Evaporation Sources. In This Section

Transcription

1 In This Section page(s) Technical Notes to - Thermal Filament Sources to - Point & Loop Heaters to -5 Coil Heaters to - Basket Heaters to -2 Spiral Heaters Thermal Boat Sources to -5 Boat Heaters to -2 Alumina-Coated Boat Heaters to - Boat Heaters for Microelectronics to -5 Thermal Box Sources to -4 Tantalum Box Heaters to -7 Tantalum Box Heaters for Microelectronics SiO Box Heaters to -40 Baffled Al2O Box Heaters Thermal Rod Sources Crucibles & Crucible Heaters Crucible Basket Heaters Crucibles for Thermal Sources to -45 Crucible Box Heaters to -47 Crucible Liners for E-Beam Sources to -54 -

2 Technical Notes & Heating Methods Introduction to Evaporation occurs when the atoms/molecules of the evaporant (the material being evaporated) achieve sufficient energy to overcome the solid/liquid binding forces and enter the gas phase. To increase the evaporation rate, the average energy is increased by raising the evaporant s temperature. Expressed another way, raising its temperature increases an evaporant s vapor pressure (VP). It s a common misconception that a solid has no VP, but as it melts, vapor suddenly appears. Melting has nothing to do with vapor pressure! For all materials (that do not decompose) VP versus temperature is a smooth curve with the material s melting point being at just one point on that curve. Honig and Kramer s Vapor Pressure Data for the Liquid and Solid Elements (RCA 6) clearly shows the non-relationship between VP and melting point. The most striking examples are two pairs of metals: gallium/gadolinium and magnesium/aluminum. The first pair have melting points of 2.76º C (Ga) and 2º C (Gd). Yet their VPs are within a factor of 0 from 0 - Torr to 760 Torr. The second pair s melting points are 650º C (Mg) and 660.2º C (Al). However, Mg s VP is 0 7 higher than Al s VP at any temperature. The strict relationship between VP and temperature for each evaporant has at least one important consequence when evaporating alloys or mixtures. Except in rare circumstances, it s impossible to evaporate an alloy and make a film of identical stoichiometry. For example, evaporating 200 Sn/Pb solder gives, initially, a film of almost pure Pb since its VP is 0 6 times higher than Sn s. (Dilution and activity coefficient affect the vapor composition too, but these issues are beyond this simple introduction.) When evaporating compounds, there are few general rules. Some compounds (e.g., MgF2 and KI) evaporate as molecules and the film s stoichiometry is identical to the compound s. Oxides may: dissociate completely, evaporate as lower oxides, evaporate as non-stoichiometric oxides, or give films with compositions identical to the evaporant. Compound semiconductor materials, the so-called III-V, II-VI materials, present a complex mix of results. Individual components may evaporate as dimers or tetramers, depending on the temperature (again, concepts beyond this simple introduction). Heating Methods Four heating techniques are commonly used to evaporate materials for thin film deposition. Different names may be applied but generally they are known as: Direct resistive heating Indirect resistive heating E-beam evaporation Pulse laser deposition (or ablation) Filaments Single- or multiple-strand tungsten wire is bent into a shape (loop, point, coil) that suits a particular mounting or the required evaporation pattern. Evaporant is deposited on the wire by dipping into a melt, into a solution of a thermally degradable salt, or physically capturing pieces. The material s evaporation rate is varied by changing the current. If the material wets or alloys with the heater, non-reproducible or continuously changing evaporation rates may occur. Since this source is inexpensive, it is often used once and discarded. Basket Heaters If a refractory metal wire is shaped into an inverted conical basket, larger pieces of material can be inserted into the cone. These are also used to heat small crucibles. Boats and Boxes Thin, flat tungsten, tantalum, or molybdenum sheets are formed into shapes with creases, dimples, folds, bends, etc., to hold evaporant. The complexity ranges from a dimple in a strip to multichamber baffled boxes with sidewayspointing vapor chimneys. The baffle in a baffle box prevents a line-of-sight between evaporant and substrate. This type of source is used where the evaporant is known to spit (crepitate). Direct Resistive Heating Thermal Sources The evaporant is placed on/in a refractory metal source through which a high electrical current flows. The method s low equipment costs are balanced by the difficulty of maintaining a constant evaporation rate (when compared with other techniques) and possible reactions between evaporant and boat material. These devices are often called thermal sources and are essentially open heaters frequently without thermal radiation shielding, insulation, or any tricks to reduce thermal gradients. Coated Boats A variant of the normal boat, a coated boat has a thin coherent layer of aluminum oxide covering the dimple. These boats are sometimes recommended for applications where the hot evaporant reacts with refractory metals. -2

3 Technical Notes Rods & Screens For very specific applications, thick tungsten rods and fine meshes/screens are recommended. Chromium evaporation is one common example. The thick rod has lower resistance than a filament, making it easier to control lower evaporating temperatures. Meshes are sometimes used to extend the coverage area without moving the substrate. Indirect Resistive Heating Thermal Sources With indirect resistive heating, a crucible holds the evaporant in isolation from the heater filament. The increased thermal mass and the evaporant/heater separation stabilizes the evaporation rate. Various iterations of these indirectly heated devices are called Knudsen cells, K-cells, effusion sources, diffusion cells, evaporation cells, etc. But distinctions between these names are blurring as manufacturers explore designs that use features from several devices. Knudsen Cells Where repeatable, constant evaporation rates are required, Knudsen cells are chosen. The classic Knudsen cell is a large-mass, small-volume tungsten container with a close-fitting thick lid where an inverted conical-shaped aperture is bored. The container is mounted on tungsten needle points to reduce thermal losses and surrounded by tungsten heater filaments and diffusers to ensure a uniform temperature. Outside the heaters, several layers of reflective radiation shielding further reduce thermal gradients in the cell. With the cell maintained at a uniform, constant, and known temperature, the evaporant s equilibrium vapor pressure is known. The aperture is small so the vapor lost through it does not significantly affect the cell s internal pressure, and the evaporant s effusion rate is constant. In addition, the small aperture means the vapor emerges in a cosine distribution (the flux issuing at any given angle to the cell lid s normal is proportional to the cosine of that angle). The maximum temperature for the classic Knudsen cell is around 2000K to 200K. Evaporation Cells Evaporation cells are based on the Knudsen cell design but are/have: Less mechanically complex Easier to fill Larger capacities Larger orifice diameters to increase material flux Lids or vapor shutters Less stringent thermal gradient specifications Higher deposition rates These devices are known as K-cells, effusion cells, evaporation sources, or thermal sources. Although the vapor plume does not have a cosine distribution, these source have many thin film applications, including molecular-beam epitaxy, low temperature evaporation (00 500º C) for organic compounds, and high temperature evaporation (500º C) for metals and inorganic compounds. Some heaters are flat ribbons arranged parallel to the crucible s long axis. This helps reduce temperature gradients in the important central zone. In other designs, the heater wires are more closely spaced at the crucible s ends to combat thermal end-effects. The crucible is typically a pure alumina cylinder closed at one end with a wide bore to increase the vapor flux. This source is well-suited to conventional evaporation but some low thermal mass versions are used as flash evaporators. Thermal Sources Some thermal sources described in Direct Resistance Heating can be constructed to accommodate crucibles and, therefore, fit in this section. In particular, refractory metal wire baskets or refractory metal boxes can be shaped into truncated cones of appropriate depth and slope to suit a given crucible. While such heaters lack the refinements and end-effect correction found in the evaporation cells, they provide inexpensive approaches to film deposition of materials that can t be in direct contact with a refractory metal. E-Beam Sources The electron-beam (e-beam) source s high deposition rates and large evaporant capacity make it convenient for production-scale coating machines. Solid evaporant such as powder, granules, lumps, or shaped starter sources, is placed in the source s copper hearth or in a crucible liner. A high electron flux generated by a hot filament placed below the source is electrostatically and magnetically focused on the top of the evaporant. The electron beam s energy raises the evaporant s surface temperature. Often the beam is rastered to increase the evaporation area. Since the evaporation area is surrounded by cooler (often solid) evaporant, unlike other thermal sources, the e-beam source s vapor plume is largely uncontaminated by crucible liner material. Production scale e-beam sources are usually single pocket (one hearth). Multipocket sources (4 or 6 hearths) are available for R&D applications. A cover plate obscures the pockets not-in-use to prevent vapor cross-contamination. Multipocket sources are particularly convenient when depositing multilayer films on a single substrate. The drawbacks of e-beam evaporation are similar to those of thermal evaporation, but they are more apparent in the e-beam source the source must be mounted upright (to prevent the evaporant spilling), evaporants often spit and must be heated in a series of ramp/soak steps to evaporation temperature, and the melt presents a high-temperature source that thermally radiates the substrate. Pulse Laser Deposition (PLD) Sources PLD uses repetitive pulses from a laser of appropriate power density, angle of incidence, and wavelength to ablate a localized area of evaporant into a vapor plume. The wavelength is important to maximize photon absorption rather than reflection. The flash evaporation nature of this technique, at least in the small volume in which the laser pulse s energy is dumped, is advantageous when evaporating alloys or mixtures. The vapor plume tends to be stoichiometrically similar to the bulk; however, the PLD vapor plume is not particularly convenient because its flux distribution is closer to cos 6 to the evaporant s surface normal. Crucible and Liners The crucible and liners are used to (A) keep the e-beam hearth free of evaporants or (B) to act as the evaporant container for basket or foil thermal sources. For an e-beam source, a liner provides an often unrecognized benefit an efficient thermal barrier. The same deposition rate requires only the power needed if a liner is not used. This reduces operating costs and lowers the system s thermal burden; however, any liner must be electrically conductive to dissipate the electron charge. For a thermal source, the crucible thermal resistance is a serious but unavoidable disadvantage. The heater is usually much hotter than the evaporant s average temperature. -

4 Thermal Filament Sources Point & Loop Heaters Points & Loops Tungsten Match the form and size of sample to heat. Figure 4 (EVSP4) Figure (EVSP) Figure 5 (EVSP5) Figure 2 (EVSP2) Figure 6 (EVSP6) Figure (EVSP) Figure 7 (EVSP7) Description Figure Pack A B C Volts Amps Watts Temp. Part No. Price Tungsten Double Loop Source Wires x 0.025" Diameter 5 5 / C EVSP025W Call Wires x 0.00" Diameter 5 5 / C EVSP00W Call 4 Wires x 0.00" Diameter 5 5 / C EVSP400W Call Wire x 0.060" Diameter 5 5 / C EVSP060W Call Tungsten Single Loop Source Wires x 0.025" Diameter /2 2 / C EVSP2025W Call Wires x 0.00" Diameter /2 2 / C EVSP200W Call 4 Wires x 0.00" Diameter /2 2 / C EVSP2400W Call Wire x 0.060" Diameter /2 2 / C EVSP2060W Call Tungsten Point Source Wires x 0.025" Diameter 5 /2 5 / C EVSP025W Call Wires x 0.00" Diameter 5 /2 5 / C EVSP00W Call 4 Wires x 0.00" Diameter 5 /2 5 / C EVSP400W Call Wires x 0.060" Diameter 5 /2 5 / C EVSP060W Call Wires x 0.025" Diameter / C EVSP4025W Call Wires x 0.00" Diameter / C EVSP400W Call 4 Wires x 0.00" Diameter / C EVSP4400W Call Wire x 0.060" Diameter / C EVSP4060W Call Wires x 0.025" Diameter / C EVSP5025W Call Wires x 0.00" Diameter / C EVSP500W Call 4 Wires x 0.00" Diameter / C EVSP5400W Call Wire x 0.040" Diameter / C EVSP5040W Call Wire x 0.060" Diameter / C EVSP5060W Call Tungsten Single Loop Source Wires x 0.025" Diameter 6 5 / C EVSP6025W Call Wire x 0.040" Diameter 6 5 / C EVSP6040W Call Wire x 0.060" Diameter 6 5 / C EVSP6060W Call Tungsten Double Loop Source Wires x 0.00" Diameter /2 N/A C EVSP700W Call Wires x 0.00" Diameter 7 5 /2 N/A C EVSP7400W Call -4

