High Yield Dicing of 100 mm and 150 mm SiC Wafer with High Throughput
|
|
- Winfred Charles
- 6 years ago
- Views:
Transcription
1 High Yield Dicing of 100 mm and 150 mm SiC Wafer with High Throughput Hans-Ulrich Zühlke (3D-Micromac, Chemnitz) Dirk Lewke (Fraunhofer IISB, Erlangen)
2 Content 1. Motivation 2. Basics of TLS-Dicing 3. A yield study for SiC-dicing 4. Quality aspects 5. Cost aspects 6. Conclusion
3 Motivation microdice separates wafers into dies State of the art: mechanical sawing Alternative: laser ablation or modification
4 Motivation State of the art is mechanical sawing with some disadvantages: Chipping and micro cracks Delamination of back side metallization Street width requirements Problems with materials like SiC or low-k Dohnke et. al: Comparison of different novel chip separation methods for 4H-SiC, Proceedings of ECSCRM conference, Grenoble 2014
5 Motivation Alternative laser dicing shows also some disadvantages: Micro cracks Significant heat affected zone Problems with back side metallization Dohnke et. al: Comparison of different novel chip separation methods for 4H-SiC, Proceedings of ECSCRM conference, Grenoble 2014
6 Motivation 4 inch 6 inch Transition from 4 to 6 has been started SiC device market is growing Market in Mio. $ Source: Yolé: Power SiC 2016: Materials, Devices, Modules, and Applications report June 2016
7 Our Solution: microdice Up to 300 mm (12 ) wafer size Integrated laser sources with long lifetime Integrated patented micro stretching function Automated wafer handling SECS / GEM interface Compatible with common SEMI standards Consumables: only DI-water microdice
8 Content 1. Motivation 2. Basics of TLS-Dicing 3. A yield study for SiC-dicing 4. Quality aspects 5. Cost aspects 6. Conclusion
9 Thermal Laser Separation (TLS) Starting point (and optional straightness) defined by scribe TLS is a cleaving process, driven by heat and cooling Cooling Laser Initial scribe or Continuous scribe
10 Advantages of TLS-Dicing on microdice TLS is a cleaving process
11 Advantages of TLS-Dicing on microdice Very high separation quality TLS is a cleaving process Si (approx. 400 µm thick) after TLS cleave and I-Scribe
12 mm/s Advantages of TLS-Dicing on microdice Very high separation quality High throughput TLS is a cleaving process Standard saw US supported saw TLS-Dicing
13 Advantages of TLS-Dicing on microdice Very high separation quality High throughput TLS is a cleaving process Low Cost of Ownership
14 Advantages of TLS-Dicing on microdice Very high separation quality High throughput TLS is a cleaving process Less design rule requirements Low Cost of Ownership TLS diced diode on 110 µm thick 4H-SiC wafer
15 Characteristic Results SEM image of a TLS diced 110 µm thick 4H SiC diode. Scribe depth approx. 13µm Smooth sidewall with fracture marks back side metallization
16 Content 1. Motivation 2. Basics of TLS-Dicing 3. A yield study for SiC-dicing 4. Quality aspects 5. Cost aspects 6. Conclusion
17 A Yield Study Objectives of study Demonstrate repeatability of dicing yield for SiC power devices (diodes) Demonstrate transferability to 6 inch wafer Experimental approach Real product wafer was used Target was to cut large dies => a cluster of smaller dies was used
18 Yield Results Comments on Categories
19 Characteristic Result Pattern Minor deviation Smaller than kerf width Not yield relevant Major deviation Yield relevant Major deviation in edge exclusion Not yield relevant
20 Yield Calculation and Results Case A (w./o. edge) Category % Perfect 97,97 Minor straightness deviation 0,94 Major straightness deviation 0,23 Cleave failure by outer metal ring 0,83 Yield (all usable dies) 98,91
21 6 Inch 4H-SiC Wafer Blank 6 inch 4H-SiC wafer 350 µm thick Back side metallization thickness: 1 µm Yield up to 97% 21 10/7/2016 3D-Micromac AG 2016
22 Content 1. Motivation 2. Basics of TLS-Dicing 3. A yield study for SiC-dicing 4. Quality aspects 5. Cost aspects 6. Conclusion
23 Quality Aspects - Electrical Parameters Typical value at 1200V: 9µA x All values in spec according data sheet Yield after packaging: % SiC-JFET, Wafer thickness 160 µm, Die size 3.16 X 3.16 mm², Back-side metal, mounted on DCB Dohnke et. al: Comparison of different novel chip separation methods for 4H-SiC, Proceedings of ECSREAM conference, Grenoble 2014
24 Quality Aspects Particles Standard case: Particles not significant Housing / mounting w./o. cleaning possible Special case: Improved scribing method Laser scribe Particle film Standard scribe Laser scribe No particle film Curtesy of Fraunhofer IISB Improved scribe
