Atomic Layer Deposition
|
|
- Earl Mathews
- 6 years ago
- Views:
Transcription
1 Atomic Layer Deposition Ville Malinen R&D Engineer Nanopinnoitteita koneenrakentajille
2 Introduction 1) Overview of Beneq 2) Atomic Layer Deposition (ALD), to deposit thin films, which Are dense and pinhole free Are extremely conformal Can be controlled accurately in thickness and composition 3) Applications of ALD in various fields Present situation and future 2
3 Company Info Established: Ownership: Products: Markets: 2005 MBO spin out from Nextrom (ex. Nokia-Maillefer) Privately owned, venture capital funded, (Via Venture Partners, Inventure) Industrial equipment and technology for functional coatings based on ALD (Atomic Layer Deposition) and aerosol (nhalo, naero ) technologies. Strong IPR-portfolio with over 60 patent families. Cleantech, biomedical and renewable energy industries, especially photovoltaics, flexible electronics and flat glass Personnel: 56 Headquarter: Sales Offices: Sales Network: Vantaa, Finland Germany (Europe), China, USA 20 sales representatives in Europe, Middle-East, Asia, Oceania and South-America 3
4 Atomic Layer Deposition - Process ALD cycle ALD is a surface controlled, self-saturating gas phase process Precursors react chemically with the surface leading to complete coverage Films are grown one molecule layer at a time by repeating the ALD cycle until the desired thickness is reached Process temperatures range from 20 to 600 C Typical process pressure is around 1 (hpa, mbar, Torr) Glass, polymers, metals and ceramics can be coated 4
5 Atomic Layer Deposition - Benefits The saturating, layer-by-layer growth mode of ALD process is the origin of its main benefits 1) Films deposited by ALD are dense and pinhole free ALD films have very good barrier properties 2) Saturating surface controlled reactions lead to extreme conformality Complex 3D structures can be coated with films of excellent thickness uniformity Photo courtesy of Aalto University, Finland 5
6 Atomic Layer Deposition - Benefits 3) Thickness of films deposited by ALD can be controlled very accurately An ALD process is repeatable by nature Films are smooth and have a sub-nanometer resolution 4) Precise thickness control allows engineering of novel materials Oxides, nitrides, carbides and noble metals can be deposited as pure materials or as tailored layer structures and mixtures 6
7 Atomic Layer Deposition - Benefits ALD is considered to be a slow process for small substrates and thin films More and more a myth An ALD process can be scaled up after the R&D phase ALD is a batch process by nature, >10m 2 per batch An optimized batch size can increase the through-put and lower the cost considerably Film thicknesses can reach several micrometers Substrate holders can be designed case by case for optimum performance Roll-to-Roll processing for mass production is under development TFS 200R 300 m/min Photo courtesy of Kalevala Koru. 7
8 Atomic Layer Deposition - Benefits Examples of coated flat surface areas 100 mm wafer single side 0.01 m mm wafer double side 0.1 m 2 Small R&D tools 0.1 to 0.5 m 2 Minibatch of 10x200mm + walls 1 m 2 TFS 1200 single side + walls 3 m 2 P400A 40 shelves + walls 10 m 2 P800 5xP400A 50 m 2 8
9 Atomic Layer Deposition Applications New applications are best discovered by people new to ALD Applications where ALD can be used: If you want to have a clean surface Coat it! A film with a thickness corresponding well with the roughness of the surface has a smoothing effect Surfaces can be functionalized with certain groups to obtain new properties Hydrophilic and hydrophobic surfaces Antibacterial surfaces 3D structures and porous materials Tubes coated from all sides by ALD OPTICS LETTERS / Vol. 30, No. 14 / July 15, 2005 Wang et al. 9
10 Atomic Layer Deposition Applications ALD films can be utilized as efficient barriers ALD growth mode produces dense, pinhole free films Thin films are less prone to cracking g/m 2 /day Food packaging Medical packaging Electrochromic displays RFID Sensors Thin-film batteries Solar cells OLEDs J. Meyer et al., Adv. Mater. 21, 1845 (2009) Beneq has developed an industrial scale ALD, low cost barrier: nclear WVTR (Water Vapor Transmission Rate) < 10-6 g/m 2 RT 10
11 Atomic Layer Deposition Applications ALD films have been studied on stainless steel: To prevent the diffusion of stainless steel constituents XPS Results of steel components (Ti and N signals omitted from the table) Relative Amounts in at.% (AXIS 165 XPS-Spectrometer, KRATOS Analytical) SS Grade (Surface Finish) Film Material Thickness (nm) T Deposition ( C) T Anneal ( C) Cr Fe Mg Mn S 304 (DB) TiN Al 2 O 3 /TiN 20/20 300/ (DB) TiN Al 2 O 3 /TiN 20/20 300/ L (DB) Al 2 O 3 /TiN 20/20 300/ L (2B) Al 2 O 3 /TiN 20/20 300/