5 Thermal Filament Sources Point & Loop Heaters Points & Loops Microelectronics Made from tungsten wire. Figure (EVSME) Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these heaters are sometimes satisfactory for more than a single-time use. Figure 4 (EVSMEB) Figure 2 (EVSME2) Figure (EVSMEA) Figure 5 (EVSMEC) Description Figure Pack A B C Volts Amps Watts Temp. Part No. Price Tungsten 6 Coils Wire 0.00" Diameter 5 7 / C EVSME00W Call Wires 0.025" Diameter 5 7 / C EVSME025W Call Tungsten 4 Coils Wire 0.00" Diameter / C EVSME200W Call Wires 0.025" Diameter / C EVSME2025W Call Tungsten Point Wire 0.00" Diameter C EVSMEA00W Call Wires 0.025" Diameter C EVSMEA02W Call Tungsten Point Wire 0.00" Diameter C EVSMEB00W Call Wires 0.025" Diameter C EVSMEB02W Call Tungsten Loop Wire 0.00" Diameter N/A C EVSMEC00W Call Wires 0.025" Diameter N/A C EVSMEC02W Call -5

6 Thermal Filament Sources Coil Heaters Coils (EVF 4) Made from tungsten wire. covers products as diverse as resistance heated boats, laser ablation target carousels, crucibles for electron beam sources, indirectly heated effusion cells, and low temperature evaporation sources specifically design for OLED/PLED coating applications in flat panel display manufacture. Applications include: discharging insulating surfaces, melting refractory metals, and increasing plasma density over normal magnetron sputter sources Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these heaters are sometimes satisfactory for more than a single-time use. Figure (EVF) Figure (EVF) Figure 2 (EVF2) Figure 4 (EVF4) Description Figure Pack A B C (I.D.) Volts Amps Watts Temp. Part No. Price Tungsten Coil Wires x 0.025" Diameter 5 4 / C EVF025W Call Wires x 0.00" Diameter 5 4 / C EVF00W Call Wire x 0.040" Diameter 5 4 / C EVF040W Call Wires x 0.025" Diameter / C EVF2025W Call Wires x 0.00" Diameter / C EVF200W Call 4 Wires x 0.00" Diameter / C EVF2400W Call Wires x 0.025" Diameter / C EVF025W Call Wires x 0.00" Diameter / C EVF00W Call 2 Wires x 0.040" Diameter / C EVF2040W Call 4 Wires x 0.00" Diameter / C EVF400W Call Wire x 0.040" Diameter / C EVF040W Call Wires x 0.025" Diameter C EVF4025W Call Wires x 0.00" Diameter C EVF400W Call 4 Wires x 0.00" Diameter C EVF4400W Call 2 Wires x 0.040" Diameter C EVF42040W Call 4 Wires x 0.040" Diameter C EVF4040W Call -6

7 Thermal Filament Sources Coil Heaters Coils (EVF 5 8) Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these heaters are sometimes satisfactory for more than a single-time use. Figure (EVF5) Figure (EVF7) Figure 2 (EVF6) Figure 4 (EVF8) Description Figure Pack A B C (I.D.) Volts Amps Watts Temp. Part No. Price Tungsten Coil Wires x 0.025" Diameter C EVF5025W Call Wires x 0.00" Diameter C EVF500W Call 4 Wires x 0.00" Diameter C EVF5400W Call 2 Wires x 0.040" Diameter C EVF52040W Call Wires x 0.040" Diameter C EVF5040W Call Wire x 0.040" Diameter C EVF5040W Call Wires x 0.025" Diameter C EVF6025W Call Wires x 0.00" Diameter C EVF600W Call 4 Wires x 0.00" Diameter C EVF6400W Call 2 Wires x 0.040" Diameter C EVF62040W Call Wires x 0.040" Diameter C EVF6040W Call Wires x 0.00" Diameter C EVF700W Call 4 Wires x 0.00" Diameter C EVF7400W Call 2 Wires x 0.040" Diameter C EVF72040W Call Wires x 0.040" Diameter C EVF7040W Call Wires x 0.00" Diameter / C EVF800W Call 4 Wires x 0.00" Diameter / C EVF8400W Call 2 Wires x 0.040" Diameter / C EVF82040W Call Wires x 0.040" Diameter / C EVF8040W Call -7

8 Thermal Filament Sources Coil Heaters Coils (EVF 2) Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these heaters are sometimes satisfactory for more than a single-time use. Figure (EVF) Figure (EVF) Figure 2 (EVF0) Figure 4 (EVF2) Description Figure Pack A B C (I.D.) Volts Amps Watts Temp. Part No. Price Tungsten Coil Wires x 0.00" Diameter / C EVF00W Call 4 Wires x 0.00" Diameter / C EVF400W Call 2 Wires x 0.040" Diameter / C EVF2040W Call Wires x 0.040" Diameter / C EVF040W Call Wires x 0.00" Diameter /2 5 / C EVF000W Call 4 Wires x 0.00" Diameter /2 5 / C EVF0400W Call 2 Wires x 0.040" Diameter /2 5 / C EVF02040W Call Wires x 0.040" Diameter /2 5 / C EVF0040W Call Wires x 0.00" Diameter / C EVF00W Call 4 Wires x 0.00" Diameter / C EVF400W Call 2 Wires x 0.040" Diameter / C EVF2040W Call Wires x 0.040" Diameter / C EVF040W Call Wires x 0.025" Diameter C EVF2025W Call Wires x 0.00" Diameter C EVF200W Call -8

9 Coils (EVF 7) Thermal Filament Sources Coil Heaters Figure (EVF) Figure (EVF5) Figure 2 (EVF4) Figure 4 (EVF6A D) Description Figure Pack A B C (I.D.) Volts Amps Watts Temp. Part No. Price Tungsten Coil Wires x 0.025" Diameter C EVF025W Call Wires x 0.00" Diameter C EVF00W Call 4 Wires x 0.00" Diameter C EVF400W Call Wires x 0.00" Diameter / C EVF400W Call 4 Wires x 0.00" Diameter / C EVF4400W Call Wires x 0.040" Diameter / C EVF4040W Call Wires x 0.00" Diameter / C EVF500W Call 4 Wires x 0.00" Diameter / C EVF5400W Call Wires x 0.040" Diameter 5 2 / C EVF5040W Call Tungsten Rod 0.00" Diameter, Wrapped with 8 Layers of 0.020" Diameter W Wire N/A C EVF6A Call 0.00" Diameter, Wrapped with 8 Layers of 0.020" Diameter W Wire 4 5 N/A C EVF6B Call 0.00" Diameter, Wrapped with 2 Layers of 0.020" Diameter W Wire 4 5 N/A C EVF6C Call 0.00" Diameter, Wrapped with 2 Layers of 0.020" Diameter W Wire N/A C EVF6D Call -

10 Thermal Filament Sources Basket Heaters Baskets Tungsten (EVB 6) Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these heaters are sometimes satisfactory for more than a single-time use. Figure 4 (EVB4) Figure (EVB) Figure 5 (EVB5) Figure 2 (EVB2) Figure (EVB) Figure 6 (EVB6) Description Figure Pack A B C (I.D.) Volts Amps Watts Temp. Part No. Price Tungsten Basket Heater Wires x 0.025" Diameter 5 /2 Wires x 0.00" Diameter 5 /2 Wire x 0.040" Diameter 5 /2 Wires x 0.025" Diameter 2 5 /2 5 Wires x 0.00" Diameter 2 5 /2 5 Wire x 0.040" Diameter 2 5 /2 5 Wires x 0.025" Diameter 5 /2 5 Wire x 0.040" Diameter 5 /2 5 Wires x 0.00" Diameter /2 7 Wire x 0.060" Diameter /2 7 Wires x 0.025" Diameter 5 5 Wire x 0.060" Diameter 5 5 Wires x 0.025" Diameter 6 5 Wire x 0.040" Diameter / C EVB025W Call 5 / C EVB00W Call 5 / C EVB040W Call 5 / C EVB2025W Call 5 / C EVB200W Call 5 / C EVB2040W Call / C EVB025W Call / C EVB040W Call / C EVB400W Call / C EVB4060W Call / C EVB5025W Call /6 EVB5060W Call / C EVB6025W Call / C EVB6040W Call -0

11 Baskets Tungsten (EVB 7 4) Thermal Filament Sources Basket Heaters Figure (EVB7) Figure 4 (EVB) Figure 2 (EVB2A) Figure (EVB2B) Figure 5 (EVB4) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Tungsten Basket Heater Wires x 0.025" Diameter 5 /6 N/A C EVB7025W Call Wire x 0.040" Diameter 5 /6 N/A C EVB7040W Call Wires x 0.025" Diameter 2 5 /2 /2 N/A C EVB2A025W Call Wires x 0.00" Diameter 2 5 /2 /2 N/A C EVB2A00W Call Wire x 0.040" Diameter 2 5 /2 /2 N/A C EVB2A040W Call Wires x 0.025" Diameter 5 /2 /2 N/A C EVB2B025W Call Wires x 0.00" Diameter 5 /2 /2 N/A C EVB2B00W Call Wire x 0.040" Diameter 5 /2 /2 N/A C EVB2B040W Call Wire x 0.060" Diameter 5 /2 /2 N/A C EVB2B060W Call Wires x 0.025" Diameter 4 5 / C EVB025W Call Wires x 0.00" Diameter 4 5 / C EVB00W Call Wire x 0.040" Diameter 4 5 / C EVB040W Call Wires x 0.00" Diameter 5 5 /2 /2 N/A C EVB400W Call 4 Wires x 0.00" Diameter 5 5 /2 /2 N/A C EVB4400W Call Wire x 0.060" Diameter 5 5 /2 /2 N/A C EVB4060W Call -

12 Thermal Filament Sources Basket Heaters Baskets for Microelectronics Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these heaters are sometimes satisfactory for more than a single-time use. Figure (EVSME6A) Figure 4 (EVSME6D) Figure 2 (EVSME6B) Figure 5 (EVSME6E) Figure (EVSME6C) Figure 6 (EVSME7) Description Figure Pack A B C Volts Amps Watts Temp. Part No. Price Tungsten Tapered Helix Tight, 5 Coils Wire x 0.00" Diameter 5 7 Wires x 0.025" Diameter 5 7 Tungsten Tapered Helix 4 Coils, Wire x 0.00" Diameter Wires x 0.025" Diameter Coils, Wire x 0.00" Diameter 5 7 -Wires x 0.025" Diameter 5 7 Tungsten Tapered Helix Tight, 2 Coils Wire x 0.00" Diameter Wires x 0.025" Diameter Tungsten Tapered Helix, 5 Coils Wire x 0.040" Diameter Tungsten Tapered Helix, 5 Coils Wires x 0.025" Diameter Tungsten Basket, 6 Coils Wire x 0.00" Diameter Wires x 0.025" Diameter /2 /2 5 5 / C EVSME6A00W Call / C EVSME6A02W Call C EVSME6B00W Call C EVSME6B02W Call C EVSME6C00W Call C EVSME6C02W Call / C EVSME6D00W Call / C EVSME6D02W Call 7 7 /2 /2 / C EVSME6E040W Call / C EVSME6E02W Call / C EVSME700W Call / C EVSME7025W Call -2