25 Content 1. Motivation 2. Basics of TLS-Dicing 3. A yield study for SiC-dicing 4. Quality aspects 5. Cost aspects 6. Conclusion
26 Throughput Calculation Wafer: 150 mm SiC Back side metal 160 µm thickness 1 mm die edge length PCM in street 70 µm street with Wafer p. h. mechanical saw TLS 4,3 Parameter: Speed 200 mm/s for TLS 4 mm/s for mech. saw 0,4 mechanical saw TLS
27 Cost Calculation Considered: Throughput: 4 wafer per hour Consumables (saw blades) Invest/depreciation for tool Footprint Not considered: Benefit in terms of yield Reduced operator costs mechanical saw: 37 TLS-Dicing : 2.40
28 Content 1. Motivation 2. Basics of TLS-Dicing 3. A yield study for SiC-dicing 4. Quality aspects 5. Cost aspects 6. Conclusion
29 Benefits and Design Rules of TLS-Dicing Benefits: Design rules: TLS offers for SiC: High yield High throughput Dicing Quality is high Significant lower cost per wafer TLS has less design rules Same tool configuration works for Si Metal (PCM) in street is ok (will be opened by scribe laser) Large front side metal structures require additional clearing step Aspect ratio for die edge length: 1 to 4 Aspect ratio for BS-metal 1 to 100, higher with slightly bending Polyimide open street >= 70 µm
30 Conclusion Dicing of SiC wafer with yield >= 98% shown Transfer from 4 to 6 inch successful demonstrated We use usually shallow continuous scribe at surface A few particles are generated, for many products no cleaning required For some products a improved scribe method was successfully tested Outstanding throughput & cost benefits
31 TLS-Dicing - Cooperation with Fraunhofer IISB More then 9 years of successful cooperation Courtesy Fraunhofer Gesellschaft Experienced scientists Wide range of measurement tools Equipped with the latest version of TLS-Dicing tool in clean room Special thanks to our EU-project partners TLS-Project partly funded by European Union contract SEA4KET
32 Thank you for your attention! 3D-Micromac AG Dr. Hans-Ulrich Zühlke Technologie-Campus Chemnitz, Germany Visit us at booth # Phone: zühlke@3d-micromac.com
microdice System for Separation of SiC Wafer Using Thermal Laser Separation
microdice System for Separation of SiC Wafer Using Thermal Laser Separation - System Integration Technologies Fraunhofer ENAS - (Ronny Neubert, 3D-Micromac AG) 3D-Micromac At a Glance Manufacturer and
More informationLaser Micromachining for Industrial Applications and R&D. 3D-Micromac AG. Symposium on Smart Integrated Systems in Chemnitz. 3D-Micromac AG
3D-Micromac AG Symposium on Smart Integrated Systems in Chemnitz 1 1 microdice - TLS-Dicing for separation of SiC 2 microprep - for high-throughput microstructure diagnostics 3 About 3D-Micromac AG 2 microdice
More informationAvailable online at ScienceDirect. Energy Procedia 77 (2015 )
Available online at www.sciencedirect.com ScienceDirect Energy Procedia 77 (2015 ) 340 345 5th International Conference on Silicon Photovoltaics, SiliconPV 2015 High quality half-cell processing using
More informationPDF created with FinePrint pdffactory Pro trial version
Benefits Damage-free dicing of thin silicon Capable of producing smallest street widths which in return provides additional space for more parts per wafer Single step process results in reduction of cost
More informationHigh-Rate Laser Micro Machining Systems Using Ultrashort Pulsed Lasers Uwe Wagner, 3D-Micromac AG
High-Rate Laser Micro Machining Systems Using Ultrashort Pulsed Lasers Uwe Wagner, 3D-Micromac AG Content 1. 3D-Micromac At a glance 2. Cluster market related machine requirements 3. Solution examples
More informationEnabling Technology in Thin Wafer Dicing
Enabling Technology in Thin Wafer Dicing Jeroen van Borkulo, Rogier Evertsen, Rene Hendriks, ALSI, platinawerf 2G, 6641TL Beuningen Netherlands Abstract Driven by IC packaging and performance requirements,
More informationAbstract. Introduction
Accelerating Silicon Carbide Power Electronics Devices into High Volume Manufacturing with Mechanical Dicing System By Meng Lee, Director, Product Marketing and Jojo Daof, Senior Process Engineer Abstract
More information3D-Micromac AG. Micromachining Excellence
3D-Micromac AG Micromachining Excellence Our international customers place great value on future-oriented and user-friendly processes. Our solutions help them increase production efficiency and lower cost.