12 Atomic Layer Deposition Applications Steel and metal surfaces are often coated for better Abrasion/corrosion resistance Friction properties Photocatalytic properties Conformal ALD films could enable new applications in geometrically challenging substrates Al 2 O 3 /TiN (20/350 nm) on AISI 304 DB 12
13 Atomic Layer Deposition Applications Taber Abrasion Test Parameters (Taber Abraser 5135) Load (g) 250 Abradant Wheel CS-10 Rotation Speed 60 (rpm) Test Duration 500 (rounds) Interpretation Visual Inspection and Weight Loss per Every 50 Cycles Abrasion Test Results AISI 304 DB Abrasion Test Results AISI 430 DB Weight Loss (mg) Coated 304 Ref. 304 Weight Loss (mg) Coated 430 Ref. 430 Number of Cycles Number of Cycles 13
14 Atomic Layer Deposition Applications 14
15 Atomic Layer Deposition Applications Other application areas include but are not limited to: Surface (both rear and front) passivation of c-si solar cells Na-diffusion barriers on soda lime glass => lower cost substrate Hybrid PVD/ALD solutions to fix pin hole related issues Thin Film PV: Cd-free buffer (Zn(O,S), MgO, In 2 S 3 ) for CIGS Solar mirrors: Barriers and reflectivity enhancements Strengthened glass by filling surface and edge trenches and nanocracks with conformal ALD films Powders and grains for various purposes 295 µs Carrier lifetime 331 µs In c-si solar cells 15
16 Strategy Beneq has a strong business model based on three steps: We identify attractive business opportunities We understand our customer s needs We commercialize coating equipment and technology into industrial solutions Concept verification and pilot production Coating and material development services In-house coating systems and capacity for the customer 16
17 Strategy We are interested in finding partners and customers who Think they have problems which could be solved by using coating technologies Are interested in developing their products further by using nanoscale coatings Are involved in either basic or applied research and wish to explore the potential of new technologies Beneq has strong experience in Large scale industrial coating equipment Process development and R&D equipment for ALD We are always looking for new opportunities to expand ALD into discovering new coating solutions for both micro- and macroscale substrates World record 1,20x1,20 m substrate size The launching of the first roll-to-roll R&D machine 17
18 Kiitos mielenkiinnosta! All rights reserved. Beneq, nclear and nhalo are registered trademarks of Beneq Oy. naero is trademark of Beneq Oy Beneq
New Surface Properties by Atomic Layer Deposition
New Surface Properties by Atomic Layer Deposition Beneq Oy, Finland Dr Tommi Vainio, CTO HANNOVER MESSE MicroTechnology Forum Innovations for Industry April 21, 2009 Turning Innovations into Success 1
More informationFlexible electronics a thin film approach. Joe Pimenoff Beneq
Flexible electronics a thin film approach Joe Pimenoff Beneq Severe semantics Thin films are thin material layers ranging from fractions of a nanometre to several micrometres in thickness. Electronic semiconductor
More informationRoll-to-roll ALD prototype for 500 mm wide webs
Roll-to-roll ALD prototype for 500 mm wide webs Tapani Alasaarela, Mikko Söderlund, Pekka Soininen Beneq Oy, Ensimmäinen Savu, 01510 Vantaa, Finland Roll-to-roll (R2R) atomic layer deposition (ALD) technology
More informationContinuous and R2R ALD for Coating of Polymer Webs
Continuous and R2R ALD for Coating of Polymer Webs AIMCAL 2011 Web Coating Conference Dr. Mikko Söderlund Application Manager Cost of ownership [ /m 2 ] R2R ALD a paradigm change Large-area (batch) ALD
More informationExtending product lifetime with ALD moisture barrier
Whitepaper Extending product lifetime with ALD moisture barrier 01 executive summary Atomic Layer Deposition (ALD) is a thin film technology that enables new and highly competitive products. Typical applications
More informationWŝŽŶĞĞƌŝŶŐ > ĞdžƉĞƌŝĞŶĐĞ ƐŝŶĐĞ ϭϵϳϰ WŝĐŽƐƵŶ ^he > Ρ WͲƐĞƌŝĞƐ > ƐLJƐƚĞŵƐ ƌŝěőŝŷő ƚśğ ŐĂƉ ďğƚǁğğŷ ƌğɛğăƌđś ĂŶĚ ƉƌŽĚƵĐƟŽŶ d, &hdhz K& d,/e &/>D /^, Z
The ALD Powerhouse Picosun Defining the future of ALD Picosun s history and background date back to the very beginning of the field of atomic layer deposition. ALD was invented in Finland in 1974 by Dr.