13 Spiral & Serpentine Area Heaters Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these heaters are sometimes satisfactory for more than a single-time use. Thermal Filament Sources Spiral Heaters Figure (EVH) Figure 2 (EVH2) Figure (EVH) Description Figure Pack A B C (I..D.) Volts Amps Watts Temp. Part No. Price Tungsten Heater Filament Wire x 0.040" Diameter 5 /2 N/A º C EVH040W Call Wire x 0.060" Diameter 5 /2 N/A º C EVH060W Call Wire x 0.040" Diameter /2 / º C EVH2040W Call Wire x 0.060" Diameter (Has Less Turn than Shown) /2 / º C EVH2060W Call Wire x 0.040" Diameter / º C EVH040W Call Wire x 0.060" Diameter (Has 2 Less Turns than Shown) 5 7 / º C EVH060W Call Spirals Microelectronics Figure (EVSME4) Figure 2 (EVSME5) Description Figure Pack A B C (I.D.) Volts Amps Watts Temp. Part No. Price Tungsten 2.5 Turn Spiral Wire x 0.00" Diameter 5 7 Wire x 0.040" Diameter 5 7 Tungsten.5 Turn Spiral Wire x 0.00" Diameter Wire x 0.040" Diameter / C EVSME400W Call / C EVSME4040W Call C EVSME500W Call C EVSME5040W Call -

14 Thermal Boat Sources Boat Heaters Trough Boat Sources Figure (EVS) Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. The Part No. listed in the ordering table carries the boat material code. MO indicates molybdenum, TA indicates tantalum, and W indicates tungsten. Figure 2 (EVS) Figure 5 (EVS45) A Figure (EVS4) B /2" DEEP Figure 6 (EVS47) C D Figure 4 (EVS44) Figure 7 (EVS48) -4

15 Thermal Boat Sources Boat Heaters Description Figure Thickness Pack A B C (I.D.) D Volts Amps Watts Temp. Part No. Price Narrow Flat Trough Tungsten 0.005" C EVS005W Call Tungsten 0.00" C EVS00W Call Tantalum 0.005" C EVS005TA Call Tantalum 0.00" C EVS00TA Call Molybdenum 0.005" C EVS005MO Call Molybdenum 0.00" C EVS00MO Call Flat Trough Tungsten " 5 /2 N/A C EVS005W Call Tungsten " 5 /2 N/A C EVS00W Call Tungsten " 5 /2 N/A C EVS05W Call Tantalum " 5 /2 N/A C EVS005TA Call Tantalum " 5 /2 N/A C EVS00TA Call Molybdenum " 5 /2 N/A C EVS005MO Call Molybdenum " 5 /2 N/A C EVS00MO Call Long Trough Tungsten 0.005" 5 /2 4 N/A C EVS4005W Call Tungsten 0.00" 5 /2 4 N/A C EVS400W Call Tungsten 0.05" /2 4 N/A C EVS405W Call Tantalum 0.005" 5 /2 4 N/A C EVS4005TA Call Tantalum 0.00" /2 4 N/A C EVS400TA Call Molybdenum 0.005" 5 /2 4 N/A C EVS4005MO Call Molybdenum 0.00" 5 /2 4 N/A C EVS400MO Call Inverted Top-Hat Trough Boat Tungsten " 5 4 / C EVS44005W Call Tungsten " 4 / C EVS4400W Call Tungsten " 4 / C EVS4405W Call Tantalum " 4 / C EVS44005TA Call Tantalum " 4 / C EVS4400TA Call Tantalum " 4 / C EVS4405TA Call Molybdenum " 5 4 / C EVS44005MO Call Molybdenum " 5 4 / C EVS4400MO Call Molybdenum " 5 4 / C EVS4405MO Call Inverted Top-Hat Long Trough Boat Tungsten " C EVS45005W Call Tungsten " C EVS4500W Call Tungsten " C EVS4505W Call Tantalum " C EVS45005TA Call Tantalum " C EVS4500TA Call Tantalum " C EVS4505TA Call Molybdenum " C EVS45005MO Call Molybdenum " C EVS4500MO Call Molybdenum " C EVS4505MO Call Thin Long Trough Boat Tungsten " /6 N/A C EVS4700W Call Tungsten " /6 N/A C EVS4705W Call Tungsten " /6 N/A C EVS47020W Call Tantalum " /6 N/A C EVS4700TA Call Tantalum " 4 2 /6 N/A C EVS4705TA Call Tantalum " 4 2 /6 N/A C EVS47020TA Call Molybdenum " /6 N/A C EVS4700MO Call Molybdenum " /6 N/A C EVS4705MO Call Description Figure Thickness Pack A B C D E F Volts Amps Watts Temp. Part No. Price Thin Trough Boat Tungsten " 5 5 /6 2 7 N/A N/A N/A C EVS48005W Call Tungsten " 5 5 /6 2 7 N/A N/A N/A C EVS4800W Call Tantalum " 5 5 /6 2 7 N/A N/A N/A C EVS4800TA Call Molybdenum " 5 5 /6 2 7 N/A N/A N/A C EVS4800MO Call -5

16 Thermal Boat Sources Boat Heaters Trough Boat Sources Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. Figure (EVS4) The Part No. listed in the ordering table carries the boat material code. MO indicates molybdenum, TA indicates tantalum, and W indicates tungsten. Figure 2 (EVS6) Figure (EVS20) Description Figure Thickness Pack A B C D E F G Volts Amps Watts Temp. Part No. Price Top-Hat Trough Boat Tungsten 0.005" C EVS4005W Call Tungsten 0.00" C EVS400W Call Tantalum 0.005" C EVS4005TA Call Tantalum 0.00" C EVS400TA Call Molybdenum 0.005" C EVS4005MO Call Molybdenum 0.00" C EVS400MO Call Description Figure Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Pan Boat Tungsten " C EVS6005W Call Tungsten " C EVS600W Call Tungsten " C EVS6005TA Call Tungsten " C EVS600TA Call Molybdenum " C EVS6005MO Call Molybdenum " C EVS600MO Call Narrowed Boat Heater Tungsten 0.005" 5 /2 4 / C EVS20A005W Call Tungsten 0.00" 5 /2 4 / C EVS20A00W Call Tungsten 0.05" 5 /2 4 / C EVS20A05W Call Tantalum 0.005" 5 /2 4 / C EVS20A005TA Call Tantalum 0.00" 5 /2 4 / C EVS20A00TA Call Molybdenum 0.005" 5 /2 4 / C EVS20A005MO Call Molybdenum 0.00" 5 /2 4 / C EVS20A00MO Call -6

17 Dimple Boat Sources Thermal Boat Sources Boat Heaters Figure (EVS28) Figure (EVS2A) Figure 4 (EVS42) Figure 2 (EVS2B) Description Figure Thickness Pack A B C (I.D.) D Volts Amps Watts Temp. Part No. Price Top-Hat Dimple Tungsten 0.005" 5 /2 /2 N/A C EVS2A005W Call Tungsten 0.00" 5 /2 /2 N/A C EVS2A00W Call Tungsten 0.05" 5 /2 /2 N/A C EVS2A05W Call Tantalum 0.005" 5 /2 /2 N/A C EVS2A005TA Call Tantalum 0.00" 5 /2 /2 N/A C EVS2A00TA Call Molybdenum 0.005" 5 /2 /2 N/A C EVS2A005MO Call Molybdenum 0.00" 5 /2 /2 N/A C EVS2A00MO Call Inverted Top-Hat Dimple Tungsten " 5 /2 /2 N/A C EVS2B005W Call Tungsten " 5 /2 /2 N/A C EVS2B00W Call Tungsten " 5 /2 /2 N/A C EVS2B05W Call Tantalum " 5 /2 /2 N/A C EVS2B005TA Call Tantalum " 5 /2 /2 N/A C EVS2B00TA Call Molybdenum " 5 /2 /2 N/A C EVS2B005MO Call Molybdenum " 5 /2 /2 N/A C EVS2B00MO Call Double Dimple Boat Molybdenum 0.005" 5 4 /2 N/A C EVS28005MO Call Molybdenum.000" 5 4 /2 N/A C EVS2800MO Call Tantalum 0.005" 5 4 /2 N/A C EVS28005TA Call Tantalum 0.00" 5 4 /2 N/A C EVS2800TA Call Tungsten 0.005" 5 4 /2 N/A C EVS28005W Call Tungsten 0.00" 4 /2 N/A C EVS2800W Call Description Figure Thickness Pack A B C D E F Volts Amps Watts Temp. Part No. Price Inverted Top-Hat Dimple Boat Tungsten " 5 4 Tungsten " 4 Tungsten " 4 Tantalum " 4 Tantalum " 4 Molybdenum " 5 4 Molybdenum " 5 4 N/A N/A C EVS42005W Call N/A N/A C EVS4200W Call N/A N/A C EVS4205W Call N/A N/A C EVS4200TA Call N/A N/A C EVS4205TA Call N/A N/A C EVS4200MO Call N/A N/A C EVS4205MO Call -7

18 Thermal Boat Sources Boat Heaters Dimple Boat Sources Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. Figure (EVS7) The Part No. listed in the ordering table carries the boat material code. MO indicates molybdenum, TA indicates tantalum, and W indicates tungsten. Figure 2 (EVSA) Figure 5 (EVSD) Figure (EVSB) Figure 6 (EVSE) Figure 4 (EVSC) Figure 7 (EVSF) -8

19 Thermal Boat Sources Boat Heaters Dimple Boat Sources Description Figure Thickness Pack A B Volts Amps Watts Temp. Part No. Price Dimple Boat Tungsten 0.005" C EVS7005W Call Tungsten 0.00" C EVS700W Call Tantalum 0.005" C EVS7005TA Call Tantalum 0.00" C EVS700TA Call Molybdenum 0.005" C EVS7005MO Call Molybdenum 0.00" C EVS700MO Call Tungsten " 5 / C EVSA005W Call Tungsten " 5 / C EVSA00W Call Tungsten " 5 / C EVSA05W Call Tantalum " 5 / C EVSA005TA Call Tantalum " 5 / C EVSA00TA Call Molybdenum " 5 / C EVSA005MO Call Molybdenum " 5 / C EVSA00MO Call Tungsten 0.005" C EVSB005W Call Tungsten 0.00" C EVSB00W Call Tungsten 0.05" C EVSB05W Call Tantalum 0.005" C EVSB005TA Call Tantalum 0.00" C EVSB00TA Call Molybdenum 0.005" C EVSB005MO Call Molybdenum 0.00" C EVSB00MO Call Tungsten " C EVSC00W Call Tantalum " C EVSC00TA Call Tantalum " C EVSC05TA Call Molybdenum " C EVSC00MO Call Molybdenum " C EVSC05MO Call Tungsten " C EVSD00W Call Tantalum " C EVSD00TA Call Tantalum " C EVSD05TA Call Tantalum " C EVSD025TA Call Molybdenum " C EVSD00MO Call Molybdenum " C EVSD05MO Call Tungsten " C EVSE00W Call Tantalum " C EVSE00TA Call Tantalum " C EVSE05TA Call Tantalum " C EVSE025TA Call Molybdenum " C EVSE00MO Call Molybdenum " C EVSE05MO Call Tungsten " C EVSF00W Call Tantalum " C EVSF00TA Call Tantalum " C EVSF05TA Call Tantalum " C EVSF025TA Call Molybdenum " C EVSF00MO Call Molybdenum " C EVSF05MO Call NOTE: Refer to our Material Deposition Table starting on page 7-2 for technical help and thermal evaporation source recommendations. -

