Precision Without Compromise

Transcription

1 D1 EVOLUTION Precision Without Compromise Versatile and user-friendly high resolution and multipurpose X-ray diffractometer for the characterization of advanced materials

2 D1 Overview Introduction Jordan Valley s D1 Evolution is the latest generation of flexible X-ray diffraction instruments for thin-film materials research, process development, and quality control. Featuring fully automated source and detector optics, the system can switch between standard and high resolution X-ray diffraction, and X-ray reflectivity modes automatically depending on the requested. This ensures the optimum tool configuration is used every time, without requiring experts to set-up the tool for use. The mode is also flexible. Measurements can be run partially or fully automated, with user-customizable scripts handling the routine work. It is also possible to run the tool in a completely manual mode, to enable the development of new methods or to investigate new materials. Analysis of the data can be fully automated as part of the routine, or analyzed off-line if required. Using RADS and REFS in automated mode, developed for the Si fabrication lines, allows routine analysis to be performed and reported without any user intervention. RADS and REFS can also be installed offline to allow more detailed analysis. This allows the degree of automation to be customized to all customers to suit their exact needs, and the system to be operated by novices and experts alike. Features & Benefits Accurate and precise s due to the highest resolution goniometer commercially available (0.16 ) Fast s due to high intensity source and optics Automated alignment, and analysis of samples Eulerian cradle with high precision sample positioning and scanning Up to 200mm wafers (150mm x 150mm scanning) 135 Chi (tilt) and unlimited Phi (azimuthal rotation) to enable pole figures Sub-micron resolution on all translation axes and highest resolution on rotation axes Intelligent automatic tool alignment and re-configuration based on the requested Industry-leading equipment control and analytical software Wide range of techniques and parameters available Built by world experts in High Resolution X-ray diffraction, with over 30 years of experience, and a large global install base Custom configurations available on request

3 D1 Overview Intelligent Alignment System Jordan Valley s D1 Evolution system features an Intelligent Alignment System and Intelligent Measurement System. These systems align the tool in the required configuration before performing the, and then the whole and analysis process in completely automated. No user knowledge or intervention is required. This is ideal for any environment where many users, or users with little experience of X-ray equipment, utilize the tool. The automated s use recipes to define what is required. This can include the type, alignment method, the parameters and the analysis file. Once the recipe is started, the software checks the current configuration, both on the source and detector, and the correct X-ray optics are moved into place and optimally aligned. The beam conditioning crystals are mounted on motorized adjustments to allow the insertion and removal into the beam. This allows the system to reconfigure from 180 (0.05 ) beam divergence, to a 5 beam divergence without user intervention. The crystals are automatically aligned during this process, as small mis-alignments of the crystals can cause a large decrease in intensity. The system is also aligned on the center of rotation of the goniometer during this process to ensure repeatable and accurate data. Slit or pinhole mounting Beam conditioning crystals X-ray Tube Multilayer Mirror EDR detector head Vertical slits or precision slits Monochromator Triple Axis Analyzer (graphite or LiF) crystal. Soller slits Note: Analyzer / Soller slit table also has tilt The detector optic components are mounted on motorized adjustments to allow the insertion and removal into the beam, along with the optimization of the alignment for each component. The detector slit size can also be motorized to allow full automation of the alignment and of samples. The monochromator is a manual placement, but is typically not required if a multilayer mirror is used. To complete the automation, the 150XY Eulerian cradle allows high precision on all axes, with wide ranges for a high variety of s. The high precision ensures accurate alignment of the sample for all axes, to ensure the automated alignment and routines repeatably and accurately measure the samples to the same high standard every time. The cradle can also be fitted with a environment stage to allow s at non-ambient conditions.