More informationNanoscale Barrier Coating on BOPP Packaging Film by ALD Presented by: Dr. Johanna Lahti Senior Research Fellow Tampere University of Technology
Nanoscale Barrier Coating on BPP Packaging Film by ALD Presented by: Dr. Johanna Lahti Senior Research Fellow Tampere University of Technology Co-authors: Kimmo Lahtinen (LUT*), Petri Johansson (TUT),
More informationNanomend Acheivements
NANOMEND METROLOGY FOR ENHANCED NANO-SCALE DETECTION, CLEANING AND REPAIR Enhanced in-line detection, cleaning and repair of nano scale defects in thin films for flexible photovoltaic and food packaging
More informationProgress in Roll-to-Roll Atomic Layer Deposition
Progress in Roll-to-Roll Atomic Layer Deposition Council for Chemical Research Barrier Workshop Arlington, Virginia September 20, 2012 E. Dickey Lotus Applied Technology Outline ALD for barrier films ALD
More informationM. Hasumi, J. Takenezawa, Y. Kanda, T. Nagao and T. Sameshima
Proceedings of 6th Thin Film Materials & Devices Meeting November 2-3, 2009, Kyoto, Japan http://www.tfmd.jp/ Characterization of SiO x /Si Interface Properties by Photo Induced Carrier Microwave Absorption
More informationManipulation and control of spatial ALD layers for flexible devices. Aimcal Memphis 2016; Edward Clerkx
Manipulation and control of spatial ALD layers for flexible devices Meyer Burger Netherlands Equipment manufacturer Functional inkjet printing Based in Eindhoven, the Netherlands Part of world-wide Meyer
More informationAtomic Layer Deposition. ALD process solutions using FlexAL and OpAL
Atomic Layer Deposition process solutions using FlexAL and OpAL Introduction to Self limiting digital growth Atomic Layer Deposition () offers precisely controlled ultra-thin films for advanced applications
More informationAtomic Layer Deposition (ALD)
Atomic Layer Deposition (ALD) ALD provides Uniform, controlled, conformal deposition of oxide, nitride, and metal thin films on a nanometer scale. ALD is a self limiting thin film deposition technique
More informationIMRE/ETPL Flagship Project
IMRE/ETPL Flagship Project Nanoparticulate Barrier Films & Gas Permeation Measurement Techniques for Thin Film Solar & Display Application Problems Senthil Ramadas Institute of Materials Research & Engineering
More informationBarix Multilayers: a Water and Oxygen Barrier for Flexible Organic Electronics. Robert Jan Visser
Barix Multilayers: a Water and Oxygen Barrier for Flexible Organic Electronics Robert Jan Visser Organic Electronics Is the Future of Electronics Organic? MIT Stanford UC Berkeley Nano Forum Vitex Systems,
More informationRoll-to-roll Technology for Transparent High Barrier Films
Roll-to-roll Technology for Transparent High Barrier Films Presented at the AIMCAL Fall Technical Conference, October 19-22, 2008, Myrtle Beach, SC, USA Nicolas Schiller, John Fahlteich, Matthias Fahland,
More informationPhotovoltaics & Solar Thermals. Thin-film equipment. Customized. FHR Anlagenbau GmbH I
Photovoltaics & Solar Thermals Thin-film equipment. Customized. FHR Anlagenbau GmbH I www.fhr.de FHR Anlagenbau GmbH is an innovative enterprise in the branch of vacuum processing and thin-film technologies.
More informationThe next thin-film PV technology we will discuss today is based on CIGS.
ET3034TUx - 5.3 - CIGS PV Technology The next thin-film PV technology we will discuss today is based on CIGS. CIGS stands for copper indium gallium selenide sulfide. The typical CIGS alloys are heterogeneous
More informationHigh Barrier Multi-Layer Parylene Coating
High Barrier Multi-Layer Parylene Coating Technology overview Surface Technolgy 2018 Company Profile Swiss company founded in 1979 Experts in Parylene coating technology Parylene Equipment Export rate
More informationAbout Cambridge NanoTech Atomic Layer Deposition (ALD) Selected Applications Manufacturing Considerations ALD Reactors Summary
About Cambridge NanoTech Atomic Layer Deposition (ALD) Selected Applications Manufacturing Considerations ALD Reactors Summary Founded in 2003 by Dr. Jill Becker Located in Cambridge, MA Grew directly
More informationALD and CVD of Copper-Based Metallization for. Microelectronic Fabrication. Department of Chemistry and Chemical Biology
ALD and CVD of Copper-Based Metallization for Microelectronic Fabrication Yeung Au, Youbo Lin, Hoon Kim, Zhengwen Li, and Roy G. Gordon Department of Chemistry and Chemical Biology Harvard University Introduction
More informationLow temperature deposition of thin passivation layers by plasma ALD
1 Low temperature deposition of thin passivation layers by plasma ALD Bernd Gruska, SENTECH Instruments GmbH, Germany 1. SENTECH in brief 2. Low temperature deposition processes 3. SENTECH SI ALD LL System
More informationRoll-to-Roll ALD Deposition of Al 2 O 3 Barrier Layers on PET
Roll-to-Roll ALD Deposition of Al 2 O 3 Barrier Layers on PET W. A. Barrow and E. R. Dickey Lotus Applied Technology AIMCAL Fall Technical Conference 2009 Amelia Island Plantation, Florida 20-Oct-2009
More informationFRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST OPTICAL COATINGS
FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST OPTICAL COATINGS OPTICAL FUNCTIONAL COATINGS AT THE FRAUNHOFER IST The development of optical functional films and the related coating processes
More informationSamuel Graham. Acknowledgements
Development of Barrier Films for Packaging Flexible Electronics Samuel Graham Woodruff School of Mechanical Engineering School of Materials Science and Engineering Center for Organic Photonics and Electronics
More informationImprovement of gas barrier properties by combination of polymer film and gas barrier layer
Improvement of gas barrier properties by combination of polymer film and gas barrier Y. Tsumagari, H. Murakami, K. Iseki and S. Yokoyama Toyobo Co., LTD. RESEARCH CENTER, - Katata 2-chome, Otsu, Shiga,
More informationInnovative Laser Processing Technologies
Innovative Laser Processing Technologies Reinhard Ferstl Director Sales & Marketing EMEA / Asia Corning Laser Technologies September 21, 2016 2016 Corning Incorporated Corning Market Segments and Additional
More informationVacuum Deposition of High Performance Gas Barrier Materials
Vacuum Deposition of High Performance Gas Barrier Materials H. Suttle, A. J. Topping, & H. E. Assender Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH ABSTRACT High performance
More informationThe Effects of Defects on the Moisture-Barrier Performance of Clear Coatings on Polymer Substrates.
