 1 nm AlOx film. The ZSX 400 readily observes the Al peaks from a 1 nm AlOx film with a range of repeatability as good as 0.01 nm. Repeatability AlOx ( nm ) Average Max Min Range Std. Dev RSD () 0.30 Quantitative Analysis Quantitative analysis can be made by preparing calibration curves with standard samples. LLD for hazardous elements in solder / low alloy steel Cd in Solder Sample Solder ( MBH SRM S40 ) Low Alloy Steel ( NIST SRM 1161~1168 ) LLD Cd: 5 ppm Cr: 2 ppm Pb: 2 ppm Cr in Low Alloy Steel Mapping Measurement of a Printed Circuit Board The following results are from the solder and wiring portion of a PCB. The precise mapping results are obtained using a 0.5 mm diameter measuring spot and a 0.1 mm step of the sample stage. These results show that the Cu pattern exists under the solder plating. Ti Layer Thickness Uniformity Measurement Since the ZSX 400 can measure samples up to 400 mm diameter, the entire surface of a 300 mm wafer can be mapped. Here, the measured thicknesses range from 17.5 nm to 20.5 nm with the center and edge regions thicker than the other areas. Comparison Between WD-XRF and ED-XRF This chart compares WD-XRF and ED-XRF of 20 nm of Al on Si. The peaks of Si and Al are completely separated with WD-XRF. 5

7 Specifications Installation Requirements Element applicable Optics X-ray tube High-voltage genarator Sample size Primary beam filter Diaphragm Crystal exchanger Detector 4Be 92U Wavelength dispersive X-ray generator End window type Rh target 4 kw High frequency inverter type Max. Rating: 4 kw, 60 kv ma Spectrometer Diameter 400 mm, thickness 50 mm at maximum Less than 30 kg Automatic exchanger ( Max. 6 filters ) Al, Ti, Cu, Zr ( standard ) Mn, Sn ( Diffraction interference rejection, optional ) Automatic exchanger Diameter 30, 20, 10, 1, 0.5 mm Maximum 10 crystals Measuring & Control Heavy element: SCLight element: F-PC Power Ground Cooling Water Drainage Room temperature Humidity Vibration 3 phase 200 / 208 V 35 A, Single phase V 50 / 60 Hz ( PC ) Independent ground with resistance less than 30 Quality: Equivalent to drinking water Temperature: Lower than 30 Pressure: MPa Flow: More than 5 L / min Open drainage with daily variation within 2 Lower than 75 % RH Lower than human sensitive level P-10 gas Ar 90 % Methane 10 % Mixture, gas pressure 0.15 MPa Layout Plan and Dimensions 6

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