DP Series Low Pressure Pneumatic Diaphragm Valves 316L SS/ASTM A479. Machine finished. FC-01 Standard Cleaning and Packaging

Transcription

1 iaphragm Valves iaphragm Valves V-0 P Series ow Pressure Pneumatic iaphragm Valves Features Minimum particle generation and dead space Fully contained seat to provide excellent resistance to swelling and contamination Elgiloy diaphragm to provide high strength and corrosion resistance ong cycle life with high speed actuation Internally threadless and springless Fully functional under vacuum conditions Technical ata Port Size Flow oefficient (v) Orifice Size Max. Working Pressure Pneumatic ctuator Operating Pressure Temperature /4" to /8" or 6 mm to 8 mm in. (4. mm) 50 psig (7. bar) 60 to 90 psig (4. to 6. bar) PTFE: -0~50 F (- ~65 ) PF: -0~0 F (-~50 ) Flow ata 70 F ( ) 60 F (6 ) Pressure rop to tmosphere psi (bar) 0 (0.68) 50 (.4) 00 (6.8) ir (l/min) Water (l/min) s eak Rate (Helium) Internal External -9 x0 mbar l/s -9 x0 mbar l/s Product Technology Grade Technology Product Grade Special leaning Ultra High Purity Material/Specification 6 SS/STM VR/SEMI F0 6 VIM-VR /SEMI F0 Wetted Surface Roughness Polishing Process leaning and Packaging Specification F-0 Standard leaning Ra 0 μin. (0.5 μm) Machine finished F-0 Special leaning Ra 5 μin. (0. μm) Electropolished F-0 Ultra High Purity leaning leaning Process Thrice degreasing ultrasonic cleaning Special cleaning with non-ozone-depleting chemicals Ultra high purity cleaning in continuously monitored ultrasonic cleaning system with deionized water ssembly Environment t atmosphere In specially cleaned areas In ISO lass 5/Federal lass 00 cleanroom Packaging Process Individually bagged ouble bagged ouble bagged and vacuum sealed in cleanroom For FR connections and tube butt connections, the standard polishing process is electropolishing and the internal surface roughness is finished to an average of Ra 5 μin. (0. μm).

2 V- iaphragm Valves Major Materials of onstruction s Item omponent ctuator onnet Nut onnet utton iaphragm () ody luminum 6 SS/ STM 479 S7400/ STM SS/ STM 479 Elgiloy/MS 5876 Material/ Specification PTFE/ STM 40 or PF/ STM 07 6 SS/ STM 479 or 6 SS/ STM 479 or 6 VIM-VR/SEMI F0 losed Model Pneumatic ctuators open, "N.O." marked on the top of the cylinder closed, "N.." marked on the top of the cylinder

3 iaphragm Valves V- imensions and Ordering Information Straight imensions imensions, in inches (millimeters), are for reference only. losed Open s.49 (7.8) /8-7 NPT ctuation Port.49 (7.8) /8-7 NPT ctuation Port with 0- mounting screws with 0- mounting screws.00 (5.4).00 (5.4) asic Ordering Number onnection and Size imensions in. (mm) P -T4- /4" Tube utt Weld 0.0 (7.6).74 (44.) P -T6- /8" Tube utt Weld 0.6 (6.6).74 (44.) P -FFR4- /4" Female FR 0.86 (.8).78 (70.6) P -RFR4- /4" Rotatable Male FR 0.86 (.8).78 (70.6) P -FR4- /4" Integral Male FR 0.6 (5.7).0 (58.4) Ordering Number escription P6 - T4 - FR4 - F ody Material Inlet Inlet Size Outlet Outlet Size ctuator Technology Grade 6 6V 6W 6 SS 6 VR 6 VIM-VR T MT FR FFR RFR F M Fractional Tube utt Weld Metric Tube utt Weld Integral Male FR Female FR Rotatable Male FR Fractional Tube Metric Tube 4 /4" 6 6 mm or /8" 8 8 mm Same as Inlet Specified in the same way as Inlet type and size O losed Open PTFE PF F F Special leaning Ultra High Purity