AIMCAL, CHARLESTON, SC, 2013 The Effects of Defects on the Moisture-Barrier Performance of Clear Coatings on Polymer Substrates. The National Centre for Printed Electronics ALF part SMITH of Centre for
More informationInline Sputtering System for Heterojunction Cells
GENERIS PVD Inline Sputtering System for Heterojunction Cells GENERIS PVD Inline Sputter System for ITO and Ag Deposition on Heterojunction Solar Cells Sputtering Technology at a Glance has delivered far
More informationMATERIALS. Silicon Wafers... J 04 J 01. MATERIALS / Inorganics & thin films guide
J MATERIALS SUBSTRATES Silicon Wafers... J 04 J J 01 MATERIALS SUBSTRATES NEYCO has a complete range of crystal substrates for a wide variety of applications, including Semiconductor, Biotechnology, Nanotechnology,
More informationTFS PRODUCTION SOLUTIONS. TFS Production Solutions. For thin-film solar modules
TFS PRODUCTION SOLUTIONS TFS Production Solutions For thin-film solar modules 2 TFS PRODUCTION SOLUTIONS MANZ AG 3 TFS PRODUCTION SOLUTIONS MANZ AG GERMAN ENGINEERING INTERNATIONALLY STAGED GLOBAL REFERENCES
More informationFlorock Seamless Flooring Systems
Architectural Specification Florotallic Epoxy and Urethane Flooring System Part 1: General 1.01 System Description A. Roller-applied 100% solids, penetrating pigmented epoxy primer, decorative pigmented
More informationKinetics of low temperature plasma carburizing of austenitic stainless steels
Journal of Materials Processing Technology 168 (2005) 189 194 Kinetics of low temperature plasma carburizing of austenitic stainless steels Y. Sun School of Materials Engineering, Nanyang Technological
More informationPRIMARY GRADES TURNING TURNING / INSERTS / INTRODUCTION TO CARBIDE INSERTS
/ ISERTS / ITRODUCTIO TO CARBIDE ISERTS PRIMARY GRADES group PVD Coated grades Carbide CVD Ceramics CB PCD Uncoated grades Carbide Cermet P M K S H P01 P05 P10 P15 P20 P25 P30 P35 P40 P45 P50 M01 M05 M15
More informationSPUTTERING TECHNOLOGY. for Multiple Applications such as Solar, Display, Semiconductor & 3D-Substrates
SPUTTERING TECHNOLOGY for Multiple Applications such as Solar, Display, Semiconductor & 3D-Substrates 02 Over 20 Years of Know-how in Physical Vapor Deposition Sputtering PECVD Evaporation SINGULUS TECHNOLOGIES
More informationAn advantage of thin-film silicon solar cells is that they can be deposited on glass substrates and flexible substrates.
