Quartz Glass for Optics

Transcription

1 ShinEtsu Quartz Products Co., Ltd. Quartz Glass for Optics Quartz glass is especially superior in its optical characteristics, such as its light transmission characteristics. Also, since quartz glass is of high purity, at the same time it also provides high heatresistance and radiationresistance characteristics. Thus, quartz glass is an extremely pure optical material. On the solid foundation of its advanced research and development system, ShinEtsu Quartz Products Co., Ltd. manufactures and markets the "SUPRASILP" series of ultrapure, highly homogeneous synthetic quartz glass. The "SUPRASILP" series is a synthetic quartz glass for optics applications developed at home in Japan, on the basis of the opticsuse quartz glass manufacturing technologies imported from Heraeus, and the outstanding synthesizing technologies of the ShinEtsu Group. The "SUPRASILP" series of synthetic quartz glass is chiefly used as lens material for the exposure devices employed in the semiconductor manufacturing process, but it is also suitable as an optical material for prisms, glass, lenses, mirrors and so on. In addition to "SUPRASILP", the Company also handles the "", "HERASIL", and "" series of opticsuse natural quartz glass of Heraeus.

2 1, Product Lineup Synthetic Quartz Glass / "SUPRASILP" Series The "SUPRASILP" Series is ultrahigh quality synthetic quartz glass that is used as lens material for the aligner used in semiconductor manufacture. In tandem with the further miniaturization of processes, this series is constantly being developed with even further capabilities, and it can be used with conventional iline systems as well as up to the mostadvanced ArF applications. product grades are available, each of which has unique characteristics in terms of light transmission rates, laserresistance properties, whether they have striae or are striae, etc. Natural Quartz Glass / "", "HERASIL", and "" Each of these brands consists of quartz glass for optics applications made by Heraeus, using natural quartz crystal as raw material. A wide range of product types are offered, from optics materials for ordinary applications to highgrade products, in accordance with the purity and homogeneity rates of each, as well as their light transmission rates, etc. Product Types Type Synthetic Quartz Glass Natural Quartz Glass Grade SUPRASILP248 SUPRASILP7 SUPRASILP71C SUPRASILP2 SUPRASILP31 SUPRASILP21 SUPRASILP3 SUPRASILF3 HERASIL Characteristics This is high purity opticaluse quartz glass that is striae in all directions, and thus is highly suited for highprecision optics applications. The optical characteristics are superior to those of P248, the laser resistance properties have been improved for its use in ArF excimer lithography applications. Large optics more than diameter 6mm are available. This is striae in one direction, and is appropriate for optical element, such as windows and lens materials, etc. This is striae in one direction, and more homogeneous than P2. The optical characteristics conform to those of P31, and the laser resistance properties have been improved for its use in ArF excimer lithography applications. This is appropriate for general optical element applications where a high light transmission rate is required. F3 has the same high IR transmission as optical fiber and also the high homogeneity of quartz glass for optical use. This is opticsuse quartz glass for which only carefully selected crystal are used as raw material. It has no particulate structure, and has extremely favorable homogeneity properties, as well as high light transmission in ultraviolet ranges. According to its purpose, 3D striae material and 1D striae material are available. This is opticsuse quartz glass manufactured from specially selected crystals and produced with low OH content. It shows high homogeneity and high light transmission characteristics all the way from visible to near infrared ranges. According to its purpose, 3D striae material and 1D striae material is available. Shape and Size Our quartz glass for optics comes in a variety of shapes, including blocks, plates, prisms, lenses, rods, and so on. For detailed information regarding the sizes and characteristics that can be manufactured, please contact the sales department in charge. On the last page, you can find the contact information for the relevant sales department. 1 Quartz Glass for Optics PCOPTGEN9E

3 2, Data and Properties *1 *1 *2 *3 *4 *5 Type Grade Striae Striae Max Homogeneity( n) Residual Bubble Fluorescence Excimer laser On strain grade intensity size Nominal grade tolerance request (nm/cm) Synthetic Quartz Glass SUPRASILP248 3D A SUPRASILP7 3D A SUPRASILP71C < < < < D A < D A < < SUPRASILP2 1D A KrF(248nm) *6 < SUPRASILP31 1D A SUPRASILP21 < < < D A ArF(193nm) *7 < SUPRASILP3 BC KrF(248nm) *6 ArF(193nm) *7 KrF(248nm) *6 SUPRASILF3 3D 1D A A < < < < slight blue Natural Quartz Glass 3D A HERASIL 1D A 31 3D A 32 1D A < < < blueviolet blueviolet blueviolet < ~1 blueviolet Note: Values shown in this chart are not specification (i.e., guaranteed) values. Please also refer to the notes listed below. For detailed information regarding the sizes and characteristics that can be manufactured, please contact the sales department in charge. On the last page, you can find the contact information for the relevant sales department. Notes regarding the List of Characteristics table *1: 3D means striae in all 3 directions. 1D means striae in one direction. According to the MILG174 standard of the U.S. Military. Evaluation made via the main surface. *2: This value is valid for 9% of the diameter. In the outer area the actual value may exceed this stated value. *3: For largesized products this value may be slightly higher in the edge zone, which is the outer 2% of the diameter. *4: Conforms to DIN *5: Excitation wavelength is 253.7nm. For quartz glass, there is almost never excitation at wavelength of 29 nm and above. *6: The transmission loss is less than.2%/cm after pulses of KrF excimer laser (λ=248nm,1mj/cm 2 /pulse ) irradiation. *7: The transmission loss is less than 1%/cm after pulses of ArF excimer laser (λ=193nm,2mj/cm 2 /pulse ) irradiation. 2 Quartz Glass for Optics PCOPTGEN9E