20 Thermal Boat Sources Boat Heaters Notched Boat Sources Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. The Part No. listed in the ordering table carries the boat material code. MO indicates molybdenum, TA indicates tantalum, and W indicates tungsten. Figure (EVS8A) Notched boats isolate the hot zone to the area between the notches. Figure 6 (EVS) Figure 2 (EVS8B) Figure (EVS8C) Figure 7 (EVS2) Figure 8 (EVS22) Figure 4 (EVS8D) Figure 5 (EVS0) Figure (EVS2) -20

21 Thermal Boat Sources Boat Heaters Description Figure Thickness Pack A B Volts Amps Watts Temp. Part No. Price Notched Dimple Tungsten 0.005" 5 / C EVS8A005W Call Tungsten 0.00" 5 / C EVS8A00W Call Tungsten 0.05" 5 / C EVS8A05W Call Tantalum 0.005" 5 / C EVS8A005TA Call Tantalum 0.00" 5 / C EVS8A00TA Call Molybdenum 0.005" 5 / C EVS8A005MO Call Molybdenum 0.00" 5 / C EVS8A00MO Call Tungsten " C EVS8B005W Call Tungsten " C EVS8B00W Call Tungsten " C EVS8B05W Call Tantalum " C EVS8B005TA Call Tantalum " C EVS8B00TA Call Molybdenum " C EVS8B005MO Call Molybdenum " C EVS8B00MO Call Tungsten 0.00" C EVS8C00W Call Tungsten 0.00" C EVS8C00TA Call Tantalum 0.05" C EVS8C05TA Call Tantalum 0.05" C EVS8C05MO Call Molybdenum 0.00" C EVS8C00MO Call Tungsten " C EVS8D00W Call Tantalum " C EVS8D00TA Call Tantalum " C EVS8D05TA Call Molybdenum " C EVS8D00MO Call Molybdenum " C EVS8D05MO Call Description Figure Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Notched Pan Dimple Boat Tungsten " C EVS0005W Call Tungsten " C EVS000W Call Tantalum " C EVS0005TA Call Tantalum " C EVS000TA Call Molybdenum " C EVS0005MO Call Molybdenum " C EVS000MO Call Notched Dimple Boat Tungsten " 5 N/A C EVS005W Call Tungsten " N/A C EVS00W Call Tantalum " 5 N/A C EVS005TA Call Tantalum " N/A C EVS00TA Call Molybdenum " 5 N/A C EVS005MO Call Molybdenum " 5 N/A C EVS00MO Call Notched Boat Tungsten " 5 / C EVS2005W Call Tungsten " / C EVS200W Call Tantalum " / C EVS2005TA Call Tantalum " / C EVS200TA Call Molybdenum " 5 / C EVS2005MO Call Molybdenum " 5 / C EVS200MO Call Tungsten " C EVS22005W Call Tungsten " C EVS2200W Call Tantalum " C EVS22005TA Call Tantalum " C EVS2200TA Call Molybdenum " C EVS22005MO Call Molybdenum " C EVS2200MO Call Deep Cup Notched Boat Tungsten 0.005" 5 / C EVS2005W Call Tungsten 0.00" / C EVS200W Call Tantalum 0.005" / C EVS2005TA Call Tantalum 0.00" / C EVS200TA Call Tantalum 0.05" / C EVS205TA Call Molybdenum 0.005" 5 / C EVS2005MO Call Molybdenum 0.00" 5 / C EVS2005M Call -2

22 Thermal Boat Sources Boat Heaters Canoe Boat Sources Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. Figure (EVS5) The Part No. listed in the ordering table carries the boat material code. MO indicates molybdenum, TA indicates tantalum, and W indicates tungsten. Figure 2 (EVS2) Figure 5 (EVS5) Figure (EVS) Figure 6 (EVS6) Figure 4 (EVS4) Figure 7 (EVS27) -22

23 Canoe Boat Sources Thermal Boat Sources Boat Heaters Description Figure Thickness Pack A B C D Volts Amps Watts Temp. Part No. Price Canoe Boat Tungsten 0.005" 5 Tantalum 0.005" 5 Tantalum 0.00" Molybdenum 0.005" 5 Molybdenum 0.00" 5 /2 4 N/A C EVS5005W Call /2 4 N/A C EVS5005TA Call /2 4 N/A C EVS500TA Call /2 4 N/A C EVS5005MO Call /2 4 N/A C EVS500MO Call Tantalum " 4 N/A C EVS2A005TA Call Tantalum " 4 N/A C EVS2A00TA Call Molybdenum " 5 4 N/A C EVS2A005MO Call Molybdenum " 5 4 N/A C EVS2A00MO Call Tantalum " /2 2 /2 N/A C EVS2B005TA Call Tantalum " /2 2 /2 N/A C EVS2B00TA Call Molybdenum " 5 /2 2 /2 N/A C EVS2B005MO Call Molybdenum " 5 /2 2 /2 N/A C EVS2B00MO Call Tungsten 0.005" 5 2 /2 4 N/A C EVS005W Call Tantalum 0.005" 2 /2 4 N/A C EVS005TA Call Tantalum 0.00" 2 /2 4 N/A C EVS00TA Call Molybdenum 0.005" 5 2 /2 4 N/A C EVS005MO Call Molybdenum 0.00" 5 2 /2 4 N/A C EVS00MO Call Tungsten " 5 2 /2 4 /2 Tungsten " 2 /2 4 /2 Tungsten " 2 /2 4 /2 Tantalum " 5 2 /2 4 /2 Tantalum " 2 /2 4 /2 Molybdenum " 5 2 /2 4 /2 Molybdenum " 5 2 /2 4 /2 / C EVS4005W Call / C EVS400W Call / C EVS405W Call / C EVS4005TA Call / C EVS400TA Call / C EVS4005MO Call / C EVS400MO Call Tungsten " N/A C EVS5005W Call Tungsten " N/A C EVS500W Call Tungsten " N/A C EVS505W Call Tantalum " N/A C EVS5005TA Call Tantalum " 2 4 N/A C EVS500TA Call Molybdenum " N/A C EVS5005MO Call Molybdenum " N/A C EVS500MO Call Tungsten " 5 7 Tungsten " 5 7 Tantalum " 5 7 Tantalum " 5 7 Molybdenum " 5 7 Molybdenum " 5 7 /6 N/A C EVS6005W Call /6 N/A C EVS600W Call /6 N/A C EVS6005TA Call /6 N/A C EVS600TA Call /6 N/A C EVS6005MO Call /6 N/A C EVS600MO Call Molybdenum " 5 N/A C EVS27005MO Call Molybdenum " 5 N/A C EVS2700MO Call Tantalum " N/A C EVS27005TA Call Tantalum " N/A C EVS2700TA Call Tungsten " 5 N/A C EVS27005W Call Tungsten " 5 N/A C EVS2700W Call NOTE: Refer to our Material Deposition Table starting on page 7-2 for technical help and thermal evaporation source recommendations. -2

24 Thermal Boat Sources Boat Heaters Holed/Covered Boat Sources Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. The Part No. listed in the ordering table carries the boat material code. MO indicates molybdenum, TA indicates tantalum, and W indicates tungsten. Figure (EVS7A) Figure 5 (EVS25) Figure 2 (EVS7B) Figure 6 (EVS26) Figure (EVS2) Figure 7 (EVS0) Figure 4 (EVS24) Figure 8 (EVS) -24

25 Holed/Covered Boat Sources Thermal Boat Sources Boat Heaters Description Figure Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Holed Boat Heater Tantalum 0.005" C EVS7A005TA Call Tantalum 0.00" C EVS7A00TA Call Tantalum " C EVS7B005TA Call Tantalum " C EVS7B00TA Call Description Figure Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Covered Boat Tungsten 0.00" C EVS200W Call Tantalum 0.00" C EVS200TA Call Molybdenum 0.00" C EVS200MO Call Covered Boat (2 Pieces) Molybdenum with Center Hole " C EVS24005MO Call Molybdenum with Center Hole " C EVS2400MO Call Tantalum with Center Hole " C EVS24005TA Call Tantalum with Center Hole " C EVS2400TA Call Tungsten with Center Hole " C EVS24005W Call Tungsten with Center Hole " C EVS2400W Call Molybdenum with End Hole " / C EVS2500MO Call Tantalum with End Hole " / C EVS2500TA Call Tungsten with End Hole " / C EVS2500W Call Molybdenum with Center Hole " / C EVS2600MO Call Tantalum with Center Hole " / C EVS2600TA Call Tungsten with Center Hole " / C EVS2600W Call Wrapped/Covered Boat (EVS24 with 0.005" Ta Overwrap to Seal) Tungsten " N/A C EVS0A00W Call Tantalum " N/A EVS0A00TA Call Molybdenum " N/A C EVS000MO Call Baffle Insert for EVS25 and EVS26 Boats Molybdenum " 4 N/A C EVS005MO Call Tantalum " 4 N/A C EVS005TA Call Tungsten " 4 N/A C EVS005W Call NOTE: Refer to our Material Deposition Table starting on page 7-2 for technical help and thermal evaporation source recommendations. Related products: Browse our deposition materials offering in Section 0. Custom materials available, contact sales@lesker.com. -25

26 Thermal Boat Sources Boat Heaters Well Boat Sources Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. Figure (EVS7) The Part No. listed in the ordering table carries the boat material code. MO indicates molybdenum, TA indicates tantalum, and W indicates tungsten. Figure 2 (EVS) Figure (EVS40) Description Figure Thickness Pack A B C D E F Volts Amps Watts Temp. Part No. Price Inverted Top-Hat Deep Well Boat Tantalum 0.005" /6 /2 /6 N/A N/A C EVS7005TA Call Tantalum 0.00" /6 /2 /6 N/A N/A C EVS700TA Call Molybdenum 0.005" 5 /6 /2 /6 N/A N/A C EVS7005MO Call Molybdenum 0.00" 5 /6 /2 /6 N/A N/A C EVS700MO Call Well Boat Tantalum " 5 /6 N/A N/A N/A C EVS005TA Call Tantalum " 5 /6 N/A N/A N/A C EVS00TA Call Molybdenum " 5 /6 N/A N/A N/A C EVS005MO Call Molybdenum " 5 /6 N/A N/A N/A EVS00MO Call Inverted Top-Hat Well Boat Tungsten 0.005" 5 /2 /2 N/A N/A N/A C EVS40005W Call Tantalum 0.005" 5 /2 /2 N/A N/A N/A C EVS40005TA Call Tantalum 0.00" /2 /2 N/A N/A N/A C EVS4000TA Call Molybdenum 0.005" 5 /2 /2 N/A N/A N/A C EVS40005MO Call Molybdenum 0.00" 5 /2 /2 N/A N/A N/A EVS4000MO Call -26