ET3034TUx - 5.2.1 - Thin film silicon PV technology 1 Last week we have discussed the dominant PV technology in the current market, the PV technology based on c-si wafers. Now we will discuss a different
More informationLayer Thickness Analysis of Thin Metal Coatings with. Bruker Nano Analytics, Berlin, Germany Webinar, June 8 th 2017
Layer Thickness Analysis of Thin Metal Coatings with micro-xrf on SEM Bruker Nano Analytics, Berlin, Germany Webinar, June 8 th 2017 09.06.2017 Presenters Stephan Boehm Product Manager Micro-XRF/SEM Bruker
More informationCommercialization of Nanotechnology
Commercialization of Nanotechnology Runar Törnqvist UMK Center of New Materials, Aalto University 8.11.2010 e-mail: runar.tornqvist@tkk.fi 8.11.2010/rt 1 My background 1977, M.Sc. (Tech), Department of
More informationUltra High Barrier Coatings by PECVD
Society of Vacuum Coaters 2014 Technical Conference Presentation Ultra High Barrier Coatings by PECVD John Madocks & Phong Ngo, General Plasma Inc., 546 E. 25 th Street, Tucson, Arizona, USA Abstract Silicon
More informationLow Temperature Atomic Layer Deposition of Tin Dioxide, SnO\(_2\)
Low Temperature Atomic Layer Deposition of Tin Dioxide, \(_2\) The arvard community has made this article openly available. Please share how this access benefits you. Your story matters Citation eo, Jaeyeong,
More informationRainMaker Humidification System for Precise Delivery of Water Vapor into Atmospheric and Vacuum Applications
RainMaker Humidification System for Precise Delivery of Water Vapor into Atmospheric and Vacuum Applications By Jeffrey Spiegelman Water vapor has multiple applications across industries including semiconductor,
More informationTFS PRODUCTION SOLUTIONS. TFS Production Solutions. For thin-film solar modules
TFS PRODUCTION SOLUTIONS TFS Production Solutions For thin-film solar modules 2 TFS PRODUCTION SOLUTIONS MANZ AG 3 TFS PRODUCTION SOLUTIONS MANZ AG GERMAN ENGINEERING INTERNATIONALLY STAGED GLOBAL REFERENCES
More informationITO SPUTTER COATED FILMS FOR TOUCH PANEL APPLICATIONS USING ROTARY SINTERED CERAMIC ITO TARGETS: WHAT CAN BE LEARNED FROM GLASS COATING?
ITO SPUTTER COATED FILMS FOR TOUCH PANEL APPLICATIONS USING ROTARY SINTERED CERAMIC ITO TARGETS: WHAT CAN BE LEARNED FROM GLASS COATING? Paul Lippens AIMCAL Web coating conference 2012 Outline Introduction
More informationA novel aerosol based wet coating technology called nfog and its applications
A novel aerosol based wet coating technology called nfog and its applications Beneq launches nfog wet coating technology Beneq is pleased to announce the launch of its new atmospheric wet coating technology
More informationFabrication Process. Crystal Growth Doping Deposition Patterning Lithography Oxidation Ion Implementation CONCORDIA VLSI DESIGN LAB
Fabrication Process Crystal Growth Doping Deposition Patterning Lithography Oxidation Ion Implementation 1 Fabrication- CMOS Process Starting Material Preparation 1. Produce Metallurgical Grade Silicon
More informationPulsed Laser Deposition of Epitaxial Titanium Nitride on Magnesium Oxide substrate
Pulsed Laser Deposition of Epitaxial Titanium Nitride on Magnesium Oxide substrate By, Preetam ANBUKARASU UTRIP 2012 (1 st Crew) Under the Guidance of, Prof. Tetsuya HASEGAWA, Solid State Chemistry Lab,
More informationComparison of PV Efficiency Using Different Types of Steam for Wet Thermal Oxidation
Comparison of PV Efficiency Using Different Types of Steam for Wet Thermal Oxidation Jeffrey Spiegelman 1 Jan Benick 2 1 RASIRC 2 Fraunhofer Institute for Solar Energy Systems (ISE) PRINT this article
More informationNanotechnology. from small dimensions to big business Thomas Liljenberg, Olof Hjortstam, Silvia Volponi
Nanotechnology from small dimensions to big business Thomas Liljenberg, Olof Hjortstam, Silvia Volponi Nanotechnology. It is difficult to overstate the potential of this newcomer to the technology world,
More informationFlorock Seamless Flooring Systems
Architectural Specification Florotallic Epoxy and Urethane Flooring System Part 1: General 1.01 System Description A. Roller-applied 100% solids, penetrating epoxy primer, decorative pigmented epoxy coatings
More informationMold Design. 12. Mold Materials. Bong-Kee Lee School of Mechanical Engineering Chonnam National University
12. Mold Materials Bong-Kee Lee Chonnam National University Mold Materials easy toolmaking good performance during production good machining properties ease of hear treatment where hardening is required
More informationENCAPSULATION OF ORGANIC LIGHT EMITTING DIODES
ENCAPSULATION OF ORGANIC LIGHT EMITTING DIODES Bhadri Visweswaran Sigurd Wagner, James Sturm, Electrical Engineering, Princeton University, NJ Siddharth Harikrishna Mohan, Prashant Mandlik, Jeff Silvernail,
More informationENCAPSULATION BARRIER LAYERS