More informationPower Electronics Packaging Solutions for Device Junction Temperature over 220 o C
EPRC 12 Project Proposal Power Electronics Packaging Solutions for Device Junction Temperature over 220 o C 15 th August 2012 Page 1 Motivation Increased requirements of high power semiconductor device
More informationEnhancement Mode GaN FETs and ICs Visual Characterization Guide
Enhancement Mode GaN FETs and ICs Visual Characterization Guide EFFICIENT POWER CONVERSION Alana Nakata, Vice President, Product Engineering, Efficient Power Conversion Corporation A detailed description
More informationPackaging solution for GaN-on-200mm Si power devices
Edition June 2018 GaN power electronics Packaging solution for GaN-on-200mm Si power devices Imec and UTAC have developed a unique process for the wafer thinning and backside metallization of highly stressed
More informationWafer Level Molded DDFN Package Project Duane Wilcoxen
Wafer Level Molded DDFN Package Project Duane Wilcoxen Definition of DDFN (Encapsulated CSP) DDFN package basically is a CSP device with an epoxy coating on all (or most) of the device sides for added
More informationDicing of Ultra-thin Silicon Wafers
Dicing of Ultra-thin Silicon Wafers Hans H. Gatzen, Gerald Guenzel Institute for Microtechnology, Hanover University, Germany Keywords: dicing, ultra thin wafers, silicon, chipping, machining Abstract:
More informationTFS PRODUCTION SOLUTIONS. TFS Production Solutions. For thin-film solar modules
TFS PRODUCTION SOLUTIONS TFS Production Solutions For thin-film solar modules 2 TFS PRODUCTION SOLUTIONS MANZ AG 3 TFS PRODUCTION SOLUTIONS MANZ AG GERMAN ENGINEERING INTERNATIONALLY STAGED GLOBAL REFERENCES
More informationTFS PRODUCTION SOLUTIONS. TFS Production Solutions. For thin-film solar modules
TFS PRODUCTION SOLUTIONS TFS Production Solutions For thin-film solar modules 2 TFS PRODUCTION SOLUTIONS MANZ AG 3 TFS PRODUCTION SOLUTIONS MANZ AG GERMAN ENGINEERING INTERNATIONALLY STAGED GLOBAL REFERENCES
More informationScribing-Cleaving-Passivation for High Energy Physics Silicon Sensors
Scribing-Cleaving-Passivation for High Energy Physics Silicon Sensors Marc Christophersen 1, Bernard F. Phlips 1, Vitaliy Fadeyev 2, Scott Ely 2, Hartmut F.-W. Sadrozinski 2 (1) Code 7654, U.S. Naval Research
More informationCustomizing Processes for Hermetic Assembly Of Devices Designed for Plastic Packages (1 of 3)
Customizing Processes for Hermetic Assembly Of Devices Designed for Plastic Packages (1 of 3) Charlie C. Megia Golden Altos Corporation 402 South Hillview Drive, Milpitas, CA 95035 cmegia@goldenaltos.com
More informationLaser grooving technique for dicing nanoscale low-k wafer
Laser grooving technique for dicing nanoscale low-k wafer Hsiang-Chen Hsu and Shih-Jeh Wu Professor Department of Mechanical and Automation Engineering I-Shou University HCHSU, ISU/Slide 1 Outline Background
More informationLaser Dicing of Silicon: Comparison of Ablation Mechanisms with a Novel Technology of Thermally Induced Stress
Dicing of Silicon: Comparison of Ablation Mechanisms with a Novel Technology of Thermally Induced Stress Oliver HAUPT, Frank SIEGEL, Aart SCHOONDERBEEK, Lars RICHTER, Rainer KLING, Andreas OSTENDORF Zentrum
More informationMicro Laser-Sintering by 3D MicroPrint GmbH
Micro Laser-Sintering by 3D MicroPrint GmbH 3D MicroPrint GmbH at a glance 2006 2008 2009 2013 Q3/2014 3D-Micromac and EOS cooperate in Micro Laser Sintering (MLS) MLS technology demonstrator available
More informationEnabling Solid State Lighting through Advancements in MOCVD Technology
Enabling Solid State Lighting through Advancements in MOCVD Technology Kenny Sun, Ph.D Director of Technology Taiwan Technology Center Veeco Taiwan Inc. LED Lighting at the Cusp of Mass Adoption LED Output/Package
More informationETIP-PV Manufacturing Conference Brussels, May 19 th Epitaxial Wafers: A game-changing technology on its way to mass production
ETIP-PV Manufacturing Conference Brussels, May 19 th 2017 Epitaxial Wafers: A game-changing technology on its way to mass production NexWafe: producer of high-quality silicon wafers NexWafe will supply
More informationMOCVD Technology for LED
MOCVD Technology for LED Prof. Dr.-Ing. Michael Heuken Vice President Corporate Research and Development AIXTRON AG, Fon: +49 (241) 8909-154, Fax: +49 (241) 8909-149, Email: M.Heuken@AIXTRON.com RWTH Aachen,
