Formula Density Z-Ratio Material Name Ca Calcium CaF Calcium Fluoride CaO *1.000 Calcium Oxide CaO-SiO *1.

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1 Material Parameters In the table below, an * is used to indicate that the material s Z Factor is not known. A method of determining Z Factor empirically follows the materials table. Formula Density Z-Ratio Material Name Ag Silver AgBr Silver Bromide AgCl Silver Chloride Al Aluminum Al2O Aluminum Oxide Al4C *1.000 Aluminum Carbide AlF *1.000 Aluminum Fluoride AlN *1.000 Aluminum Nitride AlSb Aluminum Antimonide As Arsenic As2Se *1.000 Arsenic Selenide Au Gold B Boron B2O *1.000 Boron Oxide B4C *1.000 Boron Carbide BN *1.000 Boron Nitride Ba Barium BaF Barium Fluoride BaN2O Barium Nitrate BaO *1.000 Barium Oxide BaTiO Barium Titanate (Tetr) BaTiO Barium Titanate (Cubic) Be Beryllium BeF *1.000 Beryllium Fluoride BeO *1.000 Beryllium Oxide Bi Bismuth Bi2O *1.000 Bismuth Oxide Bi2S *1.000 Bismuth Trisuiphide Bi2Se *1.000 Bismuth Selenide Bi2Te *1.000 Bismuth Telluride BiF *1.000 Bismuth Fluoride C Carbon (Graphite) C Carbon (Diamond) C8H *1.000 Parlyene (Union Carbide)

2 Ca Calcium CaF Calcium Fluoride CaO *1.000 Calcium Oxide CaO-SiO *1.000 Calcium Silicate (3) CaSO Calcium Sulfate CaTiO *10~ Calcium Titanate CaWO *1.000 Calcium Tungstate Cd Cadmium CdF *1.000 Cadmium Fluoride CdO *1.000 Cadmium Oxide CdS Cadmium Sulfide CdSe *1.000 Cadmium Selenide, CdTe Cadmium Telluride Ce *1.000 Cerium CeF *1.000 Cerium (III) Fluoride CeO *1.000 Cerium (IV) Dioxide Co Cobalt CoO Cobalt Oxide Cr Chromium Cr2O *1.000 Chromium (III) Oxide Cr3C *1.000 Chromium Carbide CrB *1.000 Chromium Boride Cs *1.000 Cesium Cs2SO Cesium Sulfate CsBr Cesium Bromide CsCl Cesium Chloride CsI Cesium Iodide Cu Copper Cu2O *1.000 Copper Oxide Cu2S Copper (I) Sulfide (Alpha) Cu2S Copper (I) Sulfide (Beta) CuS Copper (II) Sulfide Dy Dysprosium Dy2O *1.000 Dysprosium Oxide Er Erbium Er2O *1.000 Erbium Oxide Eu *1.000 Europium EuF *1.000 Europium Fluoride

3 Fe Iron Fe2O *1.000 Iron Oxide FeO *1.000 Iron Oxide FeS *1.000 Iron Sulphide Ga Gallium Ga2O *1.000 Gallium Oxide (B) GaAs Gallium Arsenide GaN *1.000 Gallium Nitride GaP *1.000 Gallium Phosphide GaSb *1.000 Gallium Antimonide Gd Gadolinium Gd2O *1.000 Gadolinium Oxide Ge Germanium Ge3N *1.000 Germanium Nitride GeO *1.000 Germanium Oxide GeTe *1.000 Germanium Telluride Hf Hafnium HfB *1.000 Hafnium Boride, HfC *1.000 Hafnium Carbide HfN *1.000 Hafnium Nitride HfO *1.000 Hafnium Oxide HfSi *1.000 Hafnium Silicide Hg Mercury Ho Holminum Ho2O *1.000 Holminum Oxide In Indium In2O *1.000 Indium Sesquioxide In2Se *1.000 Indium Selenide In2Te *1.000 Indium Telluride InAs *1.000 Indium Arsenide InP *1.000 Indium Phosphide InSb Indium Antimonide Ir Iridium K Potassium KBr Potassium Bromide KCl Potassium Chloride KF *1.000 Potassium Fluoride KI Potassium Iodide

4 La Lanthanum La2O *1.000 Lanthanum Oxide LaB *1.000 Lanthanum Boride LaF *1.000 Lanthanum Fluoride Li Lithium LiBr Lithium Bromide LiF Lithium Fluoride LiNbO Lithium Niobate Lu *1.000 Lutetium Mg Magnesium MgAl2O *1.000 Magnesium Aluminate MgAl2O *1.000 Spinel MgF Magnesium Fluoride MgO Magnesium Oxide Mn Manganese MnO Manganese Oxide MnS Manganese (II) Sulfide Mo Molybdenum Mo2C *1.000 Molybdenum Carbide MoB *1.000 Molybdenum Boride MoO *1.000 Molybdenum Trioxdide MoS *1.000 Molybdenum Disulfide Na Sodium Na3AlF *1.000 Cryolite Na5AL3F *1.000 Chiolite NaBr *1.000 Sodium Bromide NaCl Sodium Chloride NaClO Sodium Chlorate NaF Sodium Fluoride NaNO Sodium Nitrate Nb Niobium (Columbium) Nb2O *1.000 Niobium Trioxide Nb2O *1.000 Niobium (V) Oxide NbB *1.000 Niobium Boride NbC *1.000 Niobium Carbide NbN *1.000 Niobium Nitride Nd *1.000 Neodynium Nd2O *1.000 Neodynium Oxide NdF *1.000 Neodynium Fluoride