ENCAPSULATION BARRIER LAYERS PUBLICATION REVIEW ON SAVANNAH & FIJI 07.20.2015 1 Humidity Barriers * WVTR: Water Vapor Transmission Rate [g/m 2 /day] Food packaging Advanced Barriers TradiPonal Barriers
More informationUltrabarriers by Atomic Layer Deposition. Steven M. George Depts. of Chemistry & Chemical Engineering University of Colorado, Boulder, Colorado
Ultrabarriers by Atomic Layer Deposition Steven M. George Depts. of Chemistry & Chemical Engineering University of Colorado, Boulder, Colorado Outline 1. 2 O 3 ALD barriers on PEN & PET 2. Critical tensile
More informationDespite Hype, Atomic Layer Deposition Shows Promise
Research Brief Despite Hype, Atomic Layer Deposition Shows Promise Abstract: Surrounded by hype, ALD is emerging as a promising new deposition technology for both dielectric and metal films, with applications
More informationHigh Rate Deposition of Reactive Oxide Coatings by New Plasma Enhanced Chemical Vapor Deposition Source Technology
General Plasma, Inc. 546 East 25th Street Tucson, Arizona 85713 tel. 520-882-5100 fax. 520-882-5165 High Rate Deposition of Reactive Oxide Coatings by New Plasma Enhanced Chemical Vapor Deposition Source
More informationDeposited by Sputtering of Sn and SnO 2
Journal of the Korean Ceramic Society Vol. 49, No. 5, pp. 448~453, 2012. http://dx.doi.org/10.4191/kcers.2012.49.5.448 Comparative Study of Nitrogen Incorporated SnO 2 Deposited by Sputtering of Sn and
More informationDevelopment of Hot Rolled Thin Steel and High Strength PosMAC Steel for Steel Structures
Development of Hot Rolled Thin Steel and High Strength PosMAC Steel for Steel Structures Part 1. PO Martensite Steel Part 2. PosMAC Martensite Steel 2017. 11. 27 Kyong Su Park, Jaeyong Chae, Chul Min Bae
More informationSchottky Tunnel Contacts for Efficient Coupling of Photovoltaics and Catalysts
Schottky Tunnel Contacts for Efficient Coupling of Photovoltaics and Catalysts Christopher E. D. Chidsey Department of Chemistry Stanford University Collaborators: Paul C. McIntyre, Y.W. Chen, J.D. Prange,
More informationHigh strain point glass substrate for photovoltaic solar cell
Empowering solar efficiency Module material PV200 High strain point glass substrate for photovoltaic solar cell Much less deformation in the heating process than soda-lime glass. Small variations in thermal
More informationINTRODUCTION. Think HSS
INTRODUCTION Think HSS SUMMARY METALLURGY 2 Excellent strength 3 A super sharp edge 4 Safe and reliable tools Alloy elements 6 The influence of alloy elements 7 Standard compositions of HSS 8 The HSS-PM
More informationMaterial development for emerging energy technologies
Material development for emerging energy technologies Need and Approach Need Sustainable power generation is needed for the mitigation of global warming caused by greenhouse gas emissions. Advanced materials
More informationApplication of ultra-thin aluminum oxide etch mask made by atomic layer deposition technique
IOP Publishing Journal of Physics: Conference Series 61 (2007) 369 373 doi:10.1088/1742-6596/61/1/074 International Conference on Nanoscience and Technology (ICN&T 2006) Application of ultra-thin aluminum
More informationTED PELLA, INC. Microscopy Products for Science and Industry
PELCO SILICON NITRIDE, SILICON DIOXIDE, BLANK SILICON SUBSTRATES & APERTURES FOR TEM Clean, Debris-free with Exact 3mm TEM Frame and EasyGrip Edges PELCO Silicon Nitride Support Films for TEM Hydrophilic
More informationChemical Vapour Deposition: CVD Reference: Jaeger Chapter 6 & Ruska: Chapter 8 CVD - Chemical Vapour Deposition React chemicals to create a thin film
Chemical Vapour Deposition: CVD Reference: Jaeger Chapter 6 & Ruska: Chapter 8 CVD - Chemical Vapour Deposition React chemicals to create a thin film layer at the surface Typically gas phase reactions
More informationJournal of Chemical and Pharmaceutical Research, 2017, 9(1): Research Article
Available online www.jocpr.com Journal of Chemical and Pharmaceutical Research, 2017, 9(1):163-167 Research Article ISSN : 0975-7384 CODEN(USA) : JCPRC5 Synthesis and Characterization of Carbon Nano Spheres
More informationPrecursors with Metal-Nitrogen Bonds for ALD of Metals, Nitrides and Oxides
Precursors with Metal-Nitrogen Bonds for ALD of Metals, Nitrides and Oxides Abstract Roy Gordon Gordon@chemistry.harvard.edu, Cambridge, MA To achieve ALD s unique characteristics, ALD precursors must
More informationSurface Layer Characterization of Atomized Magnesium for use in Powder Metallurgy Products Paul Burke and Georges J. Kipouros
Surface Layer Characterization of Atomized Magnesium for use in Powder Metallurgy Products Paul Burke and Georges J. Kipouros Materials Engineering Program Process Engineering and Applied Science Dalhousie
More informationVAPORIZER PRODUCTS. Product Guide. MSP Corporation Rice Creek Parkway, Suite 300. Shoreview, Minnesota 55126, U.S.A.
