The liquid-metal-jet anode provides unprecedented brightness. Oscar Hemberg

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1 The liquid-metal-jet anode provides unprecedented brightness Oscar Hemberg

2 Agenda Introduction History and development of X-ray source Excillum s liquid-metal-jet-anode x-ray source Performance Applications Summary 2

3 About Excillum Founded in 2007 Spin-off from research project started at KTH (Royal Institute of Technology) in Mix of private venture capital and government agency research funding Commercializing a new x-ray source technology 4 prototype sources deployed with customers Exclusive partnership with Bruker for diffraction market First joint end customer installations planned for

4 Agenda Introduction History and development of X-ray source Excillum s liquid-metal-jet-anode x-ray source Performance Applications Summary 4

5 Historic Source Development 1904 Thermionic cathode 1990s Synchrotrons Present 1895 Discovery 1920s Line focusing and rotating anodes 2010s - Free-electron lasers Continuous drive for high brilliance sources Research focus on large scale facilities Compact sources have seen minimal improvement since the 1970s Always a need for better homelab systems 5

6 Conventional Source Technology 99.5% of electron-beam power becomes heat Solid target close to melting Few 10 kw/mm 2 e-beam power density defines the technology limit Edge speed at mechanical limits Cooling technology has been perfected Reached its maximum potential with little or no room for improvements 6

7 Agenda Introduction History and development of X-ray source Excillum s liquid-metal-jet-anode x-ray source Performance Applications Summary 7

8 The Excillum Breakthrough High-speed liquid-metal-jet anode 5 mm Anode is regenerative No longer limited by melting >1000 kw/mm 2 e-beam power density! Higher brightness source given more power per area 8

9 Prototype Installation Shutter e - optic Montel Mirror Prototype installation in a D8 Discover cabinet 9

10 Improved Version Pre-production model 10

11 MJX Source Details Closed loop recycling system Magnetic focusing optics 11

12 Agenda Introduction History and development of X-ray source Excillum s liquid metal jet anode x-ray source Performance Applications Summary 12

13 Spot Size & Quality Variable spot size: 5-20 µm W) good spot shape and high spatial stability 5 µm 10 µm 20 µm 13

14 Brightness (a.u.) Source Spectrum and Brightness 1000 Kα Gallium Ga Kα: 9.25 kev (Cu replacement) Kβ Kα In Photon Energy (kev) Kβ Spot size [µm, FWHM] Voltage [kv] Power [W] Ga Kα Flux [Photons/(s mrad 2 line] Ga Kα Brightness [Photons/(s mm 2 mrad 2 line]

15 Reliability & Serviceability Although a new target concept, it is intrinsically a simple system Main components are proven technology and solutions Electron gun and focusing: - Standard HV supply and existing HV insulator used - Cathode and optics design borrowed from accelerator technology - More in common with microfocus tubes and SEM :s than rotating anodes Liquid-jet anode - Modified reliable industrial process pump used - Nozzle design borrowed from water jet cutting technology - Closed loop recycling system, no dynamic vacuum seals Interaction chamber: - Only 200 W of beam-power need to be dissipated - Self-cleaning x-ray output window not deteriorated by vapor deposition - Standard vacuum pumping solutions used 15

16 Agenda Introduction History and development of X-ray source Excillum s liquid-metal-jet-anode x-ray source Performance Applications Summary 16

17 Phase Contrast Imaging I 0 F Δd Β δ I Δ F I Absorption I 0 e 2k d Phase shift k d >> for low Z elements and high photon energies phase contrast 17

18 Phase Contrast Tomography Excillum MJXS Sealed tube Sample: Egg of Peruphasma schultei (Samtschnecke) z1=20 mm, z2=100 mm M Z 1 Z Z 1 2 M=6 3.4 micron effective pixel size 50 x 40.8 W Matthias Bartels, Tim Salditt, Institut für Röntgenphysik, University Göttingen, Germany 18

19 X-Ray Diffraction Mirror Specifications Type Incoatec E43 Divergence 7.45 mrad Magnification 3.8 Source Performance Target Alloy77 (95% Ga) Power 200 W Spot 20 µm Flux photons/(s mrad 2 ) Brightness photons/(s mm 2 mrad 2 ) Focus Spot ~ 100 µm FWHM Intensity > photons/(s mm 2 ) 19

20 Estimated System Performance Beam sample, μm ~ Comparison of flux through a 0.1mm aperture MICROSTAR-MX EXCILLUM MJXS >5.0 x ph/mm 2 /s 260 MICROSTAR-H 110 IuS - Quazar MX 240 IuS - Quazar 300 Classic 5 kw RAG/multilayer optics Intensity x 10 9 (X-rays/sec/mm 2 ) 20

21 Future development Intensity Increased jet speed for higher load capacity Line focus for increased load capacity Power Power (not only intensity) important for certain applications Energy High temperature alloys to access essentially pure In / Sn / Pb / Bi Kα lines at 24, 25, 75 and 77 kev 21

22 Agenda Introduction History and development of X-ray source Excillum s liquid-metal-jet-anode x-ray source Performance Applications Summary 22

23 Summary Breakthrough in x-ray source technology Liquid-metal-jet x-ray sources are ready for industrial use Brightness an order of magnitude higher than conventional technology Exceptional beam quality Variable spot size attractive for certain applications Expected performance when combined with focusing Montel mirrors: ~ 100 µm diameter > photons/s/mm 2 Very attractive for - Biological Crystallography - Small angle X-Ray Scattering (BioSAXS) - High Resolution X-Ray Diffraction 23