5 Ni Nickel NiCr *1.000 Nichrome NiCrFe *10~ Inconel NiFe *1.000 Permalloy NiFeMo *10~ Supermalloy NiO *1.000 Nickel Oxide P3N *1.000 Phosphorus Nitride Pb Lead PbCl *1.000 Lead Chloride PbF Lead Fluoride PbO *1.000 Lead Oxide PbS Lead Sulfide PbSe *1.000 Lead Selenide PbSnO *1.000 Lead Stannate PbTe Lead Telluride Pd Palladium PdO *1.000 Palladium Oxide Po *1.000 Polonium Pr *1.000 Praseodymium Pr2O *1.000 Praseodymium Oxide Pt Platinum PtO *1.000 Platinum Oxide Ra *1.000 Radium Rb Rubidium Rbl *1.000 Rubidium Iodide Re Rhenium Rh Rhodium Ru Ruthenium S Sulphur Sb Antimony Sb2O *1.000 Antimony Trioxide Sb2S *1.000 Antimony Trisulfide Sc Scandium Sc2O *1.000 Scandium Oxide Se Selenium Si Silicon Si3N *1000 Silicon Nitride SiC *1.000 Silicon Carbide SiO Silicon (II) Oxide SiO Silicon Dioxide

6 Sm Samarium Sm2O *1.000 Samarium Oxide Sn Tin SnO *1.000 Tin Oxide SnS *1.000 Tin Sulfide SnSe *1.000 Tin Selenide SnTe *1.000 Tin Telluride Sr *1.000 Strontium SrF Strontium Fluroide SrO Strontium Oxide Ta Tantalum Ta2O Tantalum (V) Oxide TaB *1.000 Tantalum Boride TaC *1.000 Tantalum Carbide TaN *1.000 Tantalum Nitride Tb Terbium Tc *1.000 Technetium Te Tellurium TeO Tellurium Oxide Th Thorium ThF *1.000 Thorium.(IV) Fluoride ThO Thorium Dioxide ThOF *1.000 Thorium Oxyfluoride Ti Titanium Ti2O *1.000 Titanium Sesquioxide TiB *1.000 Titanium Boride TiC *1.000 Titanium Carbide TiN *1.000 Titanium Nitride TiO *1.000 Titanium Oxide TiO Titanium (IV) Oxide Tl Thallium TlBr *1.000 Thallium Bromide TlCl *1.000 Thallium Chloride TlI *1.000 Thallium Iodide (B) U Uranium U3O *1.000 Tri Uranium Octoxide U4O Uranium Oxide UO Uranium Dioxide

7 V Vanadium V2O *1.000 Vanadium Pentoxide VB *1.000 Vanadium Boride VC *1.000 Vanadium Carbide VN *1.000 Vanadium Nitride VO *1.000 Vanadium Dioxide W Tungsten WB *1.000 Tungsten Boride WC Tungsten Carbide WO *1.000 Tungsten Trioxide WS *1.000 Tungsten Disulphide WSi *1.000 Tungsten Suicide Y Yttrium Y2O *1.000 Yttrium Oxide Yb Ytterbium Yb2O *1.000 Ytterbium Oxide Zn Zinc Zn3Sb *1.000 Zinc Antimonide ZnF *1.000 Zinc Fluoride ZnO Zinc Oxide ZnS Zinc Sulfide ZnSe Zinc Selenide ZnTe Zinc Telluride Zr Zirconium ZrB *1.000 Zirconium Boride ZrC Zirconium Carbide ZrN *1.000 Zirconium Nitride ZrO *1.000 Zirconium Oxide Z-Factor is used to match the acoustic properties of the material being deposited to the acoustic properties of the base quartz material of the sensor crystal. Z-Factor = Zq / Zm For example, the acoustic impedance of gold is Z=23.18, so: Gold Z-Factor = 8.83 / =.381 Unfortunately, Z Factor is not readily available for many materials. Z Factor can be calculated empirically using this method: 1. Deposit the material until Crystal Life is near 50%, or near the end of life, whichever is sooner. 2. Place a new substrate adjacent to the used quartz sensor.

8 3. Set QCM Density to the calibrated value; Tooling to 100%. Zero thickness. 4. Deposit approximately 1000 to 5000 Å of material on the substrate. 5. Use a profilometer or interferometer to measure the actual substrate film thickness. 6. Adjust the Z Factor of the instrument until the correct thickness reading is shown. Another alternative is to change crystals frequently. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.