Product Guide VAPORIZER PRODUCTS MSP Corporation 5910 Rice Creek Parkway, Suite 300 Shoreview, Minnesota 55126, U.S.A. Phone: 651.287.8100 Fax: 651.287.8140 sales@mspcorp.com www.mspcorp.com ABOUT MSP
More informationActivities in Plasma Process Technology at SENTECH Instruments GmbH, Berlin. Dr. Frank Schmidt
Activities in Plasma Process Technology at SENTECH Instruments GmbH, Berlin Dr. Frank Schmidt The Company Company Private company, founded 1990 80 employees ISO 9001 Location Science & Technology Park,
More informationWAFER CARRIERS FOR MOCVD
WAFER CARRIERS FOR MOCVD HIGH PURITY COATED GRAPHITE PRODUCT MERSEN in the Semiconductor industry: Beyond the development of the silicon semiconductor industry, the compound semiconductor has opened a
More informationDEVELOPMENT OF HIGH EFFICIENCY FLEXIBLE CdTe SOLAR CELLS
DEVELOPMENT OF HIGH EFFICIENCY FLEXIBLE CdTe SOLAR CELLS A.Romeo, M. Arnold, D.L. Bätzner, H. Zogg and A.N. Tiwari* Thin Films Physics Group, Laboratory for Solid State Physics, Swiss Federal Institute
More informationand cost implications of corrosion, casting a spot light on the need for innovation in pipe coating materials and processes.
A ccording to the Energy Information Administration s International Energy Outlook for 2006, world oil demand is expected to grow from 80 million barrels per day in 2003 to 98 million barrels per day in
More informationAMORPHOUS SILICON DIOXIDE LAYER FOR HIGH EFFICIENCY CRYSTALLINE SOLAR CELLS
International Journal of Nanotechnology and Application (IJNA) ISSN(P): 2277-4777; ISSN(E): 2278-9391 Vol. 6, Issue 5, Dec 2016, 1-6 TJPRC Pvt. Ltd. AMORPHOUS SILICON DIOXIDE LAYER FOR HIGH EFFICIENCY
More informationPhotovoltaics. Thin film equipment from Oxford Instruments. The Business of Science
Photovoltaics Thin film equipment from Oxford Instruments The Business of Science Photovoltaics Plasmalab System100Pro and Plasmalab System133Pro Flexible systems for front end PV research With over 20
More informationGlass Enabling Future Touch Technology. Zachi Baharav June 4, 2012
Glass Enabling Future Touch Technology Zachi Baharav June 4, 2012 Glass Enabling Future Touch Technology Agenda Corning Overview/A Day Made of Glass Corning Display Technologies, Telecomm & Corning Gorilla
More informationALD of Copper and Copper Oxide Thin Films for Applications in Metallization Systems of ULSI Devices
ALD of Copper and Copper Oxide Thin Films for Applications in Metallization Systems of ULSI Devices a, Steffen Oswald b, Nina Roth c, Heinrich Lang c, Stefan E. Schulz a,d, and Thomas Gessner a,d a Center
More informationMake sure the exam paper has 9 pages total (including cover page)
UNIVERSITY OF CALIFORNIA College of Engineering Department of Electrical Engineering and Computer Sciences Fall 2010 EE143 Midterm Exam #2 Family Name First name SID Signature Solution Make sure the exam
More informationGENERIS PVD. Inline Sputtering System for Heterojunction Solar Cells
GENERIS PVD Inline Sputtering System for Heterojunction Solar Cells GENERIS PVD Inline Sputtering System for Heterojunction Solar Cells Sputtering Competence has delivered far more than 8000 vacuum sputtering
More informationChapter 5: Atom and Ion Movements in Materials
Slide 1 Chapter 5: Atom and Ion Movements in Materials 5-1 Slide 2 Learning Objectives 1. Applications of diffusion 2. Stability of atoms and ions 3. Mechanisms for diffusion 4. Activation energy for diffusion
More information4-in-1 Nano Machine & Technology
4-in-1 Nano Machine & Technology Machine combines 1) CVD, 2) PVD, 3) ion saturation and 4) ion-treatment processes in one (1) production cycle in one machine that produces functional coatings used to harden
More informationINVESTIGATION OF HVOF THERMAL SPRAYED MICRO B4C, MICRO- 1%, 2%, 3% NANO B4C COATINGS ON DRY SLIDING WEAR PERFORMANCE OF 410 GRADE STEEL
INVESTIGATION OF HVOF THERMAL SPRAYED MICRO B4C, MICRO- 1%, 2%, 3% NANO B4C COATINGS ON DRY SLIDING WEAR PERFORMANCE OF 410 GRADE STEEL Girisha K. G. 1, Anil K. C. 2, Akash 1 and K. V. Sreenivas Rao 1
More informationHigh Rate low pressure PECVD for barrier and optical coatings
High Rate low pressure PECVD for barrier and optical coatings, Matthias Fahland, John Fahlteich, Björn Meyer, Steffen Straach, Nicolas Schiller Outline Introduction PECVD New developments magpecvd arcpecv
More informationCrystalline Silicon Solar Cells With Two Different Metals. Toshiyuki Sameshima*, Kazuya Kogure, and Masahiko Hasumi
Crystalline Silicon Solar Cells With Two Different Metals Toshiyuki Sameshima*, Kazuya Kogure, and Masahiko Hasumi Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588,