27 Wide Dish Boat Sources Thermal Boat Sources Boat Heaters Figure (EVS6) Figure 2 (EVS8) Figure (EVS4) " DEEP A B Description Figure Thickness Pack A B C D E F Volts Amps Watts Temp. Part No. Price Wide Dish Boat Tungsten 0.00" 2 4 N/A N/A N/A C EVS600W Call Tantalum 0.00" 2 4 N/A N/A N/A C EVS600TA Call Tantalum 0.05" 2 4 N/A N/A N/A C EVS605TA Call Molybdenum 0.005" N/A N/A N/A EVS6005MO Call Top-Hat Wide Dish Boat Tungsten " 5 /2 2 / C EVS8005W Call Tungsten " /2 2 / C EVS800W Call Tantalum " /2 2 / C EVS8005TA Call Tantalum " /2 2 / C EVS800TA Call Molybdenum " 5 /2 2 / C EVS8005MO Call Molybdenum " 5 /2 2 / C EVS800MO Call Inverted Top-Hat Wide Dish Boat Tungsten 0.005" 4 N/A N/A C EVS4005W Call Tungsten 0.00" 4 N/A N/A C EVS400W Call Tungsten 0.05" 4 N/A N/A C EVS405W Call Tantalum 0.00" 4 N/A N/A C EVS400TA Call Tantalum 0.05" 4 N/A N/A C EVS405TA Call Molybdenum 0.00" 5 4 N/A N/A C EVS400MO Call Molybdenum 0.05" 5 4 N/A N/A C EVS405MO Call C D -27

28 Thermal Boat Sources Boat Heaters Elongated Dimple Boat (cc Vol.) Boat Sources Description Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Elongated Dimple Evaporation Boat (cc Vol.) Tungsten 0.00" 5 / C EVSA00W Call Tantalum 0.00" 5 / C EVSA00TA Call Molybdenum 0.00" / C EVSA00MO Call Flat Boat Sources Figure (EVS5) Figure 2 (EVS46) Description Figure Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Flat Boat Tungsten 0.005" 5 / C EVS5005W Call Tungsten 0.00" 5 / C EVS500W Call Tantalum 0.005" 5 / C EVS5005TA Call Tantalum 0.00" 5 / C EVS500TA Call Molybdenum 0.005" 5 / C EVS5005MO Call Molybdenum 0.00" 5 / C EVS500MO Call Flat Boat Tungsten " 5 4 / C EVS46005W Call Tungsten " 4 / C EVS4600W Call Tantalum " 4 / C EVS46005TA Call Tantalum " 4 / C EVS4600TA Call Molybdenum " 5 4 / C EVS46005MO Call Molybdenum " 5 4 / C EVS4600MO Call Slab Boat Sources Description Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Slab Heater Carbon 0.25" 4 / C EVS8C Call Boron Nitride 0.25" 4 /2 EVS8BN Call -28

29 Closed End Tube Boat Sources Thermal Boat Sources Boat Heaters Description Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Closed End Tube Heater ( " I.D.) Tantalum 0.25" N/A / C EVSATA Call Tantalum 0.25" N/A N/A / C EVSBTA Call Tantalum 0.25" /2 N/A N/A C EVSCTA Call Crucible Boat Sources Description Thickness Pack A B C Volts Amps Watts Temp. Part No. Price Crucible Heater Bowl (for EVC and EVC Crucibles) Tungsten 0.00" /6 4 N/A C EVS200W Call NOTE: Related products, crucibles can be found on pages -44 to -45. NOTE: Refer to our Material Deposition Table starting on page 7-2 for technical help and thermal evaporation source recommendations. -2

30 Thermal Boat Sources Alumina-Coated Boat Heaters Boats Al2O Coated (EVSA-A) Developed to replace alumina crucibles for specific applications Offer good heat transfer Mostly inert in contact with hot metals Evaporant metals do not wet alumina, resulting in the melt forming a sphere that acts as a point source Heater resistance does not change throughout the deposition since evaporant does not touch the underlying heater material Refer to our Material Deposition Table starting on page 7-2 for recommendations on specific thermal sources for given evaporated materials. Because the alumina increases the thermal resistance between heater and evaporant, coated sources require 0 50% more power to achieve the same evaporation rate as an identical but uncoated boat. Another important difference is the thermal lag created by the alumina coating. Any measurement of temperature in the region of the melt will not be the equilibrium temperature unless the power is raised very slowly. Typically, users do not have time for this slow rise and put excess power into the heater until the right evaporation rate is reached. Unfortunately, unless this excess power is then quickly reduced, the melt temperature will quickly rise above the optimum rate value. Figure (EVS) NOTE: Coated heaters can have a longer usable life than non-coated sources when using care in handling and operation. The alumina is semiconductor grade and is applied by a plasma spray technique to a thickness of 0.005". The ends of the boat are unsprayed to allow successful connection to the power supply clamps. Coated boats should not be used where the heater temperature must exceed 850 C to achieve the required evaporation rate. Figure 2 (EVS2) Figure (EVS) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Alumina-Coated Narrow Trough Top-Hat Heater Molybdenum 5 Tungsten Alumina-Coated Inverted Top-Hat Dimpled Boat Heater Molybdenum 2 5 /2 Tungsten 2 /2 Alumina-Coated Inverted Top-Hat Trough Heater Molybdenum 5 /2 Tungsten 5 / C EVSAOMO Call C EVSAOW Call /2 N/A C EVS2BAOMO Call /2 N/A C EVS2BAOW Call N/A C EVSAOMO Call N/A C EVSAOW Call -0

31 Boats Al2O Coated Thermal Boat Sources Alumina-Coated Boat Heaters Figure (EVS8) Figure 4 (EVSC) Figure 2 (EVSA) Figure 5 (EVSF) Figure (EVSB) Figure 6 (EVS2) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Alumina-Coated Notched Dimple Boat Heater Molybdenum 5 4 N/A N/A C EVS8CAOMO Call Tungsten 4 N/A N/A C EVS8CAOW Call Alumina-Coated Dimple Boat Molybdenum /2 N/A N/A C EVSAAOMO Call Tungsten /2 N/A N/A C EVSAAOW Call Molybdenum 5 4 N/A N/A C EVSBAOMO Call Tungsten 4 N/A N/A C EVSBAOW Call Molybdenum N/A N/A C EVSCAOMO Call Tungsten 4 4 N/A N/A C EVSCAOW Call Alumina-Coated Dimple Wide Boat Molybdenum N/A N/A C EVSFAOMO Call Tungsten N/A N/A C EVSFAOW Call Alumina-Coated Notched Long Trough Boat Molybdenum N/A N/A C EVS2AOMO Call Tungsten 6 4 N/A N/A C EVS2AOW Call -

32 Thermal Boat Sources Alumina-Coated Boat Heaters Boats Al2O Coated Developed to replace alumina crucibles for specific applications Mostly inert in contact with hot metals Evaporant metals do not wet alumina, resulting in the melt forming a sphere that acts as a point source Figure (EVS6A) Figure (EVS2) Figure 4 (EVS7) Figure 2 (EVS5A) Figure 5 (EVS8A) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Alumina-Coated Notched Dimple Boat Molybdenum 4 /6 N/A N/A C EVS2AOMO Call Tungsten 4 /6 N/A N/A C EVS2AOW Call Alumina-Coated Flat Boat Molybdenum 2 5 /2 N/A C EVS5AAOMO Call Tungsten 2 5 /2 N/A C EVS5AAOW Call Alumina-Coated Long Trough Boat Molybdenum N/A C EVS6AOMO Call Tungsten 4 2 N/A C EVS6AOW Call Deep-Dimple Boat Heater-Molybdenum 4 5 /2 /6 N/A C EVS7AOMO Call Alumina-Coated Top-Hat Trough Boat Molybdenum 5 / C EVS8AAOMO Call Tungsten 5 / C EVS8AAOW Call -2

33 Boats Al2O Coated (EVS5B 45B) Figure (EVS5B) Thermal Boat Sources Alumina-Coated Boat Heaters Figure 2 (EVS8B) Figure (EVS42) Figure 4 (EVS45) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Alumina-Coated Flat Trought Boat Molybdenum 5 /2 N/A N/A C EVS5BAOMO Call Tungsten 5 /2 N/A N/A C EVS5BAOW Call Alumina-Coated Top-Hat Trough Boat Molybdenum 2 / C EVS8BAOMO Call Tungsten 2 / C EVS8BAOW Call Alumina-Coated Inverted Top-Hat Dimple Molybdenum 5 4 N/A C EVS42BAOMO Call Tungsten 4 N/A C EVS42BAOW Call Alumina-Coated Double-Step Top-Hat Trough Boat Molybdenum 4 4 N/A C EVS45BAOMO Call Tungsten 4 4 N/A C EVS45BAOW Call Boats Microelectronics (EVSMEA A) Figure (EVSME) Figure (EVSME6) Figure 4 (EVSME) Figure 2 (EVSME4) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Alumina-Coated Molybdenum Narrowed Trough Heater 5 7 N/A C EVSMEAOMO Call Molybdenum Dimple Boat Heater /2 N/A C EVSME4AOMO Call Molybdenum Inverted Top-Hat Dimple Boat Heater 5 7 /2 N/A C EVSME6BAOMO Call Molybdenum Inverted Top-Hat Trough Heater N/A C EVSMEAOMO Call -

34 Thermal Boat Sources Boat Heaters for Microelectronics Boats Microelectronics (EVSME 6B) Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. Figure (EVSME5) The Part No. listed in the ordering table carries the boat material code. MO indicates molybdenum, TA indicates tantalum, and W indicates tungsten. Figure (EVSME) Figure 4 (EVSME6A) Figure 2 (EVSME4) Figure 5 (EVSME6B) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Trough Boat for Microelectronics Tungsten C EVSME005W Call Tantalum C EVSME005TA Call Molybdenum C EVSME005MO Call Dimple Boat for Microelectronics Tungsten 2 5 /2 7 N/A N/A C EVSME4005W Call Tantalum 2 5 /2 7 N/A N/A C EVSME4005TA Call Molybdenum 2 5 /2 7 N/A N/A C EVSME4005MO Call Tungsten 5 /2 7 N/A N/A C EVSME5005W Call Tantalum 5 /2 7 N/A N/A C EVSME5005TA Call Molybdenum 5 /2 7 N/A N/A C EVSME5005MO Call Dimple Top-Hat for Microelectronics Tungsten 4 5 /2 7 N/A C EVSME6A005W Call Tantalum 4 5 /2 7 N/A C EVSME6A005TA Call Molybdenum 4 5 /2 7 N/A C EVSME6A005MO Call Dimple Inverted Top-Hat for Microelectronics Tungsten 5 5 /2 7 N/A C EVSME6B005W Call Tantalum 5 5 /2 7 N/A C EVSME6B005TA Call Molybdenum 5 5 /2 7 N/A C EVSME6B005MO Call -4

