CTR LPCVD SOP Page 1 of 17 Revision

Transcription

1 CTR LPCVD OP Page 1 of 17 CTR LPCVD OP 1 cope 1.1 This OP provides instructions to operate the CTR LPCVD urnaces. 2 Table of Contents 1 cope Table of Contents Reference Documents External Documents Equipment and/or Materials afety General Information urnace Operating Procedures Log On Enable Coral Check urnace tatus Review Current tatus Change Deposition Time Download Recipe ile elect Recipe Load Run Load desired recipe Remove Boat Cover (LTO/PG only) Load Wafers LTO/PG Poly Nitride Replace Boat Cover (LTO/PG only) Initialize Graph Run Recipe Wait for Run Completion Unload Boat Remove Boat Cover (LTO/PG only) Unload Wafers Replace Boat Cover (LTO/PG only) Measure Monitor Wafers Place ystem in tandby Disable Tool in Coral Process Notes Process ummary Revision History igure 1, LTO/PG Loading Diagram igure 2, Poly Loading Diagram... 12

2 CTR LPCVD OP Page 2 of 17 igure 3, Nitride Loading Diagram Table 1, Log In Information... 4 Table 2, Recipe ile Location... 7 Table 3, Process ummary Data Reference Documents 3.1 External Documents MBB Lab User Guide 4 Equipment and/or Materials 4.1 CTR LPCVD urnaces 4.2 Quartzware 4.3 Boat fork 4.4 Monitor wafers Poly: 1000 Å oxide on silicon Others: bare silicon 4.5 iller wafers 5 afety 5.1 ollow all Nanofab safety procedures. 5.2 Ensure all Cooldown cycles are complete before handling any quartzware, wafers, or samples. CAUTION All recipes include the necessary cool down time to ensure the quartzware, wafers, and samples are cool enough to be touched and handled. Do not touch or handle quartzware, wafers, or samples unless the current run is COMPLETE. CAUTION 6 General Information 6.1 Ensure all samples are authorized to be loaded into a furnace.!! WARNING!! No photoresist, kapton tape, metals, glass, or other foreign material are allowed in the furnace. Only quartz, silicon, silicon carbide, silicon dioxide, silicon nitride, and/or Polysilicon are allowed without PRIOR approval of lab staff.!! WARNING!!

3 CTR LPCVD OP Page 3 of Ensure all samples are clean, dry, and particle-free. 6.3 Place quartzware on a quartz plate, silicon carbide cantilever paddle, or a cleanroom wiper Do NOT directly place quartzware on stainless steel. 6.4 Do NOT touch boats or boat covers with your hands Use the boat fork to move boats and boat covers Insert the tines of the fork into the pick-up tubing on the boat or boat cover. 6.5 Before touching a quartz baffle, put on a second pair of clean blue nitrile gloves. 7 urnace Operating Procedures 7.1 Log On rom the CTR host computer, select the Tymplex program If necessary, open the Tymplex program rom the Overview creen, click the Log In button. Overview Tab Log In Button

4 CTR LPCVD OP Page 4 of Type the Username and password (in CAP) for the applicable furnace. Table 1, Log In Information urnace LTO Poly Nitride TEO Username LTO POLY NITRIDE TEO Password LTO POLY NITRIDE TEO Click the Log In button. 7.2 Enable Coral Enable the furnace in Coral. 7.3 Check urnace tatus elect the main tab for the desired furnace elect the Operate subtab. Operate subtab LTO urnace main tab Blue dot Review Current tatus If there is a blue dot next to the tep button, the furnace is on Hold Click the Run button Wait for the current run to finish.

5 CTR LPCVD OP Page 5 of If there is a yellow dot next to the *** Complete *** button, the current recipe has completed. Yellow dot Click the *** Complete *** button Click the * Press to Reset * button If the current recipe is IDLE WITH COMPLETED AMPLE ON BOAT, samples from the previous run have not been removed from the boat If there are no instructions from the previous user, contact that user before removing any samples and monitor wafers.

6 CTR LPCVD OP Page 6 of If there are instructions from the previous user, carefully remove the samples and monitor wafers as noted by that user If the cantilever is in and there is a blue dot next to the Reset button, download and run the VENT AND OUT recipe If the cantilever is out, the furnace is ready for use. 7.4 Change Deposition Time rom the desktop, open the Change tep Time utility Enter/select your Coral ID. Coral ID field elect Recipe ield elect the desired recipe ollowing the prompts, change the deposition time, if needed.

7 CTR LPCVD OP Page 7 of Download Recipe ile To download a new recipe file, select the Download subtab. Download subtab Download ile to Tymkon button Click the Download ile to Tymkon button rom the dialog box, locate and select the correct recipe file. Table 2, Recipe ile Location urnace Path Recipe Type Recipe ile LTO [MainPath]\x LTO\LTO Recipes LTO, 400 C, 300 mtorr LTO Recipes.mdb PG, 400 C, 300 mtorr PG Recipes.mdb PG, 450 C, 200 mtorr NITRIDE [MainPath]\x Nitride\Nitride Recipes LOW TRE TOICHIOMETRIC POLY [MainPath]\x Poly\Poly Recipes DOPED POLY UNDOPED POLY Nitride Recipes.mdb Poly Recipes.mdb [MainPath] = C:\Program iles\tymkontools\userdata

8 CTR LPCVD OP Page 8 of rom the dialog box, click the Begin Download button Wait for the recipe to complete downloading. (ections will change from red to black text.) This text changes from red to black when download is complete. 7.6 elect Recipe elect the Operate subtab.