More informationbans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
MS7907 PRESSURE SENSOR DIE (0-7 BAR) 0 to 700 kpa range (7 bar or 102 PSI) Absolute/differential pressure sensors High linearity, small size RoHS-compatible & Pb-free 1 DESCRIPTION The sensor element of
More informationFraunhofer IZM. All Silicon System Integration Dresden Scope. M. Juergen Wolf
Fraunhofer IZM All Silicon System Integration Dresden Scope M. Juergen Wolf Fraunhofer IZM All Silicon System Integration - ASSID Dresden, Berlin, Germany Fraunhofer IZM Focus of Activities Materials,
More informationInnovative Laser Processing Technologies
Innovative Laser Processing Technologies Reinhard Ferstl Director Sales & Marketing EMEA / Asia Corning Laser Technologies September 21, 2016 2016 Corning Incorporated Corning Market Segments and Additional
More informationMulti Beam Laser Grooving Process Parameter Development and Die Strength Characterization for 40nm Node Low-K/ULK Wafer
Multi Beam Laser Grooving Process Parameter Development and Die Strength Characterization for 40nm Node Low-K/ULK Wafer Koh Wen Shi 1,3, K. Y. Yow 1, Calvin Lo 1, Dr. Yap Boon Kar 2, Dr. Halina Misran
More informationAdvanced Laser scribing of thin-film solar panels. LPKF Allegro
Advanced Laser scribing of thin-film solar panels LPKF Allegro Optimal dynamics Maximal processing speed independent of the cell orientation on the module Efficient utilization of module area Successive
More informationActivities in Plasma Process Technology at SENTECH Instruments GmbH, Berlin. Dr. Frank Schmidt
Activities in Plasma Process Technology at SENTECH Instruments GmbH, Berlin Dr. Frank Schmidt The Company Company Private company, founded 1990 80 employees ISO 9001 Location Science & Technology Park,
More informationDicing Products. Hub Blades and Services for Advanced Material Applications
Dicing Products Hub Blades and Services for Advanced Material Applications In the last two years, the implementation of new and significant quality improvement processes, combined with the addition of
More informationIMEC, LEUVEN, BELGIUM, 2 KU LEUVEN, BELGIUM, 3 U HASSELT, BELGIUM
INVESTIGATION OF RADIATION DAMAGE OF CU PLATED IBC CELLS CAUSED BY SPUTTERING OF SEED LAYER SUKHVINDER SINGH 1, BARRY O SULLIVAN 1, SHRUTI JAMBALDINNI 1, MAARTEN DEBUCQUOY 1 AND JEF POORTMANS 1,2,3 1 IMEC,
More informationFraunhofer ENAS Current results and future approaches in Wafer-level-packaging FRANK ROSCHER
Fraunhofer ENAS - Current results and future approaches in Wafer-level-packaging FRANK ROSCHER Fraunhofer ENAS Chemnitz System Packaging Page 1 System Packaging Outline: Wafer level packaging for MEMS
More informationMicrowave Plasma Processing
Microwave Plasma Processing MUEGGE GMBH Hochstraße 4-6 64385 Reichelsheim Fon +49 (0) 6164-93 07 11 Fax +49 (0) 6164-93 07 93 info@muegge.de www.muegge.de Microwave Plasma Processing Microwave Plasma Technology:
More informationLaser MicroJet. a technology for - prototyping - design innovation - mass customization - small / mid-sized manufacturing runs.
Innovative Laser Systems Laser MicroJet a technology for - prototyping - design innovation - mass customization - small / mid-sized manufacturing runs Eric Krause EPMT EPHJ Swissphotonics seminar June
More informationWater Jet Guided Laser Cutting of Silicon Thin Films Using 515nm Disk Laser
Technical Communication JLMN-Journal of Laser Micro/Nanoengineering Vol. 6, No. 2, 11 Water Jet Guided Laser Cutting of Silicon Thin Films Using 515nm Disk Laser Eva-Maria Heilmann*, Albrecht Seidl** and
More informationChallenges for Embedded Device Technologies for Package Level Integration
Challenges for Embedded Device Technologies for Package Level Integration Kevin Cannon, Steve Riches Tribus-D Ltd Guangbin Dou, Andrew Holmes Imperial College London Embedded Die Technology IMAPS-UK/NMI
More information5. Packaging Technologies Trends
5. Packaging Technologies Trends Electronic products and microsystems continue to find new applications in personal, healthcare, home, automotive, environmental and security systems. Advancements in packaging
More informationcuramik CERAMIC SUBSTRATES AMB technology Design Rules Version #04 (09/2015)