35 Thermal Boat Sources Boat Heaters for Microelectronics Boats Microelectronics (EVSME 7 2) Figure (EVSME7) Figure 2 (EVSME8) Figure (EVSME) Figure 4 (EVSME0) Figure 5 (EVSME2) Note: " tube diameter crimped at both ends. Description Figure Pack A B C Volts Amps Watts Temp. Part No. Price Dimple Top-Hat for Microelectronics Tungsten 5 7 / C EVSME7005W Call Tantalum 5 7 / C EVSME7005TA Call Molybdenum 5 7 / C EVSME7005MO Call Notched Dimple Boat for Microelectronics Tungsten /2 N/A C EVSME8005W Call Tantalum /2 N/A C EVSME8005TA Call Molybdenum /2 N/A C EVSME8005MO Call Thin Trough for Microelectronics Tungsten C EVSME005W Call Tantalum C EVSME005TA Call Molybdenum C EVSME005MO Call Canoe for Microelectronics Tantalum 4 7 ~ 2 / C EVSME0005TA Call Notched Trough for Microelectronics Tungsten N/A C EVSME2005W Call Tantalum N/A C EVSME2005TA Call Molybdenum N/A C EVSME2005MO Call Covered Boats Microelectronics Figure (EVSME2) Figure 2 (EVSME24) Description Figure Pack A B Volts Amps Watts Temp. Part No. Price Covered Boat with Side Hole for Microelectronics Tungsten 5 7 Tantalum 7 Molybdenum 5 7 Covered Boat with End Hole for Microelectronics Tungsten Tantalum 2 7 Molybdenum C EVSME2005W Call C EVSME2005TA Call C EVSME2005MO Call C EVSME24005W Call C EVSME24005TA Call C EVSME24005MO Call -5

36 Thermal Box Sources Tantalum Box Heaters Baffled Boxes Tantalum Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. When heating the same material multiple times, these boat heaters are sometimes satisfactory for more than a single-time use. Select tantalum baffle box and the appropriate baffle cover per application. Tantalum Baffled Boxes Figure (B) Figure 4 (B2 B5) Figure 2: Holed Cover for Box (B) Holed Covers for Baffled Boxes Sieve Covers for Baffled Boxes Figure 5: Holed Cover for Box (B2, B4) Figure : Sieve Cover for Box (B, B) Figure 6: Sieve Cover for Box (B4, B5) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Tantalum Baffle Box (B) /2 2 / C EVSSB Call Holed Cover 2 4 /2 2 N/A N/A C EVSSBA Call Sieve Cover 4 /2 2 N/A N/A C EVSSBB Call Tantalum Baffle Box (B2) 4 4 / C EVSSB2 Call Holed Cover 5 4 /6 N/A N/A C EVSSB2A Call Sieve Cover 6 4 /6 N/A N/A C EVSSB2B Call -6

37 Baffled Boxes Tantalum Thermal Box Sources Tantalum Box Heaters Tantalum Baffled Boxes Figure (B) Figure 2 (B2 B5) Holed Covers for Baffled Boxes Figure A: Holed Cover for Box (B2, B4) Figure A: Holed Cover for Box (B) Figure 2A: Holed Cover for Box (B5) Sieve Covers for Baffled Boxes Figure B: Sieve Cover for Box (B, B) Figure 4A: Holed Cover for Box (B6) Figure B: Sieve Cover for Box (B2) Figure 2B: Sieve Cover for Box (B4, B5) Figure 4B: Sieve Cover for Box (B6) Description Figure Pack A B C D Volts Amps Watts Temp. Part No. Price Tantalum Baffle Box (B) 2 2 / C EVSSB Call With Holed Cover A 2 /6 N/A N/A C EVSSBA Call With Sieve Cover B 2 /6 N/A N/A C EVSSBB Call Tantalum Baffle Box (B4) C EVSSB4 Call With Holed Cover A 4 N/A N/A C EVSSB4A Call With Sieve Cover 2B 4 N/A N/A C EVSSB4B Call Tantalum Baffle Box (B5) C EVSSB5 Call With Holed Cover 2A N/A N/A C EVSSB5A Call With Sieve Cover B N/A N/A C EVSSB5B Call Tantalum Baffle Box (B6) /2 2 / C EVSSB6 Call With Holed Cover 4A /2 N/A N/A C EVSSB6A Call With Sieve Cover 4B /2 N/A N/A C EVSSB6B Call -7

38 Thermal Box Sources Tantalum Box Heaters for Microelectronics Baffled Boxes Microelectronics Used for relatively high vapor pressure materials that may spit during evaporation Figure is a single structure combining box, lid with hole, and thermal radiation shields made from tantalum Figures 2A, 2B, and 2C are, respectively, the wide box body, holed lid, and sieve lid of a two-part baffle box structure Choose a heater shape that best matches the substrate s area requirements and the characteristics or form of material you plan to heat. Heaters can sometimes be used more than once when heating the same material, but often the evaporant seals the lid to the body, making separation impossible and, therefore, preventing fresh material from being placed in the correct location. Figure 2: Baffled Box Figure (EVSME) Figure 2 (EVSME2 & EVSME22) Figure 2B: Sieve Cover for Baffled Box Figure 2A: Holed Cover for Baffled Box Dimensions (in.) Power Requirements Description Figure No. per Pack A B C D Volts Amps Watts Temp. Part No. Price Tantalum Baffled Box For SiO & CdS Capacity 2g 7 5 / C EVSME Call Tantalum Box C EVSME2 Call Holed Cover for EVSME2 2A N/A N/A N/A EVSME2A Call Sieve Cover for EVSME2 2B.060 N/A N/A N/A EVSME2B Call Tantalum Box C EVSME22 Call Holed Cover for EVSME22 2A N/A N/A N/A EVSME22A Call Sieve Cover for EVSME22 2B.060 N/A N/A N/A EVSME22B Call -8

39 Baffled Boxes SiO Excellent thermal sources for depositing thin film of silicon monoxide. How they work: Thermal Box Sources SiO Box Heaters Additional information: The box is loaded with SiO before use (not exceeding the weight indicated for that box) Bulk SiO is held in compartment(s) indirectly connected to the chimney As the box is heated, the SiO vapor is forced to flow through a series of baffles before exiting at the chimney Since there is no line of sight between the bulk material and the substrate surface, the deleterious effects of spitting or streaming on the depositing film are eliminated Construction from Tantalum Available in non-rechargeable and rechargeable named to reflect the location of the initial charging or recharging A rechargeable box can be filled through one or two lids while still mounted on its electrical feedthroughs in the vacuum chamber A non-rechargeable box must be dismounted from its electrical feedthroughs and disassembled before charging or re-charging Both styles offer long life and can be recharged many times Designed with two evaporation plume directions upward vertical or downward inverted (by turning either source on its side, a "horizontal" plume can be arranged) Figure (EVSSM 8-7) Vertical Non-Rechargeable Boxes for Up Evaporation Weight Description Figure SiO Pack A B C D E (I.D.) Volts Amps Watts Temp. Part No. Price Vertical.5 g /2 7 Vertical 5 g /2 7 2 /2 Vertical 0 g 5 Vertical 20 g Vertical 40 g 4 /2 Inverted Non-Rechargeable Baffled Boxes for Down Evaporation C EVSSM8 Call C EVSSM0 Call C EVSSM2 Call / C EVSSM4 Call / C EVSSM6 Call Weight Description Figure SiO Pack A B C D E (I.D.) Volts Amps Watts Temp. Part No. Price Inverted.5 g /2 7 Inverted 5 g /2 7 2 /2 Inverted 0 g 5 Inverted 20 g Inverted 40 g 4 / C EVSSM Call C EVSSM Call / C EVSSM Call / C EVSSM5 Call / C EVSSM7 Call NOTE: The inverted style have the same dimensions as the vertical style shown above. However, the internal baffles are reversed which allows the box to be mounted in an inverted position where the exhaust port points down. Rechargeable Baffled Boxes (See next page) -

40 Thermal Box Sources SiO Box Heaters Baffled Boxes SiO Figure (EVSS020) Figure (EVSS00) Figure 2 (EVSS022) Figure 5 (EVSS026) Figure 4 (EVSS02) Rechargeable Baffled Boxes Weight Description Figure SiO Pack A B C D E Volts Amps Watts Temp. Part No. Price Vertical with Loading Cap.5 g 5 N/A / C EVSSO20 Call Inverted with Loading Cap.5 g 5 N/A / C EVSSO2 Call Vertical with Loading Cap g 2 /2 7 / C EVSSO22 Call Inverted with Loading Cap g 2 /2 7 / C EVSSO2 Call Vertical with 2 Loading Caps 6.5 g 2 /2 7 / C EVSSO0 Call Inverted with 2 Loading Caps 6.5 g 2 /2 7 / C EVSSO Call Vertical with 2 Loading Caps 4 g C EVSSO24 Call Inverted with 2 Loading Caps 4 g C EVSSO25 Call Side (Horizontal) with 2 Loading Caps 5 g C EVSSO26 Call -40

41 Baffled Boxes Al2O Coated Thermal Box Sources Baffled Al2O Box Heaters These boxes offer good heat transfer and are mostly inert in contact with hot metals. Developed to replace alumina crucibles for specific applications Evaporant metals don t wet alumina, resulting in the melt forming a sphere that acts as a point source Heater resistance doesn t change throughout the deposition since evaporant won t touch the underlying heater material With care, heaters can have a longer useable life than non-coated sources The alumina is a semiconductor grade and is applied by a plasma spray technique to a thickness of 0.005" The ends of the boat are unsprayed to enable successful connection to the power supply clamps Coated boats should not be used where the heater temperature must exceed 850 C to achieve the required evaporation rate Because the alumina increases the thermal resistance between heater and evaporant, coated sources require 0 50% more power to achieve the same evaporation rate as an identical but uncoated boat. Another important difference is the thermal lag created by the alumina coating. Any measurement of temperature in the region of the melt will not be the equilibrium temperature unless the power is raised slowly. Typically, users do not have time for this slow rise, putting excess power into the heater until the right evaporation rate is reached. Unless this excess power is quickly reduced, the melt temperature will rapidly rise above the optimum rate value. Figure (EVSME22) Figure A: Baffled Box Figure 2A: Baffled Box Figure B: Holed Cover for Baffled Box Figure 2 (EVSSB5) Figure 2B: Holed Cover for Baffled Box Figure (EVSSB) Figure A: Baffled Box Figure B: Holed Cover for Baffled Box Dimensions (in.) Description Figure No. per Pack A B C D Part No. Price Alumina-Coated Tantalum Box Heater A 7 5 EVSME22BAO Call Cover for Box Heater (EVSME22BAOTA) B 7 5 N/A N/A EVSME22AAO Call Alumina-Coated Tantalum Box Heater 2A 2 EVSSB5AO Call Cover for Box Heater (EVSSB5AOTA) 2B N/A N/A EVSSB5AAOTA Call Alumina-Coated Tantalum Box Heater A 2 /6 EVSSBAOTA Call Cover for Box Heater (EVSSBAOTA) B 2 /6 N/A N/A EVSSBAAOTA Call -4

42 Thermal Rod Sources Chrome-Plated Tungsten Rods Chrome-Plated Tungsten Rods Used to produce thin films of chromium by evaporation in the electronics and optics industries. Advantages over chromium chips: Good thermal efficiency Better regulation of film thickness Elimination of spalling.% pure Cr NOTE: Custom-built dimensions may be available. Description Pack A B C D Volts Amps Watts Temp. Part No. Price Chrome-Plated Tungsten Rods " 0.070" 0.050" 2" C EVSCRW Call " 0.070" 0.050" 4" C EVSCRW2 Call " 0.070" 0.050" 6" C EVSCRW Call Don t let your supplies evaporate! Whether you re working on research or production, Kurt J. Lesker Company offers a wide variety of inorganic evaporation materials to serve your needs. Our evaporation materials are ideal for use in these industries: vacuum metallizing, optical coating, electronic device manufacture, university and research institutions, and more. Choose from a vast assortment of metals in pellet form Popular sizes include " diameter x " long; and " diameter x " long Sold in g bottles (production customers can also purchase larger pound and kilogram quantities) Additional products are available in irregular forms, sizes, and packaging contact sales@lesker.com for more information To view our selection of evaporation materials in various forms and purities, see pages 0-4 through 0-2 or us at materials@lesker.com -42