4 Applications HRXRD and Relaxation Materials: Single crystal substrate (e.g. Si, GaAs, InP, GaN) and epilayers, including multi-layer structures Parameters: layer thickness, composition and relaxation, strain, area uniformity, mismatch, dopant level, miscut, layer tilt. Sample Mirror 2 Conditioning crystals X-ray source Detector Direct of relaxation / strain / composition of layers within a multilayer structure Automated sample alignment, and analysis Analysis performed by the JV- HRXRD (formerly Bede RADS) software. All common reflections possible for compound semiconductor substrates Variety of beam resolutions available (5 - >25 ), to automatically optimize best resolution for sample being measured Omega-2Theta scan of SiGe epi-layer.* * Sample courtesy Hitachi-Kokusai Electric

5 Applications Triple Axis & Reciprocal Space Maps Materials: Single crystal substrate (e.g. Si, GaAs, InP, GaN) and epilayers, including multi-layer structures Parameters: layer thickness, composition and relaxation, strain, area uniformity, mismatch, dopant level, miscut, layer tilt. Sample Mirror 2 Conditioning crystals X-ray source Analyzer crystal Detector Direct of relaxation / strain / composition of layers within a multilayer structure Automated sample alignment, and analysis Reciprocal space maps created using Contour software Triple axis diffraction scans can be simulated using JV-HRXRD (formerly Bede RADS) analysis software Dual channel 2 bounce and 4 bounce triple axis analyzer crystal with automated insertion and alignment when required for the Reciprocal space map of GaN multi-quantum well, showing clear satellite peaks. These highlight the well controlled growth of the multi-layer structure

6 Applications XRR of thin films Materials: Thin films or multilayer stacks with roughness < 3nm Parameters: Layer thickness, roughness, density Automated system alignment without user intervention for wide range of system resolutions multilayer mirror for thinner samples multilayer mirror with conditioning crystal for higher resolution (thicker samples Dual channel 2 bounce and 4 bounce triple axis analyzer crystal for ultrahigh resolution (very thick films) Automated sample alignment, and analysis using REFS software Motorized slits X-ray reflectivity scan (black) and automated simulation (red) of a 5nm Pt layer grown on 170nm of SiO2. Specular (blue) and diffuse) green of 531.1nm porous film. Note the) resolution of the very high frequency fringes, and the fitting (red) to the data (blue) in the inset image.

7 Applications Overview of XRD Materials: Measure nearly all possible polycrystalline and nano bulk materials and thin films. For ultra-thin layers and nano-layers, Grazing Incidence diffraction can be employed. Parameters: Phase, texture, grain / particle size, unit cell, amorphous %, residual stress X-ray diffraction has been utilised for nearly 100 years to characterize the structural properties of materials. The main focus of the Jordan Valley systems is in the characterization of the microstructure of thin films. The D1 system is the ideal choice for all of these s. With the highest resolution goniometer commercially available on the market, wide Chi (tilt) and Phi (azimuthal rotation) ranges for residual stress and texture s, and the automated configuration of the system along with fully automated s, the D1 is perfect for all of your thin film XRD needs. The fundamental principle is that of Bragg's law, where the position of the peak is related to the lattice spacing. However, using this simple principle gives the possibility to determine a number of key characteristics of the film, including Crystallinity from peak intensities Phase from peak positions/ intensities Grain size/strain from peak widths Texture from peak intensities as the sample is tilted and rotated Residual stress from peak positions at different tilt values The following pages illustrate the configurations and some of the applications possible on the Jordan Valley D1 Evolution system. These are not an exhaustive list, so please contact one of our experts to define your exact requirements and to determine the best D1 configuration for you.

8 Intensity Applications XRD of Polycrystalline Films Materials: Measure nearly all possible polycrystalline and nano bulk materials and thin films. For ultra-thin layers and nano-layers, Grazing Incidence diffraction can be employed. Parameters: phase, texture, grain / particle size, unit cell, amorphous % Scanning Axes: Linked 2Theta-Omega, 2Theta only (GI-XRD) Different detector optics for different applications Intelligent Alignment System allows automated switching an optimisation between each configuration System optimisation with multilayer mirror Automated sample alignment and Wide Omega and 2Theta ranges for accurate phase s Soller slits for precise angular Ta (002) Ta (211) Ta peaks (330), (202), (212), (411) Ta (631) Ta (200) Ta (431) Ta (331) Ta (312) Theta (deg) XRD 2Theta scans on 2 different textured metal films. Growth conditioned were varied and the films show differing amounts of α and phases. The phase is critical to control the resitivity of the