4 V- iaphragm Valves ranch imensions s imensions, in inches (millimeters), are for reference only..49 (7.8) losed.40 with 0- mounting screws /8-7 NPT ctuation Port.49 (7.8) Open.40 with 0- mounting screws /8-7 NPT ctuation Port.00 (5.4).00 (5.4) asic Ordering Number onnection and Size imensions in. (mm) P -T4- /4" Tube utt Weld 0.0 (7.6) 0.0 (7.6).74 (44.) P -T6- /8" Tube utt Weld 0.6 (6.6) 0.6 (6.6).74 (44.) P -FFR4- /4" Female FR 0.86 (.8) 0.86 (.8).78 (70.6) P -RFR4- /4" Rotatable Male FR 0.86 (.8) 0.86 (.8).78 (70.6) P -FR4- /4" Integral Male FR 0.6 (5.7) 0.6 (5.7).0 (58.4) Flow Paths Flow paths as viewed from the top Flow E Flow F Flow G Flow K Flow

5 iaphragm Valves V-4 Ordering Number escription P6 - T4 - FR4 - FFR4 - G - F 6 ody Material 6V 6W 6 SS 6 VR 6 VIM-VR T MT FR FFR RFR F M Port Fractional Tube utt Weld Metric Tube utt Weld Integral Male FR Female FR Rotatable Male FR Fractional Tube Metric Tube Port Size 4 /4" 6 6 mm or /8" 8 8 mm Port / Port / Size Same as Port Specified in the same way as Port type and size Flow Path E F G K O ctuator losed Open PTFE PF Technology Grade F F Special leaning Ultra High Purity s

6 V-5 iaphragm Valves s -Valve -Way lock imensions imensions, in inches (millimeters), are for reference only. /8-7 NPT ctuation Port /8-7 NPT ctuation Port /8-7 NPT ctuation Port 5. (5.0) 5. (5.0) /8-7 NPT ctuation Port.66 (9.0) V V V V.66 (9.0) with 0- mounting screws 0.59 (5.0) 0.59 (5.0) with 0- mounting screws.57 (40.0).57 (40.0) asic Ordering Number P -RFR4- P -FFR4- P -RFR4- P -FFR4- onnection and Size /4" Female FR /4" Female FR /4" Rotatable Male FR /4" Rotatable Male FR imensions in. (mm) 0.86 (.8). (5.8) 4.4 (07.6) 0.86 (.8).7 (4.8) 4.4 (07.6) 0.86 (.8). (5.8) 4.4 (07.6) 0.86 (.8).7 (4.8) 4.4 (07.6)

7 iaphragm Valves V-6 Flow Paths VT Flow WT Flow V V s V V V VF Flow V V WF Flow V V Flow V V Ordering Number escription P6 - FFR4 - RFR4 - FFR4 - VF - OF Valves and Ports 6 ody Material 6V 6W 6 SS 6 VR 6 VIM-VR FFR RFR Port Female FR Rotatable Male FR Port Size 4 /4" Port / Port / Size Same as Port Specified in the same way as Port type and size Flow Path VT VF V WT WF ctuator V and V O O O V losed V losed V Open V Open V losed V Open V Open V losed Technology Grade F F Special leaning Ultra High Purity PTFE PF

8 V-7 iaphragm Valves -Valve 4-Way lock s imensions imensions, in inches (millimeters), are for reference only (08) V V V x.00 (5.4) xm5x0.8-6h thread with 0- mounting screws asic Ordering Number onnection and Size imensions in. (mm) P4 -FFR4- /4" Female FR.9 (8.0).78 (70.6) P4 -RFR4- /4" Rotatable Male FR.9 (8.0).78 (70.6)

9 iaphragm Valves V-8 Flow Paths Flow paths as viewed from the top s 4 GK Flow Ordering Number escription 4 KG Flow P46 - FFR4 - RFR4 - FFR4 - FFR4 - GK - F 4 Valves and 4 Ports ody Material 6 6V 6 SS 6 VR 6W 6 VIM-VR Port FFR RFR Female FR Rotatable Male FR Port Size 4 /4 " Port //4 Port //4 Size Same as Port Specified in the same way as Port type and size Flow Path GK KG O PTFE PF ctuator losed Open Technology Grade F Special leaning F Ultra High Purity