300mm Wafer Stain Formation by Spin Etching
|
|
- Ross Stone
- 6 years ago
- Views:
Transcription
1 / The Electrochemical Society 300mm Wafer Stain Formation by Spin Etching K. Sato a, S. Mashimoto a, and M. Watanabe a a Process Development, SEZ Japan, Inc., Hongo, Bunkyo-ku , JAPAN Stain film (porous silicon) formation by immersion is reported. The Stain film formation on 300mm wafers by surface treatment is accomplished using SPIN ETCH. It is found that stain film has resistivity. Introduction Porous silicon can be created by anodic oxidation. It can be created also with Stain etching (HF + Oxidizer) solution (1). Porous silicon formed by a Stain etching solution is referred to as Stain film in this report. A thin chip is used with 3D packaging. Wire bond wiring is arranged at very narrow chip interval. It is expected that in the future the insulating technology for a chip, especially the insulating technology on the back of the chip, will become more important. Since the Stain film can be formed at room temperature and shows insulation, it may serve as insulating technology in a future packaging process. When formation of the insulated film on the back of a chip is achieved, by the conventionally used immersion etching method, a medium contacts both sides of the wafer. By the spin etching method used in this experiment, only one side of the wafer can be etched alternatively. This advantage is used in defining conditions to form the Stain film by spin etching. Experimental An outline of spin etching is shown in Fig. 1. The wafer is placed on the chuck. The device side faces downward, toward the upper side of the chuck. N2 gas is introduced from the chuck upper surface, causing the wafer to float slightly. Therefore the device side of the wafer does not actually contact the chuck. The N2 gas also has a role which protects the device side during etching. While the wafer has floated on the chuck, only the edge of the wafer touches the chuck pin. The roles of the chuck pin are to fix the wafer to the chuck, synchronize the wafer rotation with that of the chuck, and prevent slipping of the wafer relative to the chuck. Up to three kinds of medium can be used. The inside of the chamber of Fig.1 consists of four levels from bottom to top. The chamber supports independently 3 kinds of media (one in each of the bottom 3 levels) and rinse water (in the top level). Recycle or drain (single pass) is possible for each medium. The chamber is connected to the exhaust line. As a sample for the Stain film formation, P type (100) silicon wafer 300mm in diameter was used. In order to examine the Stain film formation conditions, the medium used was a mixture of HF (49wt%) and HNO3 (70wt%). The formed Stain film thickness was determined by cross-sectional SEM (Hitachi S-5200). Stain film character was investigated by infrared absorption measurement (FTIR), and compared with the data of the anodic oxidation film. After investigating film character, the insulation performance of the Stain film was investigated. 303
2 DI Water N2 Process Chamber Level 4 Chuck Exhaust Level 3 Level 2 Etchant 3 Etchant 2 Level 1 Etchant 1 N2 Drain Figure 1. Spin Processor Fig.1 Spin Processor Result and Discussion Results of changing medium ratio are shown in Fig. 2. The chemical ratios 1 HF:HNO3=100:1,2HF:HNO3=50:1,3HF:HNO3:H2O=25:30:29,4HF:HNO3=50:1. 5 HF:HNO3:H2O=1:3:5 were indicated for comparison(1)(8). In consideration of the point that the Stain film of uniform thickness is formed, composition of 1 was chosen as a medium for spin etching. HF:HNO3=50:1 HF:HNO3:H2O=25:30:29 2 HF:HNO3:H2O = 1:3:5 3 (*1) Bumpy Stain Surface HF:HNO3=100:1 1 Flat Stain Surface Stain Layer Si Layer 100 HF wt% HNO3 wt% H2O wt% Stain Layer Si Layer HF:HNO3=1:250 4 Fig.2 Stain film morphology Fig.2 Chemical depending Setup on stain etch composition Figure 2. Stain film morphology depending on stain etch composition In 1the bottom layer shown in the photograph is the Silicon substrate, and the Stain film of about 150nm thickness appears on it. The surface of the Stain film is flat. With the photograph of 2, like the photograph of 1, the bottom layer is the Silicon substrate, and an it top is the Stain film. However, it is important to note the unevenness of the surface of the Stain film differs from 1. In 3, H2O is added to HF:HNO3. In the 304