curamik CERAMIC SUBSTRATES AMB technology Design Rules Version #04 (09/2015) Content 1. Geometric properties 1.01. Available ceramic types / thicknesses... 03 1.02. thicknesses (standard)... 03 3. Quality
More informationHigh temperature reliability of power module substrates
High temperature reliability of power module substrates Dean Hamilton, University of Warwick, United Kingdom, d.p.hamilton@warwick.ac.uk Liam Mills, TT Electronics Semelab Ltd, Lutterworth, UK, Liam.Mills@semelab-tt.com
More informationUV15: For Fabrication of Polymer Optical Waveguides
CASE STUDY UV15: For Fabrication of Polymer Optical Waveguides Master Bond Inc. 154 Hobart Street, Hackensack, NJ 07601 USA Phone +1.201.343.8983 Fax +1.201.343.2132 main@masterbond.com CASE STUDY UV15:
More informationBeam Leads. Spider bonding, a precursor of TAB with all-metal tape
Beam Leads The vast majority of chips are intended for connection with thermosonic bonds: all other methods require some modification to the wafer. As early as 1972, Jordan described three gang-bonding
More informationElectrical and Fluidic Microbumps and Interconnects for 3D-IC and Silicon Interposer
Electrical and Fluidic Microbumps and Interconnects for 3D-IC and Silicon Interposer Li Zheng, Student Member, IEEE, and Muhannad S. Bakir, Senior Member, IEEE Georgia Institute of Technology Atlanta,
More informationfor fully electric vehicles
Reliability of new SiC BJT power modules for fully electric vehicles Alexander Otto 1, Eberhard Kaulfersch 2, Klas Brinkfeldt 3, Klaus Neumaier 4, Olaf Zschieschang 4, Dag Andersson 3, Sven Rzepka 1 1
More informationPolymer Microfabrication (Part II) Prof. Tianhong Cui, Mechanical Engineering ME 8254
Polymer Microfabrication (Part II) Prof. Tianhong Cui, Mechanical Engineering ME 8254 Other Polymer Techniques Embossing Low cost High throughput Structures as small as 25 nm Injection molding Features
More informationGlass Wafer. Specification
Glass Wafer Specification Glass Wafer Specification SCHOTT Thin Glass and Wafer products are the result of deep technological expertise. With a product portfolio of more than 100 optical glasses, special
More informationPHYS 534 (Fall 2008) Process Integration OUTLINE. Examples of PROCESS FLOW SEQUENCES. >Surface-Micromachined Beam
PHYS 534 (Fall 2008) Process Integration Srikar Vengallatore, McGill University 1 OUTLINE Examples of PROCESS FLOW SEQUENCES >Semiconductor diode >Surface-Micromachined Beam Critical Issues in Process
More informationIMPACT OF FIRING TEMPERATURE PROFILES ON LOCAL BSF FORMATION IN PERC SOLAR CELLS
IMPACT OF FIRING TEMPERATURE PROFILES ON LOCAL BSF FORMATION IN PERC SOLAR CELLS S. Mack1, P. Richter2, S. Werner1, F. Clement1, A. Wolf1 1Fraunhofer-Institute for Solar Energy Systems ISE 2BTU International
More informationA novel pick-and-place process for ultra-thin chips on flexible smart systems Thomas Meissner (Hahn-Schickard)
A novel pick-and-place process for ultra-thin chips on flexible smart systems Thomas Meissner (Hahn-Schickard) Dr. rer. nat. Outline 1. Introduction to Hahn-Schickard 2. Motivation 3. Pick process 4. Application
More informationSTRUCTURAL ANALYSIS OF TSVS
STRUCTURAL ANALYSIS OF TSVS HUGO BENDER CHRIS DRIJBOOMS, PATRICIA VAN MARCKE, JEF GEYPEN, OLIVIER RICHARD, PAOLA FAVIA EFUG2010 Gaeta, 11 October 2010 OUTLINE Introduction : 3D device stacking FIB analysis
More informationInternational Technology Roadmap for Photovoltaic (ITRPV) - 4 th Edition - Results 2012
International Technology Roadmap for Photovoltaic (ITRPV) - 4 th Edition - Results 2012 Stephan Raithel, SEMI Europe, Director PV Europe 10 July, San Francisco AGENDA Introduction of the 4 th edition of
More informationMicro and nano structuring of carbon based materials for micro injection moulding and hot embossing
Micro and nano structuring of carbon based materials for micro injection moulding and hot embossing Victor Usov, Graham Cross, Neal O Hara, Declan Scanlan, Sander Paulen, Chris de Ruijter, Daniel Vlasveld,
More informationAluminum / Copper oscillation welding with a 500 W direct diode laser
Application Note Issued: 2016-06-01 Aluminum / Copper oscillation welding with a 500 W direct diode laser SUMMARY The performance of the 500 W DirectProcess direct diode laser for oscillating welding by
More informationOUR SPECIALTY OUR SCOPE. We specialize in the design and manufacture of thick-film hybrid microcircuits and custom packagings.
