Why Probes Look the Way They Do Concepts and Technologies of AFM Probes Manufacturing
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2 Agilent Technologies AFM e-seminar: Understanding and Choosing the Correct Cantilever for Your Application Oliver Krause NanoWorld Services GmbH All mentioned company names and trademarks are property of the respective companies.
3 Overview Introduction Tip sample convolution General remarks Fabrication steps of AFM probes Silicon tip manufacturing process Undercut tip concept Corner tip concept Nitride tip manufacturing process (mold and release concept) Tip refinement, extra tips Tip shaping High Aspect Ratio tips Carbon Nanotube tips Probe functionalization Functional coatings Integration of actuation and beam deflection detection Page 3
4 Tip Sample Convolution Tip Tip Tip Image Image Image The AFM image is a convolution / dilation of tip and sample To image the sample as correctly as possible the ideal tip shape would be: a delta function shaped tip with an orientation perpendicular to the sample surface Page 4
5 General Remarks - Batch Fabrication 4-inch wafer with 388 probes 6-inch wafer with more than 1000 probes Page 5
6 General Remarks - AFM Probes Buildup Holder Macroscopic dimensions: 1.6 x 3.4 mm 2 for easy handling and mounting into the SPM Cantilever Beam Force constant range: 0.01 to 50 N/m Resonance frequency: 1 khz to 1 MHz Typical Geometry Length: 50 to 500 µm Width: 20 to 50 µm Thickness: 0.4 to 8 µm Tip Radius < 15 nm Tip height > 3 to 20µm Material: Single Crystalline Silicon or Silicon Nitride Thin Film Page 6
7 Overview Introduction Tip sample convolution General remarks Fabrication steps of AFM probes Silicon tip manufacturing process Undercut tip concept Corner tip concept Nitride tip manufacturing process (mold and release concept) Tip refinement, extra tips Tip shaping High Aspect Ratio tips Carbon Nanotube tips Probe functionalization Functional coatings Integration of actuation and beam deflection detection Page 7
8 Fabrication Steps of Silicon Probes - Undercut Tips The undercut tip concept Isotrope etching Future tip SiO 2 Manufacturing by wet chemical (isotropic) etching of silicon Silicon Tip formation by underetching of masking layers First commercially availiable silicon probes (1991 by O. Wolters). Now named Pointprobes.
9 Fabrication Steps of Silicon Probes - Undercut Tips Features High aspect ratio tips Low tip radii Thick cantilevers possible Limitations in minimal cantilever thicknesses (very soft cantilevers) because of initial wafer thickness variations Monolithic design Applications All application modes (contact, noncontact,special) excluding operations in fluid. Potential Integration of piezoresistive beam deflection detection Integration of sensors Page 9
10 Fabrication Steps of Silicon Probes - Corner Tips The corner tips concept Manufacturing by combinations of dry (anisotropic) and wet chemical (isotropic) etching of silicon (patented technology) 1. Silicon 2. Silicon Isotrope silicon etch Mask 1. Isotrope silicon etching 2. Removal of masking layer, masking, top side mask removal 3. Tip formation by isotrope silicon etching 3. Silicon Page 10
11 Silicon Probes Corner Tips Examples Features Tip exactly at the free end of the cantilever Thick cantilevers possible Limitations in minimal cantilever thicknesses (very soft cantilevers) because of initial wafer thickness variations Monolithic design Reliable tip shape Applications All application modes (contact, non-contact, special) excluding operations in fluid. NanoWorld Arrow NANOSENSORS AdvancedTEC Page 11
12 Fabrication Steps of Silicon Nitride Probes Mold and Release The mold and release concept Silicon 1. Isotropic etching of pyramids Deposited material Silicon Deposited material 2. Deposition of Silicon Nitride or various other materials. Structuring of the deposited material to define the cantilever. 3. Removal of the silicon. The deposited material acts now as tip and cantilever.
13 Silicon Nitride Probes - Examples Features Soft cantilevers (thin film) Variable cantilever shape Pyramidal tip shape Applications Contact mode Measurement in fluid Potential Applicable for other materials as diamond, metal or SiO 2 BudgetSensors BS-SiNi NanoWorld Pyrex-Nitride Page 13
14 Tip Shaping Rounded tip The shape of the probes apex could be modified from extremely sharp (2nm radius) to smoothly rounded (some hundred nanometers radius). Low wear out tip PointProbe Plus (courtesy NANOSENSORS ) SuperSharpSilicon TM Page 14
15 Tip Refinement High Aspect Ratio Tips Focussed Ion Beam milling Samples with extreme topographies like steep edges or deep trenches could not be imaged properly with pyramidal shaped tips To get tips with high aspect ratios material could be removed (advanced etching or Focussed Ion Beam milling) or an extra tip could be grown (Electron Beam Induced Deposition) Electron Beam Induced Deposition Sophisticated etching Tilt compensated Focussed Ion Beam milling Page 15
16 Imaging High Aspect Ratio Features Pyramidal FIB milled FIB milled, tilt compensated The hole will be measured most reliable with the tilt compensated Focussed Ion Beam milled tip (green line in the section below) Page 16
17 Tip Refinement Carbon Nanotubes Multi Wall Carbon Nanotube Single Wall Carbon Nanotube Page 17
18 Functional Coatings - Reflex Coating Bulk silicon Bare silicon cantilever Silicon cantilever with Aluminum reflex coating Page 18
19 Functional Coatings - Magnetic Coatings magnetically coated tip path of cantilever magnetic domain flat magnetic sample Magnetic Force Microscopy with coated SPM probe Experimental hard disc examined with a conventional MFM probe (Scan size: 14x14 µm 2 ) Page 19
20 Functional Coatings: Diamond Coating Polycrystalline diamond (Thickness: 100 nm) Structuring of silicon by nano-indentation with diamond coated tips Page 20
21 Functional Coatings Conductive Diamond Coated Tips Applications: Scanning Spreading Resistance Microscopy (SSRM) Tunneling AFM (TUNA) Scanning Capacitance Microscopy (SCM) Cross-section of a CMOS transistor (SEM) Surface potential images of a transistor under working conditions (gate width: 0.3 µm, source potential: 0 V, drain potential: 1 V), courtesy of IMEC Page 21
22 Functional Coatings Platinum EFM, Surface Potential Imaging Gold Functionalization for biological application Diamond Like Carbon Wear-out protection Page 22
23 Integrated Actuation and Readout Hybrid-Approach Akiyama-Probe A self-sensing and -actuating probe based on a quartz tuning fork combined with a micromachined cantilever for dynamic mode AFM SEM image of the quartz tuning fork with mounted micomachined cantilever (courtesy Nanosensors ) Page 23
24 Integrated sensors and actuators for individually addressable cantilevers Array of individually addressable cantilevers with integrated silicon tip Page 24
25 Thank you for your attention TM
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