More information1 MARCH 2017 FILM DEPOSITION NANOTECHNOLOGY
1 MARCH 2017 FILM DEPOSITION NANOTECHNOLOGY PRESENTATION Pedro C. Feijoo E-mail: PedroCarlos.Feijoo@uab.cat FABRICATION TECHNOLOGIES FOR NANOELECTRONIC DEVICES. PEDRO C. FEIJOO 2 FILM GROWTH Chemical vapor
More informationDESIGNED STAINLESS STEEL DSP SHEET. Titanium Color Sheet Nano Color Sheet Multi-Pattern Color Sheet
DESIGNED STAINLESS STEEL DSP SHEET Titanium Color Sheet Nano Color Sheet Multi-Pattern Color Sheet TITANIUM COLOR SHEET DESIGNED STAINLESS STEEL Titanium Color Sheet Nano Color Sheet Multi-Pattern Color
More informationScuffing Measurement Methodology and Improved Film Coating Systems
OPADRY II Application Data High Performance Film Coating System Scuffing Measurement Methodology and Improved Film Coating Systems PURPOSE Scuffing is a term used to describe coated tablet defects consisting
More informationWater Vapor and Carbon Nanotubes
Water Vapor and Carbon Nanotubes Published technical papers on carbon nanotube fabrication point out the need to improve the growth rate and uniformity of Carbon Nanotubes. CNT faces major hurdles in its
More information3D Structured collector foils Decrease the filling time and improve the cell capacity
EUROPEAN LI-ION BATTERY ADVANCED MANUFACTURING FOR ELECTRIC VEHICLES 3D Structured collector foils Decrease the filling time and improve the cell capacity 3D Structured collector foils Decrease the filling
More informationVANADIS 6 SuperClean
T O O L S T E E L F A C T S SuperClean High performance powder metallurgical cold work tool steel Great Tooling Starts Here! Cover photo: Powder pressing punch of. Excellent results have been obtained
More informationIBC Technology Overview: NCMS - SET
IBC Technology Overview: NCMS - SET Solomon Berman, President / CEO Elgin R Miller, Principal Materials Engineer October 10, 2017 IBC Materials & Technologies 902 Hendricks Drive, Lebanon, IN 46052 www.ibcmaterials.com
More informationFlorock Seamless Flooring Systems
Architectural Specification Floropoxy/Florospartic 5 Self-Leveling Epoxy/Polyaspartic Flooring System Part 1: General 1.01 System Description A. Roller applied 100% solids, penetrating pigmented epoxy
More informationJ. B. Bates, Xiaohua Yu, C. F. Luck, and N. J. Dudney
C/ORNL 90 0038 CRADA Final Report for CRADA Number ORNL90-0038 DEVELOPMENT OF A LITHIUM MICROBATTERY PACKAGING TECHNOLOGY ERKTSOl J. B. Bates, Xiaohua Yu, C. F. Luck, and N. J. Dudney Oak Ridge National
More informationSolarWindow. Innovating Alternative and Renewable Energy Solutions. Corporate» Technology» Media» Investors» Contact
Innovating Alternative and Renewable Energy Solutions A A A Corporate» Technology» Media» Investors» Contact SolarWindow New Energy Technologies is developing the first-of-its kind SolarWindow technology,
More informationNicely Packaged and Well Protected. Innovative Films with a Gas Barrier
Nicely Packaged and Well Protected Innovative Films with a Gas Barrier Polysilazanes for Individual Film Coatings Packaging counts. A product or person that looks good simply has better chances of success.
More informationIn-situ Monitoring of Atomic Layer Deposition Processes
Faculty of Electrical and Computer Engineering - Institute of Semiconductors and Microsystems NanoZEIT seminar @ SEMICON 2011 Deposition Processes M. Knaut*, M. Junige, M. Geidel, M. Albert, and J. W.
More informationPlatypus Gold Coated Substrates. Bringing Science to the Surface
Platypus Gold Coated Substrates Bringing Science to the Surface Overview Gold Coated Substrates - Gold Coating Introduction - Glossary of Terms - Gold Coating Methods - Critical Features Platypus Gold
More informationALD Atomic Layer Deposition
ALD Atomic Layer Deposition Christophe Vallée Laboratoire des Technologies de la Microélectronique (LTM) Univ. Grenoble Alpes, Lab. LTM (CEA-LETI/MINATEC) - Grenoble France christophe.vallee@cea.fr 1.
More informationInterface quality and thermal stability of laser-deposited metal MgO multilayers
Interface quality and thermal stability of laser-deposited metal MgO multilayers Christian Fuhse, Hans-Ulrich Krebs, Satish Vitta, and Göran A. Johansson Metal MgO multilayers metal of Fe, Ni 80 Nb 20,
More informationAdvances in Contact Cleaning for Yield Improvement
Advances in Contact Cleaning for Yield Improvement Sheila Hamilton Teknek Ltd Inchinnan Business Park Scotland, PA4 9RT United Kingdom Abstract There is an increasing trend towards coatings containing
More information