OUR SPECIALTY We specialize in the design and manufacture of thick-film hybrid microcircuits and custom packagings. OUR SCOPE We serve the global market, catering to the specific needs of a broad range
More informationThe Most Efficient SMT Solder Paste Stencil Cutter Available LPKF StencilLaser G 6080, Model 2011
The Most Efficient SMT Solder Paste Stencil Cutter Available LPKF StencilLaser G 6080, Model 2011 20 % higher cutting throughput 1 2 % cost savings on cutting gas 2 100% cost savings on chiller operation
More informationIntlvac Nanochrome I Sputter System (intlvac_sputter)
1. Intlvac_Sputter Specifications The Intlvac Nanochrome I sputter system is configured for DC, AC (40 khz), and RF (13.56 MHz) magnetron sputtering. They system has in-situ quartz lamp heating up to 200C,
More informationPushing and Entering
Pushing and Entering Dressed Blades versus Non Dressed Blades High loads Low diamond exposure Low machinability High diamond exposure High machinability Blade Edge Grinding Blade Silicon Carbide wheel
More informationA novel test method for robustness assessment of very small, functional ultra-thin chips embedded in flexible foils
A novel test method for robustness assessment of very small, functional ultra-thin chips embedded in flexible foils Nagarajan Palavesam 1, 2 Christof Landesberger 1, Christoph Kutter 1, Karlheinz Bock
More informationSheet) Graphite Sheet
PGS(Pyrolytic Graphite Sheet) Graphite Sheet Panasonic Electronic Device Co.,Ltd Panasonic Electronic Device Hokkaido Co.,Ltd PGS Graphite Sheet PGS (Pyrolytic Highly Oriented Graphite Sheet) is made of
More informationExpanding Opportunities in Stencil Cutting LPKF StencilLaser G 6060
Expanding Opportunities in Stencil Cutting LPKF StencilLaser G 6060 High cutting quality superior accuracy High throughput more stencils per shift Easy operation designed for optimum return Stencil cutting
More informationNew Metallization Concept for High Efficiency/Low Cost c-si Photovoltaic Solar Cells
New Metallization Concept for High Efficiency/Low Cost c-si Photovoltaic Solar Cells 5 th Metallization Workshop Oct. 20, 2014, Konstanz, Germany Tetsu TAKAHASHI, Taeko SENBA, Seiya KONNO, Kazuo MURAMATSU
More informationFRAUNHOFER INSTITUTE FOR MACHINE TOOLS AND FORMING TECHNOLOGY IWU SIMULATION IN FORMING TECHNOLOGY
FRAUNHOFER INSTITUTE FOR MACHINE TOOLS AND FORMING TECHNOLOGY IWU SIMULATION IN FORMING TECHNOLOGY 1 SIMULATION IN SHEET METAL FORMING Simulation is an essential part of the development chain, especially
More informationTrends in LED manufacturing: How to reduce LED cost of ownership SEMICON Taiwan 2012 Pascal Viaud - CTO
Trends in LED manufacturing: How to reduce LED cost of ownership SEMICON Taiwan 2012 Pascal Viaud - CTO Verticle Inc Lumileds OSRAM Aixtron CREE OSRAM OSRAM Cascade Microtec 75 cours Emile Zola, F-69100
More informationOptimizing the processing of sapphire with ultrashort laser pulses
Optimizing the processing of sapphire with ultrashort laser pulses Geoff Lott 1, Nicolas Falletto 1, Pierre-Jean Devilder, and Rainer Kling 3 1 Electro Scientific Industries, Eolite Systems, 3 Alphanov
More informationHigh Throughput Laser Processing of Guide Plates for Vertical Probe Cards Rouzbeh Sarrafi, Dana Sercel, Sean Dennigan, Joshua Stearns, Marco Mendes
High Throughput Laser Processing of Guide Plates for Vertical Probe Cards Rouzbeh Sarrafi, Dana Sercel, Sean Dennigan, Joshua Stearns, Marco Mendes IPG Photonics - Microsystems Division Outline Introduction
More informationAN Handling and processing of sawn wafers on UV dicing tape. Document information. Sawn wafers, UV dicing tape, handling and processing
Handling and processing of sawn wafers on UV dicing tape Rev. 2.0 13 January 2009 Application note Document information Info Keywords Abstract Content Sawn wafers, UV dicing tape, handling and processing
More informationThe development of the Collaborative Network Portal approach
The development of the Collaborative Network Portal approach The ALSI Business Case revisited Background Advanced Laser Separation International (ALSI) was founded in 2001 (spin-out from Royal Philips
More informationExtending Etch and Deposition Capabilities for Implementation of 3D Packaging of MEMS in Volume Production