43 Crucibles & Crucible Heaters Crucible Basket Heaters Crucible Basket Heaters Choose a basket heater that matches the crucible you plan to heat. Figure (EVB) NOTE: These heaters can frequently be re-used, providing they are not affected by the vapor of the material being evaporated or by the melt, should the crucible spill. Heater does not include crucible. Figure 4 (EVB0) Figure (EVB8A) Figure 2 (EVB8B) Figure 5 (EVB) For Description Crucible Figure Pack A B C Volts Amps Watts Temp. Part No. Price Tungsten Basket Heater Wire x.025" EVC 5 /2 / C EVB8A025W Call Wire x.00" EVC 5 /2 / C EVB8A00W Call Wire x.025" EVC 2 5 /2 / C EVB8B025W Call Wire x.00" EVC 2 5 /2 / C EVB8B00W Call Wire x.00" EVC C EVB00W Call 4 Wire x.00" EVC C EVB400W Call Wire x.040" EVC C EVB040W Call 4 Wire x.00" EVC C EVB0400W Call Wire x.040" EVC C EVB0040W Call Wire x.040" EVC6 5 5 / C EVB040W Call -4

44 Crucibles & Crucible Heaters Crucibles for Thermal Sources Crucibles: Thermal Sources The crucibles illustrated below fit into tungsten baskets Select from six different materials Figure (EVC) Figure 2 (EVC2) Figure (EVC) Figure 4 (EVC4) Figure 5 (EVC5) Figure 6 (EVC6) Figure 7 (EVC7) -44

45 Crucibles: Thermal Sources Crucibles & Crucible Heaters Crucibles for Thermal Sources Figure 8 (EVC8) Figure (EVC) Figure 0 (EVC0) No. per Dimensions (in.) Description Figure Pack A B C Part No. Price Aluminum Oxide Crucible for EVB8A, EVCH, EVCH0, EVCH, EVSME Heaters EVCAO Call Quartz Crucible for EVB8A, EVCH, EVCH0, EVCH, EVSME Heaters EVCQ Call Boron Nitride Crucible for EVB8A, EVCH, EVCH0, EVCH, EVSME Heaters EVCBN Call Quartz Crucible for EVB Heaters N/A EVC2Q Call Quartz Crucible N/A EVCQ Call Tantalum Crucible EVC4TA Call Molybdenum Crucible EVC4MO Call Carbon Crucible EVC4C Call Aluminum Oxide Crucible for EVB0, EVCH5, EVCH2, EVCH Heaters EVC5AO Call Quartz Thermal Crucible for EVB0, EVCH5, EVCH2, EVCH Heaters EVC5Q Call Boron Nitride Crucible for EVB0, EVCH5, EVCH2, EVCH Heaters EVC5BN Call Aluminum Oxide Crucible for EVB, EVCH4 Heaters EVC6AO Call Quartz Thermal Crucible for EVB, EVCH4 Heaters EVC6Q Call Boron Nitride Crucible for EVCH7 Heaters EVC7BN Call Carbon Crucible for EVCH7 Heaters EVC7C Call Quartz Crucible for EVCH7 Heaters EVC7Q Call Tantalum Crucible for EVCH7 Heaters EVC7TA Call Molybdenum Crucible for EVCH7 Heaters EVC7MO Call Boron Nitride Crucible for EVCH8 Heaters EVC8BN Call Carbon Crucible for EVCH8 Heaters EVC8C Call Quartz Crucible for EVCH8 Heaters EVC8Q Call Tantalum Crucible for EVCH8 Heaters EVC8TA Call Molybdenum Crucible for EVCH8 Heaters EVC8MO Call Aluminum Oxide Crucible for EVB8B, EVCH, EVCH0, EVCH, EVSME Heaters N/A EVCAO Call Quartz Crucible for EVB8B, EVCH, EVCH0, EVCH, EVSME Heaters N/A EVCQ Call Boron Nitride Crucible for EVB8B, EVCH, EVCH0, EVCH, EVSME Heaters N/A EVCBN Call Tantalum Crucible for EVB8B, EVCH, EVCH0, EVCH, EVSME Heaters N/A EVCTA Call Molybdenum Crucible for EVB8B, EVCH, EVCH0, EVCH, EVSME Heaters N/A EVCMO Call Carbon Crucible for EVB8B, EVCH, EVCH0, EVCH, EVSME Heaters N/A EVCC Call Boron Nitride Crucible for EVCH, EVSME20 Heaters EVC0BN Call Carbon Crucible for EVCH, EVSME20 Heaters EVC0C Call Quartz Crucible for EVCH, EVSME20 Heaters EVC0Q Call Tantalum Crucible for EVCH, EVSME20 Heaters EVC0TA Call Molybdenum Crucible for EVCH, EVSME20 Heaters EVC0MO Call -45

46 Crucibles & Crucible Heaters Crucible Box Heaters Crucible Box Heaters Designed to heat various sizes of crucibles. Provides more uniform heat than simple wire basket heaters Models listed include radiation shields that: Protect delicate instrumentation from overheating Protect chambers from heat Concentrate the heat source toward the crucible Figure (EVCH) Figure 4 (EVCH8) Figure 2 (EVCH5) Figure 5 (EVSME) Figure (EVCH7) Figure 6 (EVSME20) -46

47 Crucibles & Crucible Heaters Crucible Box Heaters Figure 7 (EVCH) Figure 0 (EVCH2) Figure 8 (EVCH0) Figure (EVCH) Figure (EVCH) Figure (EVS2) Figure 2 (EVCH4) No. per Dimensions (in.) Description Figure Pack A B C Volts Amps Watts Temp. Part No. Price Tantalum Crucible Heater box heater for: EVC and EVC C EVCH Call EVC C EVCH5 Call EVC C EVCH7 Call EVC C EVCH8 Call EVC and EVC 5 2 / C EVSME Call EVC0 6 2 / C EVSME20 Call EVC0 7 / C EVCH Call EVC and EVC C EVCH0 Call EVC and EVC C EVCH Call EVC5 0 / C EVCH2 Call EVC5 / C EVCH Call EVC C EVCH4 Call Tungsten Boat Heater for: EVC and EVC /6 4 N/A C EVS200W Call -47

48 Crucibles Liners Crucibles Liners for E-Beam Sources Reference Table: Hearth & Crucibles Listed by Manufacturer Original Source Pocket Hearth KJLC Crucible Manufacturer Model Size Pockets Model Balzers ESQ-0 7cc 4 EVCEB-4 ESQ- 0cc 4 EVCEB- or EVCEB-M+ or EVCEB-M FerroTec EVM- 8cc EVCEB-4 EVM- 40cc EVCEB-6 EVM- 00cc Call EVM-6 2cc 8 Call EVM-6 4cc 6 EVCEB-22 EVM-6 8cc 4 EVCEB-4 EVM-8 2cc 8 Call EVM-8 20cc 6 EVCEB-2 EVM-8 5cc 4 Call KJLC KL- 8cc EVCEB-4 KL- 40cc EVCEB-6 KL- 00cc Call KL-6 2cc 8 Call KL-6 4cc 6 EVCEB-22 KL-6 8cc 4 EVCEB-4 KL-8 2cc 8 Call KL-8 20cc 6 EVCEB-2 KL-8 5cc 4 Call Temescal SFIH-270-7cc EVCEB-4 SFIH-270-7cc EVCEB-4 SFIH-270-CK 7cc EVCEB-4 SFIH cc EVCEB-4 SFIH-270-2CK 7cc EVCEB-4 SFIH cc EVCEB- or EVCEB-M SFIH-270-2CK 5cc EVCEB- or EVCEB-M Germini 5cc EVCEB- or EVCEB-M Trigon 5cc EVCEB- or EVCEB-M SFIH cc EVCEB-6 SFIH-270-2CK 25cc EVCEB-6 SFIH-270-CK 25cc EVCEB-25 or EVCEB-25M SFIH cc EVCEB-6 or EVCEB-6M SFIH-270-CK 40cc EVCEB-6 or EVCEB-6M SFIH cc EVCEB-2M BOC Edwards EB 4cc EVCEB-0 MDC e-vap 000 2cc EVCEB-20 e-vap Mighty Source 2cc 4 EVCEB-20 EV cc 4 EVCEB-5 EV UHV 6cc 4 EVCEB-5 EV-FMP-0HUHV 6cc 4 EVCEB-5 EV-0RHUHV 6cc 4 EVCEB-5 EV HF 7cc EVCEB-2 EV-FMP-8H 7cc EVCEB-2 EV-FMP-8RH 7cc EVCEB-2 EV-FMP-0H 7cc EVCEB-2 EV-FMP-0RH 7cc EVCEB-2 EV-FMP-0V 7cc EVCEB-2 EV-FMP-0RV 7cc EVCEB-2 EV HF 2cc 6 EVCEB- EV HF 5cc EVCEB- or EVCEB-M EV cc 4 EVCEB- or EVCEB-M EV UHV-HF 5cc 4 EVCEB- or EVCEB-M EV HF 5cc 4 EVCEB- or EVCEB-M EV HF 25cc EVCEB-25 EV cc 4 EVCEB-25 EV HF 25cc 4 EVCEB-25 EV HF 25cc 6 EVCEB-25 Original Source Pocket Hearth KJLC Crucible Manufacturer Model Size Pockets Model EV HF 0cc 4 EVCEB- or EVCEB-M EV HF 0cc 4 EVCEB- or EVCEB-M EV HF 40cc EVCEB-8 or EVCEB-8M EV HF 40cc 4 EVCEB-8 or EVCEB-8M EV I-HF 40cc 6 EVCEB-8 or EVCEB-8M EV HF 40cc 6 EVCEB-8 or EVCEB-8M EV HF 00cc EVCEB-27 Telemark cc EVCEB cc EVCEB cc EVCEB cc EVCEB cc EVCEB- or EVCEB-M cc 4 EVCEB cc 4 EVCEB cc 4 EVCEB cc 4 EVCEB cc 6 EVCEB cc 4 EVCEB cc 4 EVCEB- or EVCEB-M cc 4 EVCEB-6 or EVCEB-6M cc 6 EVCEB cc 6 EVCEB cc 6 EVCEB- or EVCEB-M cc 8 EVCEB cc 6 EVCEB-6 or EVCEB-6M cc EVCEB cc EVCEB cc EVCEB- or EVCEB-M cc EVCEB-6 or EVCEB-6M cc EVCEB- or EVCEB-M+ or EVCEB-M cc 6 EVCEB-6 or EVCEB-6M cc EVCEB cc 6 EVCEB-25 or EVCEB-25M cc 6 EVCEB- or EVCEB-M+ or EVCEB-M cc 4 EVCEB-6 or EVCEB-6M cc 2 EVCEB cc 8 EVCEB- or EVCEB-M cc 8 EVCEB-25 or EVCEB-25M cc 6 EVCEB-6 or EVCEB-6M cc 6 EVCEB cc 0 EVCEB-6 or EVCEB-6M cc 6 EVCEB cc 4 EVCEB cc 4 EVCEB cc 4 EVCEB- or EVCEB-M cc 4 EVCEB-6 or EVCEB-6M cc w/ web 4 EVCEB cc w/o web 4 EVCEB- or EVCEB-M+ or EVCEB-M cc 6 EVCEB cc 6 EVCEB- or EVCEB-M cc 6 EVCEB-25 or EVCEB-25M cc 4 EVCEB-6 or EVCEB-6M cc 4 EVCEB-6 or EVCEB-6M cc & 25cc 2 & 2 EVCEB- or EVCEB-M & EVCEB-6 or EVCEB-6M -48

49 Original Source Pocket Hearth KJLC Crucible Manufacturer Model Size Pockets Model cc & 0cc & EVCEB- or w/ web EVCEB-M cc 8 EVCEB cc & 25cc & EVCEB- or EVCEB-M & EVCEB-6 or EVCEB-6M cc & 2cc 4 & 4 EVCEB-2 & EVCEB-24 CHA Industries SmartSource 7cc 4 or 6 EVCEB-2 SmartSource 5cc 4 or 6 EVCEB- or EVCEBM SmartSource 25cc 4 EVCEB-6 or EVCEB-6M SmartSource 25cc 6 EVCEB-25 or EVCEB-25M SmartSource 0cc 4 or 6 EVCEB- or EVCEB-M+ or EVCEB-M Dual EB 7cc 6 or 8 EVCEB-2 Dual EB 5cc 4 or 6 EVCEB- or EVCEB-M Dual EB 25cc 4 EVCEB-6 or EVCEB-6M Dual EB 0cc 4 EVCEB- or EVCEB-M+ or EVCEB-M Thermionics HFC007 7cc EVCEB-4 HFC05 5cc EVCEB- or EVCEB-M HFC025 25cc EVCEB-6 or EVCEB-6M HFC040 40cc EVCEB-8 or EVCEB-8M HRC SD 7cc 4 EVCEB-4 HRC BD 7cc 4 EVCEB-4 HRC05-4-SD 5cc 4 EVCEB- or EVCEB-M HRC05-4-BD 5cc 4 EVCEB- or EVCEB-M HRC025-4-SD 25cc 4 EVCEB-6 or EVCEB-6M HRC025-4-BD 25cc 4 EVCEB-6 or EVCEB-6M HRC040-4-SD 40cc 4 EVCEB-8 or EVCEB-8M HRC040-4-BD 40cc 4 EVCEB-8 or EVCEB-8M HRC SD 7cc 6 EVCEB-4 HRC BD 7cc 6 EVCEB-4 HRC05-6-SD 5cc 6 EVCEB- or EVCEB-M HRC05-6-BD 5cc 6 EVCEB- or EVCEB-M HRC025-6-SD 25cc 6 EVCEB-6 or EVCEB-6M HRC025-6-SD 25cc 6 EVCEB-6 or EVCEB-6M HRC SD 7cc 8 EVCEB-4 HRC BD 7cc 8 EVCEB-4 Crucibles Liners Crucibles Liners for E-Beam Sources Original Source Pocket Hearth KJLC Crucible Manufacturer Model Size Pockets Model HCL cc 4 EVCEB-4 HCL cc 5 EVCEB-4 HCL cc 4 EVCEB- or EVCEB-M HCL cc 5 EVCEB- or EVCEB-M HCL cc 4 EVCEB-6 or EVCEB-6M HLC cc 4 EVCEB-8 or EVCEB-8M HLC cc 4 EVCEB-8 or EVCEB-8M HM cc EVCEB-4 HM cc Call HM2 00 0cc Call HM2 05 5cc EVCEB- or EVCEB-M HM cc EVCEB-8 or EVCEB-8M HM cc Call HM cc EVCEB-27 HM2 R cc 4 EVCEB-4 HM2 R cc 4 Call HM2 R cc 4 EVCEB- or EVCEB-M HM2 R00-4 0cc 4 Call HM2 R05-4 5cc 4 EVCEB- or EVCEB-M HM2 R cc 4 EVCEB-6 or EVCEB-6M Varian cc EVCEB cc EVCEB cc 5 EVCEB cc or 4 EVCEB-2-4

50 Crucibles Liners Crucibles Liners for E-Beam Sources Graphite Crucibles The crucible forms a thermal barrier between melt and water-cooled hearth so efficient that deposition rates at the same power can increase by 400%. At the same deposition rate, power may be cut to 25% of its bare hearth value Each graphite crucible undergoes high purification before it reaches the customer Major contaminants (Fe, Si, Al, and Mg) measure less than 5 ppm, while there are no detectable levels of 6 other common metals (including Na, K, and Pb) Withstands as many as 400 evaporation cycles Materials evaporated from graphite crucibles: Al-Ge alloys, Al-Si alloys, B, Be, Bi, CdS, CeO2, Cr, Cu, Ge, In, Mg, Mo, NaAlF6, Pd, Pt, Sb, SiO, SiO2, Sr, Ta, Ti, Y2O, Zn Choose the correct size for your furnace. Taller models hold more material, but cannot work if put in a multi-hearth furnace not designed for tall crucibles Model EVCEB-2 has the same dimensions as EVCEB-4 but includes a top lip NOTE: Do not confuse this ultra-fine-grain, high-density graphite with glassy (or vitreous) carbon which typically cracks after one run. Figure Figure 2 (EVCEB-) Figure (EVCEB-2) Figure 4 (EVCEB-0) Figure 5 (EVCEB-) Dimensions (in.) Angle Pocket Volume (cc) Liner Volume (cc) A B C D Figure Part No. Price EVCEB- Call EVCEB-2 Call EVCEB- Call EVCEB-4 Call NA EVCEB-5 Call EVCEB-6 Call EVCEB-6M Call EVCEB-6M+ Call NA EVCEB-7 Call EVCEB-8 Call EVCEB-8M Call EVCEB- Call EVCEB-M Call 0 (Without Web) EVCEB-M+ Call NA EVCEB-0 Call NA EVCEB- Call EVCEB-2M Call EVCEB- Call EVCEB-M Call NA EVCEB-4M Call NA EVCEB-5 Call EVCEB-6 Call 25 (4 Pocket) EVCEB-6M Call EVCEB-7 Call EVCEB-8 Call EVCEB- Call EVCEB-20 Call EVCEB-2 Call EVCEB-22 Call EVCEB-2 Call EVCEB-24 Call EVCEB-25 Call 25 (6 Pocket) EVCEB-25M Call EVCEB-26 Call EVCEB-27 Call EVCEB-2 Call EVCEB-0 Call EVCEB- Call -50

51 FABMATE Crucibles FABMATE material =.5% elemental carbon. FABMATE shows a 0% erosion rate after (5) one-hour soak cycles in 0% hydrofluoric acid, and a 0% erosion rate after (20) one-hour soak cycles in a 70% combination nitric acid and hydrofluoric acid Alternative to troublesome materials such as quartz A high-strength graphite that has undergone purification, machining, and subjection to a proprietary carbon modification treatment from Poco Graphite, Inc. Has amorphous carbon in the first few layers of pores and an abrasion-resistant, virtually particle-free surface Acid resistant and exceptionally durable Remain thermally stable (up to 2500º C in inert atmospheres) Materials that work with FABMATE: Materials demonstrating optimum performance with FABMATE crucibles include Ag, As, Au, Ga, GeO2, Ni-Cr alloys, Pb, Se, Sn, Te, and TiO Material with which FABMATE demonstrates a prolonged crucible life: Al Materials requiring FABMATE, but good for only a single run: Fe, Ni, and Si FABMATE also works well with all materials listed under graphite crucibles NOTE: We offer FABMATE in the same models/dimensions as the standard graphite crucibles. Crucibles Liners Crucibles Liners for E-Beam Sources Figure Figure 2 (EVCFABEB-) Figure (EVCFABEB-2) Figure 4 (EVCFABEB-0) Figure 5 (EVCFABEB-) Dimensions (in.) Angle Pocket Volume (cc) Liner Volume (cc) A B C D Figure Part No. Price EVCFABEB- Call EVCFABEB-2 Call EVCFABEB- Call EVCFABEB-4 Call N/A EVCFABEB-5 Call EVCFABEB-6 Call EVCFABEB-6M Call N/A EVCFABEB-7 Call EVCFABEB-8 Call EVCFABEB-8M Call EVCFABEB- Call EVCFABEB-M Call N/A EVCFABEB-0 Call N/A EVCFABEB- Call EVCFABEB-2M Call EVCFABEB- Call EVCFABEB-M Call N/A EVCFABEB-4M Call N/A EVCFABEB-5 Call EVCFABEB-6 Call EVCFABEB-7 Call EVCFABEB-8 Call EVCFABEB- Call EVCFABEB-20 Call EVCFABEB-2 Call EVCFABEB-22 Call EVCFABEB-2 Call EVCFABEB-24 Call EVCFABEB-25 Call EVCFABEB-26 Call EVCFABEB-27 Call EVCFABEB-28 Call EVCFABEB-2 Call EVCFABEB-0 Call EVCFABEB- Call -5

52 Crucibles Liners Crucibles Liners for E-Beam Sources Intermetallic Crucibles (BN-TiB2) NOTE: Custom sizes available upon request. NOTE: Recommended for aluminum evaporation. Dimensions (in.) Angle Pocket Volume (cc) Liner Volume (cc) A B C D Part No. Price EVCEB-22INT Call EVCEB-4INT Call EVCEB-INT Call 25 (4 Pocket) EVCEB-6INT Call 25 (6 Pocket) EVCEB-25INT Call 0 (With Web) EVCEB-26INT Call EVCEB-6INT Call Aluminum Oxide Crucibles (Al2O) NOTE: Custom sizes available upon request. Dimensions (in.) Angle Pocket Volume (cc) Liner Volume (cc) A B C D Part No. Price EVCEB-22ALO Call EVCEB-4ALO Call EVCEB-ALO Call 25 (4 Pocket) EVCEB-6ALO Call 25 (6 Pocket) EVCEB-25ALO Call 0 (With Web) EVCEB-26ALO Call EVCEB-6ALO Call -52

53 Crucibles Liners Crucibles Liners for E-Beam Sources Molybdemum Crucibles (Mo) NOTE: Custom sizes available upon request. Dimensions (in.) Angle Pocket Volume (cc) Liner Volume (cc) A B C D Part No. Price EVCEB-22MO Call EVCEB-4MO Call EVCEB-MO Call 25 (4 Pocket) EVCEB-6MMO Call 25 (6 Pocket) EVCEB-25MMO Call 0 (With Web) EVCEB-26MO Call 0 (Without Web) EVCEB-MMO Call EVCEB-6MMO Call Copper Crucibles (Cu) NOTE: Custom sizes available upon request. Dimensions (in.) Angle Pocket Volume (cc) Liner Volume (cc) A B C D Part No. Price EVCEB-22CU Call EVCEB-4CU Call EVCEB-CU Call 25 (4 Pocket) EVCEB-6CU Call 25 (6 Pocket) EVCEB-25CU Call 0 (With Web) EVCEB-26CU Call 0 (Without Web) EVCEB-MCU Call EVCEB-6MCU Call -5