3 medium with added H2O, a unique form of unevenness is made to the surface of the Stain film as shown in the photograph of 3. 5 is the ratio quoted from literature for reference. 4 is nitric acid rich. Generally the composition with nitric rich acid ratios is used as a Silicon etching solution. In this case, a Stain film is not formed although unevenness can occur on the silicon substrate. For spin etching, the parameters shown as (a), (b), and (c) in Table I correspond to the 300mm wafer photographs in Figure 3. TABLE I. Spin etching parameter Parameter (a) (b) (c) Wafer rotation speed [rpm] Dispenser swing [mm] ± 15 ± 15 ± 75 Medium Temperature [C] (a) (b) (c) Figure 3. Spin etching wafer In a photograph (a), Silicon color is seen. Photograph (b) and (c) show a change of color. When such a change of color is seen, it is checked from prior SEM observation that the Stain film is formed in the surface. From this, it can be judged that the Stain film is formed in the portion where surface discoloration has occurred. With parameter (a), based on the color it can be concluded that no Stain was formed. Wafer rotation speed is 700rpm. With the center of a wafer specified as 0mm, the position of the dispenser supplying the medium is varied by ±15mm from the center (back and forth motion). This is intended to improve the uniformity of the process. In parameter (a), medium temperature was 25 degrees C. For parameter (b), when temperature of medium was changed into 30 degrees C, Stain was formed in the wafer perimeter. However, the center of a wafer still has silicon color. For parameter (c), the motion range of the Dispenser was expanded to ±75mm from ±15mm. As a result, the Stain film was formed all over the wafer. The picture of cross-sectional SEM is shown in Fig.4. As a result of measuring five points at equal intervals in the direction of the perimeter from the wafer center, they were thickness 221nm and variation ±6.2% (3sigma). 305
4 Figure 4. SEM cross section image (Wafer center) The FTIR measurement result is shown in Fig.5. Comparing with IR data of an anodic oxidation film, it turns out that the peak of Si-O-Si combination is seen at 1072cm -1 (3)-(7)(9). For comparison, the spectrum for porous silicon is shown in reference (4). (1072) Si-O-Si Figure 5. IR absorption spectra of stain film The insulation performance of the Stain film was also checked, using spin etched wafer (c). Since the Stain film was formed only on one side of the wafer, an aluminum electrode 1mm in diameter was attached to the Stain film side. Figure 6 shows the I-V measurement result where the Si substrate was set up as the + electrode and the stain film as the - electrode. Refer to SEMI M for the voltage impression method. Different points on the wafer showed different I-V characteristics, which were divided into two groups as shown in Fig
5 (B) (A) Figure 6. I-V characteristics of stain film Part (A), the solid line, indicates insulating character, whereas part (B), the dotted line, indicates insulation behavior is not seen. In order to understand this difference between (A) and (B), the difference in their IR spectra was checked. The result is shown in Fig cm-1 Figure 7. Delta Absorbance The left side vertical axis of Figure 7 shows the absorbance for (A) and (B), while the right side axis represents the delta of (A) minus (B). The results indicate Si-O-Si structure, while the difference between (A) and (B) indicates a peak of. absorption at 1060cm-1. CONCLUSIONS Although Stain films are conventionally formed by anodic oxidation or immersion type etching, it has been shown that spin etching can also be used to form Stain films. IR measurement confirmed the Stain film formed by spin etching has an absorption peak at 1072 cm -1, indicating Si-O-Si. It was also confirmed that this Stain film has insulation 307
6 performance. Depending on the character of the Stain film, there is a possibility the Si-O- Si combination in the Stain film is a cause of the insulating behavior. References 1. L.A.Jones, Progress in Surface Science, vol50, 283 (1995). 2. M.I.J. Beale, Journal of Crystal Growth, 75, 408 (1986). 3. M.A.Vasquez, REVISTA MEXICANA DE FISICA, 53, 6 (2007). 4. H.D.Fuchs, Physical Review B, 48, 11 (1993). 5. M.S.Brandt, Solid State Communications, 81, 4 (1992). 6. D.-Q. Yang, Journal of Applied Physics, 98, (2005). 7. S.Liu, Physical Review B, 49, 15 (1994). 8. D.Dimova, Thin Solid Films, 297, 9-12 (1997). 9. Sonaly.Cruz, Journal of Electro Chemical Society, 152, 6 (2005). 308
Scalable approach to multi-dimensional bulk Si anodes via metal-assisted chemical etching
Supplementary Information Scalable approach to multi-dimensional bulk Si anodes via metal-assisted chemical etching Byoung Man Bang, Hyunjung Kim, Hyun-Kon Song, Jaephil Cho* and Soojin Park* Interdisciplinary
More informationThin film silicon substrate formation using electrochemical anodic etching method
Thin film silicon substrate formation using electrochemical anodic etching method J.-H. Kwon 1, S.-H. Lee 2 and B.-K. Ju* 3 The production of detached porous silicon (PS) layers for layer transfer (LT)
More informationSupporting Information
Supporting Information Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film and IDEs-Microheater Chip Zhengfei Dai,, Lei Xu,#,, Guotao Duan *,, Tie Li *,,
More informationFabrication of regular silicon microstructures by photo-electrochemical etching of silicon
phys. stat. sol. (c) 2, No. 9, 3198 3202 (2005) / DOI 10.1002/pssc.200461110 Fabrication of regular silicon microstructures by photo-electrochemical etching of silicon G. Barillaro *, P. Bruschi, A. Diligenti,
More informationSupplementary Figure S1 Photograph of MoS 2 and WS 2 flakes exfoliated by different metal naphthalenide (metal = Na, K, Li), and dispersed in water.