Extending Etch and Deposition Capabilities for Implementation of 3D Packaging of MEMS in Volume Production David Butler, VP Product Management & Marketing SPTS Technologies Contents Industry Trends TSV
More informationDicing Glass Optical Devices
Glass Applications Dicing Glass Optical Devices -Blade Characteristics 2,, 4 4 Resin Type Q Diamond grit size: 15-45 mic. Thickness: 0.006-0.012 0.012 (0.15mm 0.3mm) Metal Sintered E08 & New matrices 8-258
More informationOptical Inspection for the Field of Thin-Film Solar
Top quality for the photovoltaic industry Optical Inspection for the Field of Thin-Film Solar Thin-film solar cells are playing an increasingly important role in the photovoltaic industry. Even though
More informationInternational Technology Roadmap for Photovoltaic (ITRPV) - 3 rd Edition - Results 2011
International Technology Roadmap for Photovoltaic (ITRPV) - 3 rd Edition - Results 2011 Dr. Markus Fischer Q-Cells SE Director R&D Processes March 26 Berlin 2012 1 AGENDA Introduction of the ITRPV - aim
More informationPre-Print for 28th European Photovoltaic Solar Energy Conference and Exhibition, Paris, 2013
STUDY ON CRYSTAL DAMAGE, BOWING AND POWER LOSSES FOR RIBBON WITH VARYING YIELD STRENGTH Andreas Schneider, Severin Aulehla, Engelbert Lemp, Rudolf Harney International Solar Energy Research Center (ISC)
More informationcsi PRODUCTION SOLUTIONS csi PRODUCTION SOLUTIONS FOR CRYSTALLINE SILICON SOLAR CELLS
csi PRODUCTION csi PRODUCTION FOR CRYSTALLINE SILICON SOLAR CELLS 3 PASSION FOR EFFICIENCY PHOTOVOLTAICS CONTENT Process machines and automation systems by Manz offer many advantages for customers in the
More informationATHENA - Module Construction
ATHENA - Module Construction 1998-2000 P. Riedler*, J. Rochet ATHENA Group, University of Zürich * now at CERN ATHENA Silicon Vertex Detector Cylindrical symmetry Outer diameter: 139.7 mm Inner diameter:
More informationOptimized Thermal Management. with Advanced Ceramic Materials for Power Electronics, CPV and HCPV
Optimized Thermal Management with Advanced Ceramic Materials for Power Electronics, CPV and HCPV T H E C E R A M I C E X P E R T S Ceramic Base Materials for the Electronics Industry We offer the full
More informationSimulation of Embedded Components in PCB Environment and Verification of Board Reliability
Simulation of Embedded Components in PCB Environment and Verification of Board Reliability J. Stahr, M. Morianz AT&S Leoben, Austria M. Brizoux, A. Grivon, W. Maia Thales Global Services Meudon-la-Forêt,
More informationGlass Wafer. Specification
Glass Wafer Specification Glass Wafer Specification SCHOTT Thin Glass and Wafer products are the result of deep technological expertise. With a product portfolio of more than 100 optical glasses, special
More informationSmart Packaging Solutions for Secure Applications
Tamper Respondent Envelope Solutions Realized by Additive Manufacturing F. Roscher, N. Saeidi, F. Selbmann T. Enderlein, E. Kaulfersch, J. Albrecht, E. Noack, C. Hannauer, A. Lecavelier, M. Wiemer and
More informationLOW TEMPERATURE PHOTONIC SINTERING FOR PRINTED ELECTRONICS. Dr. Saad Ahmed XENON Corporation November 19, 2015
LOW TEMPERATURE PHOTONIC SINTERING FOR PRINTED ELECTRONICS Dr. Saad Ahmed XENON Corporation November 19, 2015 Topics Introduction to Pulsed Light Photonic sintering for Printed Electronics R&D Tools for
More informationOverview of CMP for TSV Applications. Robert L. Rhoades, Ph.D. Presentation for AVS Joint Meeting June 2013 San Jose, CA
Overview of CMP for TSV Applications Robert L. Rhoades, Ph.D. Presentation for AVS Joint Meeting June 2013 San Jose, CA Outline TSV s and the Role of CMP TSV Pattern and Fill TSV Reveal (non-selective)
More informationHow technology innovation is anticipated to reduce the cost from PV installations. Webinar 23/05/ :00 12:00 CET
How technology innovation is anticipated to reduce the cost from PV installations. Webinar 23/05/2016 11:00 12:00 CET Agenda Item Cost reduction approach in Cheetah project ongoing work and results. Future
More informationTechARENA Packaging Exhibitor Session OCT/08, 2014 New WLP-Technology-Fusion Concept Steffen Kröhnert, Director of Technology, NANIUM S.A. V1.
TechARENA Packaging Exhibitor Session OCT/08, 2014 New WLP-Technology-Fusion Concept Steffen Kröhnert, Director of Technology, NANIUM S.A. V1.0 EXT Notification NANIUM is highly committed to IP protection.