9 CTR LPCVD OP Page 9 of Click the elect Recipe pull down box. elect Recipe pull down box elect the desired recipe. elect Recipe

10 CTR LPCVD OP Page 10 of Click the elect Recipe button. elect Recipe buton 7.7 Load Run Load desired recipe Ensure the cantilever is out and the most recent run is complete Download the desired recipe file elect the recipe to be run Remove Boat Cover (LTO/PG only) Using the boat fork, carefully lift the cover over the boat and wafers Place the cover in a storage location. NOTE: A convenient location is on the paddle, adjacent to the door baffle Remove the boat fork from the boat Load Wafers Unless otherwise noted, load all wafers with the polished side toward the furnace Load the wafers with the wafer flat up Load one wafer per slot.!! WARNING!! No photoresist, kapton tape, metals, glass, or other foreign material are allowed in the furnace. Only quartz, silicon, silicon carbide, silicon dioxide, silicon nitride, and/or Polysilicon are allowed without PRIOR approval of lab staff.!! WARNING!!

11 CTR LPCVD OP Page 11 of LTO/PG NOTE: Load wafers in every other slot (odd-numbered slots) Load monitor wafers onto the boat in slot 13 (see igure 1, LTO/PG Loading Diagram) Monitor wafers for LTO/PG are bare silicon. ample wafers that are bare silicon may be used as monitors Load sample wafers in slots 3, 5, 7, 9, 11, 15, 17, 19, 21, and/or 23, starting at the center Load filler wafers in slots 1, 25, and all unused slots. Ensure there is a sample, monitor, or filler wafer in every other slot (13 total wafers). Polished ide Quartz Baffle M Quartz Baffle DOOR = iller wafer M = Monitor wafer = ample Wafer igure 1, LTO/PG Loading Diagram Poly Load a monitor wafer onto the boat in slot 17 (see igure 2, Poly Loading Diagram) Monitor wafers for Poly are 1000Å oxide on silicon Load sample wafers in slots and/or 18-22, starting at the center Load filler wafers in slots 1-11, 23-25, and all unused slots.

12 CTR LPCVD OP Page 12 of 17 Polished ide Quartz Baffle M Quartz Baffle DOOR = iller wafer M = Monitor wafer = ample Wafer igure 2, Poly Loading Diagram Nitride Load monitor wafers onto the boat in slot 13 (see igure 3, Nitride Loading Diagram) Monitor wafers for Nitride are bare silicon. ample wafers that are bare silicon may be used as monitors Load sample wafers in slots 6 12 and/or 14 20, starting at the center Load filler wafers in slots 1-4, 22-25, and all unused slots. Polished ide Quartz Baffle M Quartz Baffle DOOR = iller wafer M = Monitor wafer = ample Wafer igure 3, Nitride Loading Diagram Replace Boat Cover (LTO/PG only) Using the boat fork, carefully place the cover over the boat and wafers Remove the boat fork from the boat.

13 CTR LPCVD OP Page 13 of Initialize Graph elect the etup subtab. etup subtab Create New Datalog ile button Enable Datalog check box Ensure the Enable Datalog check box is selected Press the Create New Datalog ile button Click OK at the prompt.

14 CTR LPCVD OP Page 14 of Run Recipe rom the Operate subtab, click the Run button. Run button Wait for Run Completion Wait for the cycle to complete The boat will be out and the *** Complete *** button will be seen Click the *** Complete *** button. Complete button

15 CTR LPCVD OP Page 15 of Click the * Press to Reset * button. Press to Reset button Unload Boat Ensure the run has completed. CAUTION All recipes include the necessary cool down time to ensure the quartzware, wafers, and samples are cool enough to be touched and handled. Do not touch or handle quartzware, wafers, or samples unless the current run is COMPLETE. CAUTION Remove Boat Cover (LTO/PG only) Using the boat fork, carefully lift the cover over the boat and wafers Place the cover in a storage location. NOTE: A convenient location is on the paddle, adjacent to the door baffle Remove the boat fork from the boat Unload Wafers Remove the monitor wafers and samples from the boat Replace Boat Cover (LTO/PG only) Using the boat fork, carefully place the cover over the boat and wafers Remove the boat fork from the boat.

16 CTR LPCVD OP Page 16 of Measure Monitor Wafers Measure the thickness at 5 sites on each monitor wafer Place ystem in tandby elect the VACUUM IDLE recipe Run the recipe. NOTE: 7.8 Disable Tool in Coral The cantilever will go in, the system will pump down, and go on hold Disable the furnace in Coral Record the thickness measurements. 8 Process Notes 8.1 Process ummary Table 3, Process ummary Data lists the basic information for the various processes. urnace Recipe Temp ( C) Table 3, Process ummary Data Pressure (mtorr) NH3 (sccm) DC (sccm) ih4 (sccm) 6%PH3 in ih4 (sccm) O2 (sccm) Approximate Deposition Rate ( Å / min ) LTO/PG LTO, 400C, 300MT LTO/PG PG, 400C, 300MT LTO/PG PG, 450C, 200MT Poly DOPED POLY Poly UNDOPED POLY Nitride LOW TRE Nitride TOICHIOMETRIC

17 CTR LPCVD OP Page 17 of 17 9 Revision History Rev Date Originator Description of Changes 2 13 Jan 2017 T. Olsen Add General Information section. Implement use of boat fork and new LTO boat cover, including new loading diagram for LTO/PG. Add Table 2, Recipe ile Location. Update Table 3, Process ummary Data (recipes, gas flows, and dep rates) Aug 2015 T. Olsen Original Release.