Your Supplier for Fused Silica

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1 Your Supplier for Fused Silica

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3 Characteristics Our Company successfully developed synthetic fused silica SK-1300 as a result of significant improvements made by the conventional VAD (vapor-phase axial deposition) method of optical fiber manufacturing technology. Unparalleled, ideal characteristics are achieved. - Ultra-high purity (total metallic impurities less than 0.5ppm) - The OH content can be controlled to 1ppm to less. - High heat resistance is ensured. - High transmission is achieved. (The SK-1310 has excellent characteristics over the entire wavelength range of ultraviolet, visible and infrared.) - Contain no bubbles or striae. - Excellent laser resistance properties. - The material for excelling in the homogeneity and precise optics is prepared. (SK-1320 series) Application For VLSI manufacturing process - Furnace tubes - various industrial jigs for semiconductors Sputtering targets Photomask substrates for ultra-lsi and LCD. Wafers for various types of devices such as TFT (poly-si thin-film transistor LCD.), SOI (Silicon on Insulator) etc. Optical elements, lenses, mirrors and windows, for ultraviolet and vacuum ultraviolet. Materials for optical fiber. Standard size Tubes & Rods Outer diameters of large size tubes 100~450mm Outer diameters 5~100mm Rods Outer diameters 3~200mm Plates 50~500mm round, 50~1000mm sq.

4 High Quality Silica Glass QUARTZ VAD-process Synthetic Fused Silica SK-1300 Our Company successfully developed synthetic fused silica SK-1300 as a result of significant improvements made to the conventional VAD (vapor-phase axial deposition) method of optical fiber manufacturing technology. SK-1300 is extremely high in purity and much lower in OH content than the traditional direct method, thus making it the first synthetic fused silica usable in the semiconductor and liquid crystal display industries. SK-1300 is the state-of-the-art technology in optical characteristics because it provides a high ultraviolet transmission, no micro inclusion and a solarization resistance, in addition to heat resistance, mechanical strength, and chemical resistance. These products can be used in a wide variety of industrial applications for semiconductors, optical and all physical or chemical related research featuring these applications: 1. Wafers for various types of devices such TFT (poly-si thin-film transistor LCD), SOI (Silicon on Insulator), etc. 2. Photomask substrates for ultra-lsi and LCD. 3. Reactor furnace tubes, jigs and tools for ULSI manufacturing processes. 4. Electrical-discharge lamp tubes. 5. Optical elements, lenses, mirrors and windows, for ultraviolet and vacuum ultraviolet. Typical Characteristics Typical Impurity Analysis ppb Element Analytical value Element Analytical value AI <0.2 Co <0.01 Fe <0.5 Ni <1.0 Ti <0.1 P <1.0 Ca <0.5 B <0.01 Mg <0.1 Na <0.5 Mn <0.1 K <0.2 Cr <0.2 Li <0.1 Cu <0.2 Zr <0.1 OH <200 (ppm) Chemical Resistance Solution Treatment temperatures ( C) & hours (H) Weight loss (mg/cm 2 ) H ~ /100 N HNO ~0.01 5% NaOH

5 QUARTZ Transmission Transmission (%) Wavelength (µm) (nm) Refractive Index 25 C in air Wavelength (nm, in air) 25 C in air 20 C in air Wavelength (nm, in air) dn/dt (i) (i) (h) (h) (g) (g) (F) (F) (e) (e) (d) (d) (C) (C) 10.1 Measuring accuracy ± 1X10 6 Measuring accuracy ± 1X10 6 Optical Qualities Item Grade Bubbles 0~0.03mm 2 /100cm 3 Striae Grade A in one direction (As per Mil-G-174) Birefrengence (Strain) 10nm/cm and under Fluorescence Not permitted (Excited wavelength 254nm) Physical Properties Item Unit Value Item Unit Value Density g/cm Coefficient of thermal expansion cm/cm C 5.5X10 7 Young s module kg/mm Poisson s ratio 0.17 Softening point C 1700 Compression strength kg/mm Annealing point C 1160 Bending strength kg/mm Strain point C 1060 Tensile strength kg/mm Torsional rigidity kg/mm Specific heat (26 C) cal/g C Vickers hardness kg/mm 2 900~1030 (26 C) cal/cm sec C 2.65X10 3 Knoop hardness kg/mm 2 650~710 Thermal conductivity ratio (100 C) cal/cm sec C 3.27X10 3 OHARA CORPORATION 50 Columbia Road Branchburg, NJ Tel: (908) Fax: (908) Arroyo Vista, #200 Rancho Santa Margarita, CA Tel: (949) Fax: (949)