More informationTHERMAL MODELLING OF MULTI-FINGER ALGAN/GAN HEMT s. H. Oprins, J. Das, W. Ruythooren, R. Vandersmissen, B. Vandevelde, M. Germain
Belgirate, Italy, 28-3 September 25 THERMAL MODELLING OF MULTI-FINGER ALGAN/GAN HEMT s H. Oprins, J. Das, W. Ruythooren, R. Vandersmissen, B. Vandevelde, M. Germain Imec vzw, Kapeldreef 75, B-31 Belgium
More informationMolding materials performances experimental study for the 3D interposer scheme
Minapad 2014, May 21 22th, Grenoble; France Molding materials performances experimental study for the 3D interposer scheme Y. Sinquin, A. Garnier, M. Argoud, A. Jouve, L. Baud, J. Dechamp, N. Allouti,
More informationSurface Preparation Challenges in Crystalline Silicon Photovoltaic Manufacturing
Surface Preparation Challenges in Crystalline Silicon Photovoltaic Manufacturing Kristopher Davis 1,3, Andrew C. Rudack 2,3, Winston Schoenfeld 1,3 Hubert Seigneur 1,3, Joe Walters 1,3, Linda Wilson 2,3
More informationTSV Interposer Process Flow with IME 300mm Facilities
TSV Interposer Process Flow with IME 300mm Facilities Property of Institute of Microelectronics (IME)-Singapore August 17, 2012 Outline 1. TSV interposer (TSI) cross sectional schematic TSI with BEOL,
More informationChallenges and Solutions for Cost Effective Next Generation Advanced Packaging. H.P. Wirtz, Ph.D. MiNaPAD Conference, Grenoble April 2012
Challenges and Solutions for Cost Effective Next Generation Advanced Packaging H.P. Wirtz, Ph.D. MiNaPAD Conference, Grenoble April 2012 Outline Next Generation Package Requirements ewlb (Fan-Out Wafer
More informationVersatile use, unique cutting
TRUMPF is certified according ISO 9001 (further information see www.trumpf.com/s/quality) Nibbler for fiber composite materials Versatile use, unique cutting No. 2347154_201805 Subject to change Worldwide:
More informationANALYSING BACKSIDE CHIPPING ISSUES OF THE DIE AT WAFER SAW. Martin Vagues In Partial Fulfillment of MatE 234 May 10th, 2003
ANALYSING BACKSIDE CHIPPING ISSUES OF THE DIE AT WAFER SAW Martin Vagues In Partial Fulfillment of MatE 234 May 10th, 2003 Prof Gunaselvaduray SJSU, San Jose ABSTRACT With shrinking technologies evolving,
More informationPlasma for Underfill Process in Flip Chip Packaging
Plasma for Underfill Process in Flip Chip Packaging Jack Zhao and James D. Getty Nordson MARCH 2470-A Bates Avenue Concord, California 94520-1294 USA Published by Nordson MARCH www.nordsonmarch.com 2015
More informationCustomized heat treatment systems for. press hardening
Customized heat treatment systems for press hardening schwartz heat treatment equipment as unique as your production line Innovation based on vast experience Ever since schwartz was founded in 1984, we
More informationCORROSION PITTING MONITORING ON LOW PRESSURE TURBINE BLADES
CORROSION PITTING MONITORING ON LOW PRESSURE TURBINE BLADES More info about this article: http://www.ndt.net/?id=22527 Abstract Jan Patera a), Pavel Zahradka a) a) Research Centre Rez s.r.o. e-mail: jan.patera@cvrez.cz,
More informationPlasma Etching Rates & Gases Gas ratios affects etch rate & etch ratios to resist/substrate
Plasma Etching Rates & Gases Gas ratios affects etch rate & etch ratios to resist/substrate Development of Sidewalls Passivating Films Sidewalls get inert species deposited on them with plasma etch Creates
More informationPrimeBlade The Swedish
PrimeBlade The Swedish Doctor Blade PrimeBlade Sweden AB is a global manufacturer and supplier of Doctor Blades for flexo, gravure, offset printers, and coating applications. Together with our Swedish
More informationAdam R. Boyd, Arthur Beckers, Martin Eickelkamp, Assad Alam, Michael Heuken
AIXTRON s MOCVD Technology Breakthrough For Micro LED High Volume Manufacturing Adam R. Boyd, Arthur Beckers, Martin Eickelkamp, Assad Alam, Michael Heuken AIXTRON SE, Herzogenrath, Germany Micro LED Display
More informationPEAK EFFICIENCIES WITH FALLING MANUFACTURING COSTS
PEAK EFFICIENCIES WITH FALLING MANUFACTURING COSTS Simple and cost-effective introduction of PERC technology into the mass production of solar cells Kerstin Strauch, Florian Schwarz, Sebastian Gatz 1 Introduction
More informationHow can MOCVD enable production of cost efficient HB LED's
How can MOCVD enable production of cost efficient HB LED's Dr. Frank Schulte AIXTRON SE Company and Market Market requests and challenges Answer from the technology Conclusion P 2 Confidential Proprietary
More informationApplications Catheters. Polymer Tube Processing Catheter Hole Drilling
Applications Catheters Polymer Tube Processing Catheter Hole Drilling Stainless Steel Tube Processing Laser Light Technologies can achieve virtually burr-free cuts in stainless steel tubing of various
More informationApplication of virtual metrology and predictive maintenance in semiconductor manufacturing
SEMICON Europa 2010 - TechARENA - Automation and Process Control Session Application of virtual metrology and predictive maintenance in semiconductor manufacturing G. Roeder, M. Pfeffer, M. Schellenberger,
More informationMaterial based challenge and study of 2.1, 2.5 and 3D integration
1 Material based challenge and study of 2.1, 2.5 and 3D integration Toshihisa Nonaka Packaging Solution Center R&D Headquarters Hitachi Chemical Co., Ltd., Sep. 8, 2016 Hitachi Chemical Co., Ltd. 2010.
More informationLow Temperature Dielectric Deposition for Via-Reveal Passivation.
EMPC 2013, September 9-12, Grenoble; France Low Temperature Dielectric Deposition for Via-Reveal Passivation. Kath Crook, Mark Carruthers, Daniel Archard, Steve Burgess, Keith Buchanan SPTS Technologies,
More information