9 Applications Pole Figures of Polycrystalline Films Materials: Measure nearly all possible polycrystalline and nano bulk materials and thin films. For ultra-thin layers and nano-layers, Grazing Incidence diffraction can be employed. Parameters: Texture Scanning Axes: Chi & Phi Sample Mirror 2 X-ray source Soller Detector Different detector optics for different applications Intelligent Alignment System allows automated switching an optimisation between each configuration System optimisation with multilayer mirror Automated sample alignment and 135 Chi range and full Phi range for wide pole figures and residual stress Pole figure of Cu film with mixed (111) and (110) texture.

10 Intensity (cps) Applications Residual Stress of Films Materials: Measure nearly all possible polycrystalline and nano bulk materials and thin films. For ultra-thin layers and nano-layers, Grazing Incidence diffraction can be employed. Parameters: Texture Scanning Axes: 2Theta & Chi Sample Mirror 2 Soller X-ray source Detector Different detector optics for different applications Intelligent Alignment System allows automated switching an optimisation between each configuration System optimisation with multilayer mirror Automated sample alignment and 135 Chi range and wide 2Theta range for residual stress s Soller slits for precise angular Analysis software for residual stress available on request. 4*101 2* *100 6*100 4*100 2*100 EG6ZHEA_No_02aa003.X01 EG6ZHEA_No_02aa017.X01* = 0 = THETA-THETA (deg) Peaks from W(220) for different tilt values. The shift in position as a function of tilt indicates the residual stress. This can be calculated using Jordan Valley Stress Analysis software.

11 Applications Topography of Single Crystals Materials: Single crystal substrate Parameters: Images strain fields caused by defects such as dislocations, slip lines, micro-pipes, dopant striations and sub-grains. Digital reflection topography no film needed! Images strain fields within ~10 microns of the sample surface. Automated sample alignment and Scan whole wafers, small pieces, or zoom in on defective areas on a sample with adjustable camera resolution All D1 Evolution systems can be upgraded in the future Example topographs from SiC substrates

12 Specifications Item X-ray Tube / Generator Specification 2.2kW Cu LFF Software RADS The original and still the best dynamical HRXRD simulation and fitting software in the industry. Multilayer Mirror Option Yes <10, Kα1 (Ge CCC) X-ray beam resolutions 5-25 (2 x Si CCC) REFS X-ray reflectivity simulation and fitting software, using a powerful genetic algorithm. Switch between configurations Omega Range resolution 2Theta Range resolution Eulerian Cradle X/Y Range Resolution Eulerian Cradle Z Range Resolution Eulerian Cradle Phi Range Resolution Eulerian Cradle Chi Range Resolution Sample sizes Fully automatic ~-10 to >180, ~0.16 ~-70 to >140, ~ mm on both mm 10mm mm Unlimited to Small pieces to 200mm PeakSplit General HRXRD calculation software Contour Mapping software, for area maps, reciprocal space maps and texture maps (including ODF). Also includes Residual Stress Analysis PolyCrystal Search/match software with PDF2 capability Control and Acquisition Control and acquisition software to control the instrument. Standard s can be easily defined, and custom routines implemented for all applications and materials. Hot stage available Yes, call for details Detector Dynamic Range >2 x 10 7 Footprint ~1.4m x 1.4m Jordan Valley Specifications and offers are subject to change without notice or obligations. All sales are subjected to our terms and conditions, a copy of which is available on request. Jordan Valley is a registered trade mark of Jordan Valley Semiconductors Ltd Global HQ Industrial Zone #6 POB 103, Ramat Gavriel Migdal Ha Emek Israel T: F: E: ask@jordanvalley.com UK Office Belmont Business Park Belmont Durham. DH1 1TW UK T: F: E: enquiries@jvsemi.co.uk