4 3, Ultraviolet & Infrared Light Initial Transmission Rates Measurement example at sample thickness 1mm 1 Transmission (including reflection loss) (%) P248/P31 3 P2/P3 2 / HERASIL 1 Reflection loss at the surface (nm) Measurement example at sample thickness 1mm Transmission (including reflection loss) (%) P7/P21 2 F3 P71C 31/32 1 Reflection loss at the surface (nm) 4, Refractive index at 2 and 1 bar SUPRASILP HERASIL nm SUPRASILP HERASIL nm Measurement accuracy ±3 15 SUPRASILP HERASIL nm Without SUPRASILF3 Quartz Glass for Optics PCOPTGEN9E

5 5, Typical Characteristics measurement accuracy : ± Relative temperature coefficients of the refractive index in 1 6 K 1 Thermal data HERASIL nm ~2 2~4 ~2 2~4 Strain temperature Annealing temperature Softening temperature Max. working temperature continuous shortterm Abbe constant nd 1 ν d = n n F C Mean specific heat ~1 ~5 ~9 J/kg K Heat conductivity W/m K Birefringence 633nm nm/cm ± ±.5 kg/cm Typical trace impurities in quartz glass unit:ppm Impurities SUPRASILP HERASIL Mean thermal expansion coefficient K 1 Al < ~ Ca < ~ Cr < ~ Cu < ~ Fe < ~ K < ~ Li < Mg < Electrical data Na < Ti < SUPRASILP HERASIL OH 11 * 132 <8 Resistivity in(ω m) *The OH content of SUPRASILF3 is less than 1ppm Mechanical data Density Modulus of elasticity Modulus of torsion Poisson's ratio Compressive strength Tensile strength g/cm 3 Bending strength 67 Torsional strength Mohshardness Microhardness Knoophardness Internal damping Sound velocity SUPRASILP m/s HERASIL 67.7± ± ~6.5 86~98 58~ Values shown in this chart are not specification (i.e., guaranteed) values. 5 3 at Dielectric loss angle tanδ 1KHz 1MHz Dielectric constant ε Hz tanδ at 1MHz is nearlyconstant up to 2, while it becomes gradually higher above 2. tanδ at 1 1 Hz becomes gradually lower up to 35, while it becomes gradually higher above 35. 2, ~1 1 6 Hz , Hz , Hz Dielectric strength in kv/mm (Layer thickness 5 mm) 2 5 SUPRASILP ~4 4~5 4 Quartz Glass for Optics PCOPTGEN9E

6 ShinEtsu Quartz Products Co., Ltd. For Business Contact If you have any questions or inquiries concerning company information about ShinEtsu Quartz Products Co., Ltd. or about its products, please inquire to the following. ShinEtsu Quartz Products Co., Ltd. / Functional Materials Division Shinjuku Sanei Bldg., 1222, NishiShinjuku, Shinjukuku, Tokyo 1623, Japan TEL : FAX : URL : ShinEtsu Quartz Group & Heraeus Quartz Group (Main companies) Japan Asia ShinEtsu Quartz Products Co., Ltd. Shinjuku Sanei Bldg., 1222, NishiShinjuku, Tokyo 1623, Japan TEL: FAX: Yamagata ShinEtsu Quartz Co., Ltd. 241,Shogehigashi, Tendoshi, Yamagata 99469, Japan TEL: FAX: Fukui ShinEtsu Quartz Co., Ltd. 14, Kayadanicho 3chome, Echizenshi, Fukui 91537, Japan TEL: FAX: Young Shin Quartz Co.,Ltd. <Korea> 149,Hoechukri, Kwanghyewonmyon, ChinchonKun, Chungbuk Province TEL: FAX: Topco Quartz Products Co.,Ltd <Taiwan> No.8 WenHua Road, HsinChu Industrial Park TEL: FAX: Heraeus ShinEtsu Quartz (China) Inc. <P.R.China> No.17,Daminghu Street, Economic & Technical Development Zone, Shenyang, TEL: FAX: Heraeus ShinEtsu Quartz Singapore Pte. Ltd. <Singapore> 26 Boon Lay Way, #19 Tradehub 21, Singapore 6997 TEL: FAX: U.S.A. Heraeus Quartz America, LLC. 1 Heraeus Blvd. Buford, GA 3518 USA TEL: FAX: Europe Heraeus Quarzglas GmbH & Co.KG <Germany> Quarzstrasse 8,6345 Hanau TEL: FAX: Quartz Glass for Optics PCOPTGEN9E ShinEtsu Quartz Products Co., Ltd