6 High Quality Silica Glass QUARTZ VAD-based Anhydrous Synthetic Fused Silica SK-1310 SK-1310 is the anhydrous synthetic fused silica among the SK-1300 series products of VAD-based synthetic fused silica. In addition to the high reliability of heat resistance, mechanical strength, and chemical resistance maintained by SK-1300, photolytic absorption is not generated to the infrared area of 2.73 µm, because it doesn t contain hydrogenous radicals. SK-1310 products are fully renovated materials with the maximum transmission applicable to the entire ultraviolet, visible and infrared areas. The physical and chemical characteristics are prominent similar to the SK-1300 products in a broad range of applications in advanced technological industries such as semiconductors and opticals. Applications: 1. Optical fibers 2. Optical elements for ultraviolet and infrared lenses or windows 3. All types of cells for ultraviolet or infrared transmission of entire areas of spectrophotometer 4. Electrical-discharge lamp tubing Typical Impurity Analysis ppm Typical Characteristics Element Analytical value Element Analytical value AI <0.01 Co <0.01 Fe <0.01 Ni <0.01 Ti <0.01 P <0.01 Ca <0.01 B <0.01 Mg <0.01 Na <0.01 Mn <0.01 K <0.01 Cr <0.01 Li <0.01 Cu <0.01 Zr <0.01 OH <1 Cl. =.1000 Chemical Resistance Solution Treatment temperatures & hours Weight loss H20 95 C 45H ~0.0002mg/cm 2 1/100 N HNO3 115 C 24H 0.005~0.01mg/cm 2 5% NaOH 100 C 10H 1.30mg/cm 2

7 QUARTZ Transmission Transmission (%) Wavelength (µm) (nm) Refractive Index Wavelength (nm) 15 C 25 C 35 C (i) (h) (g) (e) Optical Qualities Item Grade Bubbles 0~0.03mm 2 /100cm 3 Striae Grade A in one direction (As per Mil-G-174) Birefrengence (Strain) 10nm/cm and under Physical Properties Item Unit Value Item Unit Value Density g/cm Coefficient of thermal expansion 1/K 5.5X10 7 Young s module GPa 71.6 Torsional rigidity GPa 31.4 Softening point C 1700 Poisson s ratio 0.17 Annealing point C 1160 Compression strength GPa 1.1 Strain point C 1060 Bending strength MPa 69 Tensile strength MPa 55 Specific heat (26 C) kj/kg K 0.74 Vickers hardness GPa 8.8~10.1 OHARA CORPORATION 50 Columbia Road Branchburg, NJ Tel: (908) Fax: (908) Arroyo Vista, #200 Rancho Santa Margarita, CA Tel: (949) Fax: (949)

8 High Quality Silica Glass QUARTZ Synthetic Fused Silica for Optics SK-1320 Series SK-1320 series of Ohara Quartz Co., Ltd. is a synthetic fused silica for the optics developed as the fused silica material for precise, various optical componets for the optics application and the high-power laser. SK-1321 (abbr. U1), SK-1322 (abbr. U2) is guaranteed the homogeneity each in one direction and three directions. L attached to the end is suitable for the high-power laser. Applications: Lens, Window, Mirror, Prism, Filter, Corner Cube, Beam Splitter, Etalons, Brewster, Optical Flat, etc. Line-up and Each Characteristics Line-up Max Size StriaeO 1 Homogeneity 2O BirefrengenceO 2 BubblesO 3 Fluorescence 4O Transmission (mm) (nm/cm) (mm 2 /100cm 3 ) (nm) SK-1320L o/ 600 A 1D < = 10 0 ~ 0.03 None 170 ~ 2500 SK-1321(U1) o/ 250 A 1D = < 2 X D < = 3 0 ~ 0.03 Red 170 ~ 2500 SK-1321L(U1L) o/ 250 A 1D = < 2 X D < = 3 0 ~ 0.03 None 170 ~ 2500 SK-1322(U2) o/ 250 A 3D < = 2 X D < = 3 0 ~ 0.03 Red 170 ~ 2500 SK-1322L(U2L) o/ 150 A 3D < = 2 X D < = 3 0 ~ 0.03 None 170 ~ 2500 SK-1300O 5 o/ 600 A 1D < = 10 0 ~ 0.03 Red 170 ~ 2500 SK-1310O 5 o/ 600 A 1D < = 10 0 ~ 0.03 Blue 170 ~ O According to the MIL-G-174 standard of the U.S. Military. 2O Valid area diameter X 90%. 3O Conforms to DIN O Excited at Excimer laser. Please consult us about the application needed for Excimer laser durability. 5O Please refer to datasheet for this material.

9 QUARTZ Optical Qualities (SK-1320L, SK-1321, SK-1321L, SK-1322, SK-1322L) Transmission Transmission (%) (µm) (nm) Wavelength Refractive Index Wavelength (nm) Refractive index Wavelength (nm) Refractive index (d) (D) (C) (r) (i) (s) (h) (t) (g) (F) (e) Abbe number d= ( nd 1 ) = nf nc d= ( nd 1 ) = nf nc Average dispersion nf nc = Physical Properties Item Unit Value Item Unit Value Density g/cm Coefficient of thermal expansion 1/K 5.5X10 7 Young s module GPa 71.4 Torsional rigidity GPa 30.9 Softening point C 1700 Poisson s ratio 0.17 Annealing point C 1160 Compression strength GPa 1.1 Strain point C 1060 Bending strength MPa 69 Tensile strength MPa 55 Specific heat (26 C) kj/kg K 0.74 Vickers hardness GPa 8.8~10.1 (26 C) W/m K 1.1 Knoop hardness GPa 6.4~7.0 Thermal conductivity ratio (100 C) W/m K 1.4 OHARA CORPORATION 50 Columbia Road Branchburg, NJ Tel: (908) Fax: (908) Arroyo Vista, #200 Rancho Santa Margarita, CA Tel: (949) Fax: (949)

10 Quartz processing chart

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12 OHARA GmbH Im Langgewann Hofheim, Germany Phone: Fax: info@ohara-gmbh.com