Supplementary Figure S1 Photograph of MoS 2 and WS 2 flakes exfoliated by different metal naphthalenide (metal = Na, K, Li), and dispersed in water. Supplementary Figure S2 AFM measurement of typical LTMDs
More informationFabrication of Ru/Bi 4-x La x Ti 3 O 12 /Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical Vapor Deposition
Mat. Res. Soc. Symp. Proc. Vol. 784 2004 Materials Research Society C7.7.1 Fabrication of Ru/Bi 4-x La x Ti 3 O 12 /Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical
More informationPARAMETER EFFECTS FOR THE GROWTH OF THIN POROUS ANODIC ALUMINUM OXIDES
10.1149/1.2794473, The Electrochemical Society PARAMETER EFFECTS FOR THE GROWTH OF THIN POROUS ANODIC ALUMINUM OXIDES S. Yim a, C. Bonhôte b, J. Lille b, and T. Wu b a Dept. of Chem. and Mat. Engr., San
More informationUHF-ECR Plasma Etching System for Gate Electrode Processing
Hitachi Review Vol. 51 (2002), No. 4 95 UHF-ECR Plasma Etching System for Gate Electrode Processing Shinji Kawamura Naoshi Itabashi Akitaka Makino Masamichi Sakaguchi OVERVIEW: As the integration scale
More informationMARORA A Plasma Selective-oxidation Apparatus for Metal-gate Devices
Hitachi Review Vol. 57 (2008), No. 3 127 MARORA A Plasma Selective-oxidation Apparatus for Metal-gate Devices Tadashi Terasaki Masayuki Tomita Katsuhiko Yamamoto Unryu Ogawa, Dr. Eng. Yoshiki Yonamoto,
More informationPREMETAL PLANARIZATION USING SPIN-ON-DIELECTRIC. Fred Whitwer, Tad Davies, Craig Lage National Semiconductor Corp., Puyallup, WA, 98373
PREMETAL PLANARIZATION USING SPIN-ON-DIELECTRIC Fred Whitwer, Tad Davies, Craig Lage National Semiconductor Corp., Puyallup, WA, 98373 ABSTRACT A silicate type spin-on-glass (SOG) has been used to planarize
More informationSemiconductor device fabrication
REVIEW Semiconductor device fabrication is the process used to create the integrated circuits (silicon chips) that are present in everyday electrical and electronic devices. It is a multiplestep sequence
More informationSupporting Information: Model Based Design of a Microfluidic. Mixer Driven by Induced Charge Electroosmosis
Supporting Information: Model Based Design of a Microfluidic Mixer Driven by Induced Charge Electroosmosis Cindy K. Harnett, Yehya M. Senousy, Katherine A. Dunphy-Guzman #, Jeremy Templeton * and Michael
More informationDEVELOPMENT OF ELECTROLESS PROCESS FOR DEPOSITION OF ZN SILICATE COATINGS
REPORT OF THE FINAL PROJECT ENTITLED: DEVELOPMENT OF ELECTROLESS PROCESS FOR DEPOSITION OF ZN SILICATE COATINGS by Veeraraghavan S Basker Department of Chemical Engineering University of South Carolina
More informationAll fabrication was performed on Si wafers with 285 nm of thermally grown oxide to
Supporting Information: Substrate preparation and SLG growth: All fabrication was performed on Si wafers with 285 nm of thermally grown oxide to aid in visual inspection of the graphene samples. Prior
More informationMicroelectronics. Integrated circuits. Introduction to the IC technology M.Rencz 11 September, Expected decrease in line width
Microelectronics Introduction to the IC technology M.Rencz 11 September, 2002 9/16/02 1/37 Integrated circuits Development is controlled by the roadmaps. Self-fulfilling predictions for the tendencies
More informationIntroduction to CMOS VLSI Design. Layout, Fabrication, and Elementary Logic Design
Introduction to CMOS VLSI Design Layout, Fabrication, and Elementary Logic Design CMOS Fabrication CMOS transistors are fabricated on silicon wafer Lithography process similar to printing press On each
More informationFigure 2.3 (cont., p. 60) (e) Block diagram of Pentium 4 processor with 42 million transistors (2000). [Courtesy Intel Corporation.
Figure 2.1 (p. 58) Basic fabrication steps in the silicon planar process: (a) oxide formation, (b) selective oxide removal, (c) deposition of dopant atoms on wafer, (d) diffusion of dopant atoms into exposed
More informationCHAPTER 9 AFM PROFILING AND NANOLITHOGRAPHY WITH NEEDLE-TIPPED CANTILEVERS
CHAPTER 9 AFM PROFILING AND NANOLITHOGRAPHY WITH NEEDLE-TIPPED CANTILEVERS Since Ag 2 Ga nanoneedles can be directly grown on (or even in place of) the tips on AFM cantilevers using the pulling technique
More informationMATERIALS. Silicon Wafers... J 04 J 01. MATERIALS / Inorganics & thin films guide
J MATERIALS SUBSTRATES Silicon Wafers... J 04 J J 01 MATERIALS SUBSTRATES NEYCO has a complete range of crystal substrates for a wide variety of applications, including Semiconductor, Biotechnology, Nanotechnology,
More informationPhotolithography I ( Part 2 )
1 Photolithography I ( Part 2 ) Chapter 13 : Semiconductor Manufacturing Technology by M. Quirk & J. Serda Bjørn-Ove Fimland, Department of Electronics and Telecommunication, Norwegian University of Science
More informationPOSISTRIP EKC830. Will effectively remove hard to remove positive photoresist
EKC Technology POSISTRIP EKC830 Rev. C POSISTRIP EKC830 Posistrip EKC830 is an organic photoresist remover which removes positive photoresists that have experienced harshly treated processing. Posistrip
More informationMerle D. Yoder, Jr. 5th Year Microelectronic Engineering Student Rochester Institute of Technology ABSTRACT
LOW TEMPERATURE DEPOSITION OF FILMS BY ECR INT~0DUCTION Merle D. Yoder, Jr. 5th Year Microelectronic Engineering Student Rochester Institute of Technology ABSTRACT SiO films of high quality have been depositeä
More informationFused-Salt Electrodeposition of Thin-Layer Silicon
NREL/CP-450-22928 UC Category: 1250 Fused-Salt Electrodeposition of Thin-Layer Silicon J.T. Moore, T.H. Wang, M.J. Heben, K. Douglas, and T.F. Ciszek Presented at the 26th IEEE Photovoltaic Specialists
More informationCrystalline Silicon Solar Cells
12 Crystalline Silicon Solar Cells As we already discussed in Chapter 6, most semiconductor materials have a crystalline lattice structure. As a starting point for our discussion on crystalline silicon
More informationUltra High Barrier Coatings by PECVD
Society of Vacuum Coaters 2014 Technical Conference Presentation Ultra High Barrier Coatings by PECVD John Madocks & Phong Ngo, General Plasma Inc., 546 E. 25 th Street, Tucson, Arizona, USA Abstract Silicon
More informationA New High-k Transistor Technology Implemented in Accordance with the 55nm Design Rule Process
A New High-k Transistor Technology Implemented in Accordance with the 55nm Design Rule Process FUKASE Tadashi, NAKAHARA Yasushi, TAKAHASHI Toshifumi, IMAI Kiyotaka Abstract NEC Electronics has developed
More informationTemperature Scales. Questions. Temperature Conversions 7/21/2010. EE580 Solar Cells Todd J. Kaiser. Thermally Activated Processes
7/1/010 EE80 Solar Cells Todd J. Kaiser Flow of Wafer in Fabrication Lecture 0 Microfabrication A combination of Applied Chemistry, Physics and ptics Thermal Processes Diffusion & xidation Photolithograpy
More informationAnirban Som
Anirban Som 08-02-14 Introduction Few electronic conductors are both stretchable and transparent. The existing stretchable and transparent electrodes, such as graphene sheets, carbon nanotube films and
More informationPassivation of SiO 2 /Si Interfaces Using High-Pressure-H 2 O-Vapor Heating
Jpn. J. Appl. Phys. Vol. 39 (2000) pp. 2492 2496 Part, No. 5A, May 2000 c 2000 The Japan Society of Applied Physics Passivation of O 2 / Interfaces Using High-Pressure-H 2 O-Vapor Heating Keiji SAKAMOTO
More informationKGC SCIENTIFIC Making of a Chip
KGC SCIENTIFIC www.kgcscientific.com Making of a Chip FROM THE SAND TO THE PACKAGE, A DIAGRAM TO UNDERSTAND HOW CPU IS MADE? Sand CPU CHAIN ANALYSIS OF SEMICONDUCTOR Material for manufacturing process
More informationEffects of zincate treatment on adhesion of electroless Ni-P coating onto various aluminum alloys
Effects of zincate treatment on adhesion of electroless Ni-P coating onto various aluminum alloys Makoto HINO 1, Koji MURAKAMI 1, Yutaka MITOOKA 1, Ken MURAOKA 1, Teruto KANADANI 2 1. Industrial Technology
More informationLow-cost, deterministic quasi-periodic photonic structures for light trapping in thin film silicon solar cells
Low-cost, deterministic quasi-periodic photonic structures for light trapping in thin film silicon solar cells The MIT Faculty has made this article openly available. Please share how this access benefits
More informationPolycrystalline and microcrystalline silicon
6 Polycrystalline and microcrystalline silicon In this chapter, the material properties of hot-wire deposited microcrystalline silicon are presented. Compared to polycrystalline silicon, microcrystalline
More informationL5: Micromachining processes 1/7 01/22/02
97.577 L5: Micromachining processes 1/7 01/22/02 5: Micromachining technology Top-down approaches to building large (relative to an atom or even a transistor) structures. 5.1 Bulk Micromachining A bulk
More informationSupplementary Information. for
Electronic Supplementary Material (ESI) for ChemComm. This journal is The Royal Society of Chemistry 2014 Supplementary Information for Nanoslitting Phase-separated Block Copolymers by Solvent Swelling
More informationCompact hybrid plasmonic-si waveguide structures utilizing Albanova E-beam lithography system
Compact hybrid plasmonic-si waveguide structures utilizing Albanova E-beam lithography system Introduction Xu Sun Laboratory of Photonics and Microwave Engineering, Royal Institute of Technology (KTH),
More informationInterlayer Dielectric (ILD) Cracking Mechanisms and their Effects on Probe Processes. Daniel Stillman, Daniel Fresquez Texas Instruments Inc.
Interlayer Dielectric (ILD) Cracking Mechanisms and their Effects on Probe Processes Daniel Stillman, Daniel Fresquez Texas Instruments Inc. Outline Probe Optimization Why is it needed? Objective and obstacles
More informationEELE408 Photovoltaics Lecture 02: Silicon Processing
EELE408 Photovoltaics Lecture 0: licon Processing Dr. Todd J. Kaiser tjkaiser@ece.montana.edu Department of Electrical and Computer Engineering Montana State University - Bozeman The Fabrication Process
More informationP. N. LEBEDEV PHYSICAL INSTITUTE OF THE RUSSIAN ACADEMY OF SCIENCES PREPRINT
P. N. LEBEDEV PHYSICAL INSTITUTE OF THE RUSSIAN ACADEMY OF SCIENCES PREPRINT 18 CHANNELING A.V. BAGULYA, O.D. DALKAROV, M.A. NEGODAEV, A.S. RUSETSKII, A.P. CHUBENKO, V.G. RALCHENKO, A.P. BOLSHAKOV EFFECT
More informationFabrication Process. Crystal Growth Doping Deposition Patterning Lithography Oxidation Ion Implementation CONCORDIA VLSI DESIGN LAB
Fabrication Process Crystal Growth Doping Deposition Patterning Lithography Oxidation Ion Implementation 1 Fabrication- CMOS Process Starting Material Preparation 1. Produce Metallurgical Grade Silicon
More informationLecture 2: CMOS Fabrication Mark McDermott Electrical and Computer Engineering The University of Texas at Austin
Lecture 2: CMOS Fabrication Mark McDermott Electrical and Computer Engineering The University of Texas at Austin Agenda Last module: Introduction to the course How a transistor works CMOS transistors This
More informationSCHOTT MEMpax New options for the MEMS industry. NMN Technology Day Schott AG Grünenplan
SCHOTT MEMpax New options for the MEMS industry NMN Technology Day Schott AG Grünenplan 06.11.2012 Agenda 2 Agenda 1. SCHOTT thin glass for Electronics & Biotech 2. MEMS Industry and Motivation for MEMpax
More informationBecause of equipment availability, cost, and time, we will use aluminum as the top side conductor
Because of equipment availability, cost, and time, we will use aluminum as the top side conductor Top Side Conductor vacuum deposition Aluminum sputter deposit in Argon plasma CVC 601-sputter deposition
More informationElectronic Supplementary Information. Thickness Control of 3-Dimensional Mesoporous Silica Ultrathin Films by Wet-Etching
Electronic Supplementary Material (ESI) for Nanoscale. This journal is The Royal Society of Chemistry 2017 Electronic Supplementary Information Thickness Control of 3-Dimensional Mesoporous Silica Ultrathin
More information2-1 Introduction The demand for high-density, low-cost, low-power consumption,
Chapter 2 Hafnium Silicate (HfSi x O y ) Nanocrystal SONOS-Type Flash Memory Fabricated by Sol-Gel Spin Coating Method Using HfCl 4 and SiCl 4 as Precursors 2-1 Introduction The demand for high-density,
More information4. Thermal Oxidation. a) Equipment Atmospheric Furnace
4. Thermal Oxidation a) Equipment Atmospheric Furnace Oxidation requires precise control of: temperature, T ambient gas, G time spent at any given T & G, t Vito Logiudice 34 4. Thermal Oxidation b) Mechanism
More informationSchematic creation of MOS field effect transistor.
Schematic creation of MOS field effect transistor. Gate electrode Drain electrode Source electrode Gate oxide Gate length Page 1 Step 0 The positively doped silicon wafer is first coated with an insulating
More informationEE 330 Lecture 9. IC Fabrication Technology Part 2
EE 330 Lecture 9 IC Fabrication Technology Part 2 Quiz 8 A 2m silicon crystal is cut into wafers using a wire saw. If the wire diameter is 220um and the wafer thickness is 350um, how many wafers will this
More informationMostafa Soliman, Ph.D. May 5 th 2014
Mostafa Soliman, Ph.D. May 5 th 2014 Mostafa Soliman, Ph.D. 1 Basic MEMS Processes Front-End Processes Back-End Processes 2 Mostafa Soliman, Ph.D. Wafers Deposition Lithography Etch Chips 1- Si Substrate
More informationUltrasensitive and Highly Stable Resistive Pressure Sensors with. Biomaterial-Incorporated Interfacial Layers for Wearable
Supporting Information Ultrasensitive and Highly Stable Resistive Pressure Sensors with Biomaterial-Incorporated Interfacial Layers for Wearable Health-Monitoring and Human-Machine Interfaces Hochan Chang,,
More informationلبا ب ةعماج / ةيساسلأا ةيبرتلا ةيلك ة لجم
Photoluminescence from Etched Silicon Surface by High Power Laser Oday A. Abbass Department of Physics/College of Sciences/University of Kufa ABSTRACT Porous silicon layers (P-Si) has been prepared in
More informationMicroelectronic Device Instructional Laboratory. Table of Contents
Introduction Process Overview Microelectronic Device Instructional Laboratory Introduction Description Flowchart MOSFET Development Process Description Process Steps Cleaning Solvent Cleaning Photo Lithography
More informationChapter 3. In this chapter, we use sol-gel method to combine three high-k precursors, i.e. HfCl 4, ZrCl 4 and SiCl 4 together to form hafnium silicate
Chapter 3 Sol-Gel-Derived Zirconium Silicate (ZrSi x O y ) and Hafnium Silicate (HfSi x O y ) Co-existed Nanocrystal SONOS Memory 3-1 Introduction In the previous chapter, we fabricate the sol-gel-derived
More informationLecture 0: Introduction
Lecture 0: Introduction Introduction Integrated circuits: many transistors on one chip. Very Large Scale Integration (VLSI): bucketloads! Complementary Metal Oxide Semiconductor Fast, cheap, low power
More informationGalvanic Porous Silicon for High Velocity Nanoenergetics
Supporting Information Galvanic Porous Silicon for High Velocity Nanoenergetics Collin R. Becker 1,2, Steven Apperson 3, Christopher J. Morris 2, Shubhra Gangopadhyay 3, Luke J. Currano 2, Wayne A. Churaman
More informationSilicon Epitaxial CVD Want to create very sharp PN boundary grow one type layer on other in single crystal form High dopant layers on low dopant
Silicon Epitaxial CVD Want to create very sharp PN boundary grow one type layer on other in single crystal form High dopant layers on low dopant substrate Creates latch up protection for CMOS Buried Epi
More informationChemical Vapour Deposition: CVD Reference: Jaeger Chapter 6 & Ruska: Chapter 8 CVD - Chemical Vapour Deposition React chemicals to create a thin film
Chemical Vapour Deposition: CVD Reference: Jaeger Chapter 6 & Ruska: Chapter 8 CVD - Chemical Vapour Deposition React chemicals to create a thin film layer at the surface Typically gas phase reactions
More informationBLOCK COPOLYMERS ORGANIZATION AT INTERFACE
THE 19 TH INTERNATIONAL CONFERENCE ON COMPOSITE MATERIALS BLOCK COPOLYMERS ORGANIZATION AT INTERFACE D.Fischer, S. Bistac *, M. Brogly, Université de Haute Alsace, LPIM, Mulhouse France * Corresponding
More informationThermal Oxidation and Growth of Insulators (Chapter 3 - Jaeger 3) Key advantage of Si: Oxidation of Si into SiO 2 (glass) Major factor in making
Thermal Oxidation and Growth of Insulators (Chapter 3 - Jaeger 3) Key advantage of Si: Oxidation of Si into SiO (glass) Major factor in making Silicon the main semiconductor Grown at high temperature in
More information9 rue Alfred Kastler - BP Nantes Cedex 3 - France Phone : +33 (0) website :
9 rue Alfred Kastler - BP 10748-44307 Nantes Cedex 3 - France Phone : +33 (0) 240 180 916 - email : info@systemplus.fr - website : www.systemplus.fr November 2010 - Version 2 Written by: Sylvain HALLEREAU
More informationCrystal Growth and Wafer Fabrication. K.Sivasankaran, Assistant Professor (Senior), VLSI Division, School of Electronics Engineering, VIT
Crystal Growth and Wafer Fabrication K.Sivasankaran, Assistant Professor (Senior), VLSI Division, School of Electronics Engineering, VIT Crystal growth Obtaining sand Raw Polysilicon Czochralski Process
More informationCMOS Fabrication. Dr. Bassam Jamil. Adopted from slides of the textbook
CMOS Fabrication Dr. Bassam Jamil Adopted from slides of the textbook CMOS Fabrication CMOS transistors are fabricated on silicon wafer Lithography process similar to printing press On each step, different
More informationScanning Electron Microscope & Surface Analysis. Wageningen EM Centre Marcel Giesbers
Scanning Electron Microscope & Surface Analysis Wageningen EM Centre Marcel Giesbers Scanning Electron Microscope & Surface Analysis SEM vs Light Microscope and Transmission EM Secondary Electron Imaging
More informationCzochralski Crystal Growth
Czochralski Crystal Growth Crystal Pulling Crystal Ingots Shaping and Polishing 300 mm wafer 1 2 Advantage of larger diameter wafers Wafer area larger Chip area larger 3 4 Large-Diameter Wafer Handling
More informationSupporting Information
Supporting Information Distance Dependence of Plamson-Enhanced Photocurrent in Dye-Sensitized Solar Cells Stacey D. Standridge, George C. Schatz, and Joseph T. Hupp Department of Chemistry, Northwestern
More informationA Functional Micro-Solid Oxide Fuel Cell with. Nanometer Freestanding Electrolyte
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 2017 SUPPLEMENTARY INFORMATION A Functional Micro-Solid Oxide Fuel Cell with
More informationSynthesis and Characterization of Zinc Iron Sulphide (ZnFeS) Of Varying Zinc Ion Concentration
International Journal of Science and Technology Volume 5 No. 5, May, 2016 Synthesis and Characterization of Zinc Iron Sulphide (ZnFeS) Of Varying Zinc Ion Concentration I. B. Obasi 1 and J. C. Osuwa 2
More informationPackaging Commercial CMOS Chips for Lab on a Chip Integration
Supporting Information for Packaging Commercial CMOS Chips for Lab on a Chip Integration by Timir Datta-Chaudhuri, Pamela Abshire, and Elisabeth Smela Biocompatibility Although the supplier s instructions
More informationSUPPORTING INFORMATION. Disposable ATR-IR Crystals from Silicon Wafer: A. Versatile Approach to Surface Infrared. Spectroscopy
SUPPORTING INFORMATION Disposable ATR-IR Crystals from Silicon Wafer: A Versatile Approach to Surface Infrared Spectroscopy Engin Karabudak1,*, Recep Kas2*, Wojciech Ogieglo3, Damon Rafieian4, Stefan Schlautmann1,
More informationFabrication Techniques for Thin-Film Silicon Layer Transfer
Fabrication Techniques for Thin-Film Silicon Layer Transfer S. L. Holl a, C. A. Colinge b, S. Song b, R. Varasala b, K. Hobart c, F. Kub c a Department of Mechanical Engineering, b Department of Electrical
More informationFabrication of MoS 2 Thin Film Transistors via Novel Solution Processed Selective Area Deposition
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry C. This journal is The Royal Society of Chemistry 2015 Supplementary Information Fabrication of MoS 2 Thin Film Transistors via
More informationSilicon nitride deposited by ECR CVD at room temperature for LOCOS isolation technology
Applied Surface Science 212 213 (2003) 388 392 Silicon nitride deposited by ECR CVD at room temperature for LOCOS isolation technology Marcus A. Pereira, José A. Diniz, Ioshiaki Doi *, Jacobus W. Swart
More informationEE 527 MICROFABRICATION. Lecture 15 Tai-Chang Chen University of Washington EE-527 M4 MASK SET: NPN BJT. C (sub) A E = 40 µm x 40 µm
EE 527 MICROFABRICATION Lecture 15 Tai-Chang Chen University of Washington EE-527 M4 MASK SET: NPN BJT C (sub) E B A E = 40 µm x 40 µm 1 EE-527 M4 MASK SET: MOS C-V TEST CAPACITORS W = 10 µm L = 10 µm
More informationA Parametric Study on the Electrodeposition of Copper Nanocrystals on a Gold Film Electrode. Andrea Harmer Co-op term #1 April 25, 2003
A Parametric Study on the Electrodeposition of Copper Nanocrystals on a Gold Film Electrode Andrea Harmer Co-op term #1 April 25, 2003 Outline of Presentation: Introduction Purpose General method Parameters:
More informationA discussion of crystal growth, lithography, etching, doping, and device structures is presented in
Chapter 5 PROCESSING OF DEVICES A discussion of crystal growth, lithography, etching, doping, and device structures is presented in the following overview gures. SEMICONDUCTOR DEVICE PROCESSING: AN OVERVIEW
More informationChapter 2 Manufacturing Process
Digital Integrated Circuits A Design Perspective Chapter 2 Manufacturing Process 1 CMOS Process 2 CMOS Process (n-well) Both NMOS and PMOS must be built in the same silicon material. PMOS in n-well NMOS
More informationHigh Sensitivity and Low Power Consumption Gas Sensor Using MEMS Technology and Thick Sensing Film
Journal of the Korean Physical Society, Vol. 45, No. 5, November 2004, pp. 1205 1209 High Sensitivity and Low Power Consumption Gas Sensor Using MEMS Technology and Thick Sensing Film Nak-Jin Choi, Jun-Hyuk
More informationThis Appendix discusses the main IC fabrication processes.
IC Fabrication B B.1 Introduction This Appendix discusses the main IC fabrication processes. B.2 NMOS fabrication NMOS transistors are formed in a p-type substrate. The NMOS fabrication process requires
More informationconductor - gate insulator source gate n substrate conductor - gate insulator gate substrate n open switch closed switch however: closed however:
MOS Transistors Readings: Chapter 1 N-type drain conductor - gate insulator source gate drain source n p n substrate P-type drain conductor - gate insulator source drain gate source p p substrate n 42
More informationSilicon Epitaxial CVD Want to create very sharp PN boundary grow one type layer on other in single crystal form High dopant layers on low dopant
Silicon Epitaxial CVD Want to create very sharp PN boundary grow one type layer on other in single crystal form High dopant layers on low dopant substrate Creates latch up protection for CMOS Buried Epi
More informationmech14.weebly.com Chemical Machining Presented by Dr. P. Saha Department of Mechanical Engineering IIT Kharagpur
Chemical Machining Presented by Dr. P. Saha Department of Mechanical Engineering IIT Kharagpur Case Study 1 Skin of aluminum aircraft wing (after removal of unnecessary metal from numerous surface pockets
More informationCMOS VLSI Design. Introduction. All materials are from the textbook Weste and Harris, 3 rd Edition CMOS VLSI DESIGN. Introduction
CMOS VLSI Design Introduction ll materials are from the textbook Weste and Harris, 3 rd Edition CMOS VLSI DESIGN Introduction Chapter previews the entire field, subsequent chapters elaborate on specific
More informationECE 440 Lecture 27 : Equilibrium P-N Junctions I Class Outline:
ECE 440 Lecture 27 : Equilibrium P-N Junctions I Class Outline: Fabrication of p-n junctions Contact Potential Things you should know when you leave Key Questions What are the necessary steps to fabricate
More informationLow temperature formation of nc-si by ICP-CVD with internal antenna. A. Tomyo, H. Kaki, E. Takahashi, T. Hayashi, K. Ogata
Low temperature formation of nc-si by ICP-CVD with internal antenna A. Tomyo, H. Kaki, E. Takahashi, T. Hayashi, K. Ogata Process Research Center, R & D Laboratories, Nissin Electric Co., Ltd., Umezu,
More informationFilling and Planarizing Deep Trenches with Polymeric Material for Through-Silicon Via Technology
Filling and Planarizing Deep Trenches with Polymeric Material for Through-Silicon Via Technology R.K. Trichur, M. Fowler, J.W. McCutcheon, and M. Daily Brewer Science, Inc. 2401 Brewer Drive Rolla, MO
More informationSurface Micromachining of Uncooled Infrared Imaging Array Using Anisotropic Conductive Film
Surface Micromachining of Uncooled Infrared Imaging Array Using Anisotropic Conductive Film Weiguo Liu, Lingling Sun, Weiguang Zhu, Ooi Kiang Tan Microelectronics Center, School of Electrical and Electronic
More informationMethod to obtain TEOS PECVD Silicon Oxide Thick Layers for Optoelectronics devices Application
Method to obtain TEOS PECVD Silicon Oxide Thick Layers for Optoelectronics devices Application ABSTRACT D. A. P. Bulla and N. I. Morimoto Laboratório de Sistemas Integráveis da EPUSP São Paulo - S.P. -
More informationPhotoresist Coat, Expose and Develop Laboratory Dr. Lynn Fuller
ROCHESTER INSTITUTE OF TECHNOLOGY MICROELECTRONIC ENGINEERING Photoresist Coat, Expose and Develop Laboratory Dr. Lynn Fuller Webpage: http://www.rit.edu/lffeee 82 Lomb Memorial Drive Rochester, NY 14623-5604
More informationFabrication and Layout
ECEN454 Digital Integrated Circuit Design Fabrication and Layout ECEN 454 3.1 A Glimpse at MOS Device Polysilicon Aluminum ECEN 475 4.2 1 Material Classification Insulators Glass, diamond, silicon oxide
More informationThere are basically two approaches for bulk micromachining of. silicon, wet and dry. Wet bulk micromachining is usually carried out
57 Chapter 3 Fabrication of Accelerometer 3.1 Introduction There are basically two approaches for bulk micromachining of silicon, wet and dry. Wet bulk micromachining is usually carried out using anisotropic
More informationX-Ray Reflectivity Study of Hafnium Silicate Thin Films Prepared by Thermal Chemical Vapor Deposition
X-Ray Reflectivity Study of Hafnium Silicate Thin Films Prepared by Thermal Chemical Vapor Deposition Hideyuki YAMAZAKI, Advanced LSI Technology Laboratory, Toshiba Corporation hideyuki.yamazaki@toshiba.co.jp
More informationSurface Micromachining
Surface Micromachining Outline Introduction Material often used in surface micromachining Material selection criteria in surface micromachining Case study: Fabrication of electrostatic motor Major issues
More informationEE 330 Lecture 8. IC Fabrication Technology Part II. - Oxidation - Epitaxy - Polysilicon - Interconnects
EE 330 Lecture 8 IC Fabrication Technology Part II - Oxidation - Epitaxy - Polysilicon - Interconnects Review from Last Time MOS Transistor Bulk Source Gate Drain p-channel MOSFET Lightly-doped n-type
More informationBONDING OF MULTIPLE WAFERS FOR HIGH THROUGHPUT LED PRODUCTION. S. Sood and A. Wong
10.1149/1.2982882 The Electrochemical Society BONDING OF MULTIPLE WAFERS FOR HIGH THROUGHPUT LED PRODUCTION S. Sood and A. Wong Wafer Bonder Division, SUSS MicroTec Inc., 228 SUSS Drive, Waterbury Center,
More informationMICRO-ELECTRO-MECHANICAL VARIABLE BLAZE GRATINGS
MICRO-ELECTRO-MECHANICAL VARIABLE BLAZE GRATINGS D. M. Burns and V. M. Bright Air Force Institute of Technology Department of Electrical and Computer Engineering Wright-Patterson Air Force Base, OH 45433-7765
More informationThe Physical Structure (NMOS)
The Physical Structure (NMOS) Al SiO2 Field Oxide Gate oxide S n+ Polysilicon Gate Al SiO2 SiO2 D n+ L channel P Substrate Field Oxide contact Metal (S) n+ (G) L W n+ (D) Poly 1 3D Perspective 2 3 Fabrication
More informationCMOS FABRICATION. n WELL PROCESS
CMOS FABRICATION n WELL PROCESS Step 1: Si Substrate Start with p- type substrate p substrate Step 2: Oxidation Exposing to high-purity oxygen and hydrogen at approx. 1000 o C in oxidation furnace SiO
More informationSupplementary Figure 1:
b a c Supplementary Figure 1: Calibration of the Cs + sputtering rate on composite LiNi 0.7 Mn 0.15 Co 0.15 O 2 electrodes (500 ev ion energy, ~40 na measured sample current): (a) Optical profilometry
More informationExcimer Laser Annealing of Hydrogen Modulation Doped a-si Film
Materials Transactions, Vol. 48, No. 5 (27) pp. 975 to 979 #27 The Japan Institute of Metals Excimer Laser Annealing of Hydrogen Modulation Doped a-si Film Akira Heya 1, Naoto Matsuo 1, Tadashi Serikawa
More informationTHE INFLUENCE OF SUBSTRATE PREPARATION, ANODIZATION CONDITIONS AND POST ANODIZING TREATMENT ON AAO MICROSTRUCTURE. Eva JINDROVÁ, Vít JAN, Jan ČUPERA
THE INFLUENCE OF SUBSTRATE PREPARATION, ANODIZATION CONDITIONS AND POST ANODIZING TREATMENT ON AAO MICROSTRUCTURE Eva JINDROVÁ, Vít JAN, Jan ČUPERA Brno University of Technology, Faculty